TWI488824B - The method and scribing device of glass substrate - Google Patents

Description

Method for sculpting strengthened glass substrate and scribing device

The present invention relates to a method of scoring a glass substrate made of tempered glass, and a scribing apparatus usable in the scribing method.

Here, the term "tempered glass" refers to a compressive stress layer in which a residual compressive stress is formed on a surface layer of a substrate of a glass substrate by chemical treatment by ion exchange in a manufacturing step, and tensile stress remains in the substrate. Made of glass.

The tempered glass is characterized in that it has a property of being difficult to be broken by an external force due to the influence of the compressive stress layer, and on the other hand, it has a crack on the surface of the substrate and spreads to the inside of the substrate in which residual tensile stress exists. Next, the crack is easily penetrated into the nature.

Generally, the following methods are used in the processing of the split glass substrate: first, a scribe line is formed at a limited depth on the surface of the substrate, and then a break bar or a break roller is used along the scribe line from the back side of the substrate. ) Pressing to break.

In the step of forming the scribing line of the former, a method of scoring a disc-shaped cutter wheel (also referred to as a scoring wheel) against the surface of the substrate while rotating it is known, for example, revealing Patent Document 1 and the like. As the cutter wheel, a cutter wheel having a groove having continuous small irregularities at a circumferential ridge portion and a conventional cutter wheel having no irregularities at the ridge portion are used, and are used depending on the type or thickness of the substrate.

Figure 4 shows the separation of the substrate M (mother substrate) made of glass. The general cross scribe process performed when the unit substrate of the product is formed. First, the scribe line S1 in the X direction is formed on the surface of the substrate M by the cutter wheel, and then the scribe line S2 in the Y direction intersecting with the X direction is formed. When a plurality of scribe lines intersecting in the XY direction are formed in this manner, the substrate M is sent to the rupture device, and is bent from the back side along each scribe line, thereby being separated into a unit substrate.

In the method of scribing a glass substrate by a cutter wheel, there are "external cutting" and "inside cutting". The scribing method using the outer cut and the inner cut is selectively distinguished depending on the type or use of the substrate (see Patent Document 2).

The former is cut out, and as shown in FIG. 5(a), the lowermost end of the cutter wheel K is lowered slightly below the surface (upper surface) of the substrate M, and is disposed at the outer side of the one-side end of the substrate M. (Scoring start position). Further, it is horizontally moved from the set position, reaches and collides with the end portion of the substrate, and is further pressed at a predetermined timing, and at the same time, the cutter wheel K is horizontally moved to perform scribing.

When the outer cutting is employed, since the problem of the sliding of the cutter wheel does not occur at the end of the substrate, and the formed score line reaches the end portion of the substrate, the crack is easily and accurately performed in the next step. On the other hand, since the blade edge collides with the end portion of the substrate, there is a fear that the end portion of the substrate is cut, and the end portion is irregularly broken or completely cut due to the influence of the tensile stress inside the substrate. In addition, the cutter wheel is also easily worn out due to collision with the edge portion.

In the latter, as shown in Fig. 5(b), the cutter wheel is lowered from the upper side to the inner side (the scoring start position) of about 2 mm to 10 mm from the edge of the substrate, and is pressed at a predetermined time to be pressed. Connect the substrate and press it while making the cutter wheel Plan by moving horizontally.

When the inner cut is used, since the cutter wheel does not collide with the edge portion of the end portion of the substrate, there is no possibility of cutting at the end portion of the substrate, and the wear of the blade can be suppressed as compared with the outer cut. However, when the cutter wheel is moved in the horizontal direction from the state in which the blade is abutted, the blade is inadvertently invaded and slipped, and the scribing cannot be performed.

Thus, both the outer and the inner cut have advantages and disadvantages. Therefore, the use of the outer and inner cuts is distinguished depending on the type or use of the substrate.

Patent Document 1: Japanese Patent No. 3074143

Patent Document 2: Japanese Laid-Open Patent Publication No. 2009-208237

In recent years, in glass products such as cover glass used for mobile phones and the like, it is desirable to use a glass called so-called tempered glass (also referred to as chemically strengthened glass). As described above, the tempered glass is produced in such a manner that residual compressive stress remains on the surface layer of the substrate, whereby a glass which is hard to be broken although the thickness of the glass is thin can be obtained.

