KR102386333B1 - A stacker unit - Google Patents

Abstract

The stacker unit includes a supply magazine in which collets to be mounted on the pickup head are accommodated, a first loading part for loading an empty supply magazine from which the collets are discharged to be mounted on the pickup head, It may include a second loading part for loading the recovery magazine for the purpose, a hood to be mounted on the ejection body, and a third loading part for loading the hood separated from the ejection body. Accordingly, it is possible to easily supply and discharge the collet and the hood.

Description

Stacker unit {A stacker unit}

The present invention relates to a stacker unit, and more particularly, to a stacker unit for loading a hood for ejecting a die from a wafer in a die bonding process and a collet for bonding the die onto a substrate.

In general, a die bonding process is a process for bonding individualized dies to a substrate through a sawing process. In the die bonding process, an ejector for ejecting the dies from a wafer and a pickup unit for picking up and transporting the dies may be used. there is.

The pickup unit may include a collet for picking up the die using the vacuum, a pickup head to which the collet is coupled, and a driving unit for moving the pickup head.

The collet may wear out from prolonged use or may require replacement to absorb a different size die. According to the prior art, the collet is loaded by being inserted into a collet receiving groove formed on a panel for replacement, and the collet coupled to the pickup head is removed using a locking member provided on the panel, and the collet on the panel is removed. The collet is coupled to the pickup head using magnetic force. This technology is disclosed in Korean Patent No. 10-1340831.

When all the collets stacked on the panel are used up, the die bonding process is stopped, and then the new collets are supplied to the panel. In addition, the removed collet may be recovered in a state in which the die bonding process is stopped. Since the die bonding process is frequently stopped for supply of new collets and recovery of replaced collets, productivity of the die bonding process may be reduced.

Meanwhile, the ejector includes an ejector body that moves according to the position of the die under the wafer, and a hood provided at an end of the ejector body to eject the dies.

The hood may require replacement to eject a different size die. Since the replacement of the hood is performed manually by an operator, it may take a considerable amount of time to manually replace the hood. In addition, since the die bonding process is stopped even when the hood is replaced, productivity of the die bonding process may be further reduced.

Korean Patent Registration No. 10-1340831 (Registered on Dec. 5, 2013)

The present invention provides a stacker unit for accommodating the collet and the hood to supply the collet and the hood without interruption of the die bonding process.

The stacker unit according to the present invention includes a supply magazine in which collets to be mounted on a pickup head are accommodated, and a first loading unit for loading an empty supply magazine from which the collets are discharged to be mounted on the pickup head, and is separated from the pickup head. It may include a second loading part for loading the collection magazine for accommodating the collets, and a hood to be mounted on the ejection body, and a third loading part for loading the hood separated from the ejection body.

According to embodiments of the present invention, the die bonding process using the hood and the pickup head is moved between the inside and the outside of the chamber, and the supply and discharge of the supply magazine, the recovery magazine and the hood from the outside are performed. To enable the first loading part, the second loading part and the third loading part may be provided in the form of a drawer.

According to one embodiment of the present invention, the portion gripped by the transfer robot in the supply magazine, the collection magazine, and the hood is the same size so that the transfer robot holds the supply magazine, the collection magazine, and the hood in common. can have

According to embodiments of the present invention, the first loading unit, the second loading unit, and the third loading unit may have slots of the same size for loading the supply magazine, the recovery magazine, and the hood.

The stacker unit according to the present invention has a drawer shape that can be opened and closed from the outside of the first loading part, the second loading part, and the third loading part. Accordingly, the collet and the hood may be supplied to the first loading unit and the third loading unit without interruption of the die bonding process, or the collet and the hood may be recovered from the second loading unit and the third loading unit. Accordingly, the die bonding process can be fully automated, and productivity of the die bonding process can be improved.

1 is a perspective view illustrating a stacker unit according to an embodiment of the present invention.
FIG. 2 is a side view illustrating the stacker unit shown in FIG. 1 .
3 is a cross-sectional view for explaining the supply magazine shown in FIG.
4 is a cross-sectional view for explaining the collection magazine shown in FIG.

