WO2022047946A1 - Coating process - Google Patents

Coating process Download PDF

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Publication number
WO2022047946A1
WO2022047946A1 PCT/CN2020/123848 CN2020123848W WO2022047946A1 WO 2022047946 A1 WO2022047946 A1 WO 2022047946A1 CN 2020123848 W CN2020123848 W CN 2020123848W WO 2022047946 A1 WO2022047946 A1 WO 2022047946A1
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Prior art keywords
film
evaporation
vacuum evaporation
coating process
vacuum
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PCT/CN2020/123848
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French (fr)
Chinese (zh)
Inventor
贾孟
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昆山鑫美源电子科技有限公司
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Publication of WO2022047946A1 publication Critical patent/WO2022047946A1/en

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025Metallic sublayers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/081Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/20Metallic material, boron or silicon on organic substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment

Definitions

  • the invention relates to the technical field of coating, in particular to a coating process.
  • Aluminized film is a composite flexible packaging material formed by coating a very thin layer of metal aluminum on the surface of a plastic film by a special process.
  • the metal aluminum is melted and evaporated, so that the vapor of aluminum is deposited on the surface of the plastic film, so that the surface of the plastic film has a metallic luster. Because it has both the characteristics of plastic film and metal, it is a cheap and beautiful film material with excellent performance and strong practicability.
  • the purpose of the present invention is to provide a coating process, which can avoid damage to the surface of the plastic film due to excessive temperature during the vacuum evaporation process, and is conducive to improving the coating qualification rate.
  • a coating process comprising the steps of:
  • Step 1 Pretreatment of the original film
  • Step 2 primer evaporation, install the film material processed in step 1 into the vacuum evaporation equipment, send metal wires to the evaporation boat in the vacuum evaporation equipment, and perform vacuum evaporation on the film material at least once;
  • Step 3 Evaporating, increasing the speed of feeding the metal wire to the evaporation boat, and performing vacuum evaporation on the film material processed in Step 2 again;
  • Step 4 Roll up.
  • the present invention By first evaporating the film at a lower wire feeding speed, less metal particles are deposited on the surface of the film at a time, thereby reducing heat radiation. After the film surface has enough reflective layers and heat-resistant layers , and then increase the wire feeding speed to increase the single deposition amount of metal particles on the surface of the film material. Because the heat resistance of the film material after primer evaporation becomes better, and the film material is still less prone to thermal deformation after increasing the single deposition amount Case.
  • step 1 includes the following operations:
  • the production of aluminum oxide film is beneficial to improve the adhesion between the subsequent coating layer and the film material, and the water on the surface of the film material is removed by baking the film to ensure that no excess water reacts with the evaporated aluminum layer to cause the subsequent coating layer.
  • the adhesion between the coating and the film becomes poor, which is beneficial to improve the bonding firmness between the coating and the film.
  • the wire feeding speed in S1 is 150-850mm/min.
  • the vacuum degree in the vacuum evaporation equipment is 0.001-0.002mbar
  • the power of the evaporation boat is 6000-7000W to start the vacuum evaporation of the original film.
  • the vacuum degree of the film baking equipment is 0.001-0.003 mbar, and the film drying starts when the current of the evaporation boat reaches 80%-90%.
  • the wire feeding speed during the primer evaporation is 300-450mm/min.
  • the coating can be improved while ensuring that the film material will not be deformed due to severe heating. effectiveness.
  • the vacuum degree of the vacuum evaporation equipment is 0.001-0.002mbar during the primer evaporation, and the vacuum evaporation starts when the voltage of the evaporation boat is 9.3-9.5V.
  • the speed of feeding the metal wire during the vapor deposition in the third step is 450-550mm/min.
  • the coating efficiency is high, and it is beneficial to reduce the oxide layer, reduce the resistivity, and also It can ensure that the membrane material will not be deformed by heat.
  • the vacuum degree of the vacuum evaporation equipment is 0.001-0.002 mbar, and the voltage of the evaporation boat is 9.3-9.5V to start the vacuum evaporation.
  • the metal wire is aluminum wire.
  • the original film is a PET film or a CPP film.
  • the vacuum evaporation times in the second step are 1-5 times.
  • the vacuum evaporation times in the third step are 1-20 times.
  • the temperature during vacuum evaporation in the first step, the second step and the third step is 1200-1600°C.
  • the film material obtained in step 4 is also included in slitting, scraper detection and packaging and storage.
  • the metal material by vapor deposition and sputtering may cause protrusions on the surface of the film
  • the protrusions can be flattened or scraped off to avoid the protrusions when the product arrives at the customer. The problem caused the film to fail.
  • the vacuum evaporation equipment uses a new evaporation boat, it needs to be treated with boat running, and the main processes are hot boat, boat burning and boat grinding.
