KR102420784B1 - Connector for electrical connection - Google Patents

Abstract

The connector for anisotropic electrical connection conducting in the vertical direction according to the disclosed embodiment includes a first film holding a plurality of first pads, a second film positioned under the first film and holding a plurality of second pads, It includes at least two or more columns disposed between the first film and the second film and spaced apart from each other in the transverse direction, and at least one conductive part formed in the vertical direction is formed at one end of the column, and the at least two or more columns are formed at one end of the column. A bridge member having an outer surface formed of a conductive material is disposed in the space between the columns.

Description

Connector for electrical connection

The present disclosure relates to a connector for electrical connection disposed between a device under test and test equipment.

In an inspection process for determining whether a device under test, such as a manufactured semiconductor device, is defective, a connector for electrical connection is disposed between the device under test and test equipment. A connector for electrical connection electrically connects a device to be tested and a test equipment, and an inspection method for determining whether a device to be inspected is defective based on whether the device to be inspected and the test equipment is energized is known.

If the terminal of the device under test comes into direct contact with the terminal of the test equipment without the connector for electrical connection, the terminals of the test equipment may be worn out or damaged in the repeated inspection process, requiring replacement of the entire test equipment. By using the connector for electrical connection, it is possible to prevent the occurrence of the need to replace the entire test equipment. Specifically, when the connector for electrical connection is worn or damaged due to repeated contact with the terminal of the device under test, only the corresponding electrical connection connector may be replaced.

The connector for electrical connection includes a conductive portion for electrically connecting between a terminal of a device under test and a terminal of a test equipment, and an insulating portion on which the conductive portion is disposed. In order to determine whether the device under test and the test equipment are energized, the connector for electrical connection may repeatedly contact the terminal of the device under test. In addition, the connector for electrical connection may be maintained for a predetermined time or longer in a state in contact with the terminal of the device under test.

Embodiments of the present disclosure provide a connector for electrical connection having a stable electrical connection.

When the connector for electrical connection contacts the terminal of the device under test repeatedly and/or for a predetermined time or longer, the conductive portion of the connector for electrical connection may be separated from the insulating portion. When the conductive part is separated from the insulating part, an electrical signal between the device under test and the test equipment connected through the conductive part may be cut off. Accordingly, the electrical connection between the device under test and the test equipment through the connector for electrical connection may be unstable or broken.

If the electrical connection through the electrical connection connector is unstable or cut off, the reliability of the inspection method using the electrical connection connector may be lowered. Embodiments of the present disclosure solve this problem.

Embodiments of the present disclosure solve this problem, and stably provide an electrical connection between a device under test and a test equipment through a connector for electrical connection.

One aspect of the present disclosure provides embodiments of a connector for anisotropic electrical connection. A connector for anisotropic electrical connection conducting in the vertical direction according to a representative embodiment is a first film for holding a plurality of electrically conductive first pads, a first film located under the first film and a plurality of electrically conductive second pads A second film to hold, disposed between the first film and the second film and comprising at least two or more columns spaced apart from each other in a transverse direction, wherein at least one conductive portion formed in a vertical direction is formed at one end of the column There is a space between the at least two or more columns, and a bridge member having at least an outer surface formed of a conductive material is disposed in the space.

The plurality of first pads may be formed in a plurality of first through holes formed in the first film, and the plurality of second pads may be formed in a plurality of second through holes formed in the second film.

The first pad, the conductive part, the bridge member, and the second pad may be electrically connected to each other.

The column includes an insulating portion, and at least one conductive portion formed in a vertical direction is further formed at the other end of the column, the at least one conductive portion formed at one end of the column and the at least one conductive portion formed at the other end of the column At least one conductive part may be separated by the insulating part, and the conductive part formed at one end of the column and the conductive part formed at the other end of the column may include a plurality of conductive particles.

The plurality of conductive particles may be maintained in the column by the insulating part.

The column may have the smallest area of the transverse cross-section of the middle portion in the vertical direction.

The transverse cross-section of the column may have one of the following shapes: elliptical, circular and polygonal.

The bridge member may have a spherical shape.

A plurality of guide parts may be further included on the upper side of the first pad.

A third film positioned under the second film and holding a plurality of third pads, and at least two additional columns disposed between the second film and the third film and spaced apart from each other in the transverse direction, , At one end of the additional column is formed at least one additional conductive portion formed in the vertical direction, the space between the at least two or more additional columns at least an additional bridge member formed of a conductive material may be disposed on the outer surface.

The first pad, the conductive part, the bridge member, the second pad, the additional conductive part, the additional bridge member, and the third pad may be electrically connected to each other.

A connector for anisotropic electrical connection conducting in a vertical direction according to another representative embodiment includes: a plurality of conductive channels for conducting an upper end of the connector for anisotropic electrical connection and a lower end of the connector for anisotropic electrical connection; and an insulator having the plurality of conductive channels penetrating vertically and being electrically insulating, wherein each of the plurality of conductive channels includes: a plurality of conductive parts extending in a vertical direction and configured to be energized; and at least one bridge member disposed in the accommodating space formed between the plurality of conductive parts, in contact with the plurality of conductive parts, and having at least an outer surface formed of a conductive material.

