CN106086783A - A kind of radical occlusion device and occlusion method thereof and deposition system - Google Patents

A kind of radical occlusion device and occlusion method thereof and deposition system Download PDF

Info

Publication number
CN106086783A
CN106086783A CN201610509680.9A CN201610509680A CN106086783A CN 106086783 A CN106086783 A CN 106086783A CN 201610509680 A CN201610509680 A CN 201610509680A CN 106086783 A CN106086783 A CN 106086783A
Authority
CN
China
Prior art keywords
evaporation
vapor deposition
deposition source
guard mechanism
occlusion device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201610509680.9A
Other languages
Chinese (zh)
Other versions
CN106086783B (en
Inventor
付文悦
王小虎
陈立强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201610509680.9A priority Critical patent/CN106086783B/en
Publication of CN106086783A publication Critical patent/CN106086783A/en
Application granted granted Critical
Publication of CN106086783B publication Critical patent/CN106086783B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The present invention provides a kind of radical occlusion device and occlusion method thereof and deposition system.This radical occlusion device includes actuating unit and guard mechanism, actuating unit is used for driving guard mechanism to convert diverse location, guard mechanism is for blocking vapor deposition source and the evaporation passage treated between plated substrate, and keeps the evaporation passage between vapor deposition source and evaporation rate induction apparatus to open;It is additionally operable to the evaporation passage opened vapor deposition source and treat between plated substrate, and keeps the evaporation passage between vapor deposition source and evaporation rate induction apparatus to open.This radical occlusion device achieves the seriality of evaporation and controls, and not only shortens the evaporation time, and has saved deposition material, thus not only increase production capacity, and saved cost, also improves stability and the yield of evaporation simultaneously.

