JP2002020857A - Vacuum film deposition apparatus, and crucible for film deposition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the efficiency of utility of a film depositing material stored in a crucible for film deposition. SOLUTION: This vacuum film deposition apparatus has a vacuum tank 2 comprising at least a cooling can roll 5 rotating while cooling a back side of a base film F, a crucible 20 for film deposition which is provided below the cooling can roll to store material 7 for film deposition, a heat source 8 for evaporation which melts the material 7 for film deposition in the crucible for film deposition to evaporate flying particles 7a, and a cooling plate 9 which is provided close to the cooling can roll between the cooling can roll and the crucible, cools a film deposition surface side of the base film, and has an aperture 9a for regulating the angle α of incidence when the film deposition on the base film is started and the angle β of incidence when the film deposition is completed. In the crucible 20, an upper end side aperture 20a with an upper end side opened is extended to the vicinity of the aperture 9a of the cooling plate 9 in order to evaporate the flying particles toward the base film side attached to the cooling can roll, and the upper end side aperture is substantially provided along the aperture of the cooling plate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum film forming apparatus for forming a film forming material on a strip-shaped base film in a vacuum chamber by vapor deposition and a film forming crucible applied to the vacuum film forming apparatus. It is.

[0002]

2. Description of the Related Art Generally, as a means for attaching a film-forming material to a substrate, a vapor deposition step in a vacuum chamber is widely used. At this time, the substrate is a plate-like material such as glass,
Various materials such as a strip-shaped polymer film are applied. Here, a case where a polymer film (base film) is applied will be described below.

[0003] Packaging articles, decorative articles, magnetic tapes, and the like are often used as materials obtained by depositing a film-forming material on the polymer film. In particular, when depositing a film-forming material on a polymer film, the base film may be formed in a roll form of several thousand m to several tens of thousands m.
In general, a roll is set in a vacuum chamber and one roll is continuously deposited on a base film.

For example, a conventional thin film magnetic tape film forming apparatus for producing a thin film magnetic tape by depositing a metal magnetic material as a film forming material on a base film and a conventional film forming apparatus used in the thin film magnetic tape film forming apparatus The crucible for use will be described with reference to FIGS.

FIG. 4 is a structural view for explaining a conventional thin film magnetic tape film forming apparatus, and FIG. 5 is a perspective view showing a conventional film forming crucible used in the conventional thin film magnetic tape film forming apparatus. .

As shown in FIG. 4, in the conventional thin film magnetic tape film forming apparatus 1A to which the oblique deposition method is applied, the inside of the vacuum chamber 2 is maintained in a high vacuum state by a vacuum pump (not shown). In the vacuum chamber 2, a supply roll 3A and a take-up roll 3B for winding a strip-shaped base film F,
Supply side guide roll 4A and winding side guide roll 4B
And a cylindrical cooling can roll 5 that cools the back surface of the base film F while attaching the base film F during film formation is rotatably disposed. At the time of film formation on the base film F, the winding guide roll is wound while the base film F wound around the supply roll 3A is in contact with the cooling can roll 5 rotating in the direction of the arrow via the supply side guide roll 4A. It is made to travel in the direction of the arrow toward the winding roll 3B via 4B.

At this time, the base film F, which is a medium material of the thin-film magnetic tape, generally has a thickness of about 6.4 μm.
An ET (polyethylene terephthalate) film is used.

A cooler (not shown) is provided inside the cooling can roll 5, and the back side of the base film F moves while being in contact with the cooling can roll 5 during film formation. The deformation and the like due to the temperature rise of F are suppressed.

In addition, a rectangular film-forming crucible 6 as shown in FIG. 5 using MgO (magnesia) as a film-forming crucible material is provided obliquely below and left of the cooling can roll 5 in the vacuum chamber 2. is set up. The film forming crucible 6 contains a ferromagnetic material 7 such as Co as a film forming material.

On the left side wall 2a of the vacuum chamber 2, a piercing type heat source for evaporation for melting the ferromagnetic material 7 such as Co contained in the film forming crucible 6 and evaporating the flying particles 7a is provided. An electron gun 8 is attached to the film forming crucible 6. The piercing type electron gun 8 emits an electron beam 8 a toward the metallic magnetic material 7 in the film forming crucible 6.
With this electron beam 8a, the metallic magnetic material 7 in the film forming crucible 6 is formed.
Is melted to evaporate the flying particles 7a toward the base film F in contact with the cooling can roll 5.

