KR102253343B1 - Etching system for mask sheet using rotating jig and vertical loading type wet etching device - Google Patents

Abstract

The present invention relates to an etching system for a mask sheet using a rotary jig and a vertical loading type wet etching device. According to a technical point of the present invention, a mask sheet is vertically withdrawn, rotated, and individually tension-clamped through a rotary jig, wherein the mask sheet mounted on the rotary jig is loaded into a vertical loading type wet etching device having an etching section by stage or section to be etched by injection type chemical supply devices on both sides, which can lead to precise spec processing of a pattern cell. In particular, since operation (driving) settings are precisely controlled (a rotation ratio per minute of the rotary jig and the precise injection of the chemicals are controlled) within a processing part section of the chamber assembly, the etching system can fundamentally solve issues of an existing horizontal etching process (a sheet wave and the like) as well as significantly improve workability and productivity along with excellent quality in contrast to an existing system.

Description

Etching system for mask sheet using rotating jig and vertical loading type wet etching device}

In the present invention, the mask sheet is vertically pulled out, rotated, and individually tensioned clamped through a rotating jig, but the mask sheet mounted on the rotating jig is a vertical loading type web (wet) etching having an etching section for each step or division. It is loaded into the device to allow both side injection type chemical supply devices to be etched, which is formed to enable precision processing of the pattern cell, and in particular, the operation (operation) setting within the processing part section of the chamber assembly is precisely controlled (rotated). The jig's battery, rotational ratio per minute, and precise injection control of the chemical solution), which fundamentally solves the problems (sheet wave phenomenon, etc.) that occurred in the conventional horizontal etching process, as well as superior quality and workability and productivity compared to the existing ones. The present invention relates to an etching system for a mask sheet using a rotating jig and a vertical loading type web (wet) etching apparatus, characterized in that this is greatly improved.

In general, a mask sheet (metal mask) is a nickel alloy series, and a product containing 36% nickel is mainly used.

In addition, a conventional mask sheet is manufactured through a rolling method as shown in FIG. 22, in which the sheet material is formed to have a thin thickness while passing through a plurality of rolling rollers.

However, the mask sheet manufactured by this rolling method causes a problem in that a wave is generated between the pitch sections while passing through a plurality of rollers installed for rolling.

In addition, during rolling, the rollers use metal oil together to increase the smooth flatness of the sheet. Such metal oil remains as a metal post due to the non-uniformity of rolling due to the problem of waves remaining on the sheet when processing large-area sheets. There are many cases. This can eventually lead to many issues in the horizontal.

In addition, since each roller installed for rolling has a minimum limit in miniaturization of each pitch interval, and pressure must be applied to adjust the thickness of the sheet, it is almost impossible to prevent or destroy the original wave.

In the rolling process, due to the arrangement of large, medium, and small rollers whose diameter (radius) gradually decreases from the inlet to the outlet, the wave in the first section and the wave in the center and the last stage are likely to proceed in an irregular form. If the shape of the end section is not constant compared to the first section, the flatness of the sheet remains a major issue in the metal mask manufacturing process, which is important.

In addition, since a large-area mask sheet has a wide sheet width during rolling, a difference between the pressure and the pressing degree of the left and right portions relative to the center occurs, which in turn causes an inevitable wave phenomenon (the size of the mask sheet is large). The larger it is, the worse this phenomenon becomes.)

In other words, as shown in FIGS. 23 to 24, a mask sheet manufactured through a conventional rolling process has an inherently uneven surface area due to a wave (non-uniform height deviation) phenomenon generated on the surface.

The problem of the surface imbalance of the mask sheet becomes even more severe in an etching process having a horizontal chamber structure in which the sheet is transferred through a plurality of rollers and the upper and lower etching liquids are sprayed through a pressure nozzle.

That is, such a conventional horizontal web (wet) etching process becomes a factor that makes it difficult to implement (process) precision specifications for pattern cells.

And, in the horizontal web (wet) etching process, the height of the etchant spray nozzle is fixed in a fixed form, whereas irregular heights formed by waves are formed on the surface of the mask sheet, so that the sprayed etchant touches first or later. As a result, there is a problem in which precise specification processing becomes difficult.

In addition, in the horizontal web (wet) etching process, the mask sheet that is forward-transferred in one direction is difficult to adjust the tension (tension) of the mask sheet on a horizontal line, and thus a problem in which waves remain.

Incidentally, in the usual horizontal web (wet) etching process (pattern cell forming), a mask sheet (a sheet with an uneven surface already) manufactured by the above-described rolling process is loaded/unloaded through the transfer roller in the chamber. The etchant is sprayed to perform processing (molding) of the pattern cell.

That is, the conventional web (wet) etching process is a method of processing a pattern cell by spraying an etching solution on the surface of a mask sheet in a horizontal chamber at the same time in both up and down directions or selectively spraying only one of the top and bottom directions.

