KR102245789B1 - Rotating zig for Wet etching device with Vertical loading type withdrawal structure - Google Patents

Abstract

The present invention relates to a rotary jig for a wet etching device having a vertical loading type withdrawal structure and, more specifically, to a rotary jig capable of enabling vertical loading and rotation on its axis with respect to a mask sheet during a wet etching process. The mask sheet enables a working jig part to facilitate coupling and assembly during placement (or suspension assembly and tensioning), while enables a rotating jig part to perform precise and stable rotation and staged moving loading during rotation on its axis and vertical transfer. Thus, the present invention can minimize defects (fundamentally preventing a wave, delamination, a spec change, torsion, a shadow, a stain and the like of a thin large-area sheet) in contrast to an existing horizontal etching method for a mask sheet as well as can guarantee high productivity, improved workability and excellent equality.

Description

Rotating zig for Wet etching device with Vertical loading type with drawal structure}

The present invention relates to a rotating jig that allows vertical loading and rotational rotation with respect to a mask sheet during a web (wet) etching process, wherein the mask sheet allows a working jig part to be mounted (or suspended or assembled and individually). It facilitates fastening assembly and surface flattening setting (tensioning operation) during tensioning), but allows the rotating jig part to perform precise and stable rotational rotation and step-by-step moving loading during rotational rotation and vertical transfer.This is a mask It minimizes defects compared to the previous horizontal etching method for the sheet (prevents the occurrence of waves, lifts, spec changes, distortions, shadows, spots, etc. of thin-plate large-area sheets), as well as high productivity and improved workability. And it relates to a rotary jig for a web (wet) etching apparatus having a vertical loading type withdrawal structure, characterized in that the excellent quality can be ensured.

In general, a mask sheet (metal mask: metal sheet) is mainly manufactured through a rolling method, and a mask sheet manufactured by such a rolling method has a problem that the surface is uneven (see FIGS. 11 to 13).

In other words, the mask sheet, which is made thin in the form of a thin film through multiple rolling rollers of a multi-stage or step-by-step diameter difference structure, has a limitation in miniaturization of the pitch interval between each rolling roller, and to improve the rollability of the sheet and to match the exact thickness. The rolling process is performed using rollers of various sizes. At this time, when the deformation of the sheet occurs due to the pressing force, this deformation appears as a wave phenomenon of the sheet.

In addition, since a large-area mask sheet has a wide sheet width during rolling, a difference between the pressure of the left and right portions relative to the center and the degree of pressing occurs inevitably causes a wave phenomenon (this phenomenon occurs as the size of the mask sheet increases). Gets worse.)

In other words, a mask sheet manufactured through a conventional rolling process has an inherently uneven surface area due to a wave (non-uniform height deviation) phenomenon generated on the surface.

That is, the unbalanced surface problem of the mask sheet becomes a factor that makes it difficult to implement (process) precision specifications for the pattern cell during the web (wet) etching process in a horizontal chamber structure.

In detail, in the usual horizontal web (wet) etching process (pattern cell forming), a mask sheet (a sheet with an uneven surface already) manufactured by the above-described rolling process is loaded/unloaded through a transfer roller in the chamber. As it is loaded, the spraying of the etchant causes the pattern cell to be processed (molded).

That is, the conventional web (wet) etching process is a method of processing a pattern cell by spraying an etching solution on the surface of a mask sheet in a horizontal chamber at the same time in both up and down directions or selectively spraying only one of the top and bottom directions.

The mask manufacturing technology for such a web (wet) etching process has problems with waves peculiar to raw materials, the process of working them horizontally, and the specification of the wave shape depending on the nozzle pressure.Therefore, the metal mask and glass substrate required in the OLED deposition process It can be seen as a limited technique to improve the adhesion of the product.

In general, in the deposition process, a glass substrate is mounted on the top surface of a mask sheet, and a cool pad and an electromagnet (magnetic) are sequentially mounted on the top surface, and when a magnetic force is applied by an electromagnet (magnetic), the surface of the mask sheet adheres to the glass substrate. After induction to be uniformly spread, the organic material is deposited on the surface of the glass substrate through the pattern cell (see FIG. 14).