The plurality of conductive channels may be spaced apart from each other in a lateral direction.

The plurality of conductive parts may be spaced apart from a central axis extending in a vertical direction of the conductive channel.

The plurality of conductive parts may be disposed to be spaced apart from each other along the circumference of the bridge member.

The plurality of conductive parts may be 4 to 6 conductive parts.

A plurality of the accommodation spaces corresponding to the plurality of conductive channels may be formed.

The plurality of accommodation spaces may communicate with each other.

The conductive part may include a plurality of conductive particles, and a volume of the bridge member may be greater than an average volume of the plurality of conductive particles.

The plurality of conductive parts may define a portion of an outer circumferential surface of the accommodation space.

According to embodiments of the present disclosure, electrical connection between the device under test and the test equipment through the connector for electrical connection may be provided as various paths.

According to the embodiments of the present disclosure, it is possible to stably provide an electrical connection between the device under test and the test equipment through the connector for electrical connection.

1 is a vertical cross-sectional view of a connector for electrical connection according to an embodiment.
FIG. 2 is an enlarged view of the column shown in FIG. 1 .
FIG. 3 is an enlarged view of the conductive channel shown in FIG. 1 .
FIG. 4 is an example of a cross-sectional view taken along line XX′ of the connector for electrical connection shown in FIG. 1 .
FIG. 5 is another example of a cross-sectional view taken along line XX′ of the connector for electrical connection shown in FIG. 1 .
FIG. 6 is another example of a cross-sectional view taken along line XX′ of the connector for electrical connection shown in FIG. 1 .
FIG. 7 is another example of a cross-sectional view taken along line XX′ of the connector for electrical connection shown in FIG. 1 .
8 is a vertical cross-sectional view of a connector for electrical connection according to another embodiment.
9 is a vertical cross-sectional view of a connector for electrical connection according to another embodiment.
10 is a vertical cross-sectional view of a connector for electrical connection according to another embodiment.

Embodiments of the present disclosure are exemplified for the purpose of explaining the technical spirit of the present disclosure. The scope of the rights according to the present disclosure is not limited to the embodiments presented below or specific descriptions of these embodiments.

In the present disclosure, an 'embodiment' is an arbitrary division for easily explaining the technical idea of the present disclosure, and each of the embodiments is not necessarily mutually exclusive. For example, configurations disclosed in one embodiment may be applied and implemented in other embodiments, and may be changed and applied and implemented without departing from the scope of the present disclosure.

All technical and scientific terms used in this disclosure, unless otherwise defined, have the meanings commonly understood by one of ordinary skill in the art to which this disclosure belongs. All terms used in the present disclosure are selected for the purpose of more clearly describing the present disclosure and not to limit the scope of the present disclosure.

As used in this disclosure, expressions such as "comprising", "including", "having", etc. are open-ended terms connoting the possibility of including other embodiments, unless otherwise stated in the phrase or sentence in which the expression is included. (open-ended terms).

Expressions such as “consisting only of” a corresponding component used in the present disclosure should be understood as closed-ended terms that exclude the possibility of including other components in addition to the corresponding component.

Expressions in the singular described in this disclosure may include the meaning of the plural unless otherwise stated, and the same applies to expressions in the singular in the claims.

Expressions such as “first” and “second” used in the present disclosure are used to distinguish a plurality of components from each other, and do not limit the order or importance of the corresponding components.

Direction indicators such as "upper" and "upper" used in the present disclosure refer to the direction in which the first film 100 is disposed with respect to the bridge member 400 with reference to FIG. 1, and "lower", " A direction indicator such as "down" means a direction opposite to the upward direction. This is a standard for explaining the present disclosure to the last so that it can be clearly understood, and it goes without saying that the upper side and the lower side may be defined differently depending on where the standard is placed.

Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. In the accompanying drawings, identical or corresponding components are assigned the same reference numerals. In addition, in the description of the embodiments below, overlapping description of the same or corresponding components may be omitted. However, even if description regarding components is omitted, it is not intended that such components are not included in any embodiment.

1 is a vertical cross-sectional view of a connector 1000 for electrical connection according to an embodiment.

The connector 1000 for electrical connection according to an embodiment may be anisotropic that conducts in a vertical direction. The connector 1000 for electrical connection includes a first film 100 holding a plurality of first pads 110 , and a second film 100 positioned under the first film 100 and holding a plurality of second pads 210 . 2 may include a film 200 .

A plurality of first through holes 105 may be formed in the first film 100 . The plurality of first through holes 105 may be formed in the first insulating portion 101 of the first film 100 . The first through hole 105 may extend from an upper side of the first film 100 to a lower side of the first film 100 and penetrate the first insulating portion 101 . When viewed from the upper side of the first film 100 , the first through hole 105 may have a circular cross-section. The plurality of first through-holes 105 may be formed in the first insulating portion 101 to be spaced apart from each other.

The first film 100 may include a first pad 110 . A plurality of first pads 110 may be maintained on the first film 100 . The first pad 110 may be formed in the first through hole 105 . The first pad 110 may have a size and shape corresponding to the first through hole 105 . The first pad 110 may be electrically conductive. The first pad 110 may include conductive particles. The first pad 110 may include silicon. In the first pad 110 , the conductive particles may be maintained by silicon. An upper side of the first film 100 and a lower side of the first film 100 may be conductive through the first pad 110 .