Therefore, once tempered glass is used, there is an advantage that a thin, light, and strong cover glass can be manufactured. On the other hand, as the cover glass, it is necessary to perform processing for cutting out a unit product having a desired size and a desired shape from a large-area mother substrate.

In the case where the scribe line is formed by the dicing of the tempered glass, once the edge of the substrate is collided, the surface is subjected to deeper scribe by the surface compressive stress layer, which may be affected by the residual tensile stress inside the substrate. Sexually completely broken the bad situation. Therefore, use tempered glass The inner cut is better than the outer cut.

However, even if the incision is to be scribed, when the blade is abutted, since it is tempered glass, there is also a problem that the blade is hard to intrude into the surface of the substrate due to the residual compressive stress of the surface layer of the substrate, so that the blade is The effect on the substrate is very poor and slippage occurs. Therefore, there is a problem that the scoring process becomes difficult. Further, when the blade is intruded and scored with a strong pressing load, there is a problem that the film is broken or completely broken due to the influence of the residual tensile stress inside the substrate.

As described above, the tempered glass is different from the dicing process for the soda glass substrate or the like which has been used in the past, and it is difficult to form the scribe line well even by external cutting or incision. This tendency is that the thicker the compressive stress layer on the surface of the substrate is, the larger the residual stress is, the more obvious the substrate is.

Accordingly, an object of the present invention is to provide a method of scribing a scribed line by using an inscribed tempering glass substrate, which is difficult to process.

In order to achieve the above object, the following technical means are employed in the present invention. That is, the scribing method of the present invention is a method for scribing a tempered glass substrate having a compressive stress layer formed on a surface of a substrate, forming a scribing substrate, and using a grooved cutter wheel having continuous irregularities on the ridgeline of the blade (a) lowering the cutter wheel to a starting point that enters to the inner side of one end of the substrate, and in a direction of scribing the predetermined line between the return points near the starting point, in a pressed state Performing at least one reciprocating forward rotation and backward rotation to form a groove which becomes an intrusion starting point of the cutter wheel, and (b) subsequently, pressing the cutter wheel through the groove from the starting point The pressure is rotated until the end position of the predetermined line is scored to form a score line.

The distance at which the cutter wheel reciprocates, that is, the distance from the starting point to the returning position is preferably 0.5 mm to 3 mm, particularly preferably about 2 mm.

Further, from another viewpoint, the substrate scribing apparatus of the present invention is a substrate scribing apparatus which forms a score line on the surface of a glass substrate, and has a platform for mounting a glass substrate; the scribing head is held at the edge of the blade a grooved cutter wheel with continuous irregularities; the scoring head lifting mechanism is configured to raise and lower the scoring head in such a manner that the cutter wheel obtains a contact state and a leaving state with respect to a surface of the glass substrate; and the scanning mechanism enables the engraving The control unit moves in a direction along the surface of the glass substrate; and the control unit controls the lifting operation by the scoring head elevating mechanism and the movement operation of the scribing head by the scanning mechanism; and once the control unit is The state of the substrate is set such that the scribe head comes into control at a starting point that is further inside than the edge of one of the substrates, and (a) the cutter wheel is lowered to abut the starting point, The direction in which the predetermined line is scored is between the retracted position near the starting point, and at least one reciprocating forward and backward rotation is performed in a pressed state to form a cutter wheel. a groove that intrudes into the starting point, and (b) next, the cutter wheel is pressed and rotated from the starting point to the end point of the predetermined line to perform the operation of forming the score line. control.

According to the invention, the cutter wheel is caused to reciprocate at least one reciprocatingly between the starting point and the returning point. A slight trace is formed in the rotation of the initial path, and the trace is deepened in the rotation of the immediately following circuit to become a small groove. The groove formed is used as a trigger for forming a scribe line (knife) The wheel invades the groove) and functions. After the cutter wheel is subjected to at least one reciprocation, it is again rotated from the starting point to the end point of the planned line, thereby performing at least 3 scribes on the same position near the starting point, at least for the third time. It is easy to invade the blade at the starting point portion, and the score line can be preferably formed without sliding.

Further, since the intrusion of the blade at the time of forming the score line becomes easy, even if the pressing load of the cutter wheel when the score line is formed is smaller than the pressing load at the time of forming the groove at the initial starting point, the scoring can be sufficiently formed. The wire can thereby reduce the load imposed on the substrate by the cutter wheel when the score line is formed without cracking or complete breaking of the substrate.