Description

A kind of radical occlusion device and occlusion method thereof and deposition system
Technical field
The present invention relates to Display Technique field, in particular it relates to a kind of radical occlusion device and occlusion method thereof and deposition system.
Background technology
In Display Technique field, OLED evaporation process needs to carry out the speed control of deposition material during being deposited with System.At present, being usually provided with multiple vapor deposition source in the evaporation chamber of OLED, the deposition material in each vapor deposition source is used for being deposited with Form a functional layer (such as luminescent layer, electron transfer layer or hole transmission layer) of OLED.The surface of each vapor deposition source All being respectively arranged with one piece of baffle plate, baffle plate is parallel with the evaporation face of vapor deposition source, and the size of baffle plate just can block right with it The evaporation face of the vapor deposition source answered.
Each vapor deposition source is when evaporation starts, and baffle plate could start after taking away to be controlled the speed of deposition material, It is deposited with on plated substrate to treating simultaneously.After one vapor deposition source has been deposited with, next vapor deposition source repeats same process and carries out separately The rate controlled of a kind of deposition material and evaporation.This evaporation coating method is not only deposited with overlong time, and often at deposition material Speed when the most not stablizing, part deposition material has been deposited with to be treated on plated substrate, makes the evaporation thickness treating on plated substrate Control accurate not, both wasted deposition material, and affected again the quality of this steaming film plating layer on substrate.
Current evaporation process not only makes OLED display device yield low, and drastically increases OLED display device Cost, makes OLED display device be constantly in the condition being difficult to replace LCD display part.Produce line especially for G2.5 to create The problems such as such as production capacity is low, material cost is high, the time is high with cost, repeated poor stability, and these problems become obstruction The bottleneck problem of OLED development.
Summary of the invention
The present invention is directed to above-mentioned technical problem present in prior art, it is provided that a kind of radical occlusion device and occlusion method thereof and Deposition system.This radical occlusion device achieves the seriality of evaporation and controls, and not only shortens the evaporation time, and has saved evaporation material Material, thus not only increase production capacity, and saved cost, also improve stability and the yield of evaporation simultaneously.
The present invention provides a kind of radical occlusion device, and including actuating unit and guard mechanism, described actuating unit is used for driving institute Stating guard mechanism conversion diverse location, described guard mechanism is used for blocking vapor deposition source and the evaporation passage treated between plated substrate, and The evaporation passage between described vapor deposition source and evaporation rate induction apparatus is kept to open;It is additionally operable to open described vapor deposition source treat with described Evaporation passage between plated substrate, and keep the evaporation passage between described vapor deposition source and described evaporation rate induction apparatus to open.
Preferably, described evaporation rate induction apparatus and the described top treating that plated substrate is respectively positioned on described vapor deposition source, and described Evaporation rate induction apparatus and described treat plated substrate described vapor deposition source orthographic projection in the plane lay respectively at described vapor deposition source Opposite sides;
Described actuating unit is for being arranged on the side corresponding with described substrate position to be plated of described vapor deposition source, described Actuating unit includes that power source, the first drivening piece and the second drivening piece, described power source are flexibly connected with described first drivening piece, Described first drivening piece is flexibly connected with described second drivening piece, and described power source can drive described first drivening piece to rotate, with Described first drivening piece is made to drive described second drivening piece to rotate;
Described guard mechanism connects described second drivening piece, and described guard mechanism can be under the drive of described second drivening piece Rotate clockwise and anticlockwise in the range of the axis angle with described vapor deposition source is 0-90 °.
Preferably, the rectangular tabular of described guard mechanism, the long edge of described guard mechanism is away from described actuating unit Direction extends, and the width of described guard mechanism is more than or equal to the diameter of described vapor deposition source;Described guard mechanism can its plate face with The axis angle of described vapor deposition source rotates in the range of being 0-90 ° clockwise and anticlockwise.
