KR102284937B1 - Wet etching system for metal mask using rotating jig and vertical loading type web etching device - Google Patents

Abstract

The present invention relates to a stepwise wet etching method for a metal mask, using a pressure-adjustable nozzle and vertical loading. The technical gist of the present invention is to: sequentially machining the half surface of the pattern cells of and the openings of a mask sheet by stepwise etching including a plurality of steps; and allowing an angle-adjustable spray nozzle to control the pressure of chemical solutions while freely adjusting the range of an etching area when an etching solution is sprayed. An etchant is sprayed in a side (both sides) spraying manner capable of selectively controlling the intensity on a vertically loaded mask sheet, so that the precision of etching of the pattern cells is increased compared to conventional horizontal etching (the occurrence of a sheet wave phenomenon). In particular, the spray angle and pressure control of the chemical solutions (the etchant) is precisely and actively controlled, so that the quality of the mask product is increased together with the etching performance and processability and productivity is greatly improved. The stepwise wet etching method comprises: a first pre-etching step (S100) of pre-etching a half surface; a second pre-etching step (S200) of pre-etching openings; and a third post-etching step (S30) of etching the half surface and the openings.

Description

Step-by-step Ÿ‡ etching method for metal mask using pressure control nozzle and vertical loading method {Wet etching system for metal mask using rotating jig and vertical loading type web etching device}

According to the present invention, the pattern cell half surface and the opening of the mask sheet are sequentially processed by a step-type etching part composed of a plurality of steps, but when the etching solution is sprayed, the angle variable spray nozzle can freely adjust the range of the etching area. At the same time, it is possible to control the pressure of the chemical solution, which is a horizontal etching process (sheet wave phenomenon) by allowing the etchant to be sprayed with a side (both sides) injection structure that can selectively control the intensity of the mask sheet loaded vertically. It is formed to improve the etching processing precision of the pattern cell compared to the generation), and in particular, the injection angle and pressure control of the chemical liquid (etching liquid) are precisely and actively controlled to improve the etching performance and the quality of the mask product as well as the process workability It relates to a step-by-step web etching method for a metal mask using a pressure control nozzle and a vertical loading method, characterized in that productivity is greatly improved.

In general, a pattern cell for a metal mask (OLED mask sheet) is manufactured through various processing methods. Among them, the processing method using an etching process is performed by spraying an etchant up and down on the mask sheet surface in a chamber with a horizontal loading structure. The pattern cell hole is machined at one time.

The pattern cells processed through this etching process have a designed shape and specifications while being processed into different types and shapes depending on the photomask (attached film forming the pattern cell) attached to the mask sheet.

On the other hand, a normal mask sheet is basically manufactured through rolling processing to manufacture the sheet itself. have an inconsistent shape.

As the width of the sheet increases, the difference between the pressure and the degree of pressing of the left and right parts is generated, which causes more severe wave phenomenon.

And, the problem of surface imbalance of the mask sheet becomes more severe in the horizontal etching process in which the upper and lower etchants are sprayed by the pressure nozzles along with the sagging in the case of medium and large ledgers.

That is, in the horizontal web (wet) etching process, the fixed mask sheet has irregular heights due to waves generated on the surface, or sagging occurs in the case of a medium or large sheet area, so that the arrival deviation of the etchant sprayed when the etchant is sprayed ( Depending on the wave or deflection of the sheet surface, there is a problem in that precise specification processing is difficult due to the occurrence of etching deviations in the part that the chemical first or later touches).

In addition, in the horizontal web (wet) etching process, as the mask sheet, which is transferred forward in one direction, is horizontally transferred, it is difficult to adjust (tension) the tension on the mask sheet, so that a wave remains.

In other words, in the conventional horizontal web (wet) etching process, it is difficult to implement (process) a precise specification for a pattern cell (especially a medium or large ledger).

