KR102414312B1 - 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬 - Google Patents

현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬 Download PDF

Info

Publication number
KR102414312B1
KR102414312B1 KR1020197025718A KR20197025718A KR102414312B1 KR 102414312 B1 KR102414312 B1 KR 102414312B1 KR 1020197025718 A KR1020197025718 A KR 1020197025718A KR 20197025718 A KR20197025718 A KR 20197025718A KR 102414312 B1 KR102414312 B1 KR 102414312B1
Authority
KR
South Korea
Prior art keywords
image sensor
specimen
distance
translation stage
feature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020197025718A
Other languages
English (en)
Korean (ko)
Other versions
KR20190112108A (ko
Inventor
매튜 씨. 푸트만
존 비. 푸트만
브랜던 스코트
딜런 파쉬보우
Original Assignee
나노트로닉스 이미징, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 나노트로닉스 이미징, 인코포레이티드 filed Critical 나노트로닉스 이미징, 인코포레이티드
Priority to KR1020227021558A priority Critical patent/KR102668955B1/ko
Publication of KR20190112108A publication Critical patent/KR20190112108A/ko
Application granted granted Critical
Publication of KR102414312B1 publication Critical patent/KR102414312B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/26Stages; Adjusting means therefor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/362Mechanical details, e.g. mountings for the camera or image sensor, housings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365Control or image processing arrangements for digital or video microscopes
    • G02B21/367Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00Arrangements for image or video recognition or understanding
    • G06V10/10Image acquisition
    • G06V10/16Image acquisition using multiple overlapping images; Image stitching
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V20/00Scenes; Scene-specific elements
    • G06V20/60Type of objects
    • G06V20/69Microscopic objects, e.g. biological cells or cellular parts
    • G06V20/693Acquisition
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/387Composing, repositioning or otherwise geometrically modifying originals
    • H04N1/3876Recombination of partial images to recreate the original image

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Signal Processing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biomedical Technology (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020197025718A 2017-02-10 2017-05-16 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬 Active KR102414312B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020227021558A KR102668955B1 (ko) 2017-02-10 2017-05-16 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762457470P 2017-02-10 2017-02-10
US62/457,470 2017-02-10
PCT/US2017/032826 WO2018147888A1 (en) 2017-02-10 2017-05-16 Camera and specimen alignment to facilitate large area imaging in microscopy

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020227021558A Division KR102668955B1 (ko) 2017-02-10 2017-05-16 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬

Publications (2)

Publication Number Publication Date
KR20190112108A KR20190112108A (ko) 2019-10-02
KR102414312B1 true KR102414312B1 (ko) 2022-06-28

Family

ID=58779353

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020197025718A Active KR102414312B1 (ko) 2017-02-10 2017-05-16 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬
KR1020227021558A Active KR102668955B1 (ko) 2017-02-10 2017-05-16 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020227021558A Active KR102668955B1 (ko) 2017-02-10 2017-05-16 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬

Country Status (7)