In the inspection process for determining whether the device under test is defective, the first pad 110 may contact the device under test. The first pad 110 may contact the terminal of the device under test. The first pad 110 may come into contact with a terminal of the device under test and may be electrically connected to the device under test.

A plurality of second through holes 205 may be formed in the second film 200 . The plurality of second through holes 205 may be formed in the second insulating portion 201 of the second film 200 . The second through hole 205 may extend from an upper side of the second film 200 to a lower side of the second film 200 and penetrate the second insulating portion 201 . When viewed from the upper side of the second film 200 , the second through hole 205 may have a circular cross-section. The plurality of second through-holes 205 may be formed in the second insulating portion 201 to be spaced apart from each other.

The second film 200 may include a second pad 210 . A plurality of second pads 210 may be maintained on the second film 200 . The second pad 210 may be formed in the second through hole 205 . The second pad 210 may have a size and shape corresponding to the second through hole 205 . The second pad 210 may be electrically conductive. The second pad 210 may include conductive particles. The second pad 210 may include silicon. In the second pad 210 , the conductive particles may be retained by silicon. An upper side of the second film 200 and a lower side of the second film 200 may be conductive through the second pad 210 .

For example, in the inspection process for determining whether the device under test is defective, the second pad 210 may contact the test equipment. The second pad 210 may be electrically connected to the test equipment.

As another example, as in the embodiment according to FIG. 9 to be described later, the lower end of the second pad 210 may be in contact with the additional column 600 . The second pad 210 may be electrically connected to the additional column 600 .

The electrical connection connector 1000 may include at least two or more columns 300 . At least two or more columns 300 may be disposed between the first film 100 and the second film 200 . The column 300 may be in contact with the first film 100 and the second film 200 . A conductive part 310 may be formed in the column 300 . An upper portion of the conductive part 310 may contact a lower portion of the first pad 110 . A lower portion of the conductive part 310 may contact an upper portion of the second pad 210 . Column 300 may be conductive. The first pad 110 , the conductive part 310 , and the second pad 210 may be electrically connected to each other.

At least two or more columns 300 may be spaced apart from each other in the transverse direction. A space may be formed between at least two or more columns 300 . The bridge member 400 may be disposed in a space between at least two or more columns 300 . The bridge member 400 may have various shapes such as a cylinder, a polyhedron, and a sphere, but in the present embodiment, the bridge member 400 has a spherical shape. The bridge member 400 may be disposed in a space between at least two or more columns 300 to be in contact with at least two or more columns 300 . The bridge member 400 may be in contact with at least two or more columns 300 disposed adjacent to each other.

At least the outer surface 410 of the bridge member 400 may be formed of a conductive material. That is, the entire bridge member 400 including the outer surface may be formed of a conductive material, or only the outer surface 410 of the bridge member 400 may be formed of a conductive material.

In one embodiment, the interior 420 of the bridge member 400 except for the outer surface 410 of the bridge member 400 may be formed of an insulating material (eg, synthetic resin, silicone, etc.). Here, the outer surface 410 of the bridge member 400 may be formed by plating a conductive material. The conductive material may be, for example, gold.

As the outer surface 410 of the bridge member 400 is formed of a conductive material, electrical connection through the bridge member 400 may be provided. The first pad 110 , the conductive part 310 , the bridge member 400 , and the second pad 210 may be electrically connected to each other.

The electrical connection connector 1000 may include a plurality of conductive channels 10 for conducting an upper end of the electrical connection connector 1000 and a lower end of the electrical connection connector 1000 . The plurality of conductive channels 10 may be spaced apart from each other in the transverse direction. The conductive channel 10 may be a unit configuration of the connector 1000 for electrical connection that conducts the upper side of the connector 1000 for electrical connection and the lower side of the connector 1000 for electrical connection. Hereinafter, the conductive channel 10 may be known in more detail with reference to FIG. 3 .

FIG. 2 is an enlarged view of the column 300 shown in FIG. 1 .

At least one conductive part 310 formed in the vertical direction may be formed at one end of the column 300 . At the other end of the column 300, at least one conductive part 310 formed in the vertical direction may be additionally formed. The conductive part 310 may include a plurality of conductive particles 311 . The conductive part 310 including the plurality of conductive particles 311 may be conductive. The conductive part 310 may electrically connect the upper side of the column 300 and the lower side of the column 300 .

The column 300 may include an insulating part 320 . The insulating part 320 may be made of silicon. The at least one conductive part 310 formed at one end of the column 300 and the at least one conductive part 310 formed at the other end of the column 300 may be separated by the insulating part 320 . The insulating part 320 may be positioned between the at least one conductive part 310 formed at one end and the at least one conductive part 310 formed at the other end.

The plurality of conductive particles 311 of the conductive part 310 may be maintained in the column 300 by the insulating part 320 . The plurality of conductive particles 311 may be maintained at predetermined positions of the insulating part 320 . The plurality of conductive particles 311 may be maintained at the end of the insulating part 320 .