1. Republic of Korea Patent Publication No. 10-2014-0093618 (published on July 28, 2014)

The present invention is to solve the above problems, and its technical gist is that the pattern cell half surface and the opening of the mask sheet are sequentially processed by a step-type etching part composed of a plurality of steps, but when the etching solution is sprayed, an angle variable type It allows the spray nozzle to freely adjust the range of the etching area and at the same time to control the pressure of the chemical solution, which is a side (both sides) injection structure that allows selective control of the strength and weakness of the vertically loaded mask sheet. It is formed so that the etching processing precision of the pattern cell is improved compared to the previous horizontal etching process (the occurrence of sheet wave phenomenon). The purpose is to provide not only improved quality of mask products, but also greatly improved process workability and productivity.

In order to achieve this object, the present invention is such that a standing rotating jig module 100 is provided so that the mask sheet 10 can be mounted vertically, but the standing rotating jig module 100 is a rotating jig part 110 and a working jig part 120, respectively, after tensioning and fixing (clamping) the outer edge of the mask sheet 10, it is formed so as to be able to perform unidirectional loading and rotation (rotation) in a vertically standing state, The first and second etching chambers 210 - 1 of the vertical loading type web (wet) etching apparatus 200 are the mask sheets 10 that are vertically erected and loaded through the standing rotating jig module 100 . -2), a bundle having a variable angle injection nozzle 221 in the first etching chamber 210-1, so as to be etched in each step while sequentially passing through the third etching chamber 210-3 On the basis of a mask sheet (10: photomask on which a resist film is formed) that is formed at one end and is vertically loaded with a chemical liquid injection tube 222, the half surface is sprayed while spraying the etching solution at a pressure set for the entire surface of either side. a primary pre-etching step (S100) to perform temporary etching; In the secondary etching chamber 210-2, a bundle-type chemical liquid injection tube 222 having an angle-variable injection nozzle 221 is formed at the other end of one of both sides based on the mask sheet 10 loaded vertically. a secondary pre-etching step (S200) of temporarily etching the opening while spraying an etching solution at a pressure set on the entire other side opposite to that in the primary pre-etching step (S200); In the tertiary etching chamber 210-3, bundle-type chemical liquid injection tubes 222 having an angle variable injection nozzle 221 are formed at both ends, and based on the mask sheet 10 loaded vertically, A third post-etching step (S300) of simultaneously performing main etching of the half surface and the opening while spraying the etching solution at a set pressure; made up of

Accordingly, in the third post-etching step ( S300 ), the angle-variable spray nozzles 221 facing both ends with respect to the mask sheet 10 are formed so that the etching solution is sprayed at different pressures, respectively.

In addition, when the etchant is sprayed in the third post-etching step ( S300 ), the injection angles between the opposing angle variable injection nozzles 221 facing each other are formed to avoid each other, respectively.

As described above, in the present invention, the pattern cell half surface and the opening of the mask sheet are sequentially processed by a step-type etching part composed of a plurality of steps, but when the etching solution is sprayed, the range of the etching area can be freely changed by the angle-variable spray nozzle. It is possible to adjust the pressure of the chemical while simultaneously allowing the adjustment of the chemical pressure, which is a horizontal etching process ( It is formed to improve the etching processing precision of the pattern cell compared to the sheet wave phenomenon), and in particular, the injection angle and pressure control of the chemical (etching liquid) are precisely and actively controlled to improve the quality of the mask product as well as the etching performance. It has the effect of greatly improving process workability and productivity.

1 to 3 are an exemplary view showing the entire equipment of the vertical loading type web (wet) etching apparatus according to the present invention,
Figure 4 is an exemplary view showing the first etching chamber of the vertical loading type web (wet) etching apparatus according to the present invention;
5 is an exemplary view showing the second and third etching chambers of the vertical loading type web (wet) etching apparatus according to the present invention;
6 is an exemplary view showing a chemical spraying device in the first to third etching chambers according to the present invention;
11 to 18 are one side view showing the standing rotating jig module according to the present invention, the other side view and main part detailed views.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

First, as shown in Figures 1 to 10, the present invention is largely divided into a first pre-etching step (S100), a second pre-etching step (S200), and a third post-etching step (S300). is done

Accordingly, first, the standing rotating jig module 100 is formed so that the mask sheet 10 can be mounted vertically.