Preferably, cylindrically, one end nozzle of described cylinder is for the evaporation with described vapor deposition source for described guard mechanism Face is relative, and the barrel dliameter of described cylinder extends along the direction away from described actuating unit, and the diameter of described cylinder is more than or equal to described The diameter of vapor deposition source;Described guard mechanism can in the range of the axis angle of its barrel dliameter Yu described vapor deposition source is 0-90 ° up time Pin and rotating counterclockwise.
Preferably, described guard mechanism uses metal material.
Preferably, the block surface towards described vapor deposition source that is used for of described guard mechanism is set to latticed.
Preferably, described power source includes that pneumatic source or electronic source, described first drivening piece include worm screw, described second band Moving part includes turbine;Described worm screw is mutually movable with described turbine to be engaged, and described power source can drive described worm screw to rotate, described Worm screw can drive described turbine rotation.
Preferably, also include that control module, described control module are connected with described actuating unit, be used for controlling described power Mechanism action, to drive described guard mechanism to block described vapor deposition source and the described evaporation passage treated between plated substrate;And band Dynamic described guard mechanism is shifted one's position, so that described vapor deposition source and the described evaporation passage treated between plated substrate are opened.
The present invention also provides for a kind of deposition system, including above-mentioned radical occlusion device.
Preferably, also including vapor deposition source, evaporation rate induction apparatus and evaporation film thickness controller, described vapor deposition source is for treating Film plating layer is steamed on plated substrate;Described evaporation rate induction apparatus is for gathering the evaporation rate of described vapor deposition source, and the institute that will gather State evaporation rate and be sent to described evaporation film thickness controller;Described evaporation film thickness controller is for controlling according to described evaporation rate Evaporation is to the described thicknesses of layers treated on plated substrate;
The control module of described radical occlusion device connects described evaporation film thickness controller, and described evaporation film thickness controller is additionally operable to Control described control module and send control instruction to actuating unit.
The present invention also provides for the occlusion method of a kind of such as above-mentioned radical occlusion device, including:
Controlling the stage at evaporation rate, actuating unit drives guard mechanism to block vapor deposition source and the evaporation treating between plated substrate Passage, and keep the evaporation passage between described vapor deposition source and evaporation rate induction apparatus to open;
Evaporation the stage, described actuating unit drive described guard mechanism open described vapor deposition source with described treat plated substrate it Between evaporation passage, and continue to keep the evaporation passage between described vapor deposition source and described evaporation rate induction apparatus to open.
Beneficial effects of the present invention: radical occlusion device provided by the present invention, by arranging guard mechanism, can be in evaporation speed The rate control stage blocks vapor deposition source and the evaporation passage treated between plated substrate, and keeps between vapor deposition source and evaporation rate induction apparatus Evaporation passage open;Vapor deposition source and the evaporation passage treated between plated substrate can be opened in the evaporation stage again, and continue to keep steaming Evaporation passage between plating source and evaporation rate induction apparatus is opened, it is achieved that can carry out deposition material in advance before evaporation Rate controlled, when evaporation starts, the speed of deposition material has reached stable, it is achieved thereby that the seriality of evaporation controls, no Only shorten the evaporation time, and saved deposition material, and then not only increase production capacity, and saved cost, also simultaneously Improve stability and the yield of evaporation.
Deposition system provided by the present invention, by using above-mentioned radical occlusion device, it is achieved that the seriality of this deposition system Evaporation controls, and makes this deposition system not only shorten the evaporation time, and has saved deposition material, thus not only increases product Can, and saved cost, also improve stability and the yield of evaporation simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural representation of radical occlusion device in the embodiment of the present invention 1;
Fig. 2 is the structure top view of the block surface of guard mechanism in Fig. 1;