It can be seen that such a horizontal web etching process does not conform to the properties required by the metal mask in the evaporator (FIG. 25).

In general, a glass substrate is mounted on an upper surface of a mask sheet in a vacuum chamber in which the deposition process is performed, and is composed of a coolant, an electromagnet, and the like.

As the electromagnet adjusts the magnetic force, the glass substrate and the metal mask are gradually brought into close contact with each other, and after the metal mask is completely unfolded, organic substances must be placed on the surface of the glass substrate through the mask opening without distortion.

Here, one thing to be aware of between the glass substrate and the mask sheet is that the mask sheet (metal mask) and the glass substrate must be completely adhered to each other during the organic material deposition process.

In other words, it is a form in which 90 to 100 pattern cells are arranged based on a 6-inch mobile product, and defects can be minimized only when the entire area of the mask sheet is evenly adhered. A gap is opened between them and organic matter penetrates, which causes a shadow phenomenon.

In summary, the web (wet) etching process for processing (molding) the pattern cell for the rolled mask sheet (Invar36 sheet-a mask sheet that has already generated waves through the rolling process) is a horizontal structure. During the loading/unloading transfer of the mask sheet, the transfer rollers in the chamber of the chamber continuously cause an irregular surface environment, which causes inaccurate low-spec processing when the pattern cell is processed through the etching solution.

In addition, the above-described wave phenomenon may cause concave or recessed spots on the surface of the mask sheet (half surface, etc.), which causes a stain phenomenon due to poor drying after the etching liquid is formed (see Fig. 26). )

In addition, the processed low-spec mask sheet (mask sheet manufactured through the web (wet) etching process of the horizontal chamber structure) is due to the effect of heat generation in the chamber peculiar to the process when it is introduced into the vacuum chamber for organic material deposition. As the wave phenomenon is intensified, when it is in close contact with the glass substrate, the non-uniform surface area is not properly adsorbed, causing a burning phenomenon around the pattern cell (edge), or becoming a foreign material (due to the melting of organic matter or the end of its life). It turns into a foreign object) and a shadow phenomenon.

In other words, the wave defect phenomenon of the mask sheet also affects the glass substrate, resulting in a problem of deteriorating the quality of the final display product due to the decrease in organic material deposition properties.

1. Republic of Korea Patent Publication No. 10-2014-0093618 (published on 28 July 2014)

The present invention is to solve the above-described problem, and the technical gist of the present invention is to vertically draw out a mask sheet, rotate rotation, and individually tensile clamping through a rotating jig, but the mask sheet mounted on the rotating jig is stepwise or divided. A bar that is loaded into a vertical loading type web (wet) etching device having a separate etching section to allow both sides spraying type chemical supply device to be etched, which is formed to enable precision processing of the pattern cell specification, and in particular, the processing part section of the chamber assembly The internal operation (operation) setting is precisely controlled (the battery of the rotating jig and the rotational ratio per minute, precise injection control of the chemical solution), which can fundamentally solve the problems (sheet wave phenomenon, etc.) that occurred in the previous horizontal etching process. Its purpose is to provide a significant improvement in workability and productivity along with superior quality compared to the existing ones.

In other words, the rotating jig of the present invention relates to a rotating jig that allows vertical loading and rotational rotation of a mask sheet during a web (wet) etching process. It facilitates fastening and assembly during tensioning), but allows the rotating jig part to perform precise and stable rotational rotation and step-by-step moving loading during rotational rotation and vertical transfer.This is the conventional horizontal etching method for the mask sheet. In addition to minimizing contrast defects (prevention of wave generation, lifting phenomenon, spec change, distortion, shadow phenomenon, staining, etc. of thin plate type sheets), high productivity, improved workability, and excellent quality are guaranteed. It has its purpose in providing.

In addition, the rotating jig of the present invention allows a plurality of clamps to be provided in the pickup case of a rectangular frame structure in the working jig part, which firmly fixes the outer periphery with respect to the four-sided tip of the mask sheet and separates the tensile force for each position (partial) It is an object to provide an advantage in flattening and leveling of the mask sheet by being formed so as to be able to be added and adjusted.

Accordingly, the web (wet) etching apparatus of the present invention allows the upper and lower transfer rails and the transfer conveyor to proceed in one direction (loading) through each treatment part in the chamber assembly while the mask sheet is elongated vertically, but each treatment The parts are individually equipped with a chemical supply device so that the selected etching chemical (including continuous cleaning and drying) is scattered and sprayed in the form of a staggered arrangement (zigzag) from each side of the mask sheet. This is a conventional horizontal etching process. Rolling rotation (forward) of the mask sheet by the heavy transfer roller The wave phenomenon on the surface of the sheet generated during the process due to the original omission of the transfer process (this is a separate problem from the inherent in the rolling process of the mask sheet material itself) In addition to fundamentally solving the problem, it enables precise control while allowing the spray angle and spray distribution of the etching solution or spray area to be easily varied by a plurality of spray nozzles, each of which spray pressure is controlled. It is an object of the present invention to provide a flexible control of the etching solution during processing of the cell and particularly precise adjustment to ensure high specifications and high quality specifications remarkably.

