CN209481777U - Curved reflector plated film correcting plate - Google Patents

Curved reflector plated film correcting plate Download PDF

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Publication number
CN209481777U
CN209481777U CN201821997958.2U CN201821997958U CN209481777U CN 209481777 U CN209481777 U CN 209481777U CN 201821997958 U CN201821997958 U CN 201821997958U CN 209481777 U CN209481777 U CN 209481777U
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China
Prior art keywords
bracket
plated film
correcting plate
curved reflector
herring
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Active
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CN201821997958.2U
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Chinese (zh)
Inventor
刘洪涛
许斌
马伟生
张博
武鹏
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Xinxiang City Baihe Oe Co Ltd
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Xinxiang City Baihe Oe Co Ltd
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Abstract

The utility model discloses a kind of curved reflector plated film correcting plates, it is characterized by: bracket is symmetrically fixed on the upper surface of the evaporation source of coating machine cavity, and bracket one end is fixed with cavity, and the bracket other end is towards overhanging in plated film body cavity body, it is uniformly provided on the bracket multiple for installing the fastening screw hole of correcting plate, the shape of correcting plate is in herring-bone form, and it is machined with fastener hole identical with bracket on the back face of herring-bone form and is fastened by bolts, and the shark's fin of herring-bone form two sides just shelters from the evaporation source below coating machine cavity.It is uneven in plated film that the technical program solves curved reflector, to improve the qualification rate of plated film, improves product quality.

Description

Curved reflector plated film correcting plate
Technical field
The utility model relates to a kind of plated film correcting plates, especially suitable for using when optical manufacturing curved reflector plated film.
Background technique
Currently, optical thin film production is usually based on physical vapor deposition, this method is to be by solid state transformed by thin-film material The material of gaseous state or ionic state, gaseous state or ionic state passes through space by evaporation source, arrives at substrate surface, and material arrives at substrate surface Afterwards, precipitating is gradually formed into film, existing curved reflector plated film is that its substrate is put into coating machine left-hand thread in rotation work On part disk, the rotation of rotational workpieces disk, evaporation source passes through space and arrives at substrate surface during rotation, plated film is completed, due to song The shape of face reflection is arch, it is uneven often to will appear film layer in coating process, so that film plating layer uniformity is difficult to Guarantee, to influence product quality and production efficiency.
Summary of the invention
The task of the utility model can be corrected when proposing a kind of substrate film coating, and plated film is uniform, improves product qualification rate Curved reflector plated film correcting plate.
The task of the utility model is done in such a way that it is characterized by: bracket is symmetrically fixed on the steaming of coating machine cavity It the upper surface of rises, and bracket one end is fixed with cavity, and the bracket other end is towards overhanging in plated film body cavity body, on the bracket Even to be provided with multiple fastener holes for being used to install correcting plate, the shape of correcting plate is in herring-bone form, and is processed on the back face of herring-bone form There is fastener hole identical with bracket and be fastened by bolts, and the shark's fin of herring-bone form two sides just shelters from below coating machine cavity Evaporation source.Wrap up one layer of refractory metal layer, the preferred masking foil of material in the front and back sides of the correcting plate.Curved reflector rotates on On bracket when fixed correction Board position, evaporation source is sheltered from from shark's fin and sprays coating materials to curved reflector two sides.
The utility model has the effect that the technical program solves curved reflector unevenness in plated film, to mention The qualification rate of high plated film improves product quality.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model;Fig. 2 is the structural schematic diagram of correcting plate.
Drawing explanation: 1, coating machine cavity, 2, evaporation source, 3, bracket, 4, correcting plate, 5, rotational workpieces disk, 6, motor, 7, Curved reflector, 8, herring-bone form, 9, fastening screw hole, 10, shark's fin, 11, refractory metal layer.
Specific embodiment
The embodiments of the present invention are described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng The embodiment for examining attached drawing description is exemplary, it is intended to for explaining the utility model, and should not be understood as to the utility model Limitation.
Specific embodiment is as depicted in figs. 1 and 2, and in the present embodiment, curved reflector button is placed on rotation work in plated film Plated film is carried out on part disk, since curved reflector shape is domed, the intermediate position of curved surface and two sides are in plated film, evaporation source Easily there is uneven thickness in injection coating materials, to cause reflectivity that non-uniform reflection is not achieved.
For this purpose, devising bracket and correcting plate in the present embodiment, and bracket is symmetrically fixed on the evaporation source of coating machine cavity 1 The upper surface of 2, and 3 one end of bracket is fixed with cavity, and the bracket other end is towards overhanging in plated film body cavity body, on the bracket uniformly It is provided with multiple for installing the fastener hole of correcting plate.
The shape of the correcting plate 4 is in herring-bone form 8, and fastening spiral shell identical with bracket is machined with above the back of herring-bone form Hole 9 is simultaneously fastened by bolts, and the shark's fin 10 of herring-bone form two sides just shelters from the evaporation source 2 below coating machine cavity, thus Correct the generation of curved reflector two sides plated film non-uniform phenomenon.
One layer of refractory metal layer 11 is wrapped up in the front and back sides of the correcting plate, when due to plated film, coating materials that evaporation source is launched It is easily adhered in the plate face of correcting plate, not easy cleaning, and the temperature in plated film cavity is up to 250 °, is easily dissolved with plastic wraps, The preferred masking foil of the technical program, high temperature resistant are convenient for changing.
To sum up known, the technical program is overcome by bracket 3, correcting plate 4, herring-bone form 8, shark's fin 10, refractory metal layer 11 The uneven defect of prior art camber reflection plated film.
When work, 7 left-hand thread of curved reflector on rotational workpieces disk 5, correcting plate and bracket are fastened, start motor 6 drive rotational workpieces disc spins, starting evaporation source switch, and camber reflection rotates in plated film cavity, and evaporation source sprays coating materials, opens Beginning plated film, due to being fixed with correcting plate on the technical program bracket, shark's fin coincides thereon with correcting plate for curved reflector rotation When, to shelter from two long sides on curved reflector, the generation of coating film thickness uneven phenomenon is overcome, to improve plating The qualification rate of film.
In the utility model unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " Equal terms shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or integrally connected, can be two Connection inside a element.For those skilled in the art, above-mentioned term can be understood in this reality as the case may be With novel concrete meaning.