Here, one thing to be aware of between the glass substrate and the mask sheet is that the mask sheet (metal mask) and the glass substrate must be completely adhered to each other during the organic material deposition process.

In other words, it is a form in which 90 to 100 pattern cells are arranged based on a 6-inch mobile product, and defects can be minimized only when the entire area of the mask sheet is evenly adhered. There is a gap between them and organic matter penetrates, which causes a shadow phenomenon.

In summary, the web (wet) etching process for processing (molding) the pattern cell for the metal sheet of the rolling processing method (a mask sheet that has already generated waves through the rolling process) is carried out in a horizontal chamber. The loading/unloading of the mask sheet by the transfer rollers continuously causes a surface irregularity environment during transfer, which causes inaccurate low-spec processing when the pattern cell is processed through the etching solution.

In addition, the above-described wave phenomenon may also cause concave or dents on the surface of the mask sheet (half surface, etc.), which causes a stain phenomenon due to poor drying after the etching solution is formed (see FIG. 15). )

In the case of products with severe deformation of the processed mask sheet, the metal mask wave becomes more severe due to mechanical loading in the chamber during organic material deposition and radiant heat generated by the continuous process, which is a non-uniform phenomenon in the process of contacting the organic substrate and the metal mask. Is generated, and the phenomenon that it is not properly bonded appears.

These phenomena cause burning around the pattern cell (edges) or promote the formation of organic matter (the organic matter turns into a foreign matter due to melting or end of life) and a shadow phenomenon.

In other words, the wave defect phenomenon of the mask sheet also affects the glass substrate, resulting in a problem of deteriorating the quality of the final display product due to the decrease in organic material deposition properties.

1. Republic of Korea Patent Publication No. 10-2014-093618 (published on 28 July 2014)

An object of the present invention is to solve the above-described problem, and the technical gist of the present invention is to provide a rotating jig that allows vertical loading and rotational rotation of a mask sheet during a web (wet) etching process.

Accordingly, the present invention makes it easy to fasten and assemble the mask sheet when the working jig part is mounted (or suspended assembling and tensioning), but in the case of rotating rotation and vertical transfer, the rotating jig part allows precise and stable rotation and step-by-step rotation. Moving loading can be performed, which minimizes defects compared to the conventional horizontal etching method for the mask sheet (prevents the occurrence of waves, lifts, spec changes, distortions, shadows, spots, etc. of thin-plate large-area sheets). ), as well as to ensure high productivity, improved workability, and excellent quality.

In addition, the present invention allows a plurality of clamps in the working jig part to be provided in a pickup case having a rectangular frame structure, which is formed to enable the addition and adjustment of individual tensile force for each position (partial) with respect to the four-sided tip of the mask sheet. It is an object of the present invention to provide an advantage in flattening and leveling the mask sheet.

In order to achieve this purpose, the rotation jig 100 of the present invention has a gear tooth difference 112 formed on the outer circumferential surface of the circular jig ring 111, and a driving sprocket 114 coupled with one submotor 113 ) During rotation, the guide roller 116-1 of the drive set 116 is provided with a sliding groove 115 formed on the side edge of the jig ring 111 and transferred by a transfer conveyor. ) And a rotating jig part 110 to promote rotation of the jig ring 111 in the circumferential direction; The pick-up case 121 having a rectangular frame structure is provided in the inner diameter side of the jig ring 111, and the pick-up case 121 is provided with grippers 122 for fixing on both sides of the side end thereof, respectively, so that the jig ring 111 ) Is formed to be fastened with the fixing bracket 117 of, and the pickup case 121 has a plurality of clamps 123 formed on each line on the four sides of the square frame, and a working jig part 120 to fix the mask sheet 10 end; It is composed and made.

Accordingly, the guide roller 116-1 of the drive set 116 is mounted in the assembly hole 116-3 of the arc-shaped panel 116-2 corresponding to the sliding groove 115 to rotate, but the arc-shaped panel ( 116-2) is formed to be fastened and assembled to the support arm 116-5 formed on the upper surface of the transport cart frame 116-4.