The column 300 may have the smallest area of the transverse cross-section of the middle portion in the vertical direction. The area of the transverse cross-section of the column 300 may decrease from the upper portion of the column 300 toward the middle portion of the column 300 . The area of the transverse cross-section of the column 300 may decrease linearly from the top of the column 300 to the middle portion of the column 300 . The area of the transverse cross-section of the column 300 may decrease from the lower portion of the column 300 toward the middle portion of the column 300 . The area of the transverse cross-section of the column 300 may decrease linearly from the lower portion of the column 300 toward the middle portion of the column 300 . The columns 300 may be symmetrical to each other with respect to the middle portion of the column 300 in the vertical direction.

FIG. 3 is an enlarged view of the conductive channel 10 shown in FIG. 1 .

The conductive channel 10 may be a unit configuration of the connector 1000 for electrical connection that conducts the upper side of the connector 1000 for electrical connection and the lower side of the connector 1000 for electrical connection. The conductive channel 10 may be disposed to vertically penetrate the insulator 20 . The insulator 20 may include the insulating portion 320 of the column 300 , the first insulating portion 101 of the first film 100 , and the second insulating portion 201 of the second film 200 . . An insulator 20 may be disposed outside the conductive channel 10 . The insulator 20 may be disposed along the outer periphery of the conductive channel 10 .

The conductive channel 10 may include a first pad 110 . The conductive channel 10 may include a second pad 210 . The configuration and effects of the first pad 110 and the second pad 210 are the same as those described in FIG. 1 , and thus a detailed description thereof will be omitted.

The conductive channel 10 may include a plurality of conductive parts 11 extending in the vertical direction and configured to be energized. The plurality of conductive parts 11 included in the conductive channel 10 may be at least two. The conductive part 11 may have the same configuration as the conductive part 310 formed at one end of the column 300 described in FIG. 2 . The plurality of conductive parts 11 included in the conductive channel 10 may be formed in different columns 300 , respectively. For example, as shown in FIG. 3 , the two conductive parts 11 included in the conductive channel 10 may be formed in two different columns 300 , respectively.

The plurality of conductive parts 11 included in the conductive channel 10 may be disposed adjacent to each other. The plurality of conductive parts 11 included in the conductive channel 10 may form an accommodation space 12 . The plurality of conductive parts 11 included in the conductive channel 10 may surround the accommodation space 12 . The accommodation space 12 may be formed between the plurality of conductive parts 11 . The accommodation space 12 may be formed surrounded by the plurality of conductive parts 11 . The plurality of conductive parts 11 may define a portion of the outer peripheral surface of the accommodation space 12 . The outer peripheral surface of the accommodating space 12 may be any surface that forms a boundary of the accommodating space 12 . A portion of the outer circumferential surface of the accommodation space 12 may be defined by the plurality of conductive portions 11 , and the remaining portion of the outer circumferential surface of the accommodation space 12 may be an open portion.

The plurality of conductive parts 11 included in the conductive channel 10 may be spaced apart from a central axis extending in the vertical direction of the conductive channel 10 . The plurality of conductive parts 11 may be spaced apart from each other by the same distance from the central axis of the conductive channel 10 .

The plurality of conductive parts 11 included in the conductive channel 10 may be formed in different columns 300 , respectively. The conductive channel 10 may include a plurality of conductive portions 11 formed in different columns 300 and disposed adjacent to each other.

The conductive channel 10 may include a bridge member 400 disposed in the receiving space 12 . At least the outer surface 410 of the bridge member 400 may be formed of a conductive material. The volume of the bridge member 400 may be greater than the average volume of the plurality of conductive particles (refer to FIG. 2 ) included in the conductive part 11 .

The bridge member 400 may contact the plurality of conductive parts 11 . The plurality of conductive parts 11 may be disposed along the circumference of the bridge member 400 . The plurality of conductive parts 11 may be disposed to be spaced apart from each other along the circumference of the bridge member 400 .

In the conductive channel 10 , the first pad 110 , the conductive part 11 , the bridge member 400 , and the second pad 210 may be electrically connected to each other. The electrical connection connector 1000 (refer to FIG. 1 ) may additionally provide an electrical connection through the bridge member 400 . Electrical connection between the device under test and the test equipment through the connector 1000 for electrical connection may be provided through various paths.

For example, when a predetermined portion of the conductive part 11 is damaged and the electrical connection through the conductive part 11 is cut off, an electrical connection through the bridge member 400 may be provided. An electrical connection may be provided from the upper part of the conductive part 11 to the lower part of the conductive part 11 via the bridge member 400 . As the electrical connection through the bridge member 400 is provided, the electrical connection between the device under test and the test equipment through the connector 1000 for electrical connection may be stable.

FIG. 4 is an example of a cross-sectional view taken along line X-X' of the connector 1000 for electrical connection shown in FIG. 1 .

The column 300 of the connector 1000 for electrical connection may have various shapes. The shape of the column 300 may be variously changed to correspond to the terminal of the device to be inspected.