In order to achieve this object, the present invention is provided with a rotating jig 100 so that the mask sheet 10 can be vertically mounted, but the rotating jig 100 is a rotating jig part 110 and a working jig part. A mask composed of 120 and formed to perform one-way loading and rotation after tensioning and clamping the edges of the four sides of the mask sheet 10, respectively, and being vertically erected and loaded through the rotation jig 100 The sheet 10 is formed to be etched, cleaned, and dried by the step-by-step chamber assembly 210 of the vertical loading type web (wet) etching apparatus 200 and the chemical liquid supply device 220 having a side chemical liquid spraying structure, respectively.

Accordingly, the rotating jig part 110 of the rotating jig 100 has a gear tooth difference 112 formed on the outer circumferential surface of the circular jig ring 111, and a driving sprocket coupled with one submotor 113 (114) The guide roller 116 of the drive set 116 is made to rotate interlocking for a set period or for a set time during rotation, but a sliding groove 115 is formed on the side edge of the jig ring 111 to be transferred by a transfer conveyor. It is formed to promote rotation of the jig ring 111 in the circumferential direction together with -1), and the working jig part 120 of the rotation jig 100 is a pickup case having a square frame structure in the space on the inner diameter side of the jig ring 111 (121) is provided, but the pickup case 121 is formed to be fastened to the fixing bracket 117 of the jig ring 111 by forming a gripper 122 for fixing each on both sides of the side end, and the pickup case ( 121 is formed to fix the mask sheet 10 by forming a plurality of clamps 123 on each of the four sides of the square frame, and the guide roller 116-1 of the drive set 116 has a sliding groove 115 and It is mounted in the assembly hole 116-3 of the corresponding arc-shaped panel 116-2 to rotate, but the arc-shaped panel 116-2 is a support arm 116-5 formed on the upper surface of the transfer cart frame 116-4. ), and the clamp 123 has a fixing pin 123-2 formed on one side of the finger rod 123-1 and inserted into the mounting hole 11 previously formed in the mask sheet 10. A push button 123-4 having a locking protrusion 123-3 is formed on the other side of the finger rod 123-1 facing the fixing pin 123-2 and is formed to promote post-mounting and tensioning. It is formed such that tension is generated in the outward direction toward the push button 123-4 based on the elastic spring 121-2 inserted into the mounting groove 121-1 of the pickup case 121.

In addition, the chamber assembly 210 of the web (wet) etching apparatus 200 is a rectangular enclosure having a narrow plane reference width and a side reference height and a long front and rear length so that vertical transfer and vertical etching of the mask sheet 10 are possible. However, an inlet gate 211 and an outlet gate 212 are formed at each end of the front and rear of the housing, and a transfer rail 213 and a transfer conveyor 214 are formed at the inner upper and lower ends of the housing, respectively. The mask sheet 10 fixed through a separate jig shuttle is formed so that it can be transported forward in a vertically erected state, and a plurality of processing parts 215 are divided into divisions, respectively, on the line in the traveling direction of the enclosure. Etching and cleaning are performed sequentially according to the order of entry, but the chemical solution supplying device 220 of the web (wet) etching device 200 includes a plurality of spray nozzles at both ends in the inner width direction of each processing part 215 A bundle injection pipe 222 having 221 is formed to selectively supply and spray an etching solution or a cleaning rinse with respect to the mask sheet 10 proceeding with respect to the central entry line in the axial direction, and the treatment The part 215 is a first reaction etching part 215-1, a second pretreatment (Bore) etching part 215-2, and a post etching based on the initial entrance to which the mask sheet 10 enters. Part (215-3) and rinse (Rinse) cleaning part (215-4) is divided in order, but the first and second pre-processing etching parts (215-1, 215-2) are rotated by mounting the mask sheet (10) The transfer speed of the jig is 400mmm/min, the spray distance between the mask sheet 10 and the left and right spray nozzles 221 is 50-100mm, and the treatment chemical sprayed through the spray nozzle is ferric chloride, hydrochloric acid including water. , A rotary jig equipped with a mask sheet 10 in the post etching part 215-3 and formed to use a single liquid of any one of the ear liquids or selectively mixing a plurality of chemical liquids is carried forward. Chemical liquid in a paused state The main etching treatment is performed by the supply device, but during the etching treatment, the spray distance between the mask sheet 10 and the left and right spray nozzles 221 is 50 to 100 mm, and the treatment chemical sprayed through the spray nozzle is a single solution of hydrochloric acid. Is formed to use, and the transfer speed of the rotating jig equipped with the mask sheet 10 in the rinse cleaning part 215-4 is 400 mmm/min, and the mask sheet 10 and the left and right spray nozzles 221 ) The spraying distance is 50 ~ 100mm, and the treatment chemical sprayed through the spray nozzle is preferably a cleaning liquid including water.