Hereinafter, a stacker unit according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. Since the present invention can have various changes and can have various forms, specific embodiments are illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents and substitutes included in the spirit and scope of the present invention. In describing each figure, like reference numerals have been used for like elements. In the accompanying drawings, the dimensions of the structures are enlarged than the actual size for clarity of the present invention.

Terms such as first, second, etc. may be used to describe various elements, but the elements should not be limited by the terms. The above terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, a first component may be referred to as a second component, and similarly, a second component may also be referred to as a first component.

The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise. In the present application, terms such as “comprise” or “have” are intended to designate that a feature, number, step, operation, component, part, or a combination thereof described in the specification exists, but one or more other features It is to be understood that it does not preclude the possibility of the presence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present application. does not

FIG. 1 is a perspective view for explaining a stacker unit according to an embodiment of the present invention, and FIG. 2 is a side view for explaining the stacker unit shown in FIG. 1 .

1 and 2, the stacker unit 100 is provided in the chamber 10 in which the die bonding process is performed, is individualized through the dicing process, and is attached to a dicing tape from a wafer (not shown). The hood 20 and the collet 40 are loaded for replacement of the hood 20 for ejecting the die (not shown) and the collet 40 for bonding the die onto the substrate. The stacker unit 100 includes a first loading unit 110 , a second loading unit 120 , a third loading unit 130 , a supply magazine 140 , and a recovery magazine 150 .

Although not shown, in the chamber 10, a hood and an eject body for lifting and ejecting the die from the lower part of the wafer, and a wafer supporting the edge of the wafer so that the hood and the eject body eject the die stably A holder, the hood, a stage supporting the ejection body and the wafer holder, and a pickup unit for picking up and transferring the die from the wafer and bonding the die on a substrate may be provided.

The first loading unit 110 loads a plurality of collets 40 to be mounted on the pickup head. At this time, the collets 40 are accommodated in the first loading unit 110 in a state loaded on the supply magazine 140 . In addition, the collets 40 are discharged to be mounted on the pickup head, and the empty supply magazine 140 may be loaded on the first loading unit 110 .

In the second loading unit 120 , the collection magazine 150 for loading the collet 40 separated from the pickup head may be stored in an empty state.

The third loading unit 130 accommodates the hoods 20 to be mounted on the ejection body and the hoods 20 separated from the ejection body.

The supply magazine 140 , the recovery magazine 150 and the hood 20 are transported by the transport robot 30 , and the transport robot 30 moves from the supply magazine 140 , the recovery magazine 150 and the hood 20 . The gripping portion has the same size and shape. One transfer robot 30 can hold not only the hood 20 but also the supply magazine 140 and the collection magazine 150, so by holding the supply magazine 140, the collection magazine 150 and the hood 20, A separate transfer robot 30 for transferring is unnecessary.

Meanwhile, portions of the supply magazine 140 , the recovery magazine 150 , and the hood 20 , except for the portion gripped by the transfer robot 30 , may have the same shape and the same size. That is, the supply magazine 140 and the recovery magazine 150 may have the same shape and the same size as the hood 20 as a whole.

In the supply magazine 140 , the recovery magazine 150 , and the hood 20 , parts other than the part gripped by the transfer robot 30 may have different shapes and sizes. For example, the length of the supply magazine 140 and the retrieval magazine 150 may be different from the length of the hood 20 . In particular, in order to accommodate the plurality of collets 40 , the recovery magazine 150 may have a larger size than the hood 20 , except for the portion gripped by the transfer robot 30 .

The first loading unit 110 includes a plate 112 extending in a horizontal direction, and the plate 112 has a plurality of slots 114 on the side surface. Collets 40 may be accommodated in the slots 114 or an empty supply magazine 140 may be inserted.

A plurality of plates 112 having slots 114 formed thereon are provided at different heights, and the supply magazine 140 in which the collets 40 are accommodated and the empty supply magazine 140 are separated and the slots 114 of different heights. may be inserted into each of them.

A groove or a clasp may be formed on the side of the supply magazine 140 so that the supply magazine 140 can be inserted and fixed in the slots 114 . The groove or the locking protrusion may be formed partially or entirely along the periphery of the side of the supply magazine 140 .