At this time, the support arm 116-5 has a slit 116-6 formed in the longitudinal direction so that the height can be adjusted on the arc-shaped panel.

In addition, the fixing gripper 122 is such that one side of the plate-shaped fixing end 122-1 is joined on the line of the pickup case 121, but an opening groove 122-2 is formed in the center of the surface, so that the hook pin 122- 3) is formed to be inserted and mounted, and a pin head 122-5 is formed at the rear end of the hook pin 122-3, and a mounting hole 117- connected to the fixing bracket 117 is formed. 1) is formed to generate tension in the side direction of the pin head 122-5 by the internally inserted spring 117-2.

Accordingly, the fixing bracket is formed such that a plurality of even numbers with respect to the inner diameter of the jig ring are arranged at equal intervals, so that when the working jig part is installed, it is formed to facilitate assembly at a position where rotation is stopped.

On the other hand, the clamp 123 has a fixing pin 123-2 formed on one side of the finger rod 123-1 and inserted into the preformed mounting hole 11 in the mask sheet 10, and then mounted and tensioned. And a push button 123-4 having a locking protrusion 123-3 is formed on the other side of the finger rod 123-1 facing the fixing pin 123-2, It is formed such that tension is generated in the outward direction toward the push button 123-4 based on the elastic spring 121-2 inserted into the mounting groove 121-1.

Accordingly, the fixing pin is formed such that a screw thread is formed and fastened by a fixing nut.

In addition, it is preferable that the push button adjusts the tension when the elastic spring is pressed (interval adjustment) while the male and female are fastened and assembled with respect to the finger rod.

As described above, the present invention relates to a rotating jig for performing vertical loading and rotational rotation on a mask sheet during a web (wet) etching process, and when the mask sheet is mounted (or suspended assembling and tensioning) the working jig part The fastening assembly is easy, but during rotation and vertical transfer, the rotating jig part allows precise and stable rotational rotation and step-by-step moving loading, which prevents defects compared to the conventional horizontal etching method for the mask sheet. Minimization (prevention of wave generation, lifting phenomenon, specification change, warping, shadow phenomenon, staining, etc. of thin plate type large-area sheet), as well as high productivity, improved workability, and excellent quality are guaranteed. have.

In addition, the present invention allows a plurality of clamps in the working jig part to be provided in a pickup case having a rectangular frame structure, which is formed to enable the addition and adjustment of individual tensile force for each position (partial) with respect to the four-sided tip of the mask sheet. Flattening and leveling of the mask sheet has an advantageous effect.

1 is an exemplary view of a rotating jig according to the present invention,
Figure 2 is an exemplary side view of Figure 1,
3 to 5 are exemplary views of a rotating jig part according to the present invention,
6 to 8 are exemplary views of a working jig part according to the present invention,
9 to 10 is a state diagram of use of the rotating jig according to the present invention,
11 to 13 are exemplary views of a mask sheet that is manufactured through a rolling process and has a wave formed on its surface,
14 is an exemplary view showing a general organic material deposition chamber,
15 is an exemplary view showing a half-surface uneven phenomenon occurring during a conventional horizontal web (wet) etching process.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

First, as shown in FIGS. 1 to 10, the rotating jig 100 of the present invention is largely composed of a rotating jig part 110 and a working jig part 120.

The rotating jig 100 passes through a separate vertical loading type web etching device, while the mask sheet 10 fixed to the working jig part 120 causes the rotating jig part 110 to rotate while simultaneously advancing during the etching process. It serves as a conveying means for loading.

At this time, the vertical loading type web etching apparatus is a step-type work zone frame in a chamber or enclosure type in which a step-by-step etching section is set, and a transfer roller or a transfer conveyor is provided at the lower end of the longitudinal forward section, and a rotating jig part 110 to be described later. ) Of the transport cart frame 116-4 is formed to be transported forward in one direction while corresponding.

In other words, the rotating jig corresponds to a carrier that is input to a separate etching device and passes through a step-by-step etching course, and a rotating jig part that promotes rotation (cylindrical rotation) while proceeding in one direction and a mask provided therein It is largely divided into a working jig part that fixes the seat.