At this time, the standing rotating jig module 100 is composed of a rotating jig part 110 and a working jig part 120 , respectively, after tensioning and fixing (clamping) the outer edge of the mask sheet 10, vertically It is formed to be able to perform one-way loading and rotation (rotation) in a standing state.

In addition, the mask sheet 10 that is vertically erected and loaded through the standing rotating jig module 100 is the first etching chamber 210-1 and the second etching chamber of the vertical loading type wet etching apparatus 200 . (210-2) and the third etching chamber 210-3 are sequentially formed to be etched in each step.

For reference, the above-mentioned standing rotation jig module 100 and the vertical loading type web (wet) etching apparatus 200 will be described later in the equipment description below.

On the other hand, in the first pre-etching step (S100), a bundle-type chemical liquid injection tube 222 having an angle variable injection nozzle 221 is formed at one end in the primary etching chamber 210-1, Based on the vertically loaded mask sheet 10 (photomask on which the resist film is formed), the half surface is temporarily etched while spraying the etchant at a pressure set to the entire one of both surfaces.

Accordingly, in the secondary pre-etching step (S200), a bundle-type chemical liquid injection pipe 222 having an angle variable injection nozzle 221 is formed at the other end in the secondary etching chamber 210-2. Based on the vertically loaded mask sheet 10, the opening is temporarily etched while spraying the etching solution at a pressure set on the entire other side opposite to that in the first pre-etching step among both sides.

In addition, in the third post-etching step (S300), in the third etching chamber 210-3, bundle-type chemical liquid injection tubes 222 having variable angle injection nozzles 221 are formed at both ends and loaded vertically. The mask sheet 10 is formed to etch the half surface and the opening at the same time while spraying the etching solution at a pressure set on the entire both sides of the mask sheet 10 .

Accordingly, in the third post-etching step ( S300 ), the angle-variable spray nozzles 221 facing both ends with respect to the mask sheet 10 are formed so that the etching solution is sprayed at different pressures, respectively.

At this time, when the etchant is sprayed in the third post-etching step ( S300 ), the injection angles between the opposing angle variable injection nozzles 221 facing each other are formed to avoid each other, respectively.

In the present invention, the rolling-type rotation (forward) transfer process of the mask sheet by the transfer roller during the conventional horizontal etching process is omitted, and a wave phenomenon on the surface of the mask sheet (in the rolling process of the mask sheet material itself) generated in the process is omitted. It is possible to fundamentally solve ancillary problems such as deterioration of specification machinability due to a problem that is separate from the one that occurred at birth).

Accordingly, the injection nozzle 221 of the present invention allows the injection pressures of the injection nozzles facing each other to be adjusted to be different from each other. formed to secure.

In other words, when adjusting the injection pressure according to the present invention, one side injection nozzle is set to be stronger and the other side injection nozzle is set to be weak, so that processing into various patterns and concavo-convex shapes (half processing _ step molding) is smoothly performed. formed to be able to

In addition, the present invention makes it possible to easily change the injection angle and the injection distribution or the injection area of the etching solution by a plurality of injection nozzles whose injection pressure is respectively controlled in the chemical processing apparatus, while at the same time enabling precise control, which is a pattern It is formed to remarkably guarantee high-spec and high-quality specifications by enabling fluid control of the etching solution and particularly precise adjustment during etching processing for cells.

For example, the injection nozzle is in the form of a slit long cut in the longitudinal direction so that the chemical is sprayed at an angle of at least 30° to a maximum of 120°. It is formed so that the spray distribution is uniformly and widely expanded.

Next, the above-described standing rotation jig module 100 and the vertical loading type web (wet) etching apparatus 200 will be described in more detail.