The conductive part 310 may be formed at one end and the other end of the column 300 . One end of the column 300 may be one of the portions corresponding to the corner portion in the cross-section of the column 300 . The other end of the column 300 may be the remainder of the portion corresponding to the corner portion in the cross-section of the column 300 . The arrangement of one end and the other end of the column 300 may be changed according to the cross-sectional shape of the column 300 . According to the cross-sectional shape of the column 300, the other end of the column 300 may be plural.

The conductive part 310 formed at one end of the column 300 and the conductive part 310 formed at the other end of the column 300 may be included in different conductive channels 10 . The conductive part 310 formed at one end of the column 300 and the conductive part 310 formed at the other end of the column 300 may contact different bridge members 400 .

Hereinafter, with reference to FIGS. 4 to 7 , the configuration of the connector 1000 for electrical connection according to various shapes of the column 300 will be described in detail.

As shown in FIG. 4 , as an example of the column 300 , the transverse cross-section of the column 300 may be elliptical. The column 300 may have a structure in which an elliptical cross-section is stacked in the vertical direction. When the elliptical cross-section of the column 300 has a vertically stacked structure, as shown in FIG. 2 , the column 300 may have the smallest area of the transverse cross-section of the middle portion in the vertical direction. The area of the elliptical shape that is the transverse cross-section of the column 300 may be the smallest in the middle part in the vertical direction.

When the column 300 has an elliptical transverse cross-section, two conductive portions 310 may be formed in the column 300 . The conductive part 310 may be separated by the insulating part 320 . The conductive part 310 may include a plurality of conductive particles 311 . The conductive parts 310 formed at one end and the other end of the column 300 may contact the bridge member 400 . The conductive parts 310 formed at one end and the other end of the column 300 may contact the conductive material formed as the outer surface 410 of the bridge member 400 .

The conductive channel 10, which is one unit configuration of the connector 1000 for electrical connection, which conducts the upper side of the connector for electrical connection 1000 and the lower side of the connector 1000 for electrical connection, may include four conductive parts 11 . can The conductive channel 10 may include four conductive portions 11 respectively formed in four columns 300 .

The accommodation space 12 may be formed by the four conductive parts 11 . The accommodation space 12 may be surrounded by four conductive parts 11 . The accommodation space 12 formed by the four conductive parts 11 may be plural.

A plurality of accommodation spaces 12 may be formed to correspond to the plurality of conductive channels 10 . The number of accommodation spaces 12 may correspond to the number of conductive channels 10 . The plurality of accommodation spaces 12 may communicate with each other. A space between the plurality of accommodating spaces 12 may be opened without being closed.

The bridge member 400 may be disposed in the accommodation space 12 formed by the four conductive parts 11 . The bridge member 400 may be surrounded by four conductive parts 11 . The four conductive parts 11 may contact the bridge member 400 . The four conductive parts 11 may be disposed to be spaced apart from each other along the circumference of the bridge member 400 . The four conductive parts 11 may be spaced apart from each other at equal intervals along the circumference of the bridge member 400 .

FIG. 5 is another example of a cross-sectional view taken along line X-X' of the connector 1000 for electrical connection shown in FIG. 1 .

As another example of the column 300 , the transverse cross-section of the column 300 may be triangular. The column 300 may have a structure in which triangular cross-sections are stacked in the vertical direction. When the column 300 has a structure in which a triangular cross-section is stacked in the vertical direction, the column 300 may have the smallest area of the transverse cross-section of the middle portion in the vertical direction as shown in FIG. 2 . The area of a triangle, which is a transverse cross-section of the column 300 , may be smallest in the middle portion in the vertical direction.

When the column 300 has a triangular cross section, three conductive portions 310 may be formed in the column 300 . The conductive part 310 of the column 300 may be formed in a portion corresponding to each corner of the triangular cross section. The conductive part 310 may be separated by the insulating part 320 . The conductive part 310 may contact the bridge member 400 . The conductive part 310 may be in contact with a conductive material formed on the outer surface 410 of the bridge member 400 .

The conductive part 310 formed in a portion corresponding to each corner of the triangular cross section may be included in a different conductive channel 10 for each corner. The three conductive parts 310 formed in the column 300 may be included in three different conductive channels 10 .

The conductive channel 10, which is a unit configuration of the connector 1000 for electrical connection, which conducts the upper side of the connector for electrical connection 1000 and the lower side of the connector 1000 for electrical connection, may include six conductive parts 11 . can The conductive channel 10 may include six conductive portions 11 respectively formed in six columns 300 .

The accommodation space 12 may be formed by the six conductive parts 11 . The accommodation space 12 may be surrounded by six conductive parts 11 . The bridge member 400 may be disposed in the accommodation space 12 formed by the six conductive parts 11 . The bridge member 400 may be surrounded by six conductive parts 11 . The six conductive parts 11 may contact the bridge member 400 . The six conductive parts 11 may be disposed to be spaced apart from each other along the circumference of the bridge member 400 . The six conductive parts 11 may be spaced apart from each other at the same distance along the circumference of the bridge member 400 .

FIG. 6 is another example of a cross-sectional view taken along line X-X' of the connector 1000 for electrical connection shown in FIG. 1 .

