KR102368644B1 - 엔드포인트 검출을 위한 연속적인 피처 트래킹 - Google Patents

엔드포인트 검출을 위한 연속적인 피처 트래킹 Download PDF

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KR102368644B1
KR102368644B1 KR1020167033510A KR20167033510A KR102368644B1 KR 102368644 B1 KR102368644 B1 KR 102368644B1 KR 1020167033510 A KR1020167033510 A KR 1020167033510A KR 20167033510 A KR20167033510 A KR 20167033510A KR 102368644 B1 KR102368644 B1 KR 102368644B1
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South Korea
Prior art keywords
spectral feature
sequence
polishing
spectra
substrate
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Korean (ko)
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KR20160148676A (ko
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제프리 드류 데이비드
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어플라이드 머티어리얼스, 인코포레이티드
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • H01L21/304—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
KR1020167033510A 2014-04-30 2015-04-13 엔드포인트 검출을 위한 연속적인 피처 트래킹 Active KR102368644B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/265,707 2014-04-30
US14/265,707 US9352440B2 (en) 2014-04-30 2014-04-30 Serial feature tracking for endpoint detection
PCT/US2015/025616 WO2015167790A1 (en) 2014-04-30 2015-04-13 Serial feature tracking for endpoint detection

Publications (2)

Publication Number Publication Date
KR20160148676A KR20160148676A (ko) 2016-12-26
KR102368644B1 true KR102368644B1 (ko) 2022-02-25

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Application Number Title Priority Date Filing Date
KR1020167033510A Active KR102368644B1 (ko) 2014-04-30 2015-04-13 엔드포인트 검출을 위한 연속적인 피처 트래킹

Country Status (6)

Country Link
US (1) US9352440B2 (https=)
JP (1) JP6440741B2 (https=)
KR (1) KR102368644B1 (https=)
CN (1) CN106463378B (https=)
TW (1) TWI654678B (https=)
WO (1) WO2015167790A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8747189B2 (en) * 2011-04-26 2014-06-10 Applied Materials, Inc. Method of controlling polishing
WO2015163164A1 (ja) * 2014-04-22 2015-10-29 株式会社 荏原製作所 研磨方法および研磨装置
TWI816620B (zh) 2017-04-21 2023-09-21 美商應用材料股份有限公司 使用神經網路來監測的拋光裝置
US10898986B2 (en) * 2017-09-15 2021-01-26 Applied Materials, Inc. Chattering correction for accurate sensor position determination on wafer
TWI825075B (zh) 2018-04-03 2023-12-11 美商應用材料股份有限公司 針對墊子厚度使用機器學習及補償的拋光裝置、拋光系統、方法及電腦儲存媒體
US20200035495A1 (en) * 2018-07-25 2020-01-30 Globalfoundries Inc. Chemical-mechanical polishing with variable-pressure polishing pads
CN118943037A (zh) 2018-09-26 2024-11-12 应用材料公司 针对原位电磁感应监测的边缘重建中的基板掺杂的补偿
JP2021028099A (ja) * 2019-08-09 2021-02-25 株式会社荏原製作所 終点検知装置、終点検知方法
CN110549240B (zh) * 2019-09-18 2020-12-29 清华大学 一种终点检测方法和化学机械抛光装置
CN112247740B (zh) * 2020-09-25 2025-12-09 富联裕展科技(深圳)有限公司 打磨装置、方法、辅助打磨的装置、系统及方法
CN116141178B (zh) * 2023-04-17 2023-07-18 杭州鄂达精密机电科技有限公司 一种半导体阀门的加工系统及其方法
CN117102973B (zh) * 2023-08-31 2026-01-09 富联裕展科技(深圳)有限公司 打磨控制方法、装置及打磨系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004001227A (ja) 1995-07-20 2004-01-08 Ebara Corp ポリッシング装置および方法
KR100510919B1 (ko) 1997-05-28 2005-11-22 램 리서치 코포레이션 화학적-기계적 폴리싱공정시 다중파장분광계를 사용하여 두께를 모니터하는 장치 및 방법

