CN206486586U - Coating machine vaporizing-source system - Google Patents
Coating machine vaporizing-source system Download PDFInfo
- Publication number
- CN206486586U CN206486586U CN201720181793.0U CN201720181793U CN206486586U CN 206486586 U CN206486586 U CN 206486586U CN 201720181793 U CN201720181793 U CN 201720181793U CN 206486586 U CN206486586 U CN 206486586U
- Authority
- CN
- China
- Prior art keywords
- crucible
- electron gun
- coating machine
- groove
- vaporizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a kind of coating machine vaporizing-source system, it is related to coating machine technical field, including electron gun, crucible and the motor for driving crucible, the electron gun and crucible are arranged on the bottom plate of coating machine vacuum chamber, multiple hoppers are set on crucible, electron gun launching electronics beam is by abrasive material heating evaporation in hopper, 0.8 to 2mm equipment gap is set between crucible wall and the electron gun side wall is used for the installation of crucible and electron gun, the groove of annular is set on the periphery of the crucible, groove includes two symmetrically arranged slope formation flow guiding structures, the cross section of groove is in isosceles trapezoid, two trapezoidal waists are located on slope respectively.The favourable coating materials to the molten condition at sputtering of the slope of groove carries out drainage, prevents coating materials from gathering to produce obstruction to the rotation of crucible at fit-up gap, prevents the coating materials sputtered from entering in gap, influence the revolution of crucible, reduce stuck phenomenon.
Description
Technical field
The utility model is related to coating machine technical field, and in particular to a kind of vaporizing-source system of coating machine.
Background technology
Vacuum coating equipment is mainly comprised the following steps：Vacuum cavity, extract system inflates gas distribution system, heating system
System, thin film deposition control system, high voltage system, low voltage control system, vaporizing-source system, workpiece rotation system.Its function
It is described as follows：
Vacuum cavity：One space of plated film processing
Extract system：Plated film is set to reach required vacuum
Inflate gas distribution system：Pneumatic element is set to obtain enough air pressure execution
Heating system：Substrate is set to reach the temperature needed for plated film
Thin film deposition control system：The thickness plated on substrate is set to reach required requirement
High voltage system:Evaporation source is set to obtain enough voltage
Low voltage control system：The element of coating machine is controlled to complete defined act
Vaporizing-source system：Coating materials is allowed to evaporate
Workpiece rotation system：Load substrate and rotate it
And crucible structure is exactly the critical piece of vaporizing-source system, the stability of its work directly affect product into film quality
Amount.
Utility model content
The technical problems to be solved in the utility model be easily occur between existing coating machine crucible and electron gun it is stuck
Technical problem.
In order to solve the above-mentioned technical problem, the technical solution adopted in the utility model is：A kind of coating machine vaporizing-source system,
Motor including electron gun, crucible and for driving crucible, the electron gun and crucible are arranged at coating machine vacuum chamber
Bottom plate on, multiple hoppers are set on crucible, and electron gun launching electronics beam is by abrasive material heating evaporation in hopper, the crucible wall
0.8 to 2mm equipment gap is set between electron gun side wall is used for the installation of crucible and electron gun, the periphery of the crucible
Upper to set annular groove, groove includes two symmetrically arranged slopes formation flow guiding structures, and the cross section of groove is in isosceles
Trapezoidal, two trapezoidal waists are located on slope respectively.
Further, the crucible lower end sets annular flange to be used for the bottom plate that crucible is arranged on to coating machine vacuum chamber
On, the upper surface diameter of crucible is more than the external diameter and annular flange and the gap sum of bottom plate of annular flange.
Further, the baffle plate for being used to block below standard coating materials that can be swung is set above the crucible.
Further, the groove is located at the top half of crucible.
From above-mentioned technical proposal it can be seen that the utility model has advantages below：The slope of groove it is favourable to sputtering at
The coating materials of molten condition carry out drainage, prevent coating materials gathering so as to produce obstruction to the rotation of crucible at fit-up gap,
The upper surface of crucible can be covered to the gap between crucible and bottom plate, prevent the coating materials sputtered from entering in gap, shadow
The revolution of crucible is rung, stuck phenomenon is reduced.