Fig. 3 is guard mechanism in Fig. 1 arranges position view what evaporation rate controlled the stage;
Fig. 4 is that guard mechanism in Fig. 1 arranges position view in the evaporation stage;
Fig. 5 is the structural representation of radical occlusion device in the embodiment of the present invention 2.
Description of reference numerals therein:
1. actuating unit;11. first drivening pieces;12. second drivening pieces;2. guard mechanism;L. the long limit of guard mechanism;W. The width of guard mechanism;3. vapor deposition source;The axis of 31. vapor deposition source;4. treat plated substrate;5. evaporation rate induction apparatus.
Detailed description of the invention
For making those skilled in the art be more fully understood that technical scheme, below in conjunction with the accompanying drawings and be embodied as A kind of radical occlusion device provided by the present invention and occlusion method thereof and deposition system are described in further detail by mode.
Embodiment 1:
The present embodiment provides a kind of radical occlusion device, as it is shown in figure 1, include actuating unit 1 and guard mechanism 2, actuating unit 1 For driving guard mechanism 2 to convert diverse location, guard mechanism 2 leads to for blocking vapor deposition source 3 and the evaporation treated between plated substrate 4 Road, and keep the evaporation passage between vapor deposition source 3 and evaporation rate induction apparatus 5 to open;It is additionally operable to open vapor deposition source 3 and base to be plated Evaporation passage between plate 4, and keep the evaporation passage between vapor deposition source 3 and evaporation rate induction apparatus 5 to open.
This radical occlusion device is by arranging guard mechanism 2, it is achieved that can evaporation rate control the stage block vapor deposition source 3 with Treat the evaporation passage between plated substrate 4, and keep the evaporation passage between vapor deposition source 3 and evaporation rate induction apparatus 5 to open;Again can Open vapor deposition source 3 and the evaporation passage treated between plated substrate 4 in the evaporation stage, and continue to keep vapor deposition source 3 and evaporation rate sense Answer the evaporation passage between device 5 to open, it is achieved thereby that the rate controlled of deposition material can be carried out before evaporation in advance, steam When plating starts, the speed of deposition material has reached stable, and then the seriality achieving evaporation controls, and not only shortens evaporation Time, and saved deposition material, not only increase production capacity simultaneously, and saved cost, also improve stablizing of evaporation Property and yield.
In the present embodiment, evaporation rate induction apparatus 5 and treat that plated substrate 4 is respectively positioned on the top of vapor deposition source 3, and evaporation rate sense Answer device 5 and treat plated substrate 4 vapor deposition source 3 orthographic projection in the plane lay respectively at the opposite sides of vapor deposition source 3.Actuating unit 1 for being arranged on the side corresponding with treating plated substrate 4 position of vapor deposition source 3, and actuating unit 1 includes that power source (does not shows in figure Go out), the first drivening piece 11 and the second drivening piece 12, power source and the first drivening piece 11 be flexibly connected, the first drivening piece 11 and Two drivening pieces 12 are flexibly connected, and power source can drive the first drivening piece 11 to rotate, so that the first drivening piece 11 drives the second drive Part 12 rotates.Guard mechanism 2 connects the second drivening piece 12, guard mechanism 2 can under the drive of the second drivening piece 12 with evaporation Axis 31 angle in source 3 rotates in the range of being 0-90 ° clockwise and anticlockwise.
Wherein, power source includes pneumatic source (such as cylinder) or electronic source (such as motor), and the first drivening piece 11 includes worm screw, the Two drivening pieces 12 include turbine;Worm screw is mutually movable with turbine to be engaged, and power source can drive worm screw to rotate, and worm screw can drive turbine Rotate.Certainly, the structure of the first drivening piece 11 and the second drivening piece 12 is not limited only to the structure of above-mentioned turbine and worm screw. First drivening piece 11 and the setting of the second drivening piece 12, makes guard mechanism 2 rotate more flexible, it is thus possible to more neatly Realize guard mechanism 2 evaporation passage is blocked and opened, the most also substantially reduce the energy consumed when guard mechanism 2 rotates Amount.
Said structure based on radical occlusion device, guard mechanism 2 rotates counterclockwise, it is possible to realize controlling the stage at evaporation rate Vapor deposition source 3 and the evaporation passage treated between plated substrate 4 are blocked, so that it is guaranteed that the deposition material speed in vapor deposition source 3 does not has Have before reaching to stablize, will not be deposited with and treat on plated substrate 4;Guard mechanism 2 rotates clockwise, it is possible to realize opening in the evaporation stage Open vapor deposition source 3 and the evaporation passage treated between plated substrate 4, and keep the evaporation between vapor deposition source 3 and evaporation rate induction apparatus 5 to lead to Road is opened, and ensures that the coating quality treated on plated substrate 4.