  • the main processes are hot boat, boat burning and boat grinding.
  • it should be moistened to ensure that the evaporation boat is evenly infiltrated and the surface of the boat is heated evenly, so as to improve the service life and improve the problem of sputtering failure.
  • the evaporation boat when the evaporation boat is used with an evaporation length of 150,000 meters, the evaporation boat needs to be replaced. After the evaporation boat is worn out, the pits on the boat surface are prone to liquid accumulation and uneven heating, resulting in the failure of splashing aluminum.
  • the production process avoids damage to the film surface due to excessively high temperature during the vacuum evaporation process, improves the coating qualification rate and reduces the production cost.
  • the adhesion between the coating and the original film is improved.
  • the single deposition amount of metal material on the surface of the film is first reduced to reduce thermal radiation. After the film surface has enough reflective layer and heat-resistant layer, the single deposition amount of metal material on the surface of the film is increased. Coating efficiency, low deposition volume evaporation has been used to increase the oxide layer and increase the resistivity. At the same time, it avoids film surface deformation or film breakage caused by severe heating of the film surface, which is conducive to improving the product qualification rate.
  • a coating process comprising the steps of:
  • the first step is to pretreat the original PET film, which specifically includes the following operations.
  • the vacuum evaporation equipment uses a new evaporation boat, it needs to be wetted.
  • the main processes are hot boat, boat burning and boat grinding to ensure uniform infiltration of the evaporation boat and uniform heating of the boat surface, improve service life and improve splashing. Aluminum failure problem.
  • the evaporation boat When the evaporation boat is used with an evaporation length of 150,000 meters, the evaporation boat needs to be replaced. After the evaporation boat is worn out, the pits on the boat surface are prone to liquid accumulation and uneven heating, resulting in the failure of splashing aluminum.
  • Step 2 Prime the evaporation, clean the vacuum evaporation equipment, install the film material processed in step 1 into the vacuum evaporation equipment, and when the voltage of the evaporation boat reaches 9.4V, apply it to the evaporation boat in the vacuum evaporation equipment.
  • the aluminum wire is fed, and the film is subjected to three vacuum evaporations.
  • the film speed of the three vacuum evaporations is 300 m/min
  • the evaporation temperature is 1400 °C
  • the vacuum degree is 0.001 mbar.
  • the wire feeding speed of the three vacuum evaporations is in turn: 350mm/min, 400mm/min and 400mm/min, when the evaporation is over, turn off the equipment, take out the film and send it to the next step.
  • the film material is very thin after the previous work, the heat resistance is poor, and the single deposition amount is too large, and the film surface is seriously heated, which is easy to cause deformation of the film surface or film breakage.
  • the single deposition amount is increased to avoid film surface deformation or film breakage. result in product scrap.
  • Step 3 Evaporation. After the primer is completed, the single deposition amount needs to be increased. Always use a low deposition amount for evaporation, which will cause the oxide layer to increase and the resistivity to increase.
  • This step increases the speed of feeding the aluminum wire to the evaporation boat.
  • the treated film is then subjected to four vacuum evaporations. When the voltage of the evaporation boat is 9.4V, the film running process starts.
  • the wire feeding speed of the four vacuum evaporations is 500mm/min and the film running speed is 300m/min.
  • the vacuum degree is 0.001mbar
  • the evaporation temperature is 1400°C.
  • Step 4 Rewinding, when the evaporation is over, turn off the equipment, collect the film material that has been evaporated into a roll, and when winding, as the coating thickens and the physical properties of the film change, it is necessary to adjust the tension and bending angle appropriately Flatten the mask surface to avoid wrinkles on the mask surface.
  • Step 5 Slitting and molding, according to the needs of use, the film material obtained in the step 4 is slitted, and the slitted roll material is pasted with a label.
  • Step 6 Scraper detection, because the aluminum sputtering by evaporation is likely to cause bulges on the surface of the product, in this step, the film obtained in step 4 is subjected to scraper detection, and the bulges are flattened or scraped off by scraper rolling and detection to avoid The product to the client causes the film to break and fail.
  • Step 7 Packing and storing, packing and sealing the film material detected in step 5, and storing the packaged aluminized film in the warehouse.
  • Example 2 has the following differences compared to Example 1.
  • the wire feeding speed during aluminum oxide film coating is 850mm/min.
  • the wire feeding speed of the first vacuum evaporation during primer evaporation was 400 mm/min, and the wire feeding speed of the second and third vacuum evaporation was 450 mm/min.
  • the wire feeding speed during the vapor deposition in step 3 was 550 mm/min.
  • Example 2 Other process steps of Example 2 are the same as those of Example 1.
  • Example 3 has the following differences compared to Example 1.
  • the wire feeding speed during aluminum oxide film coating is 150mm/min.
