KR102383760B1 - 열시스템용 전력 변환기 - Google Patents
열시스템용 전력 변환기 Download PDFInfo
- Publication number
- KR102383760B1 KR102383760B1 KR1020217018748A KR20217018748A KR102383760B1 KR 102383760 B1 KR102383760 B1 KR 102383760B1 KR 1020217018748 A KR1020217018748 A KR 1020217018748A KR 20217018748 A KR20217018748 A KR 20217018748A KR 102383760 B1 KR102383760 B1 KR 102383760B1
- Authority
- KR
- South Korea
- Prior art keywords
- heater
- voltage
- resistance
- heating element
- output voltage
- Prior art date
Links
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24D—DOMESTIC- OR SPACE-HEATING SYSTEMS, e.g. CENTRAL HEATING SYSTEMS; DOMESTIC HOT-WATER SUPPLY SYSTEMS; ELEMENTS OR COMPONENTS THEREFOR
- F24D11/00—Central heating systems using heat accumulated in storage masses
- F24D11/02—Central heating systems using heat accumulated in storage masses using heat pumps
- F24D11/0207—Central heating systems using heat accumulated in storage masses using heat pumps district heating system
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
- G01R19/16504—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the components employed
- G01R19/16519—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the components employed using FET's
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/22—Arrangements for measuring currents or voltages or for indicating presence or sign thereof using conversion of ac into dc
- G01R19/225—Arrangements for measuring currents or voltages or for indicating presence or sign thereof using conversion of ac into dc by means of thermocouples or other heat sensitive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/25—Arrangements for measuring currents or voltages or for indicating presence or sign thereof using digital measurement techniques
- G01R19/257—Arrangements for measuring currents or voltages or for indicating presence or sign thereof using digital measurement techniques using analogue/digital converters of the type with comparison of different reference values with the value of voltage or current, e.g. using step-by-step method
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
- H05B1/0227—Applications
- H05B1/023—Industrial applications
- H05B1/0233—Industrial applications for semiconductors manufacturing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/17—District heating
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Combustion & Propulsion (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Control Of Resistance Heating (AREA)
- Automation & Control Theory (AREA)
- Dc-Dc Converters (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020227010522A KR20220044878A (ko) | 2016-06-15 | 2017-06-15 | 열시스템용 전력 변환기 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662350275P | 2016-06-15 | 2016-06-15 | |
US62/350,275 | 2016-06-15 | ||
PCT/US2017/037703 WO2017218791A1 (fr) | 2016-06-15 | 2017-06-15 | Convertisseur d'énergie pour système thermique |
KR1020197001245A KR102269440B1 (ko) | 2016-06-15 | 2017-06-15 | 열시스템용 전력 변환기 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020197001245A Division KR102269440B1 (ko) | 2016-06-15 | 2017-06-15 | 열시스템용 전력 변환기 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020227010522A Division KR20220044878A (ko) | 2016-06-15 | 2017-06-15 | 열시스템용 전력 변환기 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20210076215A KR20210076215A (ko) | 2021-06-23 |
KR102383760B1 true KR102383760B1 (ko) | 2022-04-08 |
Family
ID=59254032
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020227010522A KR20220044878A (ko) | 2016-06-15 | 2017-06-15 | 열시스템용 전력 변환기 |
KR1020217018748A KR102383760B1 (ko) | 2016-06-15 | 2017-06-15 | 열시스템용 전력 변환기 |
KR1020197001245A KR102269440B1 (ko) | 2016-06-15 | 2017-06-15 | 열시스템용 전력 변환기 |
KR1020237023444A KR20230107913A (ko) | 2016-06-15 | 2017-06-15 | 열시스템용 전력 변환기 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020227010522A KR20220044878A (ko) | 2016-06-15 | 2017-06-15 | 열시스템용 전력 변환기 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020197001245A KR102269440B1 (ko) | 2016-06-15 | 2017-06-15 | 열시스템용 전력 변환기 |