Wherein, the rectangular tabular of guard mechanism 2, the long limit L of guard mechanism 2 extends along the direction away from actuating unit 1, hides The width W of retaining device 2 is more than or equal to the diameter of vapor deposition source 3;Guard mechanism 2 can be at axis 31 angle in its plate face Yu vapor deposition source 3 Rotate clockwise and anticlockwise in the range of 0-90 °.Vapor deposition source 3 is that deposition material is arranged on the evaporation chamber of cylindrical shape In, during evaporation, the deposition material in chamber is carried out heat temperature raising, make deposition material upwards evaporate.Evaporation speed before evaporation Rate controls the stage, and guard mechanism 2 rotates counterclockwise to certain in the range of 0-90 ° of axis 31 angle of its plate face and vapor deposition source 3 During one angle such as 60 °, it can be made just to shelter from vapor deposition source 3 and the evaporation passage treated between plated substrate 4, make the deposition material cannot Evaporation is to treating on plated substrate 4, thus avoids the deposition material controlling stage speed unstable at evaporation rate to be deposited with base to be plated On plate 4, cause steaming film plating layer abnormal.When vapor deposition source 3 starts to be deposited with, guard mechanism 2 is rotated clockwise to its plate face and evaporation During axis 31 angle in source 3 a certain angle in the range of 0-90 ° such as 90 °, the plate face of guard mechanism 2 can be made no longer to block evaporation Source 3 and the evaporation passage treated between plated substrate 4, can also keep the evaporation between vapor deposition source 3 and evaporation rate induction apparatus 5 to lead to simultaneously Road is opened, and now, deposition material can be normally deposited with by vapor deposition source 3 to be treated on plated substrate 4, meanwhile, and evaporation rate induction apparatus 5 energy Enough normally monitor and control evaporation rate.When vapor deposition source 3 is not deposited with, guard mechanism 2 turns to its plate face just by vapor deposition source 3 The position that covers of evaporation opening.
In the present embodiment, guard mechanism 2 uses metal material.The guard mechanism 2 of metal material has deposition material Good carrying effect, i.e. owing to controlling the stage at evaporation rate, guard mechanism 2 has blocked vapor deposition source 3 and has treated between plated substrate 4 Evaporation passage, be deposited with on guard mechanism 2 so deposition material has part in this stage, the guard mechanism 2 of metal material It is not easy to make evaporation split away off to deposition material thereon, thus avoids after the deposition material come off falls in vapor deposition source 3 The quality of evaporation is had undesirable effect.
In the present embodiment, as in figure 2 it is shown, the block surface towards vapor deposition source 3 that is used for of guard mechanism 2 is set to latticed. Latticed block surface can make the evaporation deposition material to this face be firmly adhered in grid, thus further increases screening The retaining device 2 bearing capacity to evaporation to deposition material thereon, makes evaporation be not easy to come off to deposition material thereon, it is ensured that Evaporation can be normally carried out.
It should be noted that can also only allow the block surface of guard mechanism 2 use metal material, and its of guard mechanism 2 He partly uses the material that the weight ratio such as plastics or pottery is lighter, so can also reduce the gravity of guard mechanism 2 entirety, make screening Retaining device 2 is not easy to rotate because of gravity position change.
In the present embodiment, radical occlusion device also includes control module (not shown), and control module is with actuating unit 1 even Connect, be used for controlling actuating unit 1 action, to drive guard mechanism 2 to block vapor deposition source 3 and the evaporation passage treated between plated substrate 4; And drive guard mechanism 2 to shift one's position, so that vapor deposition source 3 and the evaporation passage treated between plated substrate 4 are opened.Control module Arranging, the evolution making guard mechanism 2 is more intelligent, thus further increases evaporation efficiency.
Said structure based on radical occlusion device, the present embodiment also provides for the occlusion method of this radical occlusion device a kind of, including: Evaporation rate controls the stage, and actuating unit 1 drives guard mechanism 2 to block vapor deposition source 3 and the evaporation passage treated between plated substrate 4, And keep the evaporation passage between vapor deposition source 3 and evaporation rate induction apparatus 5 to open (as shown in Figure 3).At evaporation stage, engine Structure 1 drives guard mechanism 2 to open vapor deposition source 3 and the evaporation passage treated between plated substrate 4, and continues to keep vapor deposition source 3 and evaporation Evaporation passage between speed induction apparatus 5 opens (as shown in Figure 4).