  • the wire feeding speed of the first vacuum evaporation during primer evaporation is 300mm/min, and the wire feeding speed of the second and third vacuum evaporation is 350mm/min.
  • the wire feeding speed during the vapor deposition in step 3 was 450 mm/min.
  • Example 3 The other process steps of Example 3 are the same as those of Example 1.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A coating process, comprising the following steps: step I, pre-treating an original film; step II, subjecting same to priming evaporation, installing the film material treated in step I in a vacuum evaporation equipment, feeding a metal wire to an evaporation boat in the vacuum evaporation equipment, and subjecting the film material to at least one vacuum evaporation process; step III, subjecting same to evaporation, increasing the speed at which the metal wire is fed to the evaporation boat, and subjecting the film material treated in step II to vacuum evaporation again; and step IV, rolling same. Step I comprises the following operations: S1, metal oxide coating, involving: installing the original film on a vacuum evaporation equipment, feeding a metal wire to the vacuum evaporation equipment and introducing oxygen thereto, and adjusting the wire feeding speed followed by subjecting the original film to vacuum evaporation; and S2, film drying, involving: drying the film material treated in S1 to remove the moisture on the surface of the film. According to the coating process, damage to the surface of a plastic thin film due to an excessively high temperature during the vacuum evaporation process can be avoided, which is beneficial for improving the pass rate of the coating.

Description

一种镀膜工艺a coating process 技术领域technical field
本发明涉及镀膜技术领域,具体涉及一种镀膜工艺。The invention relates to the technical field of coating, in particular to a coating process.
背景技术Background technique
镀铝膜是采用特殊工艺在塑料薄膜表面镀上一层极薄的金属铝而形成的一种复合软包装材料,其中最常用的加工方法当数真空镀铝法,就是在高真空状态下通过高温将金属铝融化蒸发,使铝的蒸汽沉淀堆积到塑料薄膜表面上,从而使塑料薄膜表面具有金属光泽。由于它既具有塑料薄膜的特性,又具有金属的特性,是一种廉价美观、性能优良、实用性强的薄膜材料。Aluminized film is a composite flexible packaging material formed by coating a very thin layer of metal aluminum on the surface of a plastic film by a special process. The metal aluminum is melted and evaporated, so that the vapor of aluminum is deposited on the surface of the plastic film, so that the surface of the plastic film has a metallic luster. Because it has both the characteristics of plastic film and metal, it is a cheap and beautiful film material with excellent performance and strong practicability.
但是,采用现有的真空镀膜工艺在塑料薄膜表面镀金属膜时,由于塑料薄膜的耐热性较差,在进行真空镀膜过程中容易因为塑料薄膜受热严重,造成塑料薄膜膜面变形或断裂,使得材料报废,合格率低等问题。However, when using the existing vacuum coating process to coat the metal film on the surface of the plastic film, due to the poor heat resistance of the plastic film, the plastic film is easily heated during the vacuum coating process. Makes the material scrapped, the pass rate is low and so on.
发明内容SUMMARY OF THE INVENTION
为了克服现有技术中存在的缺点和不足,本发明的目的在于提供一种镀膜工艺,可以避免在真空蒸镀过程中由于温度过高导致塑料薄膜膜面受损,有利于提高镀膜合格率。In order to overcome the shortcomings and deficiencies in the prior art, the purpose of the present invention is to provide a coating process, which can avoid damage to the surface of the plastic film due to excessive temperature during the vacuum evaporation process, and is conducive to improving the coating qualification rate.
本发明的目的通过下述技术方案实现:The object of the present invention is achieved through the following technical solutions:
一种镀膜工艺,其包括如下步骤:A coating process, comprising the steps of:
步骤一、对原膜进行预处理;Step 1: Pretreatment of the original film;
步骤二、打底蒸镀,将经步骤一处理后的膜材安装至真空蒸镀设备中,向真空蒸镀设备内的蒸发舟送金属丝,对膜材进行至少一次真空蒸镀;Step 2, primer evaporation, install the film material processed in step 1 into the vacuum evaporation equipment, send metal wires to the evaporation boat in the vacuum evaporation equipment, and perform vacuum evaporation on the film material at least once;
步骤三、蒸镀,提高向蒸发舟送金属丝的速度,对经步骤二处理后的膜材再次进行真空蒸镀;Step 3: Evaporating, increasing the speed of feeding the metal wire to the evaporation boat, and performing vacuum evaporation on the film material processed in Step 2 again;
步骤四、收卷。Step 4: Roll up.