When the base film F is running, flying particles 7a of Co and the like evaporated from the film forming crucible 6 are about 20%.
Since the temperature has been raised to about 00 ° C., the flying particles 7a
It is necessary not to deform the film forming surface side of the base film F due to the temperature of the film or radiant heat due to the evaporation material such as Co melted in the film forming crucible 6, and the flying particles 7a adhere to the cooling can roll 5. It is necessary to cover the edge portion of the base film F so as not to do so. Further, when producing a thin film magnetic tape, flying particles 7 such as Co vaporized on the film-forming surface of the base film F are required due to the requirement of electromagnetic conversion characteristics.
It is necessary to restrict the incident angle of a (this is generally referred to as oblique deposition), and it is necessary to prevent deposition at inappropriate portions.

Therefore, between the cooling can roll 5 and the film forming crucible 6 and approaching the cooling can roll 5,
A cooling plate 9 formed by water cooling is provided in an arc shape.

Here, the width of the base film F is narrower than the width of the cooling can roll 5, and in order to prevent the flying particles 7a from adhering to and wrapping around the cooling can roll 5 at the edge portion of the base film F, the cooling can roll 5 is formed. From the end of the base film F to the edge of the base film F several cm. An opening 9a is formed in the cooling plate 9 in a substantially rectangular shape along the width direction of the base film F, and flying particles 7a such as Co evaporated from the crucible 6 for film formation are formed in the opening 9a. The angle of incidence α at the start of film formation on the base film F and the angle of incidence β at the end of film formation are regulated.

An oxygen gas introduction pipe 10 is mounted between the cooling can roll 5 and the cooling plate 9 on the side of the incident angle β when the film formation is completed. Oxygen gas O ₂ is injected from the formed holes toward the flying particles 7 a of the metal magnetic material 7 evaporated from the inside of the film forming crucible 6.

The electron beam 8a emitted from the pierce type electron gun 8 is controlled by a deflection magnet 11 for applying a deflection magnetic field to the orbit and a deflection magnet 12 provided near the film forming crucible 6. I have. Therefore, by scanning the electron beam 8a in the longitudinal direction of the film forming crucible 6,
The flying particles 7a of the evaporated Co or the like form the opening 9a of the cooling plate 9.
Through the base film F to form an ultra-thin film as a Co-CoO magnetic film in the width direction. By forming this Co-CoO magnetic film in the length direction of the base film F, a long thin film magnetic tape can be formed. It has been wound around the winding roll 3B.

[0016]

By the way, in the above-mentioned conventional thin film magnetic tape film forming apparatus 1A, the film forming crucible 6 is installed below the apparatus 1A apart from the cooling can roll 5 and the cooling plate 9. Therefore, some of the flying particles 7a of a ferromagnetic material such as Co evaporated from the inside of the film forming crucible 6
Although the film is formed on the base film F through the opening 9a, most of the flying particles 7a adhere to and accumulate around the opening 9a of the cooling plate 9 as shown in FIG. I will. At this time, the amount of flying particles 7a adhering to the cooling plate 9 occupies about 85 to 90% of the whole, and is invalid.

For this reason, it is necessary to break the vacuum in the apparatus 1A, open the chamber and periodically remove the flying particles 7a attached to the cooling plate 9, and thus continuously deposit the base film F. In this case, there is a limit to the length of the film forming process on the base film F. At this time, flying particles 7 attached to cooling plate 9
In order to remove a, the flying particles 7a attached from the cooling plate 9 are removed.
Only scraping, scraping, or melting and recycling or discarding.

When recycling, its purity is important.
It was difficult to peel, scrape, and melt only the flying particles 7a of Co or the like, and the inclusion of impurities could not be avoided.

[0019] For these reasons, the cost of refining the ineffective deposits by a smelter is currently about 10% of the purchase price of the film forming material. In particular, when manufacturing a thin film magnetic tape, an expensive cobalt-based metal magnetic material is used, so that the price of a product is generally determined by the material use efficiency.

Further, in order to resume the vapor deposition on the base film F, it is necessary to draw a high vacuum inside the apparatus 1A. Furthermore, since the heating of the metal magnetic material 7 in the film forming crucible 6 is also interrupted, it is necessary to reheat the material and it takes time, so that the operation rate and productivity of the apparatus 1A deteriorate.