As another example of column 300 , the transverse cross-section of column 300 may be square or rectangular. The column 300 may have a structure in which a cross section of a square or a rectangle is stacked in the vertical direction. When the column 300 has a structure in which square or rectangular cross-sections are stacked in the vertical direction, the column 300 may have the smallest area of the lateral cross-section of the middle portion in the vertical direction as shown in FIG. 2 . The area of a square or rectangle that is a transverse cross-section of the column 300 may have the smallest middle portion in the vertical direction.

When the column 300 has a square or rectangular cross-section, four conductive portions 310 may be formed in the column 300 . The conductive part 310 of the column 300 may be formed in a portion corresponding to each corner of a square or rectangular cross-section. The conductive part 310 may be separated by the insulating part 320 . The conductive part 310 may contact the bridge member 400 . The conductive part 310 may be in contact with a conductive material formed on the outer surface 410 of the bridge member 400 .

The conductive part 310 formed in a portion corresponding to each corner of a square or rectangular cross-section may be included in a different conductive channel 10 for each corner. The four conductive parts 310 formed in the column 300 may be included in four different conductive channels 10 .

The conductive channel 10, which is one unit configuration of the connector 1000 for electrical connection, which conducts the upper side of the connector for electrical connection 1000 and the lower side of the connector 1000 for electrical connection, may include four conductive parts 11 . can The conductive channel 10 may include four conductive portions 11 respectively formed in four columns 300 .

The accommodation space 12 may be formed by the four conductive parts 11 . The accommodation space 12 may be surrounded by four conductive parts 11 . The bridge member 400 may be disposed in the accommodation space 12 formed by the four conductive parts 11 . The bridge member 400 may be surrounded by four conductive parts 11 . The four conductive parts 11 may contact the bridge member 400 . The four conductive parts 11 may be disposed to be spaced apart from each other along the circumference of the bridge member 400 . The four conductive parts 11 may be spaced apart from each other at equal intervals along the circumference of the bridge member 400 .

FIG. 7 is another example of a cross-sectional view taken along line X-X' of the connector 1000 for electrical connection shown in FIG. 1 .

As another example of the column 300 , the transverse cross-section of the column 300 may be a rhombus. The column 300 may have a structure in which a cross section of a rhombus is stacked in a vertical direction. When the column 300 has a structure in which the cross-section of the rhombus is stacked in the vertical direction, the column 300 may have the smallest area of the lateral cross-section of the middle portion in the vertical direction as shown in FIG. 2 . The area of the rhombus, which is the transverse cross-section of the column 300 , may be the smallest in the middle part in the vertical direction.

When the column 300 has a rhombic cross section, four conductive parts 310 may be formed in the column 300 . The conductive part 310 of the column 300 may be formed in a portion corresponding to each corner of the rhombic cross-section. The size of the cross-sectional area of the conductive part 310 of the column 300 may be proportional to the size of the cross-sectional area of a portion corresponding to each corner of the cross-section of the rhombus. The conductive part 310 may be separated by the insulating part 320 . The conductive part 310 may contact the bridge member 400 . The conductive part 310 may be in contact with a conductive material formed on the outer surface 410 of the bridge member 400 .

The conductive part 310 formed in a portion corresponding to each corner of the cross section of the rhombus may be included in a different conductive channel 10 for each corner. The four conductive parts 310 formed in the column 300 may be included in four different conductive channels 10 .

The conductive channel 10, which is one unit configuration of the connector 1000 for electrical connection, which conducts the upper side of the connector for electrical connection 1000 and the lower side of the connector 1000 for electrical connection, may include four conductive parts 11 . can The conductive channel 10 may include four conductive portions 11 respectively formed in four columns 300 .

The accommodation space 12 may be formed by the four conductive parts 11 . The accommodation space 12 may be surrounded by four conductive parts 11 . The bridge member 400 may be disposed in the accommodation space 12 formed by the four conductive parts 11 . The bridge member 400 may be surrounded by four conductive parts 11 . The four conductive parts 11 may contact the bridge member 400 . The four conductive parts 11 may be disposed to be spaced apart from each other along the circumference of the bridge member 400 . The four conductive parts 11 may be spaced apart from each other at equal intervals along the circumference of the bridge member 400 .

8 is a vertical cross-sectional view of the connector 1000 for electrical connection according to another embodiment.

The connector 1000 for electrical connection according to another embodiment may include the configuration of the connector 1000 for electrical connection according to the embodiment described above. The connector 1000 for electrical connection according to another embodiment may further include a guide part 150 formed on an upper side of the first pad 110 .

A conductive part 151 may be formed in the guide part 150 . The conductive part 151 may be formed in an up-down direction. The conductive part 151 may electrically connect an upper side of the conductive part 151 and a lower side of the conductive part 151 . An upper portion of the conductive part 151 may be in contact with a terminal of the device under test. The conductive part 151 may be electrically connected to a terminal of the device under test. A lower portion of the conductive part 151 may contact the first pad 110 . The conductive part 151 may be electrically connected to the first pad 110 .