In the present invention, the rotational speed of the cutter wheel is preferably such that the speed at which the score line is formed is faster than the speed at which the reciprocating movement is performed.

Thereby, the processing of the groove which is the starting point of the intrusion of the cutter wheel can be surely performed, and the formation of the score line can be quickly performed.

In the following, details of the scribing method of the present invention will be described in detail based on the drawings.

Fig. 1 is a schematic front view showing an example of a scribing device used to form a score line on a tempered glass substrate.

This scribing device A includes a stage 1 on which a tempered glass substrate M is placed. The platform 1 is provided with a holding mechanism capable of holding the substrate M placed thereon in a fixed position. In the present embodiment, as the holding means, the substrate M is adsorbed and held by a plurality of small air suction holes (not shown) opened in the stage 1. In addition, the platform 1 can be along the horizontal track 2 in the Y direction (figure 1 is moved in the front and rear directions), and is driven by a screw shaft 3 that is rotated by a motor (not shown). Further, the platform 1 can be rotated in a horizontal plane by a rotary drive unit 4 having a built-in motor.

A bridge 7 having support posts 5, 5 provided on both sides of the platform 1 and guide bars 6 extending horizontally in the X direction is provided across the platform 1.

The guide rod 6 is provided with a guide path 8 extending horizontally in the X direction so as to be movable along the guide path 8 to be provided with the scribing head 9 and driven by the motor 12.

At the lower end of the scribing head 9, a gripper 10 is detachably mounted, and a cutter wheel 11 is attached to the gripper 10. In the present invention, as the cutter wheel 11, a grooved cutter wheel having a continuous small unevenness in the circumferential ridge portion can be used.

Fig. 2 is a view showing an example of the grooved cutter wheel 11, Fig. 2(a) is a side view, and Fig. 2(b) is a front view. The grooved cutter wheel 11 is formed with an angle α of a peripheral portion of the disc 11a made of a superhard alloy having a diameter of 2 mm to 6 mm and a thickness of about 0.6 nm to 1.5 mm to form a ridge line 11b which becomes a blade edge. 100 degrees to 140 degrees), and a continuous small unevenness 11c is formed in the ridge line 11b. In addition, as the grooved cutter wheel 11, for example, a scribe wheel "APIO (registered trademark)" manufactured by Mitsuboshi Diamond Industrial Co., Ltd. may be used.

Next, a control system relating to the scoring device A will be described based on Fig. 1 . The scribing device A is provided with a control unit 20. The control unit 20 is constituted by a computer system which is constituted by a CPU (Central Processing Unit) 21 for performing control on a desired basis. Computing processing; memory 22 (memory), memory control program or required setting information; input device 23 for inputting and outputting information or operations; and display device 24 for use as an input operation screen or device Monitoring screen of the situation.

The control unit 20 stores the setting information required for the control in the memory 22 in advance, whereby the desired scribing operation can be performed by the control program and the setting information.

If the information related to the present invention is specifically described in the stored setting information, the moving speed information 22a at the time of the marking, the pressing load information 22b pressing the substrate, and the moving distance information of the scribe head are specifically described. 22c is set in advance by input before the start of processing.

For the moving speed information 22a of the scribing head, one or two numerical values can be input, and when two numerical values are input, the memory is "first moving speed" and "second moving speed", which will be described below using FIG. Generally, when reciprocating (Fig. 3 (c), (d)), the scan is performed at "first moving speed", and when the scoring end point is reached (Fig. 3 (e)), "the second moving speed" is used. Scan. When only one value is input, the memory is "first moving speed" (the first moving speed and the second moving speed are treated as the same), and the scribing process is performed (Fig. 3(c), (d), ( e)) The scribe head is always scanned at the "first moving speed".

It is also possible to input one or two values to the press load information 22b, and when the two values are input, the memory is the "first press load" and the "second press load", as described below with reference to FIG. When moving (Fig. 3 (c), (d)), press the "first pressing load" while sweeping When the scribe is reached at the end of the scoring (Fig. 3(e)), the second pressing load is used to perform the pressing while scanning. When one value is input, the memory is "first pressing load" (the first pressing load and the second pressing load are treated as the same), and the scribing process is performed (Fig. 3(c), (d), ( e)) Always perform the simultaneous pressing with the "first pressing load".