For the reasons described above, particularly in the field of manufacturing thin film magnetic tapes, poor utilization efficiency of film forming materials has become a serious problem.

Therefore, there is a demand for a vacuum film forming apparatus and a film forming crucible applied to the vacuum film forming apparatus for the purpose of improving the utilization efficiency of the film forming material in the film forming crucible.

[0023]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and a first invention is to allow a supply base to run on a take-up roll while a belt-shaped base film wound on the supply roll is in contact with the base roll. A cooling can roll that rotates while cooling the back side of the base film during film formation, a film forming crucible provided below the cooling can roll and containing a film forming material, and the film forming crucible An evaporating heat source for melting the film-forming material accommodated therein and evaporating flying particles toward the cooling can roll, and approaching the cooling can roll between the cooling can roll and the film forming crucible. An opening for cooling the film-forming surface side of the base film, and for controlling the angle of incidence of the flying particles on the base film at the start of film formation and the angle of incidence at the end of film formation. Formed cooling And at least a vacuum tank, in a vacuum film forming apparatus for forming the flying particles on the base film in contact with the cooling can roll after passing the flying particles through the opening of the cooling plate, The film forming crucible extends an upper end opening having an upper end opening near the opening of the cooling plate to evaporate the flying particles toward the base film being in contact with the cooling can roll. A vacuum film forming apparatus, wherein the upper end side opening is substantially aligned with the opening of the cooling plate.

According to a second aspect of the present invention, there is provided a cooling can roll which rotates while feeding a strip-shaped base film wound around a supply roll to a take-up roll side while cooling the base film during film formation. Provided below the cooling can roll, a film forming crucible containing a film forming material, and melting the film forming material housed in the film forming crucible to fly particles to the cooling can roll side. In a vacuum film forming apparatus for providing at least a heat source for evaporation to evaporate toward the vacuum tank, and forming the flying particles on the base film while being attached to the cooling can roll, the film forming crucible includes: In order to evaporate flying particles toward the base film being in contact with the cooling can roll, an upper end opening opening at the upper end is extended to the vicinity of the cooling can roll, and In the vacuum film forming apparatus, wherein the incident angle at the start of film formation and the angle of incidence at the end of film formation of the flying particles on the base film are regulated at the upper end side opening. is there.

According to a third aspect of the present invention, there is provided the vacuum film forming apparatus according to the first or second aspect, wherein a metal magnetic material is used as the film forming material, and the metal magnetic material is melted and evaporated. A vacuum film forming apparatus characterized in that particles are formed on the base film to produce a thin film magnetic tape.

In a fourth aspect of the present invention, the back side of the band-shaped base film wound around a supply roll in a vacuum chamber is cooled while running in contact with a cooling can roll, and is caused to travel to a take-up roll. A cooling plate provided close to a cooling can roll cools the film-forming surface side of the base film and evaporates the melted film-forming material, passes flying particles through an opening formed in the cooling plate, and opens the opening. In order to form the flying particles on the base film by regulating the angle of incidence of the flying particles on the base film and the angle of incidence at the end of the film formation on the base film, the film forming material In the film formation crucible containing the film formation, the film formation crucible has an upper end side opening opening at the upper end side for evaporating the flying particles toward the base film being attached to the cooling can roll. Near the opening of the cooling plate Extends to, is the upper end opening in the deposition crucible, characterized in that were substantially along the opening of the cooling plate.

Further, according to a fifth aspect of the present invention, a belt-shaped base film wound around a supply roll in a vacuum chamber is cooled while being in contact with a cooling can roll, and is caused to travel to a take-up roll side. In order to form the evaporated flying particles on the base film being attached to the cooling can roll,
In the film forming crucible containing the film forming material, the film forming crucible has an upper end opened at an upper end to evaporate the flying particles toward the base film being in contact with the cooling can roll. The opening extends near the cooling can roll and approaches the cooling can roll, and the incident angle at the start of film formation and the incident angle at the end of film formation of the flying particles on the base film at the upper end side opening. And a film forming crucible characterized in that:

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a vacuum film forming apparatus and a film forming crucible according to the present invention will be described below with reference to FIGS.
First Embodiment> and <Second Embodiment> will be described in detail in this order.