Brief description of the drawings
Fig. 1 is the assembling schematic diagram of crucible of the present utility model and electron gun；
Fig. 2 is the structural representation of crucible in the utility model；
Fig. 3 is the structural representation of coating machine vaporizing-source system of the present utility model.
Embodiment
Embodiment of the present utility model is elaborated below in conjunction with accompanying drawing.
As shown in figures 1 and 3, coating machine vaporizing-source system of the present utility model, including electron gun 2, crucible 4 and be used for
The motor (being not drawn into figure) of crucible is driven, the electron gun 2 and crucible 4 are arranged on the bottom plate 5 of coating machine vacuum chamber,
Multiple hoppers are set on crucible 4, and the launching electronics beam of electron gun 2 is by coating materials heating evaporation in hopper, the side wall of crucible 4 and electron gun 2
0.8 to 2mm equipment gap is set between the wall of side is used for the installation of crucible and electron gun, generally 1mm, and coating materials is by electron gun
After heating is dissolved, have a small amount of coating materials and be splashed into from hopper in fit-up gap.
The structure of crucible is as shown in Fig. 2 set the groove 6 of annular on the periphery of crucible, groove is symmetrically set including two
The formation flow guiding structure of slope 7 put, the cross section of groove 6 is in isosceles trapezoid, and groove 6 is arranged on the top half of crucible, two
The angle of 120 ° or so of formation between individual slope, two trapezoidal waists are located on slope 7 respectively.
The favourable coating materials to the molten condition at sputtering of the slope of groove 6 carries out drainage, prevents coating materials in fit-up gap
Place gathers so as to produce obstruction to the rotation of crucible, prevents stuck.
The lower end of crucible 4 set annular flange 8 be used for by crucible be arranged on coating machine vacuum chamber bottom plate 5, crucible 4 it is upper
End face diameter is more than the external diameter of annular flange 8 plus annular flange and the gap sum of bottom plate.The upper surface of crucible can be to earthenware
Gap between crucible and bottom plate is covered, and is prevented the coating materials sputtered from entering in gap, is influenceed the revolution of crucible, reduces stuck
Phenomenon.
As shown in figure 3, setting the baffle plate 3 for being used to block below standard coating materials that can be swung above crucible, baffle plate 3 is fixed
Bar 1 is fixed, and fix bar 1 can be realized by motor or cylinder etc. and rotated so as to realize the swing of baffle plate 3, when the film in crucible
When material is not also heated to plated film standard, crucible is covered with baffle plate, shadow of the top to plating film quality that coating materials enters vacuum chamber is reduced
Ring.After coating materials reaches plated film standard, baffle plate is removed.
Claims (4)
1. a kind of coating machine vaporizing-source system, including electron gun, crucible and the motor for driving crucible, the electron gun with
And crucible is arranged on the bottom plate of coating machine vacuum chamber, multiple hoppers are set, electron gun launching electronics beam is by hopper on crucible
Middle abrasive material heating evaporation, it is characterised in that：The 0.8 equipment gap for arriving 2mm is set between crucible wall and the electron gun side wall
For the installation of crucible and electron gun, the groove of annular is set, groove is symmetrical arranged including two on the periphery of the crucible
Slope formation flow guiding structure, the cross section of groove is in isosceles trapezoid, and two trapezoidal waists are located on slope respectively.
2. coating machine vaporizing-source system according to claim 1, it is characterised in that：The crucible lower end sets annular flange
Bottom plate for crucible to be arranged on to coating machine vacuum chamber, the upper surface diameter of crucible is more than the external diameter and annular of annular flange
The gap sum of flange and bottom plate.
3. coating machine vaporizing-source system according to claim 1, it is characterised in that：Being set above the crucible to swing
Be used for block the baffle plate of below standard coating materials.