The terminal accommodating part 155 in which the terminal of the device under test can be accommodated may be formed by the plurality of conductive parts 151 . The terminal accommodating part 155 may be surrounded by a plurality of conductive parts 151 . The terminal accommodating part 155 may guide the terminal of the device under test so that the terminal of the device under test may contact the first pad 110 . The terminal of the device to be tested may be accommodated in the terminal accommodating part 155 to be in contact with the plurality of conductive parts 151 . The terminal of the device to be tested may be accommodated in the terminal accommodating part 155 to be in contact with the first pad 110 . The terminal of the device under test, the plurality of conductive parts 151 , and the first pad 110 may be electrically connected to each other.

9 is a vertical cross-sectional view of the connector 1000 for electrical connection according to another embodiment.

The connector 1000 for electrical connection according to another embodiment may include the configuration of the connector 1000 for electrical connection according to the above-described embodiments.

The connector 1000 for electrical connection according to another embodiment may include a third film 500 positioned below the second film 200 . A plurality of third through holes 505 may be formed in the third film 500 . The plurality of third through holes 505 may be formed in the third insulating portion 501 of the third film 500 . The third through hole 505 may extend from an upper side of the third film 500 to a lower side of the third film 500 and penetrate the third insulating portion 501 . When viewed from the upper side of the third film 500 , the third through hole 505 may have a circular cross-section. The plurality of third through-holes 505 may be formed in the third insulating portion 501 to be spaced apart from each other.

The third film 500 may include a third pad 510 . A plurality of third pads 510 may be maintained on the third film 500 . The third pad 510 may be formed in the third through hole 505 . The third pad 510 may have a size and shape corresponding to the third through hole 505 . The third pad 510 may be electrically conductive. The third pad 510 may include conductive particles. The third pad 510 may include silicon. In the third pad 510 , conductive particles may be retained by silicon. An upper side of the third film 500 and a lower side of the third film 500 may be conductive through the third pad 510 .

The connector 1000 for electrical connection according to another embodiment may include at least two or more additional columns 600 . At least two or more additional columns 600 may be disposed between the second film 200 and the third film 500 . An additional column 600 may contact the second film 200 and the third film 500 . An additional conductive portion 610 may be formed in the additional column 600 . The additional conductive portion 610 may be formed at one end and the other end of the additional column 600 . An upper portion of the additional conductive portion 610 may contact a lower portion of the second pad 210 . A lower portion of the additional conductive portion 610 may contact an upper portion of the third pad 510 . The additional column 600 may be conductive. The first pad 110 , the conductive part 310 , the second pad 210 , the additional conductive part 610 , and the third pad 510 may be electrically connected to each other.

At least two or more additional columns 600 may be spaced apart from each other in the transverse direction. A space may be formed between at least two or more additional columns 600 . The space may be formed by at least two or more additional columns 600 disposed adjacent to each other. An additional bridge member 700 may be disposed in a space between at least two or more additional columns 600 . The additional bridge member 700 may have a spherical shape. The additional bridge member 700 may be disposed in the space between the at least two or more additional columns 600 to be in contact with the at least two or more additional columns 600 . The additional bridge member 700 may be in contact with at least two or more additional columns 600 disposed adjacent to each other.

The additional bridge member 700 may be formed of a conductive material. At least the outer surface 710 of the additional bridge member 700 may be formed of a conductive material. When the outer surface 710 of the additional bridge member 700 is formed of a conductive material, the interior of the additional bridge member 700 except for the outer surface 710 of the additional bridge member 700 may be formed of a silicon material. . The outer surface 710 of the additional bridge member 700 may be formed by plating a conductive material. The conductive material may be, for example, gold.

As the outer surface 710 of the additional bridge member 700 is formed of a conductive material, electrical connection through the additional bridge member 700 may be provided. The first pad 110 , the conductive part 310 , the bridge member 400 , the second pad 210 , the additional conductive part 610 , the additional bridge member 700 , and the third pad 510 may be electrically connected to each other. have.

10 is a vertical cross-sectional view of the connector 1000 for electrical connection according to another embodiment.

The connector 1000 for electrical connection according to another embodiment may include the configuration of the connector 1000 for electrical connection according to the above-described embodiments.

A plurality of bridge members 400 having at least an outer surface 410 made of a conductive material may be disposed in a space between at least two or more columns 300 in the connector 1000 for electrical connection according to another embodiment. The bridge members 400 may be, for example, two, but the number of the bridge members 400 is not limited thereto.

The plurality of bridge members 400 may contact each other. The bridge member 400 may contact at least one column 300 among at least two or more columns 300 disposed adjacent to each other. The bridge member 400 may contact the conductive part 310 formed in the column 300 . As the bridge member 400 contacts the at least one column 300 , the bridge member 400 and the at least one column 300 may be electrically connected. The first pad 110 , the conductive part 310 , the plurality of bridge members 400 , and the second pad 210 may be electrically connected to each other.

Embodiments may provide an electrical connection between the device under test and the test equipment through the connector 1000 for electrical connection as various paths. Further, according to the embodiments, an electrical connection between the device under test and the test equipment through the connector 1000 for electrical connection may be stably provided.

Although the technical spirit of the present disclosure has been described by the examples shown in some embodiments and the accompanying drawings, it does not depart from the technical spirit and scope of the present disclosure that can be understood by those of ordinary skill in the art to which the present disclosure belongs. It should be understood that various substitutions, modifications, and alterations within the scope may be made. Further, such substitutions, modifications, and alterations are intended to fall within the scope of the appended claims.