The movement distance information 22c can be input and set by one numerical value. As described below with reference to Fig. 3, the memory is a reciprocating movement (Fig. 3 (c), (d)) from the starting point to the turning point "moving distance L" "."

Next, a scribing method using the scribing device A will be described using FIG.

First, the cutter wheel 11 is brought to the front of the starting point P1 of the scribing process in advance so that the substrate M is placed on the stage 1 in such a manner that the moving direction of the cutter wheel 11 coincides with the planned line of scribing. In the general method of installing the substrate M, a positioning stopper (not shown) is attached to the platform 1 and positioned to abut against the positioning portion. However, the substrate may be placed at a fixed position by the transfer robot. Further, the operation until the substrate is placed may be either manual or automatic.

Further, as shown in FIGS. 3(a) and 3(b), on the scribed line of the substrate M, the grooved cutter wheel 11 is lowered to the inner side of one end edge (the left end edge of the drawing) of the substrate M. The starting point P1 (for example, the inner side of 3 mm) is pressed by a pressing load (memory is the load of the first pressing load information) obtained in the preliminary test, for example, about 0.05 MPa, and is rotated forward to the start. The return point P2 near the location (memory is the distance of the moving distance information) (refer to Figure 3 (c)).

Further, at the returning point P2, the previous pressing load is continuously maintained and folded back to rotate back to the starting point P1 to form a groove (groove) T (Refer to Figure 3(d)).

Thereafter, a scribe line S is formed by using a pressing load that is smaller than the previous pressing load (memory is the load of the second pressing load), for example, about 0.01 MPa, and is rotated to the end point P3 of the scribed line. 3(e)).

Thus, the groove T formed by reciprocating the cutter wheel 11 along the starting point P1 → the return point P2 → the starting point P1 is used as a trigger for forming the score line S (the cutter wheel intrusion It works with grooves). Therefore, after the cutter wheel 11 is reciprocated, the intrusion of the blade is facilitated when the starting point P1 is rotated to the end point P3 of the planned line, and the score line S is preferably formed without slipping.

Further, since the intrusion of the blade is easy when the score line S is formed, even if the pressing load of the cutter wheel 11 when the score line is formed is smaller than the pressing load when the groove T is formed, the score line can be sufficiently formed. S. Thereby, the load imposed on the substrate by the cutter wheel when the score line is formed can be reduced without cracking or complete breaking of the substrate.

The distance by which the cutter wheel 11 reciprocates, that is, the distance L from the starting point P1 to the returning point P2 (the distance stored as the moving distance information) is preferably set to 0.5 mm to 3 mm, and particularly preferably It is about 2 mm.

Further, the rotational speed of the cutter wheel 11 is preferably such that the speed at which the reciprocating movement is performed (the speed at which the first moving speed is memorized) is slow, for example, about 3 mm/sec, so that the speed at which the score line S is formed (memory) The speed of the second moving speed is faster, for example 100 mm/sec. Thereby, the processing of the groove T which becomes the starting point of the first cutter wheel can be surely performed, and the scribing can be performed quickly Processing of line S.

Table 1 shown below shows the test results of the scribe by the inscribed scribe method of the present invention, and Table 2 shows the test results of the scribe by the conventional inscribed scribe method.

In this test, eight grooved cutter wheels (numbered 1 to 8) having a ridgeline angle (α) of 2 mm in diameter were prepared, respectively, using the inscribed scribe method of the present invention, and the conventional inscribed scribe method. Conduct a scratch test.

As a result, in the conventional scribe method (Table 2), there are many × marks indicating that the urging force is poor or the first crack is generated, and the processing of the scribe line is extremely unstable, whereas the scribe method of the present invention is relatively unstable. In (Table 1), the score line can be stably formed over a wide range as indicated by the mark ○.

The representative embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments. For example, in the above embodiment, the cutter wheel 11 is reciprocated from the start position P1 to the return position P2, but it is also possible to perform two reciprocations depending on the type or thickness of the tempered glass. In this case, the moving speed and the pressing load at the time of the reciprocating operation are also scored with reference to the values of the first moving speed and the first pressing load.