In addition, in the first pretreatment etching part, a rotation jig equipped with a mask sheet is formed to rotate once during a transfer speed, and a rotation jig equipped with a mask sheet in the second pretreatment etching part is formed to rotate once during a transfer speed, In the post-etched part, the rotating jig equipped with the mask sheet rotates 1 to 2 revolutions per minute while the transfer is stopped, but the sprayed chemical is formed to use a single etching solution of hydrochloric acid (Use: Spec precision and final customization/ It is desirable to improve the roughness of the sheet surface and prevent stains in the half-etching section), and it is desirable to adjust the rotational speed and rotation speed of a rotating jig equipped with a mask sheet for the rinse-cleaning part and the drying part.

As described above, the present invention allows vertical extraction of the mask sheet, rotation rotation, and individual tensile clamping through a rotating jig, but the mask sheet mounted on the rotating jig is a vertical loading type web having an etching section for each step or division ( wet) The bar is loaded into the etching device to cause the chemical liquid supply device to be sprayed on both sides to be etched, and this has the effect of enabling precision processing of the pattern cell specification.

In addition, the present invention allows the operation (operation) setting within the processing part section of the chamber assembly to be precisely controlled (the battery of the rotating jig and the rotational ratio per minute, precise injection control of the chemical solution), which is a problem encountered in the conventional horizontal etching process. In addition to the ability to fundamentally solve (sheet wave phenomenon, etc.), it has the effect of greatly improving workability and productivity along with superior quality compared to the existing ones.

Accordingly, the rotating jig of the present invention relates to a rotating jig that allows vertical loading and rotational rotation of a mask sheet during a web (wet) etching process, wherein the mask sheet is mounted (or suspended, assembled and tensioned) by a working jig part. ), but the rotating jig part allows precise and stable rotational rotation and step-by-step moving loading during rotation and vertical transfer, compared to the previous horizontal etching method for the mask sheet. It has the effect of minimizing defects (prevention of wave generation, lifting phenomenon, specification change, warping, shadow phenomenon, spotting, etc. of thin plate type sheet).

In other words, the present invention has the effect of ensuring high productivity, improved workability, and excellent quality.

In addition, the rotating jig of the present invention allows a plurality of clamps to be provided in the pickup case of the square frame structure in the working jig part, which enables the addition and adjustment of individual tensile force for each position (partial) with respect to the four sides of the mask sheet. It is formed so that there is an advantageous effect of flattening and leveling the mask sheet.

On the other hand, the web (wet) etching apparatus of the present invention allows the upper and lower transfer rails and the transfer conveyor to proceed in one direction (loading) through each treatment part in the chamber assembly while the mask sheet is elongated vertically, but each treatment The parts are individually equipped with a chemical supply device so that the selected etching chemical (including continuous cleaning and drying) is scattered and sprayed in the form of a staggered arrangement (zigzag) from each side of the mask sheet. This is a conventional horizontal etching process. Rolling rotation (forward) of the mask sheet by the heavy transfer roller The wave phenomenon on the surface of the sheet generated during the process due to the original omission of the transfer process (this is a separate problem from the inherent in the rolling process of the mask sheet material itself) In addition to fundamentally solving the problem, it enables precise control while allowing the spray angle and spray distribution of the etching solution or spray area to be easily varied by a plurality of spray nozzles, each of which spray pressure is controlled. When the cell is processed, it is possible to control the etchant fluidly, and in particular, it is possible to precisely adjust, so that high specifications and high-quality specifications can be remarkably guaranteed.

1 is a side view showing a rotating jig and a vertical loading type web (wet) etching apparatus according to the present invention,
2 is an overall perspective view of a web (wet) etching apparatus according to the present invention,
3 is an exemplary view of a rotating jig according to the present invention,
Figure 4 is an exemplary side view of Figure 3,
5 to 6 are exemplary views of a rotating jig part according to the present invention,
7 to 9 are exemplary views of a working jig part according to the present invention,
10 is a state diagram showing the rotation operation of the rotating jig according to the present invention,
11 is an exemplary view showing a first pretreatment etching part of the web (wet) etching apparatus according to the present invention;
12 is an exemplary view showing a second pre-etched part and a post-etched part of the web (wet) etching apparatus according to the present invention;
13 is an exemplary view showing a rinse cleaning part according to the present invention,
14 is an exemplary view showing a drying part according to the present invention,
15 to 16 are exemplary views showing that the first and second pre-etching parts and post-etching parts are connected according to the present invention;
17 to 18 are exemplary views showing a bundle-type injection pipe having an injection nozzle of the chemical liquid supply device according to the present invention,
19 is an exemplary view showing the arrangement of thousands (spaced zigzag) of the injection nozzle according to the present invention;
20 to 21 are exemplary views showing the injection angle and injection pressure control form of the injection nozzle according to the present invention,
22 to 24 are exemplary views of a mask sheet manufactured through a rolling process and formed with waves on the surface thereof,
25 is an exemplary view showing a general organic material deposition chamber;
26 is an exemplary view showing a half-surface uneven phenomenon occurring during a conventional horizontal web (wet) etching process.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