Claims (3)

1. curved reflector plated film correcting plate, including coating machine membrane body, motor, rotational workpieces disk, evaporation source, it is characterised in that: Bracket is symmetrically fixed on the upper surface of the evaporation source of coating machine cavity, and bracket one end is fixed with cavity, and bracket other end direction It is overhanging in plated film body cavity body, it is uniformly provided on the bracket multiple for installing the fastening screw hole of correcting plate, the shape of correcting plate It is machined with fastener hole identical with bracket in herring-bone form, and on the back face of herring-bone form and is fastened by bolts, and herring-bone form two The shark's fin of side just shelters from the evaporation source below coating machine cavity.
2. curved reflector plated film correcting plate according to claim 1, it is characterised in that: the positive and negative bread of the correcting plate Wrap up in one layer of refractory metal layer, the preferred masking foil of material.
3. curved reflector plated film correcting plate according to claim 1, it is characterised in that: curved reflector rotates on bracket When the correction Board position of upper fixation, evaporation source is sheltered from from shark's fin and sprays coating materials to curved reflector two sides.
CN201821997958.2U 2018-11-30 2018-11-30 Curved reflector plated film correcting plate Active CN209481777U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821997958.2U CN209481777U (en) 2018-11-30 2018-11-30 Curved reflector plated film correcting plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821997958.2U CN209481777U (en) 2018-11-30 2018-11-30 Curved reflector plated film correcting plate

Publications (1)

Publication Number Publication Date
CN209481777U true CN209481777U (en) 2019-10-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821997958.2U Active CN209481777U (en) 2018-11-30 2018-11-30 Curved reflector plated film correcting plate

Country Status (1)

Country Link
CN (1) CN209481777U (en)

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