由于膜材较薄,耐热性差,在膜材表面单次沉积过多的金属颗粒会使膜面受热严重,容易造成膜面的变形或出现断膜的现象,导致产品报废,因此,本发明通过 先以较低的送丝速度对膜材进行打底蒸镀,使在膜材表面单次沉积较少的金属颗粒,进而减少热辐射,待膜面有足够的反射层和耐热层后,再增大送丝速度,提高金属颗粒在膜材表面的单次沉积量,由于打底蒸镀后膜材的耐热性变好,进而提高单次沉积量后膜材仍然不易发生受热变形的情况。提高单次沉积量不仅可以提高镀膜效率,另一方面,如果一直使用低沉积量进行蒸镀,将造成氧化层增多和电阻率增高的问题,造成产品无法满足客户的需求。Due to the thin film material and poor heat resistance, excessive metal particles deposited on the surface of the film material at one time will cause the film surface to be seriously heated, which is likely to cause deformation of the film surface or film breakage, resulting in product scrapping. Therefore, the present invention By first evaporating the film at a lower wire feeding speed, less metal particles are deposited on the surface of the film at a time, thereby reducing heat radiation. After the film surface has enough reflective layers and heat-resistant layers , and then increase the wire feeding speed to increase the single deposition amount of metal particles on the surface of the film material. Because the heat resistance of the film material after primer evaporation becomes better, and the film material is still less prone to thermal deformation after increasing the single deposition amount Case. Increasing the single deposition amount can not only improve the coating efficiency, but on the other hand, if you always use a low deposition amount for evaporation, it will cause the problems of increased oxide layer and increased resistivity, resulting in the product unable to meet the needs of customers.
具体的,收卷时,随着镀层增厚,膜物性改变,需适当调整张力与弯辊角度使膜面展平,避免造成膜面出现皱纹使膜材失效。Specifically, during winding, with the thickening of the coating and the change of the physical properties of the film, it is necessary to properly adjust the tension and the angle of the bending roll to flatten the film surface, so as to avoid wrinkles on the film surface and the failure of the film material.
其中,所述步骤一包括如下操作:Wherein, the step 1 includes the following operations:
S1、镀氧化铝膜,将原膜安装至真空蒸镀设备,向真空蒸镀设备中送金属丝并充入氧气,调整送丝速度后对原膜进行真空蒸镀;S1. Coating aluminum oxide film, installing the original film into the vacuum evaporation equipment, feeding metal wire to the vacuum evaporation equipment and filling with oxygen, adjusting the wire feeding speed and performing vacuum evaporation on the original film;
S2、烘膜,将经S1处理后的膜材烘干去除膜材表面的水份。S2, drying the film, drying the film material treated by S1 to remove the moisture on the surface of the film material.
本发明通过制作氧化铝膜有利于提高后续镀层与膜材的粘结力,而通过烘膜将膜材表面的水份去除,确保无多余的水份与蒸镀后的铝层反应造成后续镀层和膜材之间的粘结力变差,有利于提高镀层和膜材之间的粘结牢固度。In the present invention, the production of aluminum oxide film is beneficial to improve the adhesion between the subsequent coating layer and the film material, and the water on the surface of the film material is removed by baking the film to ensure that no excess water reacts with the evaporated aluminum layer to cause the subsequent coating layer. The adhesion between the coating and the film becomes poor, which is beneficial to improve the bonding firmness between the coating and the film.
其中,S1中的送丝速度为150-850mm/min。Among them, the wire feeding speed in S1 is 150-850mm/min.
其中,在S1镀氧化铝膜时,真空蒸镀设备中的真空度为0.001-0.002mbar,蒸发舟的功率为6000-7000W时开始对原膜进行真空蒸镀。Among them, when the aluminum oxide film is deposited in S1, the vacuum degree in the vacuum evaporation equipment is 0.001-0.002mbar, and the power of the evaporation boat is 6000-7000W to start the vacuum evaporation of the original film.
其中,在S2烘膜时,烘膜设备的真空度为0.001-0.003mbar,蒸发舟电流达到80%-90%时开始烘膜。Among them, when baking the film in S2, the vacuum degree of the film baking equipment is 0.001-0.003 mbar, and the film drying starts when the current of the evaporation boat reaches 80%-90%.
其中,所述打底蒸镀时送金属丝的速度为300-450mm/min,通过采用300-450mm/min的送丝速度,在确保膜材不会因为受热严重而变形的情况下,提高镀膜效率。Wherein, the wire feeding speed during the primer evaporation is 300-450mm/min. By adopting the wire feeding speed of 300-450mm/min, the coating can be improved while ensuring that the film material will not be deformed due to severe heating. effectiveness.
其中,所述打底蒸镀时真空蒸镀设备的真空度为0.001-0.002mbar,蒸发舟的电压为9.3-9.5V时开始进行真空蒸镀。Wherein, the vacuum degree of the vacuum evaporation equipment is 0.001-0.002mbar during the primer evaporation, and the vacuum evaporation starts when the voltage of the evaporation boat is 9.3-9.5V.