First, as shown in Figs. 1 to 21, the present invention is largely composed of a rotary jig 100 and a web (wet) etching apparatus 200.

Thus, in the present invention, a rotating jig 100 is provided so that the mask sheet 10 can be vertically mounted, but the rotating jig 100 includes a rotating jig part 110 and a working jig part 120. It is configured to be formed to perform one-way loading and rotational rotation after each of the four edge portions of the mask sheet 10 are tensioned and clamped.

That is, the rotating jig 100 passes through the vertical loading type web etching apparatus and the mask sheet 10 fixed to the working jig part 120 causes the rotating jig part 110 to rotate while simultaneously advancing during the etching process. It serves as a conveying means for loading.

At this time, the vertical loading type web etching apparatus is a step-type work zone frame in a chamber or enclosure type in which a step-by-step etching section is set, and a transfer roller or a transfer conveyor is provided at the lower end of the longitudinal forward section, and a rotating jig part 110 to be described later. ) Of the transport cart frame 116-4 is formed to be transported forward in one direction while corresponding.

In other words, the rotating jig corresponds to a carrier that is input to a separate etching device and passes through a step-by-step etching course, and a rotating jig part that promotes rotation (cylindrical rotation) while proceeding in one direction and a mask provided therein It is largely divided into a working jig part that fixes the seat.

Accordingly, the mask sheet 10 that is vertically erected and loaded through the rotating jig 100 is a step-by-step chamber assembly 210 of the vertical loading type web (wet) etching apparatus 200 and a chemical liquid supply device having a side chemical liquid injection structure ( 220) is formed to be etched, cleaned and dried, respectively.

Meanwhile, the rotating jig 100 of the present invention is largely composed of a rotating jig part 110 and a working jig part 120.

Accordingly, the rotating jig part 110 of the rotating jig 100 has a gear tooth difference 112 formed on the outer circumferential surface of the circular jig ring 111, and a driving sprocket coupled with one submotor 113 (114) It is formed to rotate interlocking for a set period or for a set time during rotation.

That is, the rotation speed of the sub-motor is determined by the control unit per minute, and the rotation may be changed or changed according to the etching part of the etching apparatus.

In addition, a drive sprocket is provided on the drive shaft of the sub-motor and is formed to rotate (rotate) the jig ring in the circumferential direction while corresponding to a gear tooth difference of the jig ring.

At this time, a sliding groove 115 is formed on the side edge of the jig ring 111, and the jig ring 111 rotates in the circumferential direction together with the guide roller 116-1 of the drive set 116 transferred by the transfer conveyor. It is formed to promote.

That is, in the front or rear surface of the jig ring, a sliding groove is formed inward along the circumferential direction, and a guide roller (a kind of bearing) is inserted therein to facilitate smooth rotation of the jig ring.

Accordingly, the guide roller 116-1 of the drive set 116 is mounted in the assembly hole 116-3 of the arc-shaped panel 116-2 corresponding to the sliding groove 115 to rotate, but the arc-shaped panel ( 116-2) is formed to be fastened and assembled to the support arm 116-5 formed on the upper surface of the transport cart frame 116-4.

That is, the guide roller is fitted and fixed in the assembly hole by a separate hinge shaft.In particular, the arc-shaped panel has a sliding groove and a diameter or radius corresponding to the sliding groove, and the outer shape of the arc-shaped panel is partially accommodated in the sliding groove to provide stable support of the jig ring. Together with the guide roller, when rotating in the circumferential direction, a guide role (to prevent separation) is promoted.

At this time, the support arm 116-5 has a slit 116-6 formed in the longitudinal direction so that the height can be adjusted on the arc-shaped panel.

On the other hand, the working jig part 120 is such that the pickup case 121 having a rectangular frame structure is provided in the inner diameter side space of the jig ring 111, and the pickup case 121 is fixed to both sides of the side end portion, respectively. (122) is formed to be fastened to the fixing bracket 117 of the jig ring 111.