<First Embodiment> FIG. 1 is a block diagram showing a vacuum film forming apparatus according to a first embodiment of the present invention, and FIG. 2 is applied to a vacuum film forming apparatus according to the first embodiment of the present invention. FIG. 2 is a perspective view showing a film forming crucible. For convenience of explanation, the same reference numerals are given to the same constituent members as those shown in the conventional example, and the description is appropriately given, and the constituent members different from the conventional example are provided with the new reference numerals. explain.

The vacuum film forming apparatus of the first embodiment according to the present invention can be applied to any apparatus that forms a film by vapor deposition on a strip-shaped base film in a vacuum chamber. . In the vacuum film forming apparatus of the first embodiment,
A metal material or a non-metal material is housed in a film forming crucible of the present invention described below as a film-forming material, and flying particles obtained by melting and evaporating the metal material or the non-metal material by a heat source for evaporation are formed on a base film. It is to form a film. At this time, when mainly using a high melting point material such as a metal material as a film forming material,
As a heat source for evaporation, an electron beam from an electron gun may be used to melt a high melting point material such as a metal material contained in a film forming crucible to evaporate flying particles. When a low melting point material is used as a heat source, the low melting point material such as a non-metallic material housed in a film forming crucible is melted by resistance heating or induction heating such as tungsten or nichrome wire as a heat source for evaporation to generate flying particles. What is necessary is just to evaporate.

Then, Au, Ag, and C are used as film forming materials.
If a metal material such as u, Al or the like is formed on a strip-shaped base film, a strip-shaped packaging film, a decoration film, a capacitor film, etc. can be manufactured.
A thin film magnetic tape can be manufactured by forming a ferromagnetic material such as a film on a base film, and a strip-shaped packaging film can be formed by forming a non-metallic material such as an organic film forming material on the base film. , Decorative films and other functional films.

In the following description, Co is used as a film forming material.
A thin film magnetic tape film forming apparatus for forming flying particles of the metallic magnetic material on a base film using a ferromagnetic material such as a ferromagnetic material will be described in detail.

As shown in FIG. 1, in the vacuum film forming apparatus (film magnetic tape film forming apparatus) 1B of the first embodiment according to the present invention, the vacuum chamber 2 is formed in the same manner as described above with reference to FIG. A supply roll 3A and a take-up roll 3B for winding a band-shaped base film F therein, and a supply-side guide roll 4
A and a take-up side guide roll 4B, and a cylindrical cooling can roll 5 that cools the back side of the base film F while attaching the base film F during film formation are rotatably arranged. A water-cooled cooling plate 9 is provided below the cooling can roll 5 in an arc shape close to the cooling can roll 5, and an opening 9 a is provided in the cooling plate 9 in contact with the cooling can roll 5. The base film F has a substantially rectangular opening along the width direction.

Below the opening 9a of the cooling plate 9,
The conventional film forming crucible 6 described with reference to FIGS.
Instead, a newly developed film forming crucible 20 of the present invention is provided.

The film forming crucible 20 is an essential part of the present invention. As shown in FIG. 2, the film forming crucible 20 is made of a material such as MgO (magnesia) as a film forming crucible. A ferromagnetic material 7 such as Co is formed inside the film forming crucible 20 as a film forming material.
Is stored. On the upper end side of the film forming crucible 20, an upper end side opening 20a is slightly opened slightly larger than the shape of the opening 9a of the cooling plate 9 and has a rectangular shape. Extends to the vicinity of the opening 9 a of the cooling plate 9, and furthermore, the upper end side opening 20 a substantially extends along the opening 9 a of the cooling plate 9.

On the side wall of the film forming crucible 20, there is provided a side wall opening 20b through which an electron beam 8a from a pierce type electron gun (evaporation heat source) 8 attached to the left side wall 2a of the vacuum chamber 2 enters. It has a rectangular opening.

Then, the electron beam 8a from the piercing type electron gun 8 enters the side wall side opening 20b of the film forming crucible 20, and the ferromagnetic material such as Co in the film forming crucible 20 is irradiated with the electron beam 8a. 7, the flying particles 7a are evaporated, and the flying particles 7a are moved from the upper end side opening 20a to the opening 9 of the cooling plate 9.
a to evaporate toward the base film F being in contact with the cooling can roll 5.

At this time, the cooling plate 9 cools the film-forming surface side of the base film F being in contact with the cooling can roll 5, as described in the conventional example. The opening 9a of the cooling plate 9 is provided with a base film F of flying particles 7a such as Co evaporated from the film forming crucible 20 in the same manner as described in the conventional example.
The angle of incidence α at the start of film formation and the angle of incidence β at the end of film formation are regulated.