First, the standing rotating jig module 100 corresponds to a carrier that is put into a vertical loading type web etching apparatus and moves while passing through a step-by-step etching course, and is composed of a rotating jig part 110 and a working jig part 120 . It is formed so as to perform unidirectional loading and rotation after tensioning and fixing (clamping) the four-sided edge of the mask sheet 10, respectively.

That is, the standing rotating jig module 100 serves as a transport means so that the mask sheet 10 fixed to the working jig part 120 rotates the rotating jig part 110 and at the same time is loaded forward during the etching process. will do

Accordingly, the rotating jig part 110 has a gear tooth 112 formed on the outer circumferential surface of the circular jig ring 111, and is set when the driving sprocket 114 coupled with the sub-motor 113 on one side rotates. It is formed to rotate interlockingly for a period or a set time.

That is, the sub-motor is configured such that the rotation speed per minute is determined by the control unit, and the rotation can be changed or changed according to the etching part of the etching apparatus.

In addition, a drive sprocket is provided on the sub-motor drive shaft to rotate (rotate) the jig ring in the circumferential direction while corresponding to the gear tooth of the jig ring.

At this time, a sliding groove 115 is formed on the side edge of the jig ring 111 to rotate the jig ring 111 in the circumferential direction together with the guide roller 116-1 of the drive set 116 transferred by the transfer conveyor. is formed to promote

That is, a sliding groove recessed inward along the circumferential direction is formed on the front or rear surface of the jig ring, and a guide roller (a kind of bearing) is inserted therein to promote smooth rotation of the jig ring.

Accordingly, the guide roller 116-1 of the drive set 116 is mounted in the assembly hole 116-3 of the arc-shaped panel 116-2 corresponding to the sliding groove 115 to rotate, but the arc-shaped panel ( 116-2) is formed to be fastened and assembled to the support arm 116-5 formed on the upper surface of the transport bogie frame 116-4.

That is, the guide roller is fitted and fixed in the assembly hole by a separate hinge shaft. In particular, the arc-shaped panel has a diameter or radius corresponding to the sliding groove, and the outer shape of the arc-shaped panel is partially accommodated in the sliding groove, thereby stably supporting the jig ring. Together with the guide roller, it serves as a guide (prevention of separation) when rotating in the circumferential direction.

At this time, the support arm 116-5 has a slit 116-6 formed in the longitudinal direction so that the height can be adjusted on the arc-shaped panel.

On the other hand, the working jig part 120 has a pickup case 121 having a rectangular frame structure in the inner diameter side space of the jig ring 111 , and the pickup case 121 is a gripper for fixing on both sides of the side end, respectively. 122 is formed so as to be fastened with the fixing bracket 117 of the jig ring 111 .

At this time, the pickup case 121 is formed so as to fix the mask sheet 10 by forming a plurality of clamps 123 on each line of the four sides of the rectangular frame.

In addition, the fixing gripper 122 has one fixed end 122-1 of a plate shape joined to the pickup case 121 line, and an opening groove 122-2 is formed in the center of the surface to form a hook pin 122- 3) is formed so that the latch (122-4) is inserted and mounted.

At this time, a pin head 122-5 is formed at the rear end of the hook pin 122-3, and is attached to the spring 117-2 inserted based on the mounting hole 117-1 connected to the fixing bracket 117. The pinhead 122-5 is formed to generate tension in the side direction.

Accordingly, the pinhead is a kind of nut, and a through screw is formed in the body, and the hook pin has a male thread formed on the pinhead side line. do.

That is, the fixing gripper 122 has one end (opposite of the opening groove) integrally coupled to the pickup case, and is mounted by simply hanging it on the latch 122-4 using the opening groove 122-2. This is done.

And, the exact position setting or alignment of the pickup case (the square frame is located at the central point with respect to the jig ring) is adjusted by tightening the screw of the pin head 122-5 to adjust the gap with the hook pin 122-3. This variable is formed so that the tension of the spring 117-2 formed therebetween can be adjusted.