At this time, the pickup case 121 is formed to fix the mask sheet 10 by forming a plurality of clamps 123 for each line on the four sides of the square frame.

In addition, the fixing gripper 122 is such that one side of the plate-shaped fixing end 122-1 is joined on the line of the pickup case 121, but an opening groove 122-2 is formed in the center of the surface, so that the hook pin 122- 3) of the bracket (122-4) is formed to be inserted and mounted.

At this time, a pin head (122-5) is formed at the rear end of the hook pin (122-3), and is inserted into the spring (117-2) based on the mounting hole (117-1) connected to the fixing bracket (117). As a result, it is formed so that tension in the direction toward the pin head 122-5 is generated.

Thus, the pin head is a kind of nut, and a through screw is formed on the body, and the hook pin is formed with a male thread on the side of the pin head to increase or loosen the tension of the spring based on the inner surface of the mounting hole when mutually tightening. do.

That is, such a gripper for fixing 122 has one end (opposite side of the opening groove) integrally coupled to the pickup case, and is mounted only by hanging it on the latch 122-4 using the opening groove 122-2. This is done.

In addition, the exact position setting or alignment of the pickup case (where the square frame is located at the center point based on the jig ring) can be adjusted with the hook pin 122-3 by tightening the screw of the pin head 122-5. This variable is formed to enable tension adjustment of the spring 117-2 formed therebetween.

Accordingly, the fixing bracket is formed such that a plurality of even numbers with respect to the inner diameter of the jig ring are arranged at equal intervals, so that when the working jig part is installed, it is formed to facilitate assembly at a position where rotation is stopped.

On the other hand, the clamp 123 has a fixing pin 123-2 formed on one side of the finger rod 123-1 and inserted into the preformed mounting hole 11 in the mask sheet 10, and then mounted and tensioned. It is formed to be.

At this time, a push button 123-4 having a locking protrusion 123-3 is formed on the other side of the finger rod 123-1 facing the fixing pin 123-2, and the mounting groove of the pickup case 121 It is formed such that tension is generated in the outward direction toward the push button 123-4 based on the elastic spring 121-2 inserted into the (121-1).

Accordingly, the fixing pin is formed such that a screw thread is formed and fastened by a fixing nut.

In addition, it is preferable that the push button 123-4 is capable of adjusting the tension when the elastic spring is pressed (interval adjustment) while being assembling male and female with respect to the finger rod.

On the other hand, the web (wet) etching apparatus 200 of the present invention is largely composed of a chamber assembly 210 and a chemical supply device 220.

At this time, the chamber assembly 210 of the web (wet) etching apparatus 200 is a rectangular enclosure having a narrow plane reference width and a side reference height and a long front and rear length so that vertical transfer and vertical etching of the mask sheet 10 are possible. Is formed to be provided.

Accordingly, an inlet gate 211 and an outlet gate 212 are formed at each end of the front and rear sides of the housing, and a transfer rail 213 and a transfer conveyor 214 are formed at the upper and lower ends of the housing, respectively, so that a separate jig is formed. The mask sheet 10 fixed through the shuttle is formed to be transported forward in a vertically erected state.

In addition, while a plurality of processing parts 215 are divided into divisions along the line in the traveling direction of the enclosure, etching and cleaning are sequentially performed for each part according to the order of entry.

At this time, the processing part 215 includes a first reaction etching part 215-1, a second pretreatment (Bore) etching part 215-2, and a post based on the initial entrance to which the mask sheet 10 enters. The (Post) etching part 215-3 and the rinse cleaning part 215-4 are formed to be divided in order.

Accordingly, the transfer speed of the rotating jig equipped with the mask sheet 10 in the first and second pretreatment etching parts 215-1 and 215-2 is 400mmm/min, and the mask sheet 10 and the left and right spray nozzles 221 The spraying distance between them is 50 to 100mm, and the treatment chemical sprayed through the spray nozzle is formed to use a single solution of ferric chloride, hydrochloric acid, and auris including water, or selectively mix a plurality of chemicals. .

In addition, the rotation jig in which the mask sheet 10 is mounted in the post etching part 215-3 is formed so that the chemical supply device performs the main etching process while the forward transfer is temporarily stopped.

At this time, when the post etching part 215-3 is etched, the spray distance between the mask sheet 10 and the left and right spray nozzles 221 is 50 to 100 mm, and the treatment chemical sprayed through the spray nozzle is hydrochloric acid. It is formed to use a single liquid.

Accordingly, in the rinse cleaning part 215-4, the transfer speed of the rotating jig equipped with the mask sheet 10 is 400 mmm/min, and the spray distance between the mask sheet 10 and the left and right spray nozzles 221 is It is 50 to 100mm, and the treatment chemical sprayed through the spray nozzle is preferably a cleaning liquid containing water.