Accordingly, the rotating jig part 110 has a gear tooth difference 112 formed on the outer circumferential surface of the circular jig ring 111 and is set when the driving sprocket 114 coupled with the one side submotor 113 rotates. It is formed to rotate interlocking for a period or a set time.

That is, the rotation speed of the sub-motor is determined by the control unit per minute, and the rotation may be changed or changed according to the etching part of the etching apparatus.

In addition, a drive sprocket is provided on the drive shaft of the sub-motor and is formed to rotate (rotate) the jig ring in the circumferential direction while corresponding to a gear tooth difference of the jig ring.

At this time, a sliding groove 115 is formed on the side edge of the jig ring 111, and the jig ring 111 rotates in the circumferential direction together with the guide roller 116-1 of the drive set 116 transferred by the transfer conveyor. It is formed to promote.

That is, in the front or rear surface of the jig ring, a sliding groove is formed inward along the circumferential direction, and a guide roller (a kind of bearing) is inserted therein to facilitate smooth rotation of the jig ring.

Accordingly, the guide roller 116-1 of the drive set 116 is mounted in the assembly hole 116-3 of the arc-shaped panel 116-2 corresponding to the sliding groove 115 to rotate, but the arc-shaped panel ( 116-2) is formed to be fastened and assembled to the support arm 116-5 formed on the upper surface of the transport cart frame 116-4.

That is, the guide roller is fitted and fixed in the assembly hole by a separate hinge shaft.In particular, the arc-shaped panel has a sliding groove and a diameter or radius corresponding to the sliding groove, and the outer shape of the arc-shaped panel is partially accommodated in the sliding groove to provide stable support of the jig ring. Together with the guide roller, when rotating in the circumferential direction, a guide role (to prevent separation) is promoted.

At this time, the support arm 116-5 has a slit 116-6 formed in the longitudinal direction so that the height gap on the arc-shaped panel can be adjusted.

On the other hand, the working jig part 120 is such that the pickup case 121 having a rectangular frame structure is provided in the inner diameter side space of the jig ring 111, and the pickup case 121 is fixed to both sides of the side end portion, respectively. (122) is formed to be fastened to the fixing bracket 117 of the jig ring 111.

At this time, the pickup case 121 is formed to fix the mask sheet 10 by forming a plurality of clamps 123 for each line on the four sides of the square frame.

In addition, the fixing gripper 122 is such that one side of the plate-shaped fixing end 122-1 is joined on the line of the pickup case 121, but an opening groove 122-2 is formed in the center of the surface, so that the hook pin 122- 3) of the bracket (122-4) is formed to be inserted and mounted.

At this time, a pin head (122-5) is formed at the rear end of the hook pin (122-3), and is inserted into the spring (117-2) based on the mounting hole (117-1) connected to the fixing bracket (117). As a result, it is formed so that tension in the direction toward the pin head 122-5 is generated.

Thus, the pin head is a kind of nut, and a through screw is formed on the body, and the hook pin is formed with a male thread on the side of the pin head to increase or loosen the tension of the spring based on the inner surface of the mounting hole when mutually tightening. do.

That is, such a gripper for fixing 122 has one end (opposite side of the opening groove) integrally coupled to the pickup case, and is mounted only by hanging it on the latch 122-4 using the opening groove 122-2. This is done.

In addition, the exact position setting or alignment of the pickup case (where the square frame is located at the center point based on the jig ring) can be adjusted with the hook pin 122-3 by tightening the screw of the pin head 122-5. This variable is formed to enable tension adjustment of the spring 117-2 formed therebetween.

Accordingly, the fixing bracket is formed such that a plurality of even numbers with respect to the inner diameter of the jig ring are arranged at equal intervals, so that when the working jig part is installed, it is formed to facilitate assembly at a position where rotation is stopped.

On the other hand, the clamp 123 has a fixing pin 123-2 formed on one side of the finger rod 123-1 and inserted into the preformed mounting hole 11 in the mask sheet 10, and then mounted and tensioned. It is formed to be.