Accordingly, the fixing bracket is formed so that a plurality of even numbers are arranged at equal intervals with respect to the inner diameter of the jig ring to facilitate assembly at a position where the rotation stops when the working jig part is installed.

On the other hand, the clamp 123 has a fixing pin 123-2 formed on one side of the finger rod 123-1 and is inserted into the mounting hole 11 pre-formed in the mask sheet 10 to achieve mounting and tension. formed to do

At this time, a push button 123-4 having a locking jaw 123-3 is formed on the other side of the finger rod 123-1 opposite to the fixing pin 123-2, so that the mounting groove of the pickup case 121 is formed. Based on the elastic spring 121-2 inserted into the 121-1, the push button 123-4 is formed to generate tension in the outward direction.

Accordingly, the fixing pin is formed such that a screw thread is formed and fastened by a fixing nut.

In addition, it is preferable that the push button 123-4 be able to adjust the tension when pressing (adjusting the spacing) to the elastic spring while allowing the male and female fastening assembly with respect to the finger rod.

On the other hand, the vertical loading type web (wet) etching apparatus 200 of the present invention is a chamber composed of a first etching chamber (210-1), a second etching chamber (210-2), and a third etching chamber (210-3) The assembly 210 and the bundle type chemical liquid injection pipe 222 having the angle variable injection nozzle 221 are formed to form the chemical liquid supply device 220 .

This vertical loading type web etching apparatus is a step-type work zone frame in a chamber or enclosure type in which a step-by-step etching section is set, and a transfer roller or a transfer conveyor is provided at the lower end of the longitudinal advance section, and the rotating jig part 110 to be described later. The transfer bogie frame 116-4 is formed to be transferred forward in one direction while corresponding.

At this time, the chamber assembly 210 of the vertical loading type web (wet) etching apparatus 200 has a rectangular reference width with a narrow plane reference width and a long side reference height and front and rear length so as to enable vertical transfer and vertical etching of the mask sheet 10 . It is formed so as to be provided with a face housing.

Accordingly, an inlet gate 211 and an outlet gate 212 are formed at each end of the front and rear of the housing, and a transfer rail 213 and a transfer conveyor 214 are formed at the inner upper and lower ends of the housing, respectively, so that a separate jig is formed. It is formed so that the mask sheet 10 fixed through the shuttle can be transferred forward in a vertically standing state.

In addition, the first etching chamber 210-1, the second etching chamber 210-2, and the third etching chamber 210-3 are divided into sections on the line in the moving direction of the housing, and etching is performed for each part. formed to do

Accordingly, in the first and second etching chambers 210-1 and 210-2, the transport speed of the standing rotating jig module equipped with the mask sheet 10 is 400 mm/min, and the mask sheet 10 and the left and right injection nozzles 221 ) between the injection distance is 50 to 100 mm, and the treatment liquid sprayed through the injection nozzle is formed so that a single liquid of any one of ferric chloride, hydrochloric acid, and noble liquid containing water or a plurality of chemical liquids can be selectively mixed. do.

In addition, the standing rotating jig module mounted with the mask sheet 10 in the tertiary etching chamber 210-3 is formed so that the chemical liquid supply device performs the main etching process while the forward transfer is temporarily stopped.

At this time, during the etching process in the tertiary etching chamber, the injection distance between the mask sheet 10 and the left and right injection nozzles 221 is 50 to 100 mm, and the treatment chemical injected through the injection nozzle is formed to use a single solution of hydrochloric acid. .

In the first and second etching chambers, the standing rotating jig module mounted with the mask sheet is formed so that the mask sheet rotates once during the transfer speed.

Accordingly, the standing rotating jig module equipped with a mask sheet in the third etching chamber rotates 1 to 2 revolutions per minute in a state in which the transfer is stopped, but the chemical liquid to be sprayed is formed to use a single etchant with hydrochloric acid (purpose of use: Spec refinement) and for final alignment/ improvement of roughness of the sheet surface and prevention of surface stains in the half-etched section).

