JPS6468468A - Apparatus for producing thin metallic film - Google Patents
Apparatus for producing thin metallic filmInfo
- Publication number
- JPS6468468A JPS6468468A JP22683387A JP22683387A JPS6468468A JP S6468468 A JPS6468468 A JP S6468468A JP 22683387 A JP22683387 A JP 22683387A JP 22683387 A JP22683387 A JP 22683387A JP S6468468 A JPS6468468 A JP S6468468A
- Authority
- JP
- Japan
- Prior art keywords
- metallic films
- polymer substrate
- plural
- thin metallic
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent the thermal deformation or melting of a tape-shaped high- polymer substrate and the difficulty in the formation of uniform thin metallic films by winding said substrate around a rotating cylindrical can and depositing the metallic films by evaporation from plural metal supplying source around the can dividely in plural times. CONSTITUTION:The tap-shaped high-polymer substrate supplied from a feed roll 3 is wound around the cylindrical can 2 and the thin metallic films of desired thicknesses are deposited by evaporation on the high-polymer substrate by the metal vapors from the plural metal supplying sources 9. Only the surfaces of the metal supplying sources 9 are melted and evaporated by the arc from an arc power supply 10 even if the metal supply sources are inclined in the installation position according to the positions thereof and, therefore, plural pieces of said devices can be installed around the cylindrical can 2. The formation of the vapor deposited metallic films of the prescribed thicknesses is executed dividely in plural times and since the region where the thin metallic film is formed by one time of vapor deposition is wide, the vapor deposited metallic films of the prescribed thicknesses are formed stably without excessive temp. elevation of the high-polymer substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22683387A JPS6468468A (en) | 1987-09-10 | 1987-09-10 | Apparatus for producing thin metallic film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22683387A JPS6468468A (en) | 1987-09-10 | 1987-09-10 | Apparatus for producing thin metallic film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6468468A true JPS6468468A (en) | 1989-03-14 |
Family
ID=16851288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22683387A Pending JPS6468468A (en) | 1987-09-10 | 1987-09-10 | Apparatus for producing thin metallic film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6468468A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04224671A (en) * | 1990-12-25 | 1992-08-13 | Kobe Steel Ltd | Vacuum arc vapor-depositing device |
| CN103361623A (en) * | 2013-07-30 | 2013-10-23 | 林正亮 | Winding evaporation type vacuum coating machine |
| CN112048700A (en) * | 2020-09-05 | 2020-12-08 | 昆山鑫美源电子科技有限公司 | Film coating process |
-
1987
- 1987-09-10 JP JP22683387A patent/JPS6468468A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04224671A (en) * | 1990-12-25 | 1992-08-13 | Kobe Steel Ltd | Vacuum arc vapor-depositing device |
| CN103361623A (en) * | 2013-07-30 | 2013-10-23 | 林正亮 | Winding evaporation type vacuum coating machine |
| CN103361623B (en) * | 2013-07-30 | 2016-07-06 | 林正亮 | A kind of winding vaporation-type vacuum coating equipment |
| CN112048700A (en) * | 2020-09-05 | 2020-12-08 | 昆山鑫美源电子科技有限公司 | Film coating process |
| WO2022047946A1 (en) * | 2020-09-05 | 2022-03-10 | 昆山鑫美源电子科技有限公司 | Coating process |
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