其中,所述步骤三蒸镀时送金属丝的速度为450-550mm/min,通过将送丝速度提升至450-550mm/min,镀膜效率高,且有利于减少氧化层,降低电阻率,还能确保膜材不会受热变形。Wherein, the speed of feeding the metal wire during the vapor deposition in the third step is 450-550mm/min. By increasing the wire feeding speed to 450-550mm/min, the coating efficiency is high, and it is beneficial to reduce the oxide layer, reduce the resistivity, and also It can ensure that the membrane material will not be deformed by heat.
其中,所述步骤三蒸镀时,真空蒸镀设备的真空度为0.001-0.002mbar,蒸发舟电压为9.3-9.5V开始进行真空蒸镀。Wherein, during the evaporation in the third step, the vacuum degree of the vacuum evaporation equipment is 0.001-0.002 mbar, and the voltage of the evaporation boat is 9.3-9.5V to start the vacuum evaporation.
其中,所述金属丝为铝丝。Wherein, the metal wire is aluminum wire.
其中,所述原膜为PET膜或CPP膜。Wherein, the original film is a PET film or a CPP film.
其中,所述步骤二中的真空蒸镀次数为1-5次。Wherein, the vacuum evaporation times in the second step are 1-5 times.
其中,所述步骤三中的真空蒸镀次数为1-20次。Wherein, the vacuum evaporation times in the third step are 1-20 times.
其中,所述步骤一、步骤二、步骤三中真空蒸镀时的温度为1200-1600℃。Wherein, the temperature during vacuum evaporation in the first step, the second step and the third step is 1200-1600°C.
其中,还包括对步骤四得到的膜材进行分切、刮刀检测和打包储存。Among them, the film material obtained in step 4 is also included in slitting, scraper detection and packaging and storage.
由于蒸镀溅射金属材料可能会造成膜材表面有凸起,通过对分切的膜材进行刮刀滚压和检测,可以将凸起压平或刮落,避免产品到客户端时由于凸起问题造成断膜失效。Since the metal material by vapor deposition and sputtering may cause protrusions on the surface of the film, by rolling and testing the cut film with a scraper, the protrusions can be flattened or scraped off to avoid the protrusions when the product arrives at the customer. The problem caused the film to fail.
其中,当真空蒸镀设备使用新蒸发舟时,需对其进行润舟处理,主要工序为热舟、烧舟以及磨舟。使用新蒸发舟时对其进行润舟,确保蒸发舟浸润均匀,舟面加热均匀,提高使用寿命并改善溅射失效问题。Among them, when the vacuum evaporation equipment uses a new evaporation boat, it needs to be treated with boat running, and the main processes are hot boat, boat burning and boat grinding. When using a new evaporation boat, it should be moistened to ensure that the evaporation boat is evenly infiltrated and the surface of the boat is heated evenly, so as to improve the service life and improve the problem of sputtering failure.
其中,当蒸发舟使用达到15万米的蒸镀长度时,需对蒸发舟进行更换。因为蒸发舟损耗后,舟面出现凹坑易出现积液,受热不均问题,造成溅铝失效。Among them, when the evaporation boat is used with an evaporation length of 150,000 meters, the evaporation boat needs to be replaced. After the evaporation boat is worn out, the pits on the boat surface are prone to liquid accumulation and uneven heating, resulting in the failure of splashing aluminum.
本发明的有益效果在于:The beneficial effects of the present invention are:
本生产工艺通过设计制备过程中的各个步骤,避免了在真空蒸镀过程中由于温度过高导致膜面受损,提高了镀膜合格率,降低生产成本。通过在对原膜制作氧化铝膜镀层,提高镀层与原膜的粘结力。蒸镀时通过先降低金属材料在膜材表面的单次沉积量,减少热辐射,待膜面有足够的反射层和耐热层后再提升金属材料在膜材表面的单次沉积量,提高镀膜效率,一直使用低沉积量蒸镀而造成氧化层增多电阻率增高,同时避免了膜面受热严重而造成膜面变形或断膜,有利于提高产品合格率。By designing each step in the preparation process, the production process avoids damage to the film surface due to excessively high temperature during the vacuum evaporation process, improves the coating qualification rate and reduces the production cost. By making an aluminum oxide film coating on the original film, the adhesion between the coating and the original film is improved. During evaporation, the single deposition amount of metal material on the surface of the film is first reduced to reduce thermal radiation. After the film surface has enough reflective layer and heat-resistant layer, the single deposition amount of metal material on the surface of the film is increased. Coating efficiency, low deposition volume evaporation has been used to increase the oxide layer and increase the resistivity. At the same time, it avoids film surface deformation or film breakage caused by severe heating of the film surface, which is conducive to improving the product qualification rate.
具体实施方式detailed description
为了便于本领域技术人员的理解,下面结合实施例对本发明作进一步的说明,实施方式提及的内容并非对本发明的限定。In order to facilitate the understanding of those skilled in the art, the present invention will be further described below with reference to the examples, and the contents mentioned in the embodiments are not intended to limit the present invention.
