KR102254494B1 - 반도체소자 테스트용 핸들러 - Google Patents

반도체소자 테스트용 핸들러 Download PDF

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Publication number
KR102254494B1
KR102254494B1 KR1020150061838A KR20150061838A KR102254494B1 KR 102254494 B1 KR102254494 B1 KR 102254494B1 KR 1020150061838 A KR1020150061838 A KR 1020150061838A KR 20150061838 A KR20150061838 A KR 20150061838A KR 102254494 B1 KR102254494 B1 KR 102254494B1
Authority
KR
South Korea
Prior art keywords
chamber
test
circulation path
test tray
temperature condition
Prior art date
Application number
KR1020150061838A
Other languages
English (en)
Korean (ko)
Other versions
KR20160129540A (ko
Inventor
나윤성
노종기
Original Assignee
(주)테크윙
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)테크윙 filed Critical (주)테크윙
Priority to KR1020150061838A priority Critical patent/KR102254494B1/ko
Priority to JP2016078002A priority patent/JP6126267B2/ja
Priority to CN201610244998.9A priority patent/CN106076876B/zh
Priority to TW105112837A priority patent/TWI596350B/zh
Publication of KR20160129540A publication Critical patent/KR20160129540A/ko
Priority to KR1020210062339A priority patent/KR102407476B1/ko
Application granted granted Critical
Publication of KR102254494B1 publication Critical patent/KR102254494B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34—Sorting according to other particular properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/02—Measures preceding sorting, e.g. arranging articles in a stream orientating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36—Sorting apparatus characterised by the means used for distribution
    • B07C5/361—Processing or control devices therefor, e.g. escort memory
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36—Sorting apparatus characterised by the means used for distribution
    • B07C5/361—Processing or control devices therefor, e.g. escort memory
    • B07C5/362—Separating or distributor mechanisms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2608—Circuits therefor for testing bipolar transistors
    • G01R31/2619—Circuits therefor for testing bipolar transistors for measuring thermal properties thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020150061838A 2015-04-30 2015-04-30 반도체소자 테스트용 핸들러 KR102254494B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020150061838A KR102254494B1 (ko) 2015-04-30 2015-04-30 반도체소자 테스트용 핸들러
JP2016078002A JP6126267B2 (ja) 2015-04-30 2016-04-08 半導体素子テスト用のハンドラ
CN201610244998.9A CN106076876B (zh) 2015-04-30 2016-04-19 半导体元件测试用分选机
TW105112837A TWI596350B (zh) 2015-04-30 2016-04-25 半導體元件測試用分選機
KR1020210062339A KR102407476B1 (ko) 2015-04-30 2021-05-14 반도체소자 테스트용 핸들러

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150061838A KR102254494B1 (ko) 2015-04-30 2015-04-30 반도체소자 테스트용 핸들러

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020210062339A Division KR102407476B1 (ko) 2015-04-30 2021-05-14 반도체소자 테스트용 핸들러

Publications (2)

Publication Number Publication Date
KR20160129540A KR20160129540A (ko) 2016-11-09
KR102254494B1 true KR102254494B1 (ko) 2021-05-24

Family

ID=57529338

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020150061838A KR102254494B1 (ko) 2015-04-30 2015-04-30 반도체소자 테스트용 핸들러
KR1020210062339A KR102407476B1 (ko) 2015-04-30 2021-05-14 반도체소자 테스트용 핸들러

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020210062339A KR102407476B1 (ko) 2015-04-30 2021-05-14 반도체소자 테스트용 핸들러

Country Status (4)

Country Link
JP (1) JP6126267B2 (zh)
KR (2) KR102254494B1 (zh)
CN (1) CN106076876B (zh)
TW (1) TWI596350B (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102461321B1 (ko) * 2017-08-18 2022-11-02 (주)테크윙 전자부품 테스트용 핸들러
KR102422649B1 (ko) * 2017-12-19 2022-07-19 (주)테크윙 전자부품 테스트용 핸들러
KR102469918B1 (ko) * 2018-03-27 2022-11-23 (주)테크윙 처리 챔버 및 이를 포함하는 핸들러
KR20200071357A (ko) * 2018-12-11 2020-06-19 (주)테크윙 전자부품 테스트용 핸들러
CN112114207B (zh) * 2019-06-19 2024-05-10 泰克元有限公司 测试板及测试腔室
KR20210043040A (ko) 2019-10-10 2021-04-21 삼성전자주식회사 반도체 장치의 테스트 장치
KR102638649B1 (ko) * 2020-07-07 2024-02-19 세메스 주식회사 반도체 소자 가압 장치 및 이를 포함하는 테스트 핸들러
KR20220028846A (ko) * 2020-08-31 2022-03-08 세메스 주식회사 챔버 모듈 및 이를 포함하는 테스트 핸들러
CN112325920B (zh) * 2020-11-06 2021-11-23 北京清大天达光电科技股份有限公司 一种传感器芯片标定测试调度方法及系统
CN113305045B (zh) * 2021-05-29 2022-09-06 王利杰 一种智能化电气设备检测装置及其使用方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100765462B1 (ko) 2006-11-22 2007-10-09 미래산업 주식회사 핸들러의 테스트 트레이 이송방법
KR100792725B1 (ko) 2006-01-09 2008-01-11 미래산업 주식회사 반도체 소자 테스트 핸들러 및 그의 제어방법

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JP5022381B2 (ja) * 2006-12-21 2012-09-12 株式会社アドバンテスト 電子部品試験装置及び電子部品の試験方法
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KR100938172B1 (ko) * 2007-12-28 2010-01-21 미래산업 주식회사 핸들러, 반도체 소자 로딩방법, 테스트트레이 이송방법, 및반도체 소자 제조방법
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KR102072390B1 (ko) * 2013-06-18 2020-02-04 (주)테크윙 테스트핸들러
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KR100765462B1 (ko) 2006-11-22 2007-10-09 미래산업 주식회사 핸들러의 테스트 트레이 이송방법

Also Published As

Publication number Publication date
KR102407476B1 (ko) 2022-06-14
TWI596350B (zh) 2017-08-21
JP6126267B2 (ja) 2017-05-10
CN106076876B (zh) 2018-09-25
CN106076876A (zh) 2016-11-09
TW201708831A (zh) 2017-03-01
KR20160129540A (ko) 2016-11-09
JP2016212089A (ja) 2016-12-15
KR20210061316A (ko) 2021-05-27

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