The second loading unit 120 includes a plate 122 extending in a horizontal direction, and the plate 122 has a plurality of slots 124 on the side surface. The retrieval magazine 150 may be inserted into the slots 124 . A groove or a locking protrusion may be formed in the side of the recovery magazine 150 so that the recovery magazine 150 can be inserted and fixed in the slots 134 .

The third loading unit 130 includes a plate 132 extending in a horizontal direction, and the plate 132 has a plurality of slots 134 on the side surface. Hoods 20 may be inserted into the slots 134 . A groove or a hooking protrusion may be formed on the side of the hood 20 so that the hoods 20 can be inserted into the slots 134 and fixed.

The grooves or locking jaws may be formed adjacent to portions gripped by the transfer robot 30 in the supply magazine 140 , the recovery magazine 150 , and the hood 20 , respectively. Accordingly, in the supply magazine 140 , the recovery magazine 150 , and the hood 20 , the size (or cross-sectional area) of the portion in which the grooves or locking jaws are formed may be substantially the same. Therefore, the slots 114 , 124 , 134 into which the supply magazine 140 , the recovery magazine 150 and the hood 20 are respectively inserted may also have the same size.

Meanwhile, the first loading unit 110 , the second loading unit 120 , and the third loading unit 130 may be respectively provided at different heights. In addition, at least any two of the first loading unit 110 , the second loading unit 120 and the third loading unit 130 may be provided together at the same height. 1 and 2, the first loading unit 110 is provided at different heights, and the second loading unit 120 and the third loading unit 130 are provided together at the same height.

3 is a cross-sectional view for explaining the supply magazine shown in FIG.

Referring to FIG. 3 , the supply magazine 140 includes a body 142 , a support member 144 , and permanent magnets 148 .

The body 142 accommodates the collets 40 in a state loaded therein. The body 142 has a substantially cylindrical shape. On the outer surface of the body 142, a groove or a locking protrusion for fixing with the slots 114 of the first loading unit 110 is formed.

The support member 144 is provided on the inner bottom surface of the body 142 and elastically supports the collets 40 accommodated in the body 142 .

The support member 144 includes a plate 145 and a coil spring 146 .

The plate 145 is disposed in a horizontal state inside the body 142 . The coil spring 146 is disposed between the bottom surface of the body 142 and the plate 145 , and elastically supports the plate 145 .

The plate 145 supports the collets 40 accommodated in the body 142 . Accordingly, the plate 145 is in contact with the lower pad of the collet 40 . The plate 145 may be made of a material having a low coefficient of friction. Examples of the material include PEEK resin, Teflon resin, and the like. Since the friction coefficient of the plate 145 is low, it is possible to prevent damage to the lower pad.

The coil spring 146 cushions the impact applied to the collet 40 when the collet 40 descends and comes into contact with the plate 145 . Accordingly, damage to the collet 40 can be prevented.

In addition, the plate 145 rises due to the restoring force of the coil spring 146 , and accordingly the plate 145 pushes up the collet 40 accommodated in the body 142 .

A permanent magnet 148 for fixing the collet 40 is provided at the upper end of the body 142 . For example, when the collet 40 has a rectangular shape, the permanent magnets 148 may be disposed on both sides facing the inner side of the body 142 or may be disposed on four sides of the inner side of the body 142 .

The permanent magnets 148 may magnetically fix the upper pad of the collet 40, which is a magnetic body. Even if the collets 40 inside the body 142 are pushed up by the elastic force of the support member 144 , the permanent magnets 148 may fix the collet 40 at the top. Accordingly, it is possible to prevent the collet 40 from being separated from the body 142 by the elastic force of the support member 144 .

4 is a cross-sectional view for explaining the collection magazine shown in FIG.

Referring to FIG. 4 , the recovery magazine 150 includes a body 152 and locking members 154 .

The body 152 may accommodate the collets 40 in a state loaded therein. The body 152 has a substantially cylindrical shape. A groove or a locking protrusion for fixing with the slots 124 of the second loading part 120 is formed on the outer surface of the body 152 . The engaging members 154 are provided on both upper ends of the body 152 . The locking members 154 allow vertical movement of the pickup head but limit the upward movement of the collet 40 so that the collet 40 can be separated from the pickup head while the pickup head is moved upward.