KR1020237023444A KR20230107913A (ko) | 2016-06-15 | 2017-06-15 | 열시스템용 전력 변환기 |
Country Status (7)
Country | Link |
---|---|
US (4) | US10690705B2 (fr) |
EP (3) | EP3813099B1 (fr) |
JP (1) | JP7143226B2 (fr) |
KR (4) | KR20220044878A (fr) |
CN (1) | CN109863584B (fr) |
TW (1) | TWI657712B (fr) |
WO (1) | WO2017218791A1 (fr) |
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DE102018110382A1 (de) * | 2018-04-30 | 2019-10-31 | Volkswagen Aktiengesellschaft | Verfahren zur Temperaturermittlung eines elektrisch beheizbaren Katalysators |
US10633742B2 (en) | 2018-05-07 | 2020-04-28 | Lam Research Foundation | Use of voltage and current measurements to control dual zone ceramic pedestals |
KR20210019573A (ko) | 2018-07-05 | 2021-02-22 | 램 리써치 코포레이션 | 기판 프로세싱 시스템에서 기판 지지부의 동적 온도 제어 |
US11183400B2 (en) * | 2018-08-08 | 2021-11-23 | Lam Research Corporation | Progressive heating of components of substrate processing systems using TCR element-based heaters |
US10872747B2 (en) | 2018-08-08 | 2020-12-22 | Lam Research Corporation | Controlling showerhead heating via resistive thermal measurements |
CN111211029B (zh) * | 2018-11-21 | 2023-09-01 | 中微半导体设备(上海)股份有限公司 | 一种多区控温等离子反应器 |
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CN109871052A (zh) * | 2019-04-03 | 2019-06-11 | 上海颐柏科技股份有限公司 | 一种电热辐射管温度控制装置及其控制方法 |
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CN115552782A (zh) * | 2020-05-06 | 2022-12-30 | 沃特洛电气制造公司 | 用于热力系统的隔离型功率变换器 |
CN115669217A (zh) | 2020-05-19 | 2023-01-31 | 沃特洛电气制造公司 | 用于电阻加热器的被动和主动校准方法 |
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US20220368229A1 (en) * | 2020-11-19 | 2022-11-17 | Innoscience (Suzhou) Technology Co., Ltd. | High frequency and power-adjustable electronic heating type device and method for operating the same |
KR20240045279A (ko) * | 2021-08-11 | 2024-04-05 | 램 리써치 코포레이션 | 히터 온도를 제어하기 위해 정류기 및 벅 스테이지 (buck stage) 를 사용하는 전압의 진폭 변조 |
US11973409B2 (en) | 2021-09-29 | 2024-04-30 | Chromalox, Inc. | Heating system and method of heating a process fluid |
TW202316907A (zh) | 2021-09-30 | 2023-04-16 | 美商瓦特洛威電子製造公司 | 用於計算電加熱器之電氣特性之方法及系統 |
US20230130591A1 (en) | 2021-10-27 | 2023-04-27 | Chromalox, Inc. | Heating system and method of heating a process medium |
US20230161935A1 (en) | 2021-11-22 | 2023-05-25 | Watlow Electric Manufacturing Company | Method of generating a digital twin of the environment of industrial processes |
CN114640245B (zh) * | 2022-05-20 | 2022-09-06 | 深圳市微源半导体股份有限公司 | 热功率驱动电路、驱动组件和电子设备 |
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2017
- 2017-06-15 WO PCT/US2017/037703 patent/WO2017218791A1/fr unknown
- 2017-06-15 TW TW106120060A patent/TWI657712B/zh active
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JP2002215246A (ja) * | 2001-01-19 | 2002-07-31 | Auto Network Gijutsu Kenkyusho:Kk | ヒータの温度制御方法及び温度制御装置 |
JP2004303466A (ja) | 2003-03-28 | 2004-10-28 | Canon Inc | ヒータ駆動回路 |
JP2009033905A (ja) | 2007-07-30 | 2009-02-12 | Panasonic Corp | 電力制御装置 |
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US20230021550A1 (en) | 2023-01-26 |
JP2019524047A (ja) | 2019-08-29 |
KR102269440B1 (ko) | 2021-06-25 |
CN109863584B (zh) | 2023-05-26 |
US20200264216A1 (en) | 2020-08-20 |
EP3813099A1 (fr) | 2021-04-28 |
CN109863584A (zh) | 2019-06-07 |
US20200256899A1 (en) | 2020-08-13 |
WO2017218791A1 (fr) | 2017-12-21 |
US20170363663A1 (en) | 2017-12-21 |
EP4099370A1 (fr) | 2022-12-07 |
TW201806440A (zh) | 2018-02-16 |
KR20190019152A (ko) | 2019-02-26 |
KR20220044878A (ko) | 2022-04-11 |
EP3472858B1 (fr) | 2022-01-12 |
EP3813099B1 (fr) | 2022-08-03 |
KR20230107913A (ko) | 2023-07-18 |
TWI657712B (zh) | 2019-04-21 |
US10690705B2 (en) | 2020-06-23 |
KR20210076215A (ko) | 2021-06-23 |
EP3472858A1 (fr) | 2019-04-24 |
JP7143226B2 (ja) | 2022-09-28 |
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