4. coating machine vaporizing-source system according to claim 1, it is characterised in that：The groove is located at the first half of crucible
Point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720181793.0U CN206486586U (en) | 2017-02-27 | 2017-02-27 | Coating machine vaporizing-source system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720181793.0U CN206486586U (en) | 2017-02-27 | 2017-02-27 | Coating machine vaporizing-source system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206486586U true CN206486586U (en) | 2017-09-12 |
Family
ID=59762819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720181793.0U Active CN206486586U (en) | 2017-02-27 | 2017-02-27 | Coating machine vaporizing-source system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206486586U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111139437A (en) * | 2020-02-27 | 2020-05-12 | 成都国泰真空设备有限公司 | Rotary type melt device |
| WO2022206385A1 (en) * | 2021-04-01 | 2022-10-06 | 宁波星河材料科技有限公司 | High-flux film preparation device in which crucible replacement is convenient, and use thereof |
-
2017
- 2017-02-27 CN CN201720181793.0U patent/CN206486586U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111139437A (en) * | 2020-02-27 | 2020-05-12 | 成都国泰真空设备有限公司 | Rotary type melt device |
| WO2022206385A1 (en) * | 2021-04-01 | 2022-10-06 | 宁波星河材料科技有限公司 | High-flux film preparation device in which crucible replacement is convenient, and use thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206486586U (en) | Coating machine vaporizing-source system | |
| JP4110175B2 (en) | Arc ion plating method | |
| CN103993266B (en) | Vacuum evaporation equipment | |
| WO2023045052A1 (en) | High-throughput thin film deposition device and thin film deposition method | |
| CN101654770B (en) | Production process for preparing indium tin oxide conductive film on flexible base material | |
| CN202576553U (en) | Magnetron sputtering target material | |
| CN214300327U (en) | Cylindrical rotary type rectangular magnetic stripe magnetron sputtering target | |
| CN103866241B (en) | A kind of ion auxiliary thermal evaporation combined magnetic-controlled sputter coating apparatus | |
| CN108193183A (en) | A kind of adjustable cathode baffle | |
| CN107022743A (en) | A kind of magnetic-control sputtering continuous plating equipment for micro-nano powder | |
| CN204779787U (en) | Magnetron sputtering target rifle | |
| CN201890924U (en) | Plasma vacuum ceramic coating device | |
| CN208121194U (en) | A kind of adjustable cathode baffle | |
| CN204644456U (en) | The vacuum coating film equipment that volume to volume magnetic control sputtering cathode combines with column multi-arc source | |
| CN207525332U (en) | A kind of Multi-function rolling film-coating machine based on electronics industry | |
| CN205821446U (en) | A kind of low temperature depositing magnetic control sputtering film plating device | |
| CN206232800U (en) | A kind of evaporation coating device for preparing organic light emitting diode device | |
| CN211645366U (en) | Spraying technology switches protection machanism | |
| CN218203013U (en) | Metallized film evaporation material furnace | |
| CN216192660U (en) | Evaporation source cover plate of film plating machine | |
| CN2086749U (en) | Multi-arc-magnetron sputtering multifunctional coating equipment | |
| CN220926912U (en) | Magnetron sputtering device capable of changing target material group | |
| CN103866258B (en) | A kind of preparation method of the double frequency Magnetron Sputtering Thin Film based on radio frequency and very high frequency(VHF) | |
| CN215103504U (en) | Sectional adjustable gas distribution device suitable for vacuum coating machine | |
| CN208052575U (en) | The high inflation film manufacturing machine vane of control accuracy |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200428 Address after: 214400 No.206, Zhencheng Road, Jiangyin City, Wuxi City, Jiangsu Province Co-patentee after: Song Shuwei Patentee after: JIANGYIN ZHONGXING SINOPRIME OPTICAL INDUSTRY Co.,Ltd. Address before: 214000 No.1, Zhencheng Road, Jiangyin City, Wuxi City, Jiangsu Province Patentee before: JIANGYIN ZHONGXING SINOPRIME OPTICAL INDUSTRY Co.,Ltd. |
|
| TR01 | Transfer of patent right |