On the other hand, the chemical liquid supply device 220 of the vertical loading type web (wet) etching apparatus 200 is formed with a bundle type injection tube 222 having a plurality of injection nozzles 221 at both ends in the inner width direction for each etching chamber. It is formed so that the supply and injection of the etching solution are selectively performed with respect to the mask sheet 10 which proceeds based on the central entry line.

Accordingly, the bundle-type injection tubes 222 are formed to be arranged at equal intervals to each other in the form of a plurality of branch tubes connected in the vertical and/or height directions in each etching chamber.

In this case, the bundle-type injection pipe is formed to receive the desired chemical solution from the main supply pipe 223 , and the injection nozzle 221 is formed to be disposed at an opposite angle to the injection nozzles facing each other.

This is to prevent the chemical liquids injected after the processing of the pattern cell from being sprayed to each other.

Accordingly, the injection nozzle 221 allows the injection pressures of the injection nozzles facing each other to be adjusted differently, so that the etching specification is more precisely secured by the injection pressure alternated during the one-way vertical loading and rotation of the mask sheet. is formed

That is, the injection pressure is set to be stronger for one side injection nozzle and weaker for the other side injection nozzle, so that various patterns and concavo-convex shapes (half processing_step difference molding) are smoothly processed.

The present invention is not limited to the specific preferred embodiments described above, and without departing from the gist of the present invention as claimed in the claims, anyone with ordinary skill in the art to which the invention pertains can implement various modifications. Of course, such modifications are intended to be within the scope of the claims.

10 ... mask sheet 11 ... opening
12 ... Half face 100 ... Standing rotating jig module
110 ... Rotating Jig Part 120 ... Working Jig Part
200 ... vertical loading web etching device
S100 ... 1st pre-etching step S200 ... 2nd pre-etching step
S300 ... 3rd post-etching step

Claims (3)

A standing rotating jig module 100 is provided so that the mask sheet 10 can be mounted vertically, but the mask sheet 10 that is vertically erected and loaded through the standing rotating jig module 100 is a vertical loading type Ÿ ‡ (wet) to be etched in each step while sequentially passing through the first etching chamber 210-1, the second etching chamber 210-2, and the third etching chamber 210-3 of the etching apparatus 200 In the step-by-step Ÿ‡ etching method for metal masks using a pressure control nozzle and a vertical loading method to
In the primary etching chamber 210-1, a bundle-type chemical liquid injection tube 222 having a variable angle injection nozzle 221 is formed at one end and is vertically loaded on either side of the mask sheet 10 based on any of the two sides. a first pre-etching step (S100) of temporarily etching the half surface while spraying the etching solution at a pressure set on the entire surface;
In the secondary etching chamber 210-2, a bundle-type chemical liquid injection tube 222 having an angle-variable injection nozzle 221 is formed at the other end of one of both sides based on the mask sheet 10 loaded vertically. a secondary pre-etching step (S200) of temporarily etching the opening while spraying an etching solution at a pressure set on the entire other side opposite to that in the primary pre-etching step (S200);
In the tertiary etching chamber 210-3, bundle-type chemical liquid injection tubes 222 having a variable angle injection nozzle 221 are formed at both ends, and based on the mask sheet 10 loaded vertically, A third post-etching step (S300) of simultaneously performing main etching of the half surface and the opening while spraying the etching solution at a set pressure;
A step-by-step Ÿ‡ etching method for a metal mask using a pressure control nozzle and a vertical loading method, characterized in that it is composed of According to claim 1, wherein in the third post-etching step (S300), the angle-variable spray nozzles 221 facing both ends with respect to the mask sheet 10 are characterized in that the etching solution is sprayed at different pressures, respectively. A step-by-step Ÿ‡ etching method for metal masks using a pressure control nozzle and vertical loading method. The pressure control nozzle and vertical direction according to claim 1, wherein when the etching solution is sprayed in the third post-etching step (S300), the injection angles between the opposite angle-variable injection nozzles 221 facing each other are respectively avoided from each other. Step-by-step Ÿ‡ etching method for metal mask using loading method.

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