Accordingly, in the first embodiment, the base film F of the flying particles 7a such as Co evaporated from the film forming crucible 20 is formed.
The angle of incidence α at the start of film formation and the angle of incidence β at the end of film formation are regulated by the opening 9 a of the cooling plate 9.
The upper end side opening 20a of 0 may be slightly larger than the opening 9a of the cooling plate 9 as described above.

An oxygen gas introduction pipe 10 is provided between the cooling can roll 5 and the cooling plate 9 on the side of the incident angle β when the film formation is completed. Oxygen gas O ₂ is injected from the formed plurality of holes toward the flying particles 7 a of the ferromagnetic material 7 such as Co evaporated from the inside of the film forming crucible 6.

The electron beam 8 a emitted from the pierce type electron gun 8 is controlled by a deflection magnet 11 for applying a deflection magnetic field to the orbit and a deflection magnet 12 provided near the film forming crucible 20. I have. Therefore, by scanning the electron beam 8a in the longitudinal direction of the film forming crucible 20, the flying particles 7a such as evaporated Co pass through the opening 9a of the cooling plate 9 and pass through the opening 9a of the cooling plate 9 in the width direction of the base film F.
An extremely thin O magnetic film is formed, and a long thin magnetic tape is wound on a take-up roll 3B by forming the Co-CoO magnetic film in the length direction of the base film F.

Here, flying particles 7a of Co or the like were actually formed on the base film F of 10000 m using the film forming crucible 20 in the vacuum film forming apparatus 1B of the first embodiment. At this time, the base film F is made of PE having a thickness of 10 μm.
Using a T (polyethylene terephthalate) film, 50 kg of pure cobalt was set in the film forming crucible 20 as an evaporation material. The running speed of the base film F is 1
The film was formed under the conditions of 00 m / min and the film thickness of 0.2 μm. The vapor concentration of the material on the film forming crucible 20 was monitored by an atomic absorption monitor so that the pure cobalt was evaporated according to the initial conditions, and the evaporation amount was kept constant by controlling the output of the electron gun.

After a film of pure cobalt was formed on the base film F over 10,000 m, the remaining amount of cobalt remaining in the film forming crucible 20 of the present invention was measured.
It was 3 kg. The difference in weight between the base film F after the formation of 10,000 m and the base film F before the formation showed that the amount of cobalt used for the formation was about 5.3 kg. Therefore, the evaporation material utilization efficiency when using the film forming crucible 20 of the present invention is $ 5.3 / (50-4).
3) It was found that｝ × 100% was about 76%.

On the other hand, instead of the film forming crucible 20 of the present invention,
In the conventional film forming crucible 6 shown in FIG.
When a pure cobalt film was actually formed on a 0000 m base film F, a 10,000 m film was formed, and then a crucible 6 for film formation was formed.
The amount of cobalt remaining inside was about 14 kg. Therefore,
It was found that the efficiency of using the evaporation material when the conventional film forming crucible 6 was used was {5.3 / (50-14)} × 100%, which was about 15%.

From these experiments, it was found that the film forming crucible 2 of the present invention was used.
It has been found that the use efficiency of evaporating material can be greatly improved by using 0 as compared with the conventional case.

According to the vacuum film forming apparatus 1B and the film forming crucible 20 of the first embodiment of the present invention configured as described above,
Particularly, since the upper end side opening 20a of the film forming crucible 20 extends to the vicinity of the opening 9a of the cooling plate 9, the ferromagnetic material 7 such as Co stored in the film forming crucible 20 is melted and evaporated. The flying particles 7a thus formed can be formed on the base film F without waste, and the utilization efficiency of the metal magnetic material 7 is greatly improved.
Further, since the flying particles 7a evaporated from the inside of the film forming crucible 20 do not scatter around the opening 9a of the cooling plate 9, the flying particles 7a do not adhere to and accumulate on the cooling plate 9 at all. 1B is easy to maintain, and the usability is improved.

<Second Embodiment> FIG. 3 is a block diagram showing a vacuum film forming apparatus according to a second embodiment of the present invention.