At this time, a push button 123-4 having a locking protrusion 123-3 is formed on the other side of the finger rod 123-1 facing the fixing pin 123-2, and the mounting groove of the pickup case 121 It is formed such that tension is generated in the outward direction toward the push button 123-4 based on the elastic spring 121-2 inserted into the (121-1).

Accordingly, the fixing pin is formed such that a screw thread is formed and fastened by a fixing nut.

In addition, it is preferable that the push button 123-4 is capable of adjusting the tension when the elastic spring is pressed (interval adjustment) while being assembling male and female with respect to the finger rod.

The present invention is not limited to the specific preferred embodiments described above, and any person having ordinary knowledge in the technical field to which the design belongs without departing from the gist of the present invention claimed in the claims can implement various modifications. Of course, such changes are intended to be within the scope of the description of the claims.

10 ... Mask sheet 11 ... Mounting hole
100 ... rotary jig
110 ... rotating jig part 111 ... jig ring
112 ... gear difference 113 ... sub motor
114 ... Drive sprocket 115 ... Sliding groove
116 ... Drive set 116-1 ... Guide roller
116-2 ... Arc panel 116-3 ... Assembly work
116-4 ... Transport cart frame 116-5 ... Support arm
116-6 ...Slit 117 ...Fixing bracket
117-1 ... Mounting hole 117-2 ... Spring
120 ... working jig part 121 ... pickup case
121-1 ... Mounting groove 121-2 ... Elastic spring
122 ... Fixed gripper 122-1 ... Fixed end
122-2 ... Opening groove 122-3 ... Hook pin
122-4 ... brace 122-5 ... pinhead
123 ... clamp 123-1 ... finger rod
123-2 ... fixing pin 123-3 ... locking jaw
123-4 ... push button

Claims (3)

A gear tooth difference 112 is formed on the outer circumferential surface of the circular jig ring 111 to rotate interlockingly for a set period or for a set time when the drive sprocket 114 coupled with one sub-motor 113 rotates, A sliding groove 115 is formed on the side edge of the jig ring 111 so that the jig ring 111 rotates in the circumferential direction together with the guide roller 116-1 of the drive set 116 transferred by the transfer conveyor. A rotating jig part 110 and; The pick-up case 121 having a rectangular frame structure is provided in the inner diameter side of the jig ring 111, and the pick-up case 121 is provided with grippers 122 for fixing on both sides of the side end portion, respectively, so that the jig ring 111 ) Is formed to be fastened with the fixing bracket 117 of, and the pickup case 121 has a working jig part 120 that fixes the mask sheet 10 by forming a plurality of clamps 123 on each line on the four sides of the square frame end; In the rotary jig for a wet etching apparatus having a vertical loading type withdrawal structure consisting of,
The guide roller 116-1 of the drive set 116 is mounted in the assembly hole 116-3 of the arc-shaped panel 116-2 corresponding to the sliding groove 115 to rotate, but the arc-shaped panel 116- 2) is formed to be fastened and assembled to the support arm 116-5 formed on the upper surface of the transfer cart frame 116-4, and the clamp 123 is a fixing pin 123-2 on one side of the finger rod 123-1. ) Is formed and inserted into the preformed mounting hole 11 in the mask sheet 10, and is formed to facilitate mounting and tensioning, and the finger rod 123-1 facing the fixing pin 123-2 On the other side, a push button (123-4) having a locking projection (123-3) is formed, based on the elastic spring (121-2) inserted into the mounting groove (121-1) of the pickup case (121). 123-4) is formed to generate tension in the outward direction, and the fixing gripper 122 is such that the plate-shaped fixing end 122-1 is joined on the line of the pickup case 121, and the fixing end 122 An opening groove (122-2) is formed in the center of the surface of -1) so that the hook (122-4) of the hook pin (122-3) is inserted and mounted, and the rear end of the hook pin (122-3) is The pinhead 122-5 is formed and the tension in the direction toward the pinhead 122-5 is reduced by the spring 117-2 inserted based on the mounting hole 117-1 connected to the fixing bracket 117. Rotating jig for Ÿ‡ (wet) etching apparatus having a vertical loading type withdrawal structure, characterized in that to generate.
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