Embodiment 2:
The present embodiment provides a kind of radical occlusion device, as different from Example 1, as it is shown in figure 5, guard mechanism 2 is in cylinder Shape, one end nozzle of cylinder is for relative with the evaporation face of vapor deposition source 3, and the barrel dliameter of cylinder prolongs along the direction away from actuating unit 1 Stretching, the diameter of cylinder is more than or equal to the diameter of vapor deposition source 3;Guard mechanism 2 can be at axis 31 angle of its barrel dliameter with vapor deposition source 3 Rotate clockwise and anticlockwise in the range of 0-90 °.
In the present embodiment, control the stage at evaporation rate, when cylindric guard mechanism 2 turns to block position, just Vapor deposition source 3 and the evaporation treated between plated substrate 4 passage can be sheltered from completely, it is to avoid control stage speed at evaporation rate unstable Fixed deposition material is deposited with to be treated on plated substrate 4, causes steaming film plating layer abnormal.
Wherein, controlling the stage at evaporation rate, cylindric guard mechanism 2 can forward its other end nozzle and evaporation speed just to Rate induction apparatus 5 is just relative, i.e. the bearing of trend of cylinder barrel dliameter evaporation just and between vapor deposition source 3 and evaporation rate induction apparatus 5 Passage bearing of trend is consistent, and now, the deposition material that vapor deposition source 3 is evaporated is just introversive along the cylinder of cylindric guard mechanism 2 Evaporation rate induction apparatus 5 is deposited with, and is controlled with the evaporation rate to deposition material;Meanwhile, in this stage, the steaming of vapor deposition source 3 Plating material cannot be deposited with to be treated on plated substrate 4.In that case it is preferable that the inner core face of cylindric guard mechanism 2 is set to Latticed.
In the present embodiment, other structures and the occlusion method of radical occlusion device are in the same manner as in Example 1, and here is omitted.
It is further to note that guard mechanism 2 can also use the structure of other shapes, as long as can be at evaporation rate Vapor deposition source 3 and the evaporation passage treated between plated substrate 4 are realized blocking by the control stage.
The beneficial effect of embodiment 1-2: the radical occlusion device that embodiment 1-2 is provided, by arranging guard mechanism, Ji Neng The evaporation rate control stage blocks vapor deposition source and the evaporation passage treated between plated substrate, and keeps vapor deposition source to sense with evaporation rate Evaporation passage between device is opened;Vapor deposition source and the evaporation passage treated between plated substrate can be opened in the evaporation stage again, and continue The evaporation passage between vapor deposition source and evaporation rate induction apparatus is kept to open, it is achieved that can be deposited with in advance before evaporation The rate controlled of material, when evaporation starts, the speed of deposition material has reached stable, it is achieved thereby that the seriality control of evaporation System, not only shortens the evaporation time, and has saved deposition material, and then not only increase production capacity, and saved cost, with Time also improve stability and the yield of evaporation.
Embodiment 3:
The present embodiment provides a kind of deposition system, including embodiment 1-2 radical occlusion device in any one.
Wherein, deposition system also include vapor deposition source, evaporation rate induction apparatus and evaporation film thickness controller, vapor deposition source for Treat to steam on plated substrate film plating layer.Evaporation rate induction apparatus is for gathering the evaporation rate of vapor deposition source, and the evaporation rate that will gather It is sent to be deposited with film thickness controller.Evaporation film thickness controller is for controlling evaporation to the film layer treated on plated substrate according to evaporation rate Thickness.The control module of radical occlusion device connects evaporation film thickness controller, and evaporation film thickness controller is additionally operable to control this control module Control instruction is sent to actuating unit.
By using embodiment 1-2 radical occlusion device in any one, it is achieved that the seriality evaporation control of this deposition system System, makes this deposition system not only shorten the evaporation time, and has saved deposition material, thus not only increase production capacity, and Save cost, also improve stability and the yield of evaporation simultaneously.
It is understood that the principle that is intended to be merely illustrative of the present of embodiment of above and the exemplary enforcement that uses Mode, but the invention is not limited in this.For those skilled in the art, in the essence without departing from the present invention In the case of god and essence, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.