Again, when the speed and the spraying distance are less than or above the corresponding range, the removal reaction that occurs when the cleaning liquid contacts the mask sheet becomes less or excessive, making precise and smooth pattern cell processing difficult.

In addition, after the rinse cleaning part 215-4, an air knife part 215-5 is further provided to spray high-pressure air.

In addition, in the first pretreatment etching part, a rotation jig equipped with a mask sheet is formed to rotate once during a feed rate, and in the second pretreatment etching part, a rotation jig equipped with a mask sheet is formed to rotate once during a feed rate.

Thus, in the post-etched part, the rotating jig equipped with the mask sheet rotates 1 to 2 rotations per minute while the transfer is stopped, but the sprayed chemical is formed to use a single etching solution of hydrochloric acid (Use: Spec precision and final customization For improving the roughness of the sheet surface and preventing stains on the surface of the half-etched section).

At this time, it is preferable that the rinse cleaning part and the drying part be able to adjust the rotational speed and rotational speed of the rotating jig equipped with the mask sheet.

On the other hand, the chemical solution supply device 220 of the web (wet) etching apparatus 200 includes a bundle type injection pipe 222 having a plurality of injection nozzles 221 at both ends in the inner width direction of each treatment part 215 It is formed so as to selectively supply and spray an etching solution or a cleaning rinse to the mask sheet 10 proceeding based on the central entrance line in the axial direction.

Accordingly, the bundle type injection pipe 222 is formed to be arranged at equal intervals from each other in the form of a branch pipe connected in a vertical direction within each treatment part 215.

At this time, the bundle type injection pipe is formed to receive a target chemical solution from the main supply pipe 223, and the injection nozzles 221 are formed to be disposed opposite to each other with the side injection nozzles facing each other.

This is to prevent the chemicals sprayed after the processing of the pattern cell from spraying to each other.

In addition, the injection nozzle 221 allows the injection pressures of the injection nozzles facing each other to be adjusted differently from each other, so that the etching specification is more precisely secured by the alternate injection pressure when the mask sheet is rotated in advance by the jig shuttle. Is formed.

That is, the injection pressure is formed so that the one side injection nozzle is set stronger and the other side injection nozzle is set weaker to facilitate processing into patterns of various shapes and irregularities (half processing_step forming).

The present invention is not limited to the specific preferred embodiments described above, and any person having ordinary knowledge in the technical field to which the design belongs without departing from the gist of the present invention claimed in the claims can implement various modifications. Of course, such changes are intended to be within the scope of the description of the claims.

10 ... Mask sheet 11 ... Mounting hole
100 ... rotary jig
110 ... rotating jig part 111 ... jig ring
112 ... gear difference 113 ... sub motor
114 ... Drive sprocket 115 ... Sliding groove
116 ... Drive set 116-1 ... Guide roller
116-2 ... Arc panel 116-3 ... Assembly work
116-4 ... Transport cart frame 116-5 ... Support arm
116-6 ...Slit 117 ...Fixing bracket
117-1 ... Mounting hole 117-2 ... Spring
120 ... working jig part 121 ... pickup case
121-1 ... Mounting groove 121-2 ... Elastic spring
122 ... Fixed gripper 122-1 ... Fixed end
122-2 ... Opening groove 122-3 ... Hook pin
122-4 ... brace 122-5 ... pinhead
123 ... clamp 123-1 ... finger rod
123-2 ... fixing pin 123-3 ... locking jaw
123-4 ... push button
200 ... Web (wet) etching device 210 ... Chamber assembly
211 ... Entrance gate 212 ... Exit gate
213 ... Transfer rail 214 ... Transfer conveyor
215 ... Treatment part 215-1 ... 1st pretreatment etching part
215-2 ... 2nd pre-etching part 215-3 ... Post-etching part
215-4 ... Rinse cleaning part 215-5 ... Drying part
220 ... chemical liquid supply device 221 ... spray nozzle
222 ... Bundle type injection pipe 223 ... Main supply pipe

Claims (3)