Further, in the above embodiment, the pressing load of the cutter wheel 11 at the time of forming the score line is smaller than the pressing load when the groove T is reciprocated, but the pressing load at the time of reciprocation may be scribed. The entire length of the line is scored.

In the other aspects of the invention, modifications and changes may be appropriately made without departing from the scope of the invention.

The scribing method of the present invention can be utilized in the case of scoring a tempered glass substrate.

M‧‧‧Battery material substrate

P1‧‧‧ starting point

P2‧‧‧Return location

S‧‧ scribe

T‧‧‧ trench

11‧‧‧Cutter wheel

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing an embodiment of a scoring apparatus used in the scribing method of the present invention.

Fig. 2 is a front view and a left side view showing an example of the cutter wheel of Fig. 1.

Fig. 3 is a plan view showing the sequence of the scribing method of the present invention.

Fig. 4 is a view showing a cross-scouring process of a general glass substrate.

Fig. 5 is a view showing a conventional scribing method using a cutter wheel.

11‧‧‧Cutter wheel

M‧‧‧ substrate

T‧‧‧ trench

S‧‧ scribe

L‧‧‧Moving distance

P1‧‧‧ starting point

P2‧‧‧Return location

P3‧‧‧ Destination Location

Claims (6)

A method for scribing a tempered glass substrate, wherein the tempered glass substrate having a compressive stress layer formed on a surface of the substrate is formed with a scribe line, which is characterized by: a grooved cutter wheel having continuous ridges and ridges on the edge of the blade, (a) The cutter wheel descends against a starting point that enters to the inner side of one of the end edges of the substrate, and performs at least one reciprocating advancement in a pressing state between the direction of the predetermined line and the reentry point near the starting point. Rotating and retreating to form a groove that becomes an intrusion starting point of the cutter wheel, and (b) subsequently, the cutter wheel is pressed and rotated to pass through the groove from the starting point until the end point of the predetermined line is scored. The scribe line is formed; the pressing load of the cutter wheel when the scribe line is formed is smaller than the pressing load of the cutter wheel when the groove which becomes the starting point of the cutter wheel is formed. The method of scoring a tempered glass substrate according to the first aspect of the invention, wherein the rotational speed of the scoring wheel when forming the score line is faster than the rotational speed of the reciprocating movement. The method for scoring a tempered glass substrate according to claim 1 or 2, wherein the distance from the starting point to the turning point is 0.5 mm to 3 mm. A scribing device is formed on a surface of a glass substrate to form a scribe line, which is characterized in that: a platform is disposed on which the glass substrate is placed; and the scribing head is held by the grooved cutter wheel having continuous ridges on the edge of the blade edge; The scribing head elevating mechanism is configured to raise and lower the scribing head by bringing the cutter wheel into a contact state and a leaving state with respect to a surface of the glass substrate; and the scanning mechanism is configured to cause the scribing head to be along a surface of the glass substrate And a control unit that performs a lifting operation by the above-described scoring head elevating mechanism and a control of a moving operation of the scribing head by the scanning mechanism; wherein the control unit is in a state in which the substrate is already provided When the scribing head comes to the starting point to enter the inner side of one end of the substrate, (a) the cutter wheel is lowered to abut the starting point, and the direction of the predetermined line is Between the reversing points near the starting point, at least one reciprocating forward and backward rotation are performed in a pressed state to form a groove which becomes an intrusion starting point of the cutter wheel, and (b) next, the cutter wheel is made from the above starting point Pressing and rotating by means of the above-mentioned groove until the end point of the predetermined line is scored, and the control of forming the scribe line is performed; and the cutter wheel forming the scribe line is formed The pressing load, the pressing load becomes more form of cutter wheel when the starting point of the groove intrusion of the cutter wheel is small. The scoring device of claim 4, wherein the control unit includes a memory unit that can respectively record the rotation of the (a) reciprocating rotation and the end point of the (b) to the predetermined line of scoring The moving speed of the head is momentarily determined, and the reciprocating rotation of the above (a) and the end point of the predetermined line up to (b) are determined according to the moving speed memorized by the memory unit. The speed of movement when the point is rotated. The scoring device of claim 4, wherein the control unit includes a memory unit that memorizes the end point of the (a) reciprocating rotation and the end point of the (b) to the scoring line. The pressing load of the head when turning.