实施例1Example 1
一种镀膜工艺,其包括如下步骤:A coating process, comprising the steps of:
步骤一、对PET原膜进行预处理,具体包括如下操作。The first step is to pretreat the original PET film, which specifically includes the following operations.
S11.材料、设备检测,对原膜材料的长宽、外观、厚度、延展率、达因值、质量以及透光度进行检测是否达标,检测铝丝材料丝径大小以及纯度,对蒸发舟尺寸、外观进行检查,最后进行设备点检,开机检查。S11. Material and equipment testing, check whether the length, width, appearance, thickness, elongation, dyne value, quality and transmittance of the original film material are up to standard, check the wire diameter and purity of the aluminum wire material, and check the size of the evaporation boat. , Check the appearance, and finally carry out the equipment inspection and start-up inspection.
其中,当真空蒸镀设备使用新蒸发舟时,需对其进行润舟处理,主要工序为热 舟、烧舟以及磨舟,确保蒸发舟浸润均匀,舟面加热均匀,提高使用寿命并改善溅铝失效问题。Among them, when the vacuum evaporation equipment uses a new evaporation boat, it needs to be wetted. The main processes are hot boat, boat burning and boat grinding to ensure uniform infiltration of the evaporation boat and uniform heating of the boat surface, improve service life and improve splashing. Aluminum failure problem.
当蒸发舟使用达到15万米的蒸镀长度时,需对蒸发舟进行更换。因为蒸发舟损耗后,舟面出现凹坑易出现积液,受热不均问题,造成溅铝失效。When the evaporation boat is used with an evaporation length of 150,000 meters, the evaporation boat needs to be replaced. After the evaporation boat is worn out, the pits on the boat surface are prone to liquid accumulation and uneven heating, resulting in the failure of splashing aluminum.
S12.镀氧化铝膜,清洁真空蒸镀设备,然后将原膜安装至真空蒸镀设备,并调整送丝速度为780mm/min、走膜速度为5m/s、蒸镀温度为1400℃、真空度为0.001mbar,接着启动设备,当蒸发舟功率达到6500W时,向蒸发舟内送铝丝,开始走膜工艺,当蒸镀结束后,关闭设备,将膜材取出并送至下一步工序,通过氧化铝膜镀膜层的制作,提高了镀层与原膜的粘结力。S12. Coat aluminum oxide film, clean the vacuum evaporation equipment, then install the original film to the vacuum evaporation equipment, and adjust the wire feeding speed to 780mm/min, the film travel speed to 5m/s, the evaporation temperature to 1400℃, and the vacuum The temperature is 0.001mbar, and then the equipment is started. When the power of the evaporation boat reaches 6500W, the aluminum wire is fed into the evaporation boat to start the film running process. When the evaporation is over, the equipment is turned off, and the film material is taken out and sent to the next process. Through the production of the aluminum oxide film coating layer, the adhesion between the coating layer and the original film is improved.
S13.烘膜,对真空蒸镀设备进行清洗,将经S12处理后的膜材安装至设备中,并调整设备真空度为0.002mbar,走膜速度为150m/min,接着启动设备,当蒸发舟电流达到80%-90%时,开始走膜工艺,通过蒸发舟加热将膜材表面的水份烘干,确保膜材表面无多余水分与蒸镀后的铝层反应造成粘结力变差,造成镀铝层与膜材之间的粘结牢固度失效。S13. Bake the film, clean the vacuum evaporation equipment, install the film material treated by S12 into the equipment, and adjust the vacuum degree of the equipment to 0.002mbar and the film running speed to 150m/min, then start the equipment, when the evaporation boat When the current reaches 80% - 90%, the film running process starts, and the water on the surface of the film is dried by heating by the evaporation boat to ensure that there is no excess water on the surface of the film and the aluminum layer after evaporation will cause poor adhesion. Causes the failure of the bonding firmness between the aluminized layer and the film.