Specifically, the pickup head and the collet 40 may be moved downward toward the inside of the collection magazine 150 to remove the collet 40, and then may be moved upward again.

In this case, the locking members 154 may be provided on both sides of the vertical movement path of the pickup head. In particular, the locking members 154 may allow downward and upward movement of the pickup head, but may allow downward movement with respect to the collet 40 but may restrict upward movement. As a result, the locking members 154 can separate the collet 40 from the pickup head while the pickup head is moved upwardly inside the recovery magazine 150 .

As an example, the locking members 154 may be mounted on both inner sides of the inlet of the body 152 to enable downward rotation by a spring (not shown), for example, a coil spring or a torsion spring. The locking members 154 may be rotated downward to enable downward movement of the collet 40 , but after the collet 40 has passed downward, it returns to its initial position by the torsion spring and moves upward of the collet 40 . movement can be restricted. Unlike the above, the locking members 154 may be installed so as to move forward and backward from the inner surface of the collection magazine 150 using a spring.

As a result, the collet 40 can be disengaged from the pickup head by being caught by the locking members 154 while the pickup head is moved upwardly inside the recovery magazine 150 .

Referring back to FIGS. 1 and 2 , the first loading part 110 , the second loading part 120 , and the third loading part 130 are disposed adjacent to each other, and in the form of a drawer on one side of the chamber 10 . can be opened and closed. Accordingly, the first loading part 110 , the second loading part 120 , and the third loading part 130 are opened from the outside of the chamber 10 to supply the collet 40 and the hood 20 or the separated collet (40) and the hood (20) can be discharged.

Specifically, the supply magazine 140 on which the collets 40 are loaded is supplied by opening the first loading unit 110 , and the collets 40 are discharged to be mounted on the pickup head and the supply magazine 140 in an empty state. ) can be released.

In addition, by opening the second loading unit 120 , the collection magazine 150 on which the separated collets 40 are loaded may be discharged, and the collection magazine 150 in an empty state may be supplied.

Then, the hood 20 may be supplied by opening the third loading unit 130 , and the separated hoods 20 may be discharged.

Since the collet 40 and the hood 20 are supplied from the outside of the chamber 10 or the separated collet 40 and the hood 20 are discharged, the collet 40 and the hood 20 are supplied or the separated collet ( 40) and when discharging the hood 20, there is no need to stop the die bonding process. Accordingly, productivity of the die bonding process may be improved.

As described above, the stacker unit according to the present invention has a drawer shape in which the first loading unit, the second loading unit and the third loading unit can be opened and closed from the outside of the chamber. Accordingly, the collet and the hood may be supplied to the first loading unit and the third loading unit without interruption of the die bonding process, or the collet and the hood may be recovered from the second loading unit and the third loading unit. Accordingly, the productivity of the die bonding process may be improved by fully automating the die bonding process.

Although the above has been described with reference to the preferred embodiment of the present invention, those skilled in the art can variously modify and change the present invention without departing from the spirit and scope of the present invention as set forth in the following claims. You will understand that you can.

100: stacker unit 110: first loading unit
120: second loading part 130: third loading part
140: supply magazine 150: recovery magazine
10: chamber 20: hood
30: transfer robot 40: collet

Claims (4)

a supply magazine in which collets to be mounted on the pickup head are accommodated, and a first loading unit for loading an empty supply magazine from which the collets are discharged to be mounted on the pickup head;
a second loading unit for loading a recovery magazine for accommodating the collets separated from the pickup head; and
A hood to be mounted on the ejection body and a third loading unit for loading the hood separated from the ejection body,
The stacker unit, characterized in that the portions gripped by the transfer robot in the supply magazine, the collection magazine, and the hood have the same size so that the transfer robot holds the supply magazine, the collection magazine and the hood in common. The method of claim 1, wherein the hood and the pickup head move between the inside and the outside of the chamber where the die bonding process is performed, and the supply magazine, the recovery magazine, and the hood can be supplied and discharged from the outside. Stacker unit, characterized in that the first loading portion, the second loading portion and the third loading portion is provided in the form of a drawer. delete The stacker unit according to claim 1, wherein the first loading section, the second loading section and the third loading section have slots of the same size for loading the supply magazine, the recovery magazine and the hood.

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