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5838447A (en) 1995-07-20 1998-11-17 Ebara Corporation Polishing apparatus including thickness or flatness detector
TW398036B (en) 1998-08-18 2000-07-11 Promos Technologies Inc Method of monitoring of chemical mechanical polishing end point and uniformity
WO2000026613A1 (en) 1998-11-02 2000-05-11 Applied Materials, Inc. Optical monitoring of radial ranges in chemical mechanical polishing a metal layer on a substrate
US6399501B2 (en) 1999-12-13 2002-06-04 Applied Materials, Inc. Method and apparatus for detecting polishing endpoint with optical monitoring
JP2001287159A (ja) * 2000-04-05 2001-10-16 Nikon Corp 表面状態測定方法及び測定装置及び研磨装置及び半導体デバイス製造方法
JP2002359217A (ja) * 2001-05-31 2002-12-13 Omron Corp 研磨終点検出方法およびその装置
KR101398570B1 (ko) * 2005-08-22 2014-05-22 어플라이드 머티어리얼스, 인코포레이티드 화학적 기계적 폴리싱의 스펙트럼 기반 모니터링을 위한 장치 및 방법
US7226339B2 (en) * 2005-08-22 2007-06-05 Applied Materials, Inc. Spectrum based endpointing for chemical mechanical polishing
US7998358B2 (en) 2006-10-31 2011-08-16 Applied Materials, Inc. Peak-based endpointing for chemical mechanical polishing
JP5436969B2 (ja) * 2009-05-27 2014-03-05 株式会社荏原製作所 研磨終点検知方法、研磨終点検知装置、研磨方法、および研磨装置
JP2011000647A (ja) * 2009-06-16 2011-01-06 Ebara Corp 研磨監視方法
JP5339859B2 (ja) * 2008-11-07 2013-11-13 株式会社東京精密 研磨終了時点の検出方法及び検出装置
US8352061B2 (en) 2008-11-14 2013-01-08 Applied Materials, Inc. Semi-quantitative thickness determination
US8751033B2 (en) * 2008-11-14 2014-06-10 Applied Materials, Inc. Adaptive tracking spectrum features for endpoint detection
JP5376293B2 (ja) * 2008-11-17 2013-12-25 株式会社ニコン 終点検出装置および研磨装置
WO2011056485A2 (en) * 2009-11-03 2011-05-12 Applied Materials, Inc. Endpoint method using peak location of spectra contour plots versus time
KR101774031B1 (ko) * 2010-05-05 2017-09-01 어플라이드 머티어리얼스, 인코포레이티드 종료점 검출을 위한 스펙트럼 피쳐들의 동적 또는 적응 트랙킹
US8834229B2 (en) 2010-05-05 2014-09-16 Applied Materials, Inc. Dynamically tracking spectrum features for endpoint detection
US8930013B2 (en) 2010-06-28 2015-01-06 Applied Materials, Inc. Adaptively tracking spectrum features for endpoint detection
TWI478259B (zh) * 2010-07-23 2015-03-21 應用材料股份有限公司 用於終點偵測之二維光譜特徵追蹤
JP6030636B2 (ja) * 2011-04-28 2016-11-24 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ モデルに基づく、研磨のためのスペクトルライブラリの生成
WO2013133974A1 (en) * 2012-03-08 2013-09-12 Applied Materials, Inc. Fitting of optical model to measured spectrum

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004001227A (ja) 1995-07-20 2004-01-08 Ebara Corp ポリッシング装置および方法
KR100510919B1 (ko) 1997-05-28 2005-11-22 램 리서치 코포레이션 화학적-기계적 폴리싱공정시 다중파장분광계를 사용하여 두께를 모니터하는 장치 및 방법

Also Published As

Publication number Publication date
WO2015167790A1 (en) 2015-11-05
TWI654678B (zh) 2019-03-21
JP6440741B2 (ja) 2018-12-19
US9352440B2 (en) 2016-05-31
TW201606870A (zh) 2016-02-16
KR20160148676A (ko) 2016-12-26
CN106463378B (zh) 2019-06-11
US20150314415A1 (en) 2015-11-05
JP2017515307A (ja) 2017-06-08
CN106463378A (zh) 2017-02-22

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