步骤二、打底蒸镀,清洁真空蒸镀设备,将经步骤一处理后的膜材安装至真空蒸镀设备中,待蒸发舟的电压达到9.4V时,向真空蒸镀设备内的蒸发舟送铝丝,对膜材进行三次真空蒸镀,三次真空蒸镀的走膜速度均为300m/min、蒸镀温度为1400℃、真空度为0.001mbar,三次真空蒸镀的送丝速度依次为350mm/min、400mm/min和400mm/min,当蒸镀结束后,关闭设备,将膜材取出并送至下一步工序。由于膜材经过前序工作后材质很薄,耐热性差,单次沉积量过大膜面受热严重,易造成膜面变形或断膜。通过对膜材进行至少一次打底蒸镀,使用较少沉积量,减少热辐射,待膜面有足够的反射层和耐热层后提升单次沉积量,避免了由于膜面变形或断膜导致的产品报废。Step 2: Prime the evaporation, clean the vacuum evaporation equipment, install the film material processed in step 1 into the vacuum evaporation equipment, and when the voltage of the evaporation boat reaches 9.4V, apply it to the evaporation boat in the vacuum evaporation equipment. The aluminum wire is fed, and the film is subjected to three vacuum evaporations. The film speed of the three vacuum evaporations is 300 m/min, the evaporation temperature is 1400 °C, and the vacuum degree is 0.001 mbar. The wire feeding speed of the three vacuum evaporations is in turn: 350mm/min, 400mm/min and 400mm/min, when the evaporation is over, turn off the equipment, take out the film and send it to the next step. Because the film material is very thin after the previous work, the heat resistance is poor, and the single deposition amount is too large, and the film surface is seriously heated, which is easy to cause deformation of the film surface or film breakage. By performing at least one primer evaporation on the film material, less deposition amount is used to reduce heat radiation. After the film surface has enough reflective layer and heat-resistant layer, the single deposition amount is increased to avoid film surface deformation or film breakage. result in product scrap.
步骤三、蒸镀,打底完成后需提高单次沉积量,一直使用低沉积量蒸镀,将造成氧化层增多电阻率增高,本步骤提高向蒸发舟送铝丝的速度,对经步骤二处理后的膜材再进行四次真空蒸镀,当蒸发舟的电压为9.4V时,开始走膜工艺,四次真空蒸镀的送丝速度均为500mm/min、走膜速度为300m/min、真空度为0.001mbar、蒸镀温度为1400℃。Step 3: Evaporation. After the primer is completed, the single deposition amount needs to be increased. Always use a low deposition amount for evaporation, which will cause the oxide layer to increase and the resistivity to increase. This step increases the speed of feeding the aluminum wire to the evaporation boat. The treated film is then subjected to four vacuum evaporations. When the voltage of the evaporation boat is 9.4V, the film running process starts. The wire feeding speed of the four vacuum evaporations is 500mm/min and the film running speed is 300m/min. , The vacuum degree is 0.001mbar, and the evaporation temperature is 1400℃.
步骤四、收卷,当蒸镀结束后,关闭设备,对已完成蒸镀的膜材进行收集成卷,收卷时,随着镀层增厚,膜物性改变,需适当调整张力与弯辊角度使膜面展平,避免使膜面产生皱纹。Step 4: Rewinding, when the evaporation is over, turn off the equipment, collect the film material that has been evaporated into a roll, and when winding, as the coating thickens and the physical properties of the film change, it is necessary to adjust the tension and bending angle appropriately Flatten the mask surface to avoid wrinkles on the mask surface.
步骤五、分切成型,按照使用需求,对步骤四得到的膜材进行分切,将分切完成的卷料粘贴标识。Step 5: Slitting and molding, according to the needs of use, the film material obtained in the step 4 is slitted, and the slitted roll material is pasted with a label.
步骤六、刮刀检测,由于蒸镀溅铝容易造成产品表面有凸起问题,本步骤对步骤四得到的膜材进行刮刀检测,通过刮刀滚压及检测,将凸起压平或刮落,避免产品到客户端造成断膜失效。Step 6: Scraper detection, because the aluminum sputtering by evaporation is likely to cause bulges on the surface of the product, in this step, the film obtained in step 4 is subjected to scraper detection, and the bulges are flattened or scraped off by scraper rolling and detection to avoid The product to the client causes the film to break and fail.
步骤七、打包储存,将通过步骤五检测的膜材进行包装密封,包装后的镀铝膜入库储存。Step 7: Packing and storing, packing and sealing the film material detected in step 5, and storing the packaged aluminized film in the warehouse.
实施例2Example 2
一种镀膜工艺,实施例2相比实施例1具有以下区别。A coating process, Example 2 has the following differences compared to Example 1.
氧化铝膜镀膜时的送丝速度为850mm/min。The wire feeding speed during aluminum oxide film coating is 850mm/min.
打底蒸镀时第一次真空蒸镀的送丝速度为400mm/min,第二次和第三次真空蒸镀时的送丝速度为450mm/min。The wire feeding speed of the first vacuum evaporation during primer evaporation was 400 mm/min, and the wire feeding speed of the second and third vacuum evaporation was 450 mm/min.
步骤三蒸镀时的送丝速度为550mm/min。The wire feeding speed during the vapor deposition in step 3 was 550 mm/min.
实施例2的其它工艺步骤与实施例1相同。Other process steps of Example 2 are the same as those of Example 1.
实施例3Example 3
一种镀膜工艺,实施例3相比实施例1具有以下区别。A coating process, Example 3 has the following differences compared to Example 1.