The vacuum film forming apparatus 1 of the second embodiment shown in FIG.
C has the same configuration as that of the previously described vacuum film forming apparatus 1B of the first embodiment except for a part thereof. Here, for convenience of explanation, the same reference numerals are used for the components shown above. And only different points from the first embodiment will be described.

As shown in FIG. 3, in the vacuum film forming apparatus 1C according to the second embodiment of the present invention, the opening 9a of the cooling plate 9 is opened by being slightly larger than that in the first embodiment. I have.

On the other hand, the film forming crucible 20 is substantially the same in appearance as the first embodiment described with reference to FIG. 2, but melts the ferromagnetic material 7 such as Co contained therein. In order to evaporate the flying particles 7a evaporated toward the base film F in contact with the cooling can roll 5, the upper end side opening 20a opened at the upper end side is provided with the cooling can roll 5.
The base film F of the flying particles 7 is extended to the vicinity and approached to the cooling can roll 5, and the upper end side opening 20a.
The opening size of the upper end side opening 20a is set so that the incident angle α at the start of film formation and the incident angle β at the end of film formation can be regulated.

Then, the upper end side opening 2 of the film forming crucible 20 is formed.
0 a is made to enter the opening 9 a of the cooling plate 9 from below, and the upper end side opening 20 a is made to approach the cooling can roll 5.

In the second embodiment, flying particles 7a obtained by melting and evaporating a ferromagnetic material 7 such as Co contained in a crucible 20 for film formation are used as base materials at an opening 20a on the upper end side of the crucible 20 for film formation. The flying particles 7a can be directly formed on the base film F in contact with the cooling can roll 5 while the incident angle α at the start of film formation on the film F and the incident angle β at the end of film formation are regulated. it can.

If it is not necessary to cool the film-forming surface side of the base film F during film-forming, the cooling plate 9 is not required, so that the film-forming crucible 20 of the second embodiment can be applied. Good.

According to the vacuum film forming apparatus 1C and the film forming crucible 20 of the second embodiment of the present invention configured as described above,
In particular, since the upper end side opening 20a of the film forming crucible 20 extends to the vicinity of the cooling can roll 5, the film forming crucible 2
The flying particles 7a obtained by melting and evaporating the ferromagnetic material 7 such as Co stored in 0 can be directly formed on the base film F without waste, and the utilization efficiency of the metal magnetic material 7 is greatly improved. When the cooling plate 9 is provided, the film forming crucible 20
Since the flying particles 7a evaporated from the inside do not scatter to the cooling plate 9, the flying particles 7a do not adhere to and accumulate on the cooling plate 9, so that maintenance of the apparatus 1C is facilitated and usability is improved.

[0055]

In the vacuum film forming apparatus and film forming crucible according to the present invention described in detail above, according to the vacuum film forming apparatus according to claim 1 and the film forming crucible according to claim 4, particularly, Since the opening on the upper end side of the crucible extends to the vicinity of the opening of the cooling plate, flying particles obtained by melting and evaporating the film-forming material stored in the film-forming crucible are deposited on the base film without waste. As a result, the utilization efficiency of the film forming material is greatly improved. In addition, since flying particles evaporated from the film forming crucible do not scatter around the opening of the cooling plate, flying particles do not adhere to and accumulate on the cooling plate at all, making maintenance of the apparatus easier and easier to use. Selfishness improves.

In the vacuum film forming apparatus according to the second aspect and the film forming crucible according to the fifth aspect, particularly, the upper end side opening of the film forming crucible extends to the vicinity of the cooling can roll. Flying particles obtained by melting and evaporating the film-forming material contained in the film-forming crucible can be directly formed on the base film without waste, and the utilization efficiency of the film-forming material is greatly improved. When a cooling plate is provided, flying particles evaporated from the film forming crucible do not scatter to the cooling plate. And ease of use is improved.

According to the vacuum film forming apparatus of the third aspect, the thin film magnetic tape is manufactured by using the metal magnetic material as the film forming material by applying the vacuum film forming apparatus of the first or second aspect. As a result, the operation rate and productivity of the apparatus are improved, and a thin-film magnetic tape can be manufactured efficiently, which ultimately greatly reduces the cost of the thin-film magnetic tape.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a vacuum film forming apparatus according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing a film forming crucible applied to the vacuum film forming apparatus of the first embodiment according to the present invention.

FIG. 3 is a configuration diagram illustrating a vacuum film forming apparatus according to a second embodiment of the present invention.

FIG. 4 is a configuration diagram for explaining a conventional thin film magnetic tape film forming apparatus.

FIG. 5 is a perspective view showing a conventional film forming crucible used in a conventional thin film magnetic tape film forming apparatus.

[Explanation of symbols]

1B: Vacuum film forming apparatus of the first embodiment, 1C: Vacuum film forming apparatus of the second embodiment, 2 ... vacuum tank, 3A ... supply roll, 3B ...
Take-up roll, 5: cooling can roll, 7: film forming material (ferromagnetic material), 7a: evaporated flying particles, 8: evaporation heat source (pierce type electron gun), 9: cooling plate, 9a: opening, 20
... crucible for film formation, 20a ... upper end side opening, F ... base film.

Claims (5)

[Claims] 1. A cooling can roll that runs on a take-up roll side while abutting a strip-shaped base film wound on a supply roll, and rotates while cooling the back side of the base film during film formation; A film forming crucible provided below the cooling can roll and containing the film forming material, and the film forming material housed in the film forming crucible is melted to evaporate flying particles toward the cooling can roll side. A heat source for evaporation to be provided, provided between the cooling can roll and the film forming crucible in close proximity to the cooling can roll to cool the film forming surface side of the base film and to form the base of the flying particles. At least a cooling plate provided with an opening for controlling the incident angle at the start of film formation and the incident angle at the end of film formation on the film is provided at least in a vacuum tank, and the flying particles are provided at the opening of the cooling plate. After passing In a vacuum film forming apparatus for forming the flying particles on the base film in contact with the cooling can roll, the film forming crucible includes the base film in which the flying particles are in contact with the cooling can roll. An upper end opening having an upper end opened to evaporate toward the vicinity of an opening of the cooling plate, and the upper end opening is substantially aligned with the opening of the cooling plate. Vacuum film forming equipment. 2. A cooling can roll that runs on a take-up roll side while adhering a strip-shaped base film wound on a supply roll, and rotates while cooling the base film during film formation; A crucible for film formation containing a film-forming material, and an evaporator for melting the film-forming material contained in the film-forming crucible and evaporating flying particles toward the cooling can roll. A vacuum source provided at least in a vacuum chamber, wherein the flying particles are deposited on the base film being in contact with the cooling can roll. The film forming crucible comprises: An upper end opening that is open at the upper end side to evaporate toward the base film being attached to the roll extends to near the cooling can roll and approaches the cooling can roll,
A vacuum film forming apparatus, wherein an angle of incidence of the flying particles on the base film at the start of film formation and an angle of incidence at the time of film formation end are regulated by the upper end side opening. 3. The vacuum film forming apparatus according to claim 1, wherein a metal magnetic material is used as the film forming material, and flying particles obtained by melting and evaporating the metal magnetic material are formed on the base film. A vacuum film forming apparatus characterized by forming a film to form a thin film magnetic tape. 4. The cooling device according to claim 1, wherein the back side of the band-shaped base film wound around the supply roll in the vacuum chamber is cooled while being brought into contact with the cooling can roll and is run toward the take-up roll. The flying particles obtained by evaporating the molten film-forming material while cooling the film-forming surface side of the base film with the cooling plate provided are passed through the opening formed in the cooling plate, and the flying particles of the flying particles are passed through the opening. In order to regulate the incident angle at the start of film formation and the incident angle at the end of film formation on the base film to form the flying particles on the base film,
In the film forming crucible containing the film forming material, the film forming crucible has an upper end opened at an upper end to evaporate the flying particles toward the base film being in contact with the cooling can roll. A crucible for film formation, wherein an opening extends to near the opening of the cooling plate, and the upper end side opening is substantially aligned with the opening of the cooling plate. 5. A belt-shaped base film wound around a supply roll in a vacuum tank is cooled while being in contact with a cooling can roll and travels to a take-up roll side, and flying particles obtained by evaporating a molten film-forming material are removed. In order to form a film on the base film being in contact with the cooling can roll, in a film forming crucible containing the film forming material, the film forming crucible applies the flying particles to the cooling can roll. The upper end side opening which opened the upper end side to evaporate toward the base film in contact is extended to the vicinity of the cooling can roll and approached to the cooling can roll,
A crucible for film formation, wherein an angle of incidence of the flying particles on the base film at the start of film formation and an angle of incidence at the end of film formation are regulated by the upper end side opening.