Country Link
US (4) US10048477B1 (enExample)
EP (1) EP3580599B1 (enExample)
JP (2) JP7029821B2 (enExample)
KR (2) KR102414312B1 (enExample)
CN (1) CN110291438A (enExample)
TW (3) TWI764786B (enExample)
WO (1) WO2018147888A1 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017170698A1 (ja) * 2016-03-31 2017-10-05 キヤノン株式会社 アダプタ、顕微鏡調節方法、顕微鏡システム及びプログラム。
KR102414312B1 (ko) 2017-02-10 2022-06-28 나노트로닉스 이미징, 인코포레이티드 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬
US10545096B1 (en) * 2018-10-11 2020-01-28 Nanotronics Imaging, Inc. Marco inspection systems, apparatus and methods
US10481379B1 (en) 2018-10-19 2019-11-19 Nanotronics Imaging, Inc. Method and system for automatically mapping fluid objects on a substrate
US11294162B2 (en) 2019-02-07 2022-04-05 Nanotronics Imaging, Inc. Fluorescence microscopy inspection systems, apparatus and methods with darkfield channel
CN109752832B (zh) * 2019-03-25 2024-10-22 南京泰立瑞信息科技有限公司 一种显微镜镜筒在z轴上的运动控制方法及自动显微镜
US11593919B2 (en) 2019-08-07 2023-02-28 Nanotronics Imaging, Inc. System, method and apparatus for macroscopic inspection of reflective specimens
US10915992B1 (en) 2019-08-07 2021-02-09 Nanotronics Imaging, Inc. System, method and apparatus for macroscopic inspection of reflective specimens
CN110996002B (zh) * 2019-12-16 2021-08-24 深圳市瑞图生物技术有限公司 显微镜聚焦方法、装置、计算机设备和存储介质
CN112469984B (zh) * 2019-12-31 2024-04-09 深圳迈瑞生物医疗电子股份有限公司 一种图像分析装置及其成像方法
DE102020113454A1 (de) 2020-05-19 2021-11-25 Carl Zeiss Microscopy Gmbh Mikroskop und Verfahren zum Erzeugen eines aus mehreren mikroskopischen Einzelbildern zusammengesetzten Bildes
US11748871B2 (en) * 2020-09-28 2023-09-05 KLA Corp. Alignment of a specimen for inspection and other processes
DE102021101439A1 (de) * 2021-01-22 2022-07-28 Carl Zeiss Microscopy Gmbh Mikroskopiesystem und verfahren zur rotationsüberprüfung einer mikroskopkamera
EP4063709A1 (en) * 2021-03-22 2022-09-28 Roche Diagnostics GmbH Laboratory system and corresponding method of operation
CN115020270B (zh) * 2021-07-06 2025-05-16 深圳市森美协尔科技有限公司 晶圆测试设备及测试方法
EP4177662A1 (en) * 2021-11-09 2023-05-10 Roche Diagnostics GmbH Instrument for automatically dissecting a biological specimen on a slide
CN116263539A (zh) * 2022-08-11 2023-06-16 上海睿钰生物科技有限公司 一种显微成像系统
DE102023114945B3 (de) 2023-06-07 2024-11-21 Carl Zeiss Meditec Ag Computerimplementiertes Bildgebungsverfahren und optisches Beobachtungsgerät
KR102852898B1 (ko) * 2023-12-15 2025-09-02 (주)코셈 다중창 박막을 이용한 대기압 전자현미경
CN119846827B (zh) * 2025-03-21 2025-06-13 浙江荷湖科技有限公司 一种针对电缸驱动的超大视野显微镜的视野调平方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110169936A1 (en) * 2010-01-14 2011-07-14 Olympus Corporation Microscope
JP2013083743A (ja) * 2011-10-07 2013-05-09 Keyence Corp 拡大観察装置
JP2014130221A (ja) * 2012-12-28 2014-07-10 Canon Inc 画像処理装置、その制御方法、画像処理システム、及びプログラム
JP2016110042A (ja) * 2014-12-10 2016-06-20 キヤノン株式会社 顕微鏡システム、制御方法、及びプログラム

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2681722B2 (ja) * 1990-11-29 1997-11-26 ハウス食品株式会社 方向性のある物品の充填装置
JP3620884B2 (ja) 1995-03-01 2005-02-16 富士機械製造株式会社 画像処理装置
JPH1048527A (ja) * 1996-08-01 1998-02-20 Olympus Optical Co Ltd イメージローテータ装置及び走査型光学顕微鏡
JPH10103924A (ja) * 1996-09-27 1998-04-24 Olympus Optical Co Ltd 微少寸法測定装置
US6107637A (en) * 1997-08-11 2000-08-22 Hitachi, Ltd. Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
WO2002086416A2 (en) * 2001-04-25 2002-10-31 Amnis Corporation Method and apparatus for correcting crosstalk and spatial resolution for multichannel imaging
JP4048265B2 (ja) * 2002-08-26 2008-02-20 独立行政法人科学技術振興機構 一細胞長期観察装置
JP2006349762A (ja) 2005-06-13 2006-12-28 Olympus Corp 測定顕微鏡装置
JP2007114547A (ja) 2005-10-21 2007-05-10 Nikon Corp 顕微鏡装置
JP2011145470A (ja) 2010-01-14 2011-07-28 Olympus Corp 顕微鏡
EP3151052B1 (en) * 2010-02-01 2025-03-26 Illumina, Inc. Focusing methods and optical systems and assemblies using the same
FR2963093B1 (fr) * 2010-07-26 2012-08-03 Vit Installation d'inspection optique 3d de circuits electroniques
US8175452B1 (en) * 2010-10-26 2012-05-08 Complete Genomics, Inc. Method and system for imaging high density biochemical arrays with sub-pixel alignment
JP5700797B2 (ja) 2011-01-24 2015-04-15 株式会社キーエンス 共焦点顕微鏡システム、画像処理方法および画像処理プログラム
JP5963453B2 (ja) * 2011-03-15 2016-08-03 株式会社荏原製作所 検査装置
US20130077892A1 (en) * 2011-09-27 2013-03-28 Yasunori Ikeno Scan Order Optimization and Virtual Slide Stitching
JP5896725B2 (ja) * 2011-12-20 2016-03-30 オリンパス株式会社 撮像装置
JP6560490B2 (ja) 2014-12-10 2019-08-14 キヤノン株式会社 顕微鏡システム
KR102414312B1 (ko) 2017-02-10 2022-06-28 나노트로닉스 이미징, 인코포레이티드 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110169936A1 (en) * 2010-01-14 2011-07-14 Olympus Corporation Microscope
JP2013083743A (ja) * 2011-10-07 2013-05-09 Keyence Corp 拡大観察装置
JP2014130221A (ja) * 2012-12-28 2014-07-10 Canon Inc 画像処理装置、その制御方法、画像処理システム、及びプログラム
JP2016110042A (ja) * 2014-12-10 2016-06-20 キヤノン株式会社 顕微鏡システム、制御方法、及びプログラム