1000 electrical connection connector, 10 conductive channel, 11: conductive part, 12 receiving space, 100 first film, 101 first insulating portion, 105 first through hole, 110 first pad, 150: Guide part 151: conductive part, 155: terminal receiving part, 20: insulator, 200: second film, 201: second insulating portion, 205: second through hole, 210: second pad, 300: column, 310: conductive Part, 311: conductive particles, 320: insulating part, 400: bridge member, 410: outer surface of the bridge member, 420: the inside of the bridge member, 500: third film, 505: third through hole, 510: third pad , 600: additional column, 610: additional conductive part, 700: additional bridge member

Claims (20)

It is a connector for anisotropic electrical connection that conducts in the vertical direction,
a first film holding a plurality of first electrically conductive pads;
a second film positioned under the first film and holding a plurality of electrically conductive second pads;
at least two columns disposed between the first film and the second film and spaced apart from each other in the transverse direction,
At one end of the column is formed at least one conductive portion formed in the vertical direction,
There is a space between the at least two or more columns, and a bridge member having at least an outer surface formed of a conductive material is disposed in the space,
Connectors for anisotropic electrical connections. According to claim 1,
The plurality of first pads are formed in a plurality of first through holes formed in the first film,
The plurality of second pads are formed in a plurality of second through holes formed in the second film,
Connectors for anisotropic electrical connections. According to claim 1,
The first pad, the conductive part, the bridge member, and the second pad are electrically connected,
Connectors for anisotropic electrical connections. According to claim 1,
The column comprises an insulation,
At the other end of the column, at least one conductive part formed in the vertical direction is further formed,
The at least one conductive portion formed at one end of the column and the at least one conductive portion formed at the other end of the column are separated by the insulating portion,
The conductive portion formed at one end of the column and the conductive portion formed at the other end of the column include a plurality of conductive particles,
Connectors for anisotropic electrical connections. 5. The method of claim 4,
The plurality of conductive particles are held in the column by the insulating portion,
Connectors for anisotropic electrical connections. According to claim 1,
The column has the smallest area of the transverse cross-section of the middle part in the vertical direction,
Connectors for anisotropic electrical connections. According to claim 1,
wherein the transverse cross-section of the column has a shape of one of elliptical, circular and polygonal;
Connectors for anisotropic electrical connections. According to claim 1,
The bridge member has a spherical shape,
Connectors for anisotropic electrical connections. According to claim 1,
Further comprising a plurality of guide parts on the upper side of the first pad,
Connectors for anisotropic electrical connections. According to claim 1,
a third film positioned under the second film and holding a plurality of third pads;
Further comprising at least two or more additional columns disposed between the second film and the third film and spaced apart from each other in the transverse direction,
At one end of the additional column is formed at least one additional conductive portion formed in the vertical direction,
An additional bridge member having at least an outer surface formed of a conductive material is disposed in the space between the at least two or more additional columns,
Connectors for anisotropic electrical connections. 11. The method of claim 10,
the first pad, the conductive part, the bridge member, the second pad, the additional conductive part, the additional bridge member, and the third pad are electrically connected;
Connectors for anisotropic electrical connections. It is a connector for anisotropic electrical connection that conducts in the vertical direction,
a plurality of conductive channels for conducting an upper end of the connector for anisotropic electrical connection and a lower end of the connector for anisotropic electrical connection; and
and an insulator in which the plurality of conductive channels penetrate vertically and are electrically insulating;
Each of the plurality of conductive channels,
a plurality of conductive parts extending in the vertical direction and configured to be energized; and
It is disposed in the receiving space formed between the plurality of conductive parts, and is in contact with the plurality of conductive parts, comprising at least one bridge member having at least an outer surface formed of a conductive material,
Connectors for anisotropic electrical connections. 13. The method of claim 12,
The plurality of conductive channels are laterally spaced apart from each other,
Connectors for anisotropic electrical connections. 13. The method of claim 12,
The plurality of conductive parts are spaced apart from a central axis extending in the vertical direction of the conductive channel,
Connectors for anisotropic electrical connections. 13. The method of claim 12,
The plurality of conductive parts are disposed to be spaced apart from each other along the circumference of the bridge member,
Connectors for anisotropic electrical connections. 13. The method of claim 12,
The plurality of conductive parts are 4 to 6 conductive parts,
Connectors for anisotropic electrical connections. 13. The method of claim 12,
A plurality of the receiving spaces corresponding to the plurality of conductive channels are formed,
Connectors for anisotropic electrical connections. 18. The method of claim 17,
The plurality of accommodation spaces are in communication with each other,
Connectors for anisotropic electrical connections. 13. The method of claim 12,
The conductive part includes a plurality of conductive particles,
The volume of the bridge member is greater than the average volume of the plurality of conductive particles,
Connectors for anisotropic electrical connections. 13. The method of claim 12,
The plurality of conductive portions defining a portion of the outer peripheral surface of the accommodation space,
Connectors for anisotropic electrical connections.

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