Claims (11)

1. a radical occlusion device, including actuating unit and guard mechanism, it is characterised in that described actuating unit is used for driving described Guard mechanism conversion diverse location, described guard mechanism is for blocking vapor deposition source and the evaporation passage treated between plated substrate, and protects Hold the evaporation passage between described vapor deposition source and evaporation rate induction apparatus to open;It is additionally operable to open described vapor deposition source to be plated with described Evaporation passage between substrate, and keep the evaporation passage between described vapor deposition source and described evaporation rate induction apparatus to open.
Radical occlusion device the most according to claim 1, it is characterised in that described evaporation rate induction apparatus and described treat plated substrate It is respectively positioned on the top of described vapor deposition source, and described evaporation rate induction apparatus and described treat that plated substrate is in described vapor deposition source place plane On orthographic projection lay respectively at the opposite sides of described vapor deposition source;
Described actuating unit is for being arranged on the side corresponding with described substrate position to be plated of described vapor deposition source, described power Mechanism includes power source, the first drivening piece and the second drivening piece, and described power source is flexibly connected with described first drivening piece, described First drivening piece is flexibly connected with described second drivening piece, and described power source can drive described first drivening piece to rotate, so that institute Stating the first drivening piece drives described second drivening piece to rotate;
Described guard mechanism connect described second drivening piece, described guard mechanism can under the drive of described second drivening piece with The axis angle of described vapor deposition source rotates in the range of being 0-90 ° clockwise and anticlockwise.
Radical occlusion device the most according to claim 2, it is characterised in that the rectangular tabular of described guard mechanism, described in block The long edge of mechanism extends away from the direction of described actuating unit, and the width of described guard mechanism is more than or equal to described vapor deposition source Diameter;Described guard mechanism can in the range of the axis angle in its plate face Yu described vapor deposition source is 0-90 ° clockwise and the inverse time Pin rotates.
Radical occlusion device the most according to claim 2, it is characterised in that described guard mechanism cylindrically, described cylinder One end nozzle is for relative with the evaporation face of described vapor deposition source, and the barrel dliameter of described cylinder prolongs along the direction away from described actuating unit Stretching, the diameter of described cylinder is more than or equal to the diameter of described vapor deposition source;Described guard mechanism can be in its barrel dliameter and described vapor deposition source Axis angle be 0-90 ° in the range of rotate clockwise and anticlockwise.
5. according to the radical occlusion device described in claim 1-4 any one, it is characterised in that described guard mechanism uses metal material Material.
6. according to the radical occlusion device described in claim 1-4 any one, it is characterised in that described guard mechanism for towards The block surface of described vapor deposition source is set to latticed.
Radical occlusion device the most according to claim 2, it is characterised in that described power source includes pneumatic source or electronic source, institute State the first drivening piece and include that worm screw, described second drivening piece include turbine;Described worm screw is mutually movable with described turbine to be engaged, institute Stating power source can drive described worm screw to rotate, and described worm screw can drive described turbine rotation.
Radical occlusion device the most according to claim 1, it is characterised in that also include control module, described control module and institute State actuating unit to connect, be used for controlling described actuating unit action, to drive described guard mechanism to block described vapor deposition source and institute State the evaporation passage treated between plated substrate;And drive described guard mechanism to shift one's position, so that described vapor deposition source is treated with described Evaporation passage between plated substrate is opened.
9. a deposition system, it is characterised in that include the radical occlusion device described in claim 1-8 any one.
Deposition system the most according to claim 9, it is characterised in that also include vapor deposition source, evaporation rate induction apparatus and steaming Plating film thickness controller, described vapor deposition source is for treating to steam on plated substrate film plating layer;Described evaporation rate induction apparatus is used for gathering institute State the evaporation rate of vapor deposition source, and the described evaporation rate gathered is sent to described evaporation film thickness controller;Described evaporation film Thick controller is for controlling evaporation to the described thicknesses of layers treated on plated substrate according to described evaporation rate;
The control module of described radical occlusion device connects described evaporation film thickness controller, and described evaporation film thickness controller is additionally operable to control Described control module sends control instruction to actuating unit.
The occlusion method of 11. 1 kinds of radical occlusion devices as described in claim 1-8 any one, it is characterised in that including:
Controlling the stage at evaporation rate, actuating unit drives guard mechanism to block vapor deposition source and the evaporation treating between plated substrate leads to Road, and keep the evaporation passage between described vapor deposition source and evaporation rate induction apparatus to open;
In the evaporation stage, described actuating unit drives described guard mechanism open described vapor deposition source and described treat between plated substrate Evaporation passage, and continue to keep the evaporation passage between described vapor deposition source and described evaporation rate induction apparatus to open.
CN201610509680.9A 2016-06-30 2016-06-30 A kind of radical occlusion device and its occlusion method and deposition system Active CN106086783B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610509680.9A CN106086783B (en) 2016-06-30 2016-06-30 A kind of radical occlusion device and its occlusion method and deposition system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610509680.9A CN106086783B (en) 2016-06-30 2016-06-30 A kind of radical occlusion device and its occlusion method and deposition system