氧化铝膜镀膜时的送丝速度为150mm/min。The wire feeding speed during aluminum oxide film coating is 150mm/min.
打底蒸镀时第一次真空蒸镀的送丝速度为300mm/min,第二次和第三次真空蒸镀时的送丝速度为350mm/min。The wire feeding speed of the first vacuum evaporation during primer evaporation is 300mm/min, and the wire feeding speed of the second and third vacuum evaporation is 350mm/min.
步骤三蒸镀时的送丝速度为450mm/min。The wire feeding speed during the vapor deposition in step 3 was 450 mm/min.
实施例3的其它工艺步骤与实施例1相同。The other process steps of Example 3 are the same as those of Example 1.
上述实施例为本发明较佳的实现方案,除此之外,本发明还可以其它方式实现,在不脱离本发明构思的前提下任何显而易见的替换均在本发明的保护范围之内。The above-mentioned embodiment is a preferred implementation scheme of the present invention. In addition, the present invention can also be implemented in other ways, and any obvious replacements are within the protection scope of the present invention without departing from the concept of the present invention.

Claims (10)

  1. 一种镀膜工艺,其特征在于:包括如下步骤:A coating process is characterized in that: comprises the following steps:
    步骤一、对原膜进行预处理;Step 1: Pretreatment of the original film;
    步骤二、打底蒸镀,将经步骤一处理后的膜材安装至真空蒸镀设备中,向真空蒸镀设备内的蒸发舟送金属丝,对膜材进行至少一次真空蒸镀;Step 2, primer evaporation, install the film material processed in step 1 into the vacuum evaporation equipment, send metal wires to the evaporation boat in the vacuum evaporation equipment, and perform vacuum evaporation on the film material at least once;
    步骤三、蒸镀,提高向蒸发舟送金属丝的速度,对经步骤二处理后的膜材再次进行真空蒸镀;Step 3: Evaporating, increasing the speed of feeding the metal wire to the evaporation boat, and performing vacuum evaporation on the film material processed in Step 2 again;
    步骤四、收卷。Step 4: Roll up.
  2. 根据权利要求1所述的一种镀膜工艺,其特征在于:所述步骤一包括如下操作:A coating process according to claim 1, wherein the step 1 comprises the following operations:
    S1、镀金属氧化膜,将原膜安装至真空蒸镀设备,向真空蒸镀设备中送金属丝并通入氧气,调整送丝速度后对原膜进行真空蒸镀;S1, metal oxide film is coated, the original film is installed in the vacuum evaporation equipment, the metal wire is fed into the vacuum evaporation equipment and oxygen is introduced, and the original film is vacuum evaporated after adjusting the wire feeding speed;
    S2、烘膜,将经S1处理后的膜材烘干去除膜材表面的水份。S2, drying the film, drying the film material treated by S1 to remove the moisture on the surface of the film material.
  3. 根据权利要求1所述的一种镀膜工艺,其特征在于:所述打底蒸镀时送金属丝的速度为300-450mm/min。A coating process according to claim 1, characterized in that: the speed of feeding the metal wire during the primer evaporation is 300-450 mm/min.
  4. 根据权利要求1所述的一种镀膜工艺,其特征在于:所述步骤三蒸镀时送金属丝的速度为450-550mm/min。A coating process according to claim 1, wherein the speed of feeding the metal wire is 450-550 mm/min during the vapor deposition in the third step.
  5. 根据权利要求1所述的一种镀膜工艺,其特征在于:所述金属丝为铝丝。A coating process according to claim 1, wherein the metal wire is an aluminum wire.
  6. 根据权利要求1所述的一种镀膜工艺,其特征在于:所述原膜为PET膜或CPP膜。A coating process according to claim 1, wherein the original film is a PET film or a CPP film.
  7. 根据权利要求1所述的一种镀膜工艺,其特征在于:所述步骤二中的真空蒸镀次数为1-5次。A coating process according to claim 1, wherein the number of times of vacuum evaporation in the second step is 1-5 times.
  8. 根据权利要求1所述的一种镀膜工艺,其特征在于:所述步骤三中的真空蒸镀次数为1-20次。A coating process according to claim 1, wherein the number of times of vacuum evaporation in the step 3 is 1-20 times.
  9. 根据权利要求2所述的一种镀膜工艺,其特征在于:所述步骤一、步骤二、步骤三中真空蒸镀时的温度为1200-1600℃。A coating process according to claim 2, wherein the temperature during vacuum evaporation in the first step, the second step and the third step is 1200-1600°C.
  10. 根据权利要求1-9任意一项所述的一种镀膜工艺,其特征在于:还包括对步骤四得到的膜材进行分切、刮刀检测和打包储存。A coating process according to any one of claims 1-9, characterized in that: it further comprises the steps of slitting, scraper detection, and packing and storing the film obtained in step 4.
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