Also Published As

Publication number Publication date
TW202234120A (zh) 2022-09-01
US20180231752A1 (en) 2018-08-16
TW201831858A (zh) 2018-09-01
US20180307016A1 (en) 2018-10-25
JP2022062236A (ja) 2022-04-19
EP3580599B1 (en) 2024-12-25
US10698191B2 (en) 2020-06-30
WO2018147888A1 (en) 2018-08-16
TW202140991A (zh) 2021-11-01
TWI764786B (zh) 2022-05-11
TWI734891B (zh) 2021-08-01
JP7428406B2 (ja) 2024-02-06
US20180335614A1 (en) 2018-11-22
KR20220093274A (ko) 2022-07-05
EP3580599A1 (en) 2019-12-18
KR102668955B1 (ko) 2024-05-23
US10416426B2 (en) 2019-09-17
JP2020507813A (ja) 2020-03-12
JP7029821B2 (ja) 2022-03-04
US20200326519A1 (en) 2020-10-15
CN110291438A (zh) 2019-09-27
US10048477B1 (en) 2018-08-14
KR20190112108A (ko) 2019-10-02
TWI849418B (zh) 2024-07-21
US11099368B2 (en) 2021-08-24

Similar Documents

Publication Publication Date Title
KR102414312B1 (ko) 현미경 검사에서 대 영역 이미징을 용이하게 하는 카메라 및 표본 정렬
US6320609B1 (en) System using a polar coordinate stage and continuous image rotation to compensate for stage rotation
KR101110145B1 (ko) X선 투시 장치
US7573049B2 (en) Wafer alignment method for dual beam system
US8532950B2 (en) Method for calibrating a stage-camera system, and a stage-camera system
CN107957659B (zh) 掩模版和晶圆缺陷检测正交性补偿方法
CN109447971A (zh) 一种摆线齿轮型线误差精确提取及关键形位精度快速分析方法
JP7088771B2 (ja) アライメント方法
CN116499401A (zh) 基于X-ray的晶圆级玻璃通孔TGV检测装置及方法
CN116879166B (zh) 一种基于机械臂的大口径平面光学元件表面缺陷扫描方法
CN100401014C (zh) 线宽测量装置
US11079584B2 (en) Method for use in optical imaging, a system for using in optical imaging and an optical system
CN106891331B (zh) 用于操纵对象以进行成像的系统和方法
US20040179096A1 (en) Imaging system using theta-theta coordinate stage and continuous image rotation to compensate for stage rotation
JPH0435846A (ja) 半導体ウエハの位置合せ方法
JP5407075B2 (ja) X線分析装置
KR100672166B1 (ko) 선폭 측정 장치
CN115265408A (zh) 闪测仪及其操作方法
JPH05256607A (ja) 座標測定機の位置合わせ装置

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20190902

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20200327

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20210730

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20220325

GRNT Written decision to grant
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20220624

PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20220624

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20220624

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20250616

Start annual number: 4

End annual number: 4