Publications (2)

Publication Number Publication Date
CN106086783A true CN106086783A (en) 2016-11-09
CN106086783B CN106086783B (en) 2019-01-22

Family

ID=57211634

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610509680.9A Active CN106086783B (en) 2016-06-30 2016-06-30 A kind of radical occlusion device and its occlusion method and deposition system

Country Status (1)

Country Link
CN (1) CN106086783B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107858651A (en) * 2017-11-27 2018-03-30 合肥鑫晟光电科技有限公司 A kind of evaporated device
CN111334754A (en) * 2018-12-18 2020-06-26 合肥欣奕华智能机器有限公司 Evaporation device capable of monitoring rate and rate monitoring method
CN112981314A (en) * 2021-02-03 2021-06-18 武汉华星光电半导体显示技术有限公司 Evaporation plating equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006045581A (en) * 2004-07-30 2006-02-16 Nec Kansai Ltd Vacuum deposition apparatus and vacuum deposition method using the apparatus
CN102534529A (en) * 2010-12-24 2012-07-04 北京北方微电子基地设备工艺研究中心有限责任公司 Magnetron sputtering source and magnetron sputtering equipment
CN102703875A (en) * 2012-07-05 2012-10-03 哈尔滨工业大学 Technological equipment for swept-angle magnetron sputtering deposition
CN105349960A (en) * 2015-10-27 2016-02-24 京东方科技集团股份有限公司 Shielding device, shielding method thereof and evaporation system
CN105525257A (en) * 2015-12-31 2016-04-27 蚌埠雷诺真空技术有限公司 Continuous mask baffle transmission device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006045581A (en) * 2004-07-30 2006-02-16 Nec Kansai Ltd Vacuum deposition apparatus and vacuum deposition method using the apparatus
CN102534529A (en) * 2010-12-24 2012-07-04 北京北方微电子基地设备工艺研究中心有限责任公司 Magnetron sputtering source and magnetron sputtering equipment
CN102703875A (en) * 2012-07-05 2012-10-03 哈尔滨工业大学 Technological equipment for swept-angle magnetron sputtering deposition
CN105349960A (en) * 2015-10-27 2016-02-24 京东方科技集团股份有限公司 Shielding device, shielding method thereof and evaporation system
CN105525257A (en) * 2015-12-31 2016-04-27 蚌埠雷诺真空技术有限公司 Continuous mask baffle transmission device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107858651A (en) * 2017-11-27 2018-03-30 合肥鑫晟光电科技有限公司 A kind of evaporated device
CN107858651B (en) * 2017-11-27 2020-02-04 合肥鑫晟光电科技有限公司 Evaporation plating equipment
CN111334754A (en) * 2018-12-18 2020-06-26 合肥欣奕华智能机器有限公司 Evaporation device capable of monitoring rate and rate monitoring method
CN112981314A (en) * 2021-02-03 2021-06-18 武汉华星光电半导体显示技术有限公司 Evaporation plating equipment

Also Published As

Publication number Publication date
CN106086783B (en) 2019-01-22

Similar Documents

Publication Publication Date Title
CN105349960B (en) A kind of radical occlusion device and its occlusion method and deposition system
CN106086783A (en) A kind of radical occlusion device and occlusion method thereof and deposition system
KR20190082723A (en) Method for double-side vacuum film formation and laminate obtainable by the method
WO2018018926A1 (en) Evaporator, evaporation coating apparatus and evaporation coating method
US20170159171A1 (en) Evaporation method
KR101146981B1 (en) Apparatus of evaporation and control method the same
KR102014932B1 (en) Method for double-side vacuum film formation and laminate obtainable by the method
CN103993269A (en) Coating device and coating method
CN105154831B (en) A kind of vacuum evaporation source apparatus and vacuum evaporation equipment
US20210292890A1 (en) Evaporation deposition device and method of controlling same
CN108441813A (en) A kind of mask mounting assembly and mask device
KR20130074307A (en) Evaporation device for manufacturing of oled having apparatus for chucking and dechucking
EP3162912B1 (en) Film formation device for cutting tool provided with coating film, and film formation method for cutting tool provided with coating film
CN106756807A (en) A kind of vapor deposition source, evaporation coating device and its evaporation coating method
JP2007119829A (en) Sputtering film deposition apparatus
KR101204855B1 (en) Evaporation device for manufacturing of OLED
JP2007224376A (en) Vacuum vapor deposition apparatus and method
CN102327839A (en) Drum-type film coating equipment
JP2014031547A (en) Vapor deposition device and vapor deposition method
KR101325481B1 (en) Evaporating apparatus capable of making patterns
KR20150046565A (en) Apparatus for Depositing Thin Film
CN205692926U (en) A kind of making apparatus of lithium ion battery
KR20210130762A (en) Optimized systems and methods for transporting and moving substrates in modular coating facilities
KR102188345B1 (en) Vapor deposition device substrate treting method
KR20170048510A (en) Assembly and method for deposition of material on a substrate

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant