KR102205786B1 - Method of dividing brittle substrate - Google Patents

Abstract

By having the first to third surfaces SD1 to SD3, the blade tip 51 having the ridge line PS and the vertex PP is prepared. By sliding the blade tip 51 on one side SF1 of the brittle substrate 4 in a direction from the ridge line PS to the first side SD1, the trench line TL having a groove shape becomes a crackless state. Is formed. The brittle substrate 4 in the thickness direction DT along the trench line TL from the edge ED by cutting the edge ED of the brittle substrate 4 by the ridge line PS of the edge 51 The crack line CL is formed by extending the crack of. The brittle substrate 4 below the trench line TL is disconnected from a continuous connection in a direction intersecting with the trench line TL by the crack line CL.

Description

Method of dividing brittle substrate {METHOD OF DIVIDING BRITTLE SUBSTRATE}

The present invention relates to a method for dividing a brittle substrate.

In the manufacture of electric equipment such as a flat display panel or a solar panel, it is often necessary to divide a brittle substrate. In a typical segmentation method, first, crack lines are formed on a brittle substrate. In the present specification, the "crack line" means that a crack partially advanced in the thickness direction of the brittle substrate extends in a line shape on the surface of the brittle substrate. Next, a so-called brake process is performed. Specifically, by applying stress to the brittle substrate, cracks in the crack line completely advance in the thickness direction. Accordingly, the brittle substrate is divided along the crack line.

According to Patent Document 1, a dent in the upper surface of the glass plate is generated during scribing. In this patent document 1, this depression is called "scribe line." In addition, at the same time as the angle of the scribe line, a crack that extends from the scribe line in a direction immediately below occurs. As shown in the technique of this patent document 1, in a conventional typical technique, a crack line is formed simultaneously with the formation of a scribe line.

According to Patent Document 2, a segmentation technique that is remarkably different from the above typical segmentation technology is proposed. According to this technique, first, plastic deformation is caused by sliding of the blade tip on a brittle substrate, thereby forming a groove shape called "scribe line" in this patent document 2. In the present specification, hereinafter, the groove shape is referred to as a "trench line". When the trench line is formed, no crack is formed below the trench line. The crack line is then formed by extending the crack along the trench line. That is, unlike typical techniques, a trench line that does not involve cracks is once formed, and then a crack line is formed along the trench line. After that, a normal braking process is performed along the crack line.

The trench line without cracks, which is used in the technique of Patent Document 2, can be formed by sliding the edge of the blade under a lower load than a typical scribe line accompanying the simultaneous formation of cracks. As the load is small, damage to the blade tip is reduced. Therefore, according to this segmentation technique, the life of the blade tip can be increased.

Japanese Laid-Open Patent Publication No. Hei 9-188534 International Publication No. 2015/151755

In a typical conventional technique, the fact that no cracks were formed during scribing meant a failure of scribing. However, in the dividing technique of Patent Document 2, a trench line without cracks is intentionally formed by scribing. And after that, a crack line is generated along the trench line. In order to start forming the crack lines, it is necessary to give the brittle substrate an opportunity to release the internal stress generated in the brittle substrate by the formation of the trench lines. As for a method of providing this opportunity, various methods are proposed in Patent Document 2 above. According to the research of the present inventors, although these methods are also useful, there remains a problem that the probability of forming a crack line is slightly low or that the work burden is slightly high because an additional braking process is required.

The present invention has been made to solve the above problems, and the object is that after forming a trench line having no cracks under the trench line, a crack line along the trench line can be more reliably and easily formed. , To provide a method for dividing a brittle substrate.

A method for dividing a brittle substrate according to an aspect of the present invention includes the following steps a) to e).

a) A brittle substrate having one side on which an edge is formed and a thickness direction perpendicular to one side is prepared.

b) The first side, the second side adjacent to the first side, and the second side adjacent to each other form a ridge line, and the third that forms a vertex by being adjacent to each of the first and second sides. A blade tip with noodles is prepared.

c) A trench line having a groove shape is formed on one side of the brittle substrate by plastic deformation by sliding the edge of the blade on one side of the brittle substrate in a direction from the ridge line to the first side. The trench line is formed so as to obtain a crackless state in which the brittle substrate is continuously connected in a direction below the trench line in a direction crossing the trench line.

d) A crack line is formed by cutting the edge of one side of the brittle substrate by the ridge line of the edge sliding in step c), and extending the crack of the brittle substrate in the thickness direction along the trench line from the edge. . The brittle substrate below the trench line is disconnected from a continuous connection in a direction crossing the trench line by the crack line.

e) A brittle substrate is divided along the crack line.

A method for dividing a brittle substrate according to another aspect of the present invention includes the following steps a) to e).

a) A brittle substrate having one side and a thickness direction perpendicular to one side is prepared. On one surface, an assist line having an assist trench line having a groove shape and an assist crack line constituted by cracks of the brittle substrate in the thickness direction extending along the assist trench line are formed.

b) The first side, the second side adjacent to the first side, and the second side and the second side are adjacent to each other to form a ridge, and the third side that forms a vertex by being adjacent to each of the first and second sides The blade tip to have is ready.

c) A trench line having a groove shape is formed on one side of the brittle substrate by plastic deformation by sliding the edge of the blade on one side of the brittle substrate in a direction from the ridge line to the first side. The trench line is formed so as to obtain a crackless state in which the brittle substrate is continuously connected in a direction below the trench line in a direction crossing the trench line.

d) Crack line by extending the crack of the brittle substrate in the thickness direction along the trench line from the assist line by crossing the ridge line of the edge of the blade sliding in step c) with the assist line formed on one side of the brittle substrate. Is formed. The brittle substrate below the trench line is disconnected from a continuous connection in a direction crossing the trench line by the crack line.

e) A brittle substrate is divided along the crack line.

According to the method for dividing a brittle substrate according to an aspect of the present invention, first, a blade tip can be easily prepared. This is because the apex of the blade tip is formed as a location where the three surfaces of the first, second and third surfaces join. For example, when the apex of the blade tip is formed by a point where more than three faces join, it is necessary to align the position of the remaining face so that the three faces pass through the joining point. For this reason, high processing precision is required. On the other hand, when the apex of the blade tip is formed by the point where the three surfaces join, such high processing precision is not required. Second, it is possible to more reliably form a crack line along the trench line. This is because the ridge line of the edge of the blade that is slid to form the trench line cuts the edge of one side of the brittle substrate. By this cut-out, an opportunity to start formation of a crack line is obtained with high certainty.

According to a method for dividing a brittle substrate according to another aspect of the present invention, first, a blade tip can be easily prepared. This is because the apex of the blade tip is formed as a location where the three surfaces of the first, second and third surfaces join. For example, when the apex of the blade tip is formed by a point where more than three faces join, it is necessary to align the position of the remaining face so that the three faces pass through the joining point. For this reason, high processing precision is required. On the other hand, when the apex of the blade tip is formed by the point where the three surfaces join, such high processing precision is not required. Second, it is possible to more reliably form a crack line along the trench line. This is because the ridge line of the edge of the blade sliding for the formation of the trench line is the intersection of the assist line formed on one side of the brittle substrate and the trench line formed by the vertex of the edge of the sliding blade, and applies a stress locally. . By applying this stress, an opportunity to start the formation of crack lines is obtained with high certainty.

1 is a side view schematically showing a configuration of a cutting mechanism used in a method for dividing a brittle substrate according to a first embodiment of the present invention.
Fig. 2 is a schematic plan view at the point of arrow II in Fig. 1;
3 is a flow diagram schematically showing the configuration of a method for dividing a brittle substrate in Embodiments 1 to 5 of the present invention.
Fig. 4 is a top view schematically showing a first step in the method for dividing a brittle substrate according to the first embodiment of the present invention.
5 is a schematic cross-sectional view taken along line VV in FIG. 4.
6 is a top view schematically showing a second step of the method for dividing a brittle substrate according to the first embodiment of the present invention.
Fig. 7 is a schematic cross-sectional view taken along the line VII-VII in Fig. 6;
8 is a plan view schematically showing the configuration of a cutting mechanism used in a method for dividing a brittle substrate in a comparative example.
9 is a flow diagram schematically showing a configuration of a method for forming a trench line in a method for dividing a brittle substrate according to the second embodiment of the present invention.
Fig. 10 is a top view schematically showing a first step in the method for dividing a brittle substrate according to the third embodiment of the present invention.
11 is a schematic cross-sectional view taken along the line XI-XI in FIG. 10;
Fig. 12 is a top view schematically showing a second step of the method for dividing a brittle substrate according to the third embodiment of the present invention.
13 is a top view schematically showing a third step of the method for dividing a brittle substrate according to the third embodiment of the present invention.
Fig. 14 is a top view schematically showing a first step in a method for dividing a brittle substrate according to the fourth embodiment of the present invention.
15 is a top view schematically showing a second step of the method for dividing a brittle substrate in the fourth embodiment of the present invention.
16 is a cross-sectional view schematically showing a configuration of a blade tip used in a method for dividing a brittle substrate according to the fifth embodiment of the present invention.
Fig. 17 is a cross-sectional view schematically showing the configuration of an assist blade tip used in a method for dividing a brittle substrate according to the fifth embodiment of the present invention.

Hereinafter, an embodiment of the present invention will be described based on the drawings. In the following drawings, the same reference numerals are assigned to the same or corresponding parts, and the description is not repeated.

<Embodiment 1>

(Configuration of cutting mechanism)

With reference to FIGS. 1 and 2, first, a configuration of a cutting mechanism 50 used in a trench line formation step in the method for dividing the glass substrate 4 (brittle substrate) of the present embodiment will be described. The cutting mechanism 50 has a blade tip 51 and a shank 52. The blade tip 51 is held by being fixed to the shank 52 as its holder.

The blade tip 51 is formed with a top surface SD1 (first surface) and a plurality of surfaces surrounding the top surface SD1. These plurality of surfaces include a side surface SD2 (second surface) and a side surface SD3 (third surface). The top surface SD1 and the side surfaces SD2 and SD3 (first to third surfaces) face in different directions and are adjacent to each other. The blade tip 51 has a vertex where the top surface SD1 and the side surfaces SD2 and SD3 join. The protrusion of the blade tip 51 is formed by this vertex PP. Further, the side surfaces SD2 and SD3 constitute a ridge line PS constituting the side portion of the blade tip 51. The ridge line PS extends linearly from the vertex PP, and has a convex shape extending linearly. From the above configuration, the blade tip 51 forms a ridge line PS by being adjacent to the top surface SD1, the side surface SD2 adjacent to the top surface SD1, and the side surface SD2, and also forms the top surface SD1 and the side surface. Each of (SD2) has a side surface (SD3) that is adjacent to each other to form a vertex (PP).

It is preferable that the blade tip 51 is a diamond point. That is, it is preferable that the blade tip 51 is made of diamond from the viewpoint of reducing hardness and surface roughness. More preferably, the blade tip 51 is made of single crystal diamond. More preferably, crystallographically speaking, the top surface SD1 is a {001} surface, and each of the side surfaces SD2 and SD3 is a {111} surface. In this case, the side surfaces SD2 and SD3, although having different directions, are crystallographically equivalent crystal planes.

Further, a diamond other than a single crystal may be used, for example, a polycrystalline diamond synthesized by a CVD (Chemical Vapor Deposition) method may be used. Alternatively, a sintered diamond obtained by bonding polycrystalline diamond particles sintered from fine-grained graphite or non-graphitic carbon without containing a binder such as an iron group element by a binder such as an iron group element may be used.

The shank 52 extends along the axial direction AX. The blade tip 51 is preferably attached to the shank 52 so that the normal direction of the top surface SD1 substantially follows the axial direction AX.

(How to divide the glass substrate)

Next, a method of dividing the glass substrate 4 will be described below with reference to the flow diagram shown in FIG. 3.

In step S10 (FIG. 3), the glass substrate 4 (FIG. 1) to be divided is prepared. The glass substrate 4 has an upper surface SF1 (one surface) and an opposite lower surface SF2 (the other surface). An edge ED is formed on the upper surface SF1. In the example shown in FIG. 4, the edge ED has a rectangular shape. The glass substrate 4 has a thickness direction DT perpendicular to the upper surface SF1. Further, in step S20 (FIG. 3), the above-described cutting mechanism 50 (FIGS. 1 and 2) having the blade tip 51 is prepared.

Referring to Fig. 4, a trench line TL is formed in step S30 (Fig. 3). Specifically, the following steps are performed.

First, the vertex PP of the blade tip 51 (FIG. 1) is pressed against the upper surface SF1 at the position N1. Accordingly, the blade tip 51 comes into contact with the glass substrate 4. It is preferable that the position N1 is separated from the edge ED of the upper surface SF1 of the glass substrate 4, as shown. In other words, it can be avoided that the blade tip 51 collides with the edge ED of the upper surface SF1 of the glass substrate 4 at the start of sliding of the blade tip 51.

Next, the blade tip 51 pressed as described above slides on the upper surface SF1 of the glass substrate 4 (see arrow in FIG. 4 ). The blade tip 51 (FIG. 1) slides in the direction from the ridge line PS to the ceiling surface SD1 on the upper surface SF1. Strictly speaking, the blade tip 51 slides in the direction DB projected on the upper surface SF1 in a direction from the ridge line PS to the ceiling surface SD1 via the vertex PP. The direction DB generally follows the direction in which the extending direction of the ridge line PS in the vicinity of the vertex PP was projected onto the upper surface SF1. In FIG. 1, the direction DB corresponds to the direction opposite to the direction in which the axial direction AX extending from the blade tip 51 is projected onto the upper surface SF1. Therefore, the blade tip 51 is pushed on the upper surface SF1 by the shank 52.

Each of the ridge line PS and the ceiling surface SD1 of the blade tip 51 (FIG. 1) sliding on the upper surface SF1 of the glass substrate 4 is the upper surface SF1 of the glass substrate 4 and the angle AG1 ) And angle (AG2). It is preferable that the angle AG2 is smaller than the angle AG1.

Plastic deformation occurs on the upper surface SF1 by the sliding. Accordingly, a trench line TL (FIG. 5) having a groove shape is formed on the upper surface SF1. It is preferable that the trench line TL is generated only by plastic deformation of the glass substrate 4, and in that case, no cutting occurs on the upper surface SF1 of the glass substrate 4. In order to avoid being cut, it is sufficient not to make the load of the blade tip 51 excessively high. By not being cut, it is possible to avoid occurrence of undesirable fine fragments on the upper surface SF1. However, slight shaving is usually acceptable.

The formation of the trench line TL is performed by sliding the blade tip 51 from the position N1 to the position N3e via the position N2 between the position N1 and the position N3e. The position N2 is separated from the edge ED of the upper surface SF1 of the glass substrate 4. The position N3e is located at the edge ED of the upper surface SF1 of the glass substrate 4.

The trench line TL is a direction DC (FIG. 5) in which the glass substrate 4 intersects the extending direction of the trench line TL (transverse direction in Fig. 4) below the trench line TL. It is formed so that a crackless state, which is a state in which it is continuously connected, is obtained. In the crackless state, the trench line TL due to plastic deformation is formed, but the resulting crack is not formed. In order to obtain a crackless state, the load applied to the blade tip 51 is so small that no cracks occur at the time of formation of the trench line TL, and creates a state of internal stress that can cause cracks in the subsequent process. It is adjusted so that it is large enough to cause plastic deformation as it is produced.

In order to form the trench line TL, the blade tip 51 slid as described above finally reaches the position N3e. The crackless state is maintained at the time when the blade tip 51 is positioned at the position N2, and is maintained until the moment when the blade tip 51 reaches the position N3e. When the blade tip 51 reaches the position N3e, the ridge line PS (FIG. 1) of the blade tip 51 cuts off the edge ED of the upper surface SF1 of the glass substrate 4.

With reference to Figs. 6 and 7, fine breakage occurs at the position N3e by the above cutting. Using this fracture as a starting point, cracks are generated so as to relieve internal stress in the vicinity of the trench line TL. Specifically, cracks of the glass substrate 4 in the thickness direction DT along the trench line TL from the position N3e located at the edge ED of the upper surface SF1 of the glass substrate 4 This extends (refer to the arrow in Fig. 6). In other words, the formation of the crack line CL starts. Accordingly, as step S50 (FIG. 3), the crack line CL is formed from the position N3e to the position N1.

In addition, in order to make the formation of the crack line CL more reliably, the speed at which the blade tip 51 slides from the position N2 to the position N3e is higher than the speed at the position N2 from the position N1. It may be small. Similarly, the load applied to the blade tip 51 from the position N2 to the position N3e may be larger than the load from the position N1 to the position N2 in the range where the crackless state is maintained.

The glass substrate 4 in the lower side of the trench line TL by the crack line CL crosses the extending direction of the trench line TL (the transverse direction in Fig. 6) (DC) (Fig. 7) The continuous connection is broken. Here, "continuous connection" means, in other words, a connection that is not blocked by cracks. Further, as described above, in a state in which the continuous connection is disconnected, portions of the glass substrate 4 may be in contact with each other through the crack of the crack line CL. Further, a slightly continuous connection may be left just below the trench line TL.

The direction in which the crack line CL (FIG. 6) extends along the trench line TL (FIG. 4) (arrow in FIG. 6) is opposite to the direction in which the trench line TL is formed (arrow in FIG. 4). In order to generate the crack line CL in this directional relationship, when the blade tip 51 slides in the direction DB (Fig. 1) to form the trench line TL, the angle AG2 is the angle AG1. It is preferable to be smaller than. If this angular relationship is not satisfied, the crack line CL is unlikely to occur. In addition, if the angle AG1 and the angle AG2 are approximately the same, it is likely to become unstable whether or not the crack line CL occurs.

Next, in step S60 (FIG. 3), the glass substrate 4 is divided along the crack line CL. That is, a so-called brake process is performed. The brake process can be performed by application of an external force to the glass substrate 4. For example, a stress applying member (e.g., a member referred to as ``brake bar'') is placed on the lower surface SF2 toward the crack line CL (Fig. 7) on the upper surface SF1 of the glass substrate 4 By pressing, a stress such as opening a crack in the crack line CL is applied to the glass substrate 4. In addition, when the crack line CL completely advances in the thickness direction DT at the time of its formation, the formation of the crack line CL and the division of the glass substrate 4 occur simultaneously.

The glass substrate 4 is divided by the above. In addition, the above-described crack line CL formation process is essentially different from the so-called brake process. The braking process completely separates the substrate by further extending the cracks already formed in the thickness direction. On the other hand, the forming process of the crack line CL brings about a change from the crackless state obtained by the formation of the trench line TL to a state having cracks. It is considered that this change occurs due to the release of the internal stress of the crackless state.

(Comparative Example 1)

Referring to Fig. 8, the vertex PP of the blade tip 59 of the present comparative example is formed at a location where the four surfaces SE1 to SE4 join. At the vertex PP, four ridge lines PS1 to PS4 are formed. In this case, in the process of FIG. 4, the edge ED of the upper surface SF1 of the glass substrate 4 can be cut out by any one of the ridge lines PS1 to PS4. Therefore, as in the present embodiment, there is an advantage in that the crack line CL is easily formed reliably. On the one hand, there is a disadvantage in that high processing precision is required for the formation of the blade tip 59, and thus the formation is not easy. Because, as in this comparative example, when the apex of the blade edge (PP) is formed by the point where the faces SE1 to SE4 join, the position of one remaining face so that three of these faces pass through the joining point. Because you need to fit.

(Comparative Example 2)

In this comparative example, it is assumed that the sliding direction of the blade tip 51 is opposite to the direction DB (Fig. 1). In this case, in the process of FIG. 4, the edge ED of the upper surface SF1 of the glass substrate 4 is cut off not by the ridge line PS, but the ceiling surface SD1. That is, when cutting down, the sharp ridge line PS acts in the present embodiment, whereas the flat top surface SD1 acts in the comparative example. For this reason, in the present comparative example, it becomes difficult to generate minute breakage that triggers the start of formation of the crack line CL. Therefore, it becomes difficult to reliably form the crack line CL.

(effect)

According to this embodiment, first, the blade tip 51 can be easily prepared. This is because, unlike Comparative Example 1, the apex of the blade tip 51 is formed as a location where the three surfaces of the top surface SD1, the side surface SD2, and the side surface SD3 join. For example, when the apex of the blade tip is formed by a point where more than three faces join, it is necessary to align the position of the remaining face so that the three faces pass through the joining point. For this reason, high processing precision is required. On the other hand, when the apex of the blade tip is formed by the point where the three surfaces join, such high processing precision is not required. Second, it is possible to more reliably form the crack line CL along the trench line TL. This is because, unlike Comparative Example 2, the ridge line PS of the blade tip 51 slid to form the trench line TL cuts the edge ED of the upper surface SF1 of the glass substrate 4 to be. By this cutting, an opportunity for the start of formation of the crack line CL is obtained with high certainty.

<Embodiment 2>

Referring again to FIG. 4, in this embodiment, a lubricant is supplied to the position where the blade tip 51 slides on the upper surface SF1 of the glass substrate 4. In other words, the process of forming the trench line TL (FIG. 4) (FIG. 3: Step S30) includes, as shown in FIG. 9, a step S31 of supplying a lubricant, and the blade tip 51 at the position where the lubricant was supplied. ) Includes a sliding step S32. In order to perform step S31, for example, a lubricant supply unit (not shown) may be formed in the shank 52 (FIG. 1). In addition, since the configurations other than these are substantially the same as those of the first embodiment described above, the description is not repeated. Moreover, step S31 is also applicable to Embodiments 3-5 mentioned later.

In this embodiment, similarly to the first embodiment, the direction DB (FIG. 1) is selected as the advancing direction of the blade tip 51. Under the condition that the load on the blade tip 51 is the same, the sliding in the direction DB is more likely to damage the blade tip 51 than the sliding in the reverse direction. According to this embodiment, this damage can be suppressed effectively. Accordingly, the life of the blade tip can be increased.

<Embodiment 3>

With reference to FIG. 10, in step S10 (FIG. 3 ), the same glass substrate 4 as in the first embodiment is prepared. However, in this embodiment, the assist line AL is formed on the upper surface SF1 of the glass substrate 4. Referring to FIG. 11, the assist line AL has an assist trench line Tla and an assist crack line CLa. The assist trench line Tla has a groove shape. The assist crack line CLa is configured by extending the crack of the glass substrate 4 in the thickness direction DT along the assist trench line Tla.

In the present embodiment, the assist line AL is formed by a step of simultaneously forming the assist trench line Tla and the assist crack line CLa on the upper surface SF1 of the glass substrate 4. Such an assist line AL may be formed by a conventional and typical scribing method. For example, in such an assist line AL, as shown by the arrow in FIG. 10, the edge of the blade sits on the edge ED of the upper surface SF1 of the glass substrate 4, and moves on the upper surface SF1. It can be done by doing. Since minute cracks are generated due to the impact upon sitting, it is easily possible to simultaneously form the assist crack line CLa when forming the assist trench line Tla. In order to suppress damage to the blade tip and the glass substrate 4 when the blade tip sits, it is preferable that the blade tip has a shape different from the shape of the blade tip 51 and suitable for sitting. Specifically, it is preferable that the blade tip is held (wheel-shaped) so as to be able to rotate. In other words, it is preferable that the blade tip rotates rather than sliding on the glass substrate 4. In addition, although the starting point of the assist line AL is the edge ED in FIG. 10, it may be separated from the edge ED.

Next, in step S20 (Fig. 3), the same blade tip 51 as in the first embodiment is prepared. Further, in order to facilitate the preparation of the blade tip for the assist line AL described above, the assist line AL may be formed using this blade tip 51. Alternatively, the assist line AL may be formed by using a blade tip having the same shape as that of the blade tip 51.

Referring to Fig. 12, next, a trench line TL is formed in step S30 (Fig. 3). Specifically, the following steps are performed.

First, the same operation as in the first embodiment is performed. Specifically, the vertex PP of the blade tip 51 (FIG. 1) is pressed against the upper surface SF1 at the position N1. Next, the pressed blade tip 51 slides in the direction DB (FIG. 1) on the upper surface SF1 of the glass substrate 4 (see arrow in FIG. 12). Accordingly, the trench line TL is formed in a crackless state on the upper surface SF1.

In the present embodiment, the formation of the trench line TL extends the blade tip 51 from the position N1 to the position N3a via the position N2 between the position N1 and the position N3a. It is done by sliding. The position N3a is disposed on the assist line AL. The position N2 is arranged between the position N1 and the position N3a. Preferably, the blade tip 51 is further slid to the position N4 beyond the position N3a on the assist line AL. It is preferable that the position N4 is away from the edge ED.

The blade tip 51 slid as described above to form the trench line TL intersects the assist line AL at the position N3a. Therefore, the ridge line PS (FIG. 1) of the blade tip 51 also intersects the assist line AL. A minute break occurs at the position N3a by this intersection. Using this fracture as a starting point, cracks are generated so as to relieve internal stress in the vicinity of the trench line TL. Specifically, the crack of the glass substrate 4 in the thickness direction DT extends from the position N3a located on the assist line AL along the trench line TL (see arrow in FIG. 13 ). ). In other words, formation of the crack line CL (Fig. 13) is started. Accordingly, as step S50 (FIG. 3), the crack line CL is formed from the position N3a to the position N1. After formation of the crack line CL, in the same manner as in the first embodiment, the glass substrate 4 in a direction crossing the trench line TL in the lower side of the trench line TL by the crack line CL Continuous connection is broken.

The blade tip 51 is detached from the glass substrate 4 after reaching the position N3a. Preferably, the blade tip 51 is removed from the glass substrate 4 after sliding to the position N4 beyond the position N3a.

Next, in step S60 (FIG. 3), the glass substrate 4 is divided along the crack line CL similarly to the first embodiment. By the above, the method of dividing the glass substrate 4 of this embodiment is performed.

According to this embodiment, first, for the same reason as the first embodiment, the blade tip 51 can be easily prepared. As a result, similarly to the first embodiment, the crack line CL along the trench line TL can be formed more reliably. Because, for the formation of the trench line (TL), the ridge line (PS) of the blade tip (51), which is slid, is formed on the upper surface (SF1) of the glass substrate (4). This is because a stress is applied locally to the position N3a (Fig. 12) where the trench lines TL formed by the vertices intersect. By applying this stress, an opportunity to start formation of the crack line CL is obtained with high certainty.

<Embodiment 4>

In this embodiment, unlike the third embodiment, each of the assist trench line Tla and the assist crack line CLa of the assist line AL (Figs. 11 and 12) is the trench described in the first embodiment. It is formed by a method similar to the method of forming the line TL and the crack line CL. Hereinafter, this method will be described in detail.

First, a blade tip used for formation of the assist line AL is prepared. This blade tip may be the same as the blade tip 51 (FIGS. 1 and 2). That is, the formation of the assist line AL and the formation of the trench line TL formed thereafter may be performed by the common blade tip 51. Alternatively, as a blade tip for formation of the assist line AL, a blade tip different from the blade tip 51 (hereinafter referred to as "assisted blade tip") may be provided. The assist blade tip may have the same shape as that of the blade tip 51 (FIGS. 1 and 2 ). Alternatively, the assist blade tip may have a shape different from the shape of the blade tip 51. Even when the assist blade tip has a shape different from the shape of the blade tip 51, the assist blade tip is formed of a top surface (SD1), a side surface (SD2), and a side surface (SD3) forming the vertex (PP) and the ridge line (PS). It has a configuration, and it is preferable that the difference in the above-described shape is due to a difference in arrangement between these configurations. The "shape" of the blade tip considered here is the shape of the part near the apex (PP) of the blade tip, that is, the shape of the part acting on the glass substrate 4, and the shape of the part away from the working part is usually important. Not. Hereinafter, in order not to make the explanation redundant, the blade tip used for formation of the assist line AL may be simply referred to as a "blade tip" regardless of whether it is the blade tip 51 or the assist blade tip.

Referring to Fig. 14, next, the assist trench line TLa is formed in a crackless state by a method similar to that of the formation of the trench line TL (Fig. 4). Referring to FIG. 15, next, by a method similar to the method of forming the crack line CL along the trench line TL (FIG. 6 ), the assist trench line along the assist trench line TLa (FIG. 14) ( TLa) is formed. By the above, the assist line AL (Fig. 11) is formed.

Next, as in the third embodiment, in steps S30 and S50 (FIG. 3), a trench line TL (FIG. 12) and a crack line CL (FIG. 13) are formed, and in step S60 (FIG. 3) , The glass substrate 4 is divided along the crack line CL. By the above, the method of dividing the glass substrate 4 of this embodiment is performed.

In this embodiment, the load applied to the blade tip 51 in the formation of the trench line TL (FIG. 12) is compared to the load applied to the blade tip in the formation of the assist trench line TLa (FIG. 14 ). It gets bigger. According to the experimental study of the present inventor, by forming a difference in the load in this way, the crack line CL can be generated more reliably.

Preferably, the angle AG2 (Fig. 1) in the formation of the trench line TL (Fig. 12) is smaller than the angle AG2 (Fig. 1) in the formation of the assist trench line TLa. . By using such an angular relationship, in particular, even when the blade tip for forming the assist trench line Tla is the blade tip 51 or the assist blade tip having the same shape as that of the blade tip 51, the above-described load is Easy to set the difference. This is because, when the shape of the blade tip is the same, the smaller the angle AG2 is, the greater the load that can form the trench line TL (or the assist trench line TLa) in a crackless state increases. In the formation of the trench line TL, when the angle AG2 is too large, it is compatible with forming the trench line TL in a crackless state and using a load larger than the load at the time of forming the assist trench line TLa. It becomes difficult to make it. On the other hand, when the angle AG2 (FIG. 1) in the formation of the trench line TL (FIG. 12) becomes smaller than the angle AG2 (FIG. 1) in the formation of the assist trench line TLa , In the formation of the trench line TL, it becomes easy to use a load larger than the load at the time of formation of the assist trench line TLa. Accordingly, consideration of applying a blade tip design suitable for high load to the blade tip 51 for the trench line TL, and applying a blade tip design suitable for low load to the blade tip for the assist trench line Tla becomes unnecessary. Accordingly, in the formation of the assist trench line TLa, the blade tip 51 used for formation of the trench line TL, or an assist blade tip having the same shape as the shape may be used.

As described above, when a difference is formed in the angle AG2 (FIG. 1), as a blade tip for forming the assist trench line Tla, separate from the blade tip 51 for forming the trench line TL, assist It is desirable that the blade tip is prepared. Accordingly, the posture of the blade tip 51 can be fixed in a state where the angle AG2 of the blade tip 51 becomes suitable for formation of the trench line TL. In other words, between the formation process of the assist trench line TLa and the formation process of the trench line TL, the posture adjustment of the blade tip 51 for optimizing the angle AG2 becomes unnecessary.

<Embodiment 5>

16 and 17, in the present embodiment, the blade tip 51 is used in the formation of the trench line TL, and the assist described in the fourth embodiment is in the formation of the assist trench line TLa. As the blade tip, an assist blade tip 51a is used. The shape of the blade tip 51 and the shape of the assist blade tip 51a are different from each other. For example, each of the blade tip 51 and the assist blade tip 51a in the vicinity of the vertex PP (refer to Fig. 2) is the angle (AP) of the ridge line PS in the cross section perpendicular to the ridge line PS. And APa), and the angle AP is larger than the angle APa. In addition, since the configurations other than these are substantially the same as those of the fourth embodiment described above, the description is not repeated.

According to the present embodiment, blade tips having different shapes are used when forming the assist trench line TLa and when forming the trench line TL. Accordingly, in the formation of the assist trench line TLa and the trench line TL, respectively, as the shape of the blade tip, one suitable for relatively low load and one suitable for high load can be used. Therefore, a crackless state can be obtained more reliably at the time of formation of the assist trench line TLa and the trench line TL, and further, the assist crack line T from each of the assist trench line TLa and the trench line TL ( CLa) and the crack line CL can be generated more reliably.

In addition, in each of the above embodiments, it is illustrated for the case where the edge of the upper surface SF1 is a rectangular shape, but other shapes may be used. Further, the case where the upper surface SF1 is flat has been described, but the upper surface may be curved. Further, the case where the trench line TL has a linear shape has been described, but the trench line TL may have a curved shape. In addition, the case where the glass substrate 4 is used as the brittle substrate has been described, but the brittle substrate may be made of a brittle material other than glass, for example, ceramics, silicon, compound semiconductors, sapphire or quartz. have.

ED: edge
AL: assist line
CL: Crack line
SD1: Cheonmyeon (1st side)
SD2: Side (2nd side)
SD3: Side (3rd side)
SF, SF1: Top (one side)
PP: vertex
TL: trench line
PS: Ridge
CLa: Assist Crack Line
TLa: assist trench line
4: Glass substrate (brittle substrate)
51: blade tip
51a: Assist blade end

Claims (6)

a) a step of preparing a brittle substrate having one side on which an edge is formed and a thickness direction perpendicular to the one side, and further,
b) The first surface, the second surface adjacent to the first surface, and the second surface are adjacent to each other to form a ridge line, and the first surface and the second surface are adjacent to each other to form a vertex. A step of preparing a blade tip having a third side is provided, and additionally
c) A trench line having a groove shape is formed on the one surface of the brittle substrate by plastic deformation by sliding the edge of the blade on the one surface of the brittle substrate in a direction from the ridge line to the first surface. The trench line is formed so as to obtain a crackless state in which the brittle substrate is continuously connected in a direction crossing the trench line under the trench line, and The angle formed by the first surface with the one surface of the brittle substrate is smaller than the angle formed by the ridge line of the blade tip with the one surface of the brittle substrate, and further
d) The ridge line of the edge of the blade slid by the step c) cuts the edge of the one surface of the brittle substrate, so that the brittle substrate in the thickness direction along the trench line from the edge A crack line is formed by extending the crack, and the brittle substrate is continuously disconnected in a direction crossing the trench line under the trench line by the crack line, and further
e) comprising the step of dividing the brittle substrate along the crack line,
How to segment a brittle substrate. The method of claim 1,
The load applied to the blade tip when the ridge line of the blade tip cuts down the edge of the one surface of the brittle substrate in the step d) is greater than the load applied to the blade tip in the step c). How to segment a brittle substrate. The method according to claim 1 or 2,
The sliding speed of the blade tip when the ridge line of the blade tip cuts down the edge of the one surface of the brittle substrate in the step d) is smaller than the sliding speed of the blade tip in the step c). How to segment a brittle substrate. a) a step of preparing a brittle substrate having one surface and a thickness direction perpendicular to the one surface, on the one surface, an assist trench line having a groove shape, and the assist trench line in the thickness direction An assist line having an assist crack line configured by extending the crack of the brittle substrate along the assist trench line is formed, and further
b) The first surface, the second surface adjacent to the first surface, and the second surface are adjacent to each other to form a ridge line, and the first surface and the second surface are adjacent to each other to form a vertex. A step of preparing a blade tip having a third side is provided, and additionally
c) A trench line having a groove shape is formed on the one surface of the brittle substrate by plastic deformation by sliding the edge of the blade on the one surface of the brittle substrate in a direction from the ridge line to the first surface. The trench line is formed so as to obtain a crackless state in which the brittle substrate is continuously connected in a direction crossing the trench line under the trench line, and The angle formed by the first surface with the one surface of the brittle substrate is smaller than the angle formed by the ridge line of the blade tip with the one surface of the brittle substrate, and further
d) The ridge line of the edge of the blade slid by the step c) crosses the assist line formed on the one surface of the brittle substrate, so that the thickness direction from the assist line to the trench line A step of forming a crack line by extending the crack of the brittle substrate is provided, and the brittle substrate is disconnected continuously in a direction crossing the trench line under the trench line by the crack line, Add to
e) a step of dividing the brittle substrate along the crack line,
The step a),
a1) a step of preparing any one of the blade tip and the assist blade tip, wherein the assist blade tip comprises a first surface, a second surface adjacent to the first surface, and a ridge line by adjacent to the second surface. And also has a third surface that forms a vertex by neighboring each of the first and second surfaces, and additionally
a2) By sliding any of the blade tip and the assist blade tip in a direction from the ridge line to the first surface on the one surface of the brittle substrate, the assist trench line is plastically deformed to cause the one of the brittle substrate. Including a step of forming on a surface, wherein the assist trench line is a crackless state in which the brittle substrate is continuously connected in a direction intersecting the assist trench line below the assist trench line. To be formed, and additionally
a3) a step of forming the assist crack line by extending the crack of the brittle substrate in the thickness direction along the assist trench line, wherein the assist crack line is used below the assist trench line. The brittle substrate is continuously disconnected in a direction crossing the trench line,
How to segment a brittle substrate. delete delete

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