A rotating jig 100 is provided so that the mask sheet 10 can be vertically mounted, but the rotating jig 100 is composed of a rotating jig part 110 and a working jig part 120, and is composed of a mask sheet ( 10) is formed to perform one-way loading and rotational rotation after each tensioning and clamping the outer rim of the outer edge, and the mask sheet 10 that is vertically erected and loaded through the rotation jig 100 is a vertical loading type Ÿ ‡(Wet) A rotating jig and vertical loading type Ÿ‡(wet) etching to allow the step-by-step chamber assembly 210 of the etching device 200 and the chemical liquid supply device 220 of the side chemical liquid injection structure to be etched, cleaned, and dried, respectively. In the mask sheet etching system using the device,
The rotating jig part 110 of the rotary jig 100 has a gear tooth difference 112 formed on the outer circumferential surface of the circular jig ring 111, and a driving sprocket 114 coupled with one submotor 113 ) During rotation, the guide roller 116-1 of the drive set 116 is provided with a sliding groove 115 formed on the side edge of the jig ring 111 and transferred by a transfer conveyor. ) And the jig ring 111 is formed to rotate in the circumferential direction, and the working jig part 120 of the rotation jig 100 is a pickup case 121 having a square frame structure in the inner diameter side space of the jig ring 111 ) Is provided, but the pickup case 121 is formed to be fastened with the fixing bracket 117 of the jig ring 111 by forming a gripper 122 for fixing each on both sides of the side end, and the pickup case 121 Is formed to fix the mask sheet 10 by forming a plurality of clamps 123 on each of the four sides of the square frame, and the guide roller 116-1 of the drive set 116 corresponds to the sliding groove 115 It is mounted in the assembly hole 116-3 of the arc-shaped panel 116-2 to rotate, but the arc-shaped panel 116-2 is attached to the support arm 116-5 formed on the upper surface of the transfer cart frame 116-4. It is formed to be fastened and assembled, and the clamp 123 has a fixing pin 123-2 formed on one side of the finger rod 123-1 and is inserted into the preformed mounting hole 11 in the mask sheet 10 and then mounted. And a push button 123-4 having a locking projection 123-3 is formed on the other side of the finger rod 123-1 opposite to the fixing pin 123-2, and a pickup case The elastic spring 121-2 inserted in the mounting groove 121-1 of the 121 is formed to generate tension in the outward direction toward the push button 123-4, and the Ÿ‡ (wet) etching device The chamber assembly 210 of 200 has a narrow plane reference width, a side reference height, and a long rectangular surface to enable vertical transfer and vertical etching of the mask sheet 10. The enclosure is provided, but an inlet gate 211 and an exit gate 212 are formed at each end of the front and rear of the enclosure, and a transport rail 213 and a transport conveyor 214 are formed at the upper and lower ends of the enclosure, respectively. Is formed so that the mask sheet 10 fixed through a separate jig shuttle is vertically erected so that it can be transported forward, and a plurality of processing parts 215 are divided into each part on the line in the direction of travel of the enclosure. Etching and cleaning are performed sequentially according to the order of entry, but the chemical solution supplying device 220 of the Ÿ‡ (wet) etching device 200 has a plurality of A bundle type injection pipe 222 having the injection nozzle 221 is formed to selectively supply and spray an etching solution or a cleaning rinse with respect to the mask sheet 10 proceeding with respect to the central entry line in the axial direction, The processing part 215 includes a first reaction etching part 215-1, a second pretreatment (Bore) etching part 215-2, and a post based on the initial entrance to which the mask sheet 10 enters. ) The etching part 215-3 and the rinse cleaning part 215-4 are divided in order, but the mask sheet 10 is mounted on the first and second pretreatment etching parts 215-1 and 215-2. The feed speed of one rotating jig is 400mmm/min, the spray distance between the mask sheet 10 and the left and right spray nozzles 221 is 50-100mm, and the treatment chemical sprayed through the spray nozzle is ferric chloride including water. , Hydrochloric acid, a rotating jig equipped with a mask sheet 10 in the post etching part 215-3, formed to use a single liquid or selectively mix a plurality of chemical liquids In a state in which the transfer is temporarily stopped, the chemical supply device performs the main etching process, but during the etching process, the spray distance between the mask sheet 10 and the left and right spray nozzles 221 is 50 to 100 mm, through the spray nozzle. Sprayed The treatment chemical is formed to use a single solution of hydrochloric acid, and the transfer speed of the rotating jig equipped with the mask sheet 10 in the rinse cleaning part 215-4 is 400 mmm/min, and the mask sheet 10 The spray distance between the spray nozzles 221 and the left and right sides is 50 to 100 mm, and the treatment chemical sprayed through the spray nozzle is formed of a cleaning liquid including water, and the fixing gripper 122 has a fixed end 122-1 on one side of the plate. ) To be joined on the line of the pickup case 121, but an opening groove 122-2 is formed in the center of the surface of the fixed end 122-1, so that the catches 122-4 of the hook pins 122-3 are It is formed to be inserted and mounted, a pin head (122-5) is formed at the rear end of the hook pin (122-3), the spring 117 inserted based on the mounting hole (117-1) connected to the fixing bracket (117) It is formed to generate tension in the direction of the pin head 122-5 by -2), and the spray nozzle 221 is formed to be a side spray nozzle facing each other with respect to the mask sheet vertically loaded through the jig shuttle. An etching system for a mask sheet using a rotating jig and a vertical loading type Ÿ‡ etching device, characterized in that the spray nozzles 221 are arranged at an angle to each other so that the spray pressures of the spray nozzles facing each other can be adjusted differently from each other.
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