KR102205384B1 - 기판 처리 장치 및 기판의 냉각 방법 - Google Patents
기판 처리 장치 및 기판의 냉각 방법 Download PDFInfo
- Publication number
- KR102205384B1 KR102205384B1 KR1020180005984A KR20180005984A KR102205384B1 KR 102205384 B1 KR102205384 B1 KR 102205384B1 KR 1020180005984 A KR1020180005984 A KR 1020180005984A KR 20180005984 A KR20180005984 A KR 20180005984A KR 102205384 B1 KR102205384 B1 KR 102205384B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate holding
- duct
- intake
- heat treatment
- substrate
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017008917A JP6735686B2 (ja) | 2017-01-20 | 2017-01-20 | 基板処理装置及び基板の冷却方法 |
JPJP-P-2017-008917 | 2017-01-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20180086139A KR20180086139A (ko) | 2018-07-30 |
KR102205384B1 true KR102205384B1 (ko) | 2021-01-19 |
Family
ID=62925471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020180005984A KR102205384B1 (ko) | 2017-01-20 | 2018-01-17 | 기판 처리 장치 및 기판의 냉각 방법 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6735686B2 (zh) |
KR (1) | KR102205384B1 (zh) |
CN (1) | CN108335998B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115440633B (zh) * | 2022-10-17 | 2023-07-11 | 北京北方华创微电子装备有限公司 | 半导体工艺设备和排气调节机构 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012080081A (ja) | 2010-09-09 | 2012-04-19 | Tokyo Electron Ltd | 縦型熱処理装置 |
JP2014042042A (ja) | 2007-09-06 | 2014-03-06 | Hitachi Kokusai Electric Inc | 半導体製造装置及び基板処理方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100932965B1 (ko) * | 2007-02-09 | 2009-12-21 | 가부시키가이샤 히다치 고쿠사이 덴키 | 단열 구조체, 가열 장치, 가열 시스템, 기판 처리 장치 및반도체 장치의 제조 방법 |
JP5237592B2 (ja) * | 2007-07-06 | 2013-07-17 | 株式会社日立国際電気 | 基板処理装置、基板処理装置の排気ガス処理方法及び基板処理方法 |
KR101509286B1 (ko) * | 2010-09-09 | 2015-04-06 | 도쿄엘렉트론가부시키가이샤 | 종형 열처리 장치 |
JP5565242B2 (ja) * | 2010-09-29 | 2014-08-06 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
JP5625981B2 (ja) | 2011-02-10 | 2014-11-19 | 東京エレクトロン株式会社 | 熱処理装置及び熱処理方法 |
JP5779957B2 (ja) * | 2011-04-20 | 2015-09-16 | 東京エレクトロン株式会社 | ローディングユニット及び処理システム |
WO2013141371A1 (ja) * | 2012-03-22 | 2013-09-26 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法および基板処理方法 |
JP6170847B2 (ja) * | 2013-03-25 | 2017-07-26 | 株式会社日立国際電気 | 断熱構造体、加熱装置、基板処理装置および半導体装置の製造方法 |
JP6211938B2 (ja) * | 2014-01-27 | 2017-10-11 | 東京エレクトロン株式会社 | 基板熱処理装置、基板熱処理装置の設置方法 |
JP6441244B2 (ja) * | 2016-02-02 | 2018-12-19 | 株式会社Kokusai Electric | 基板処理装置 |
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2017
- 2017-01-20 JP JP2017008917A patent/JP6735686B2/ja active Active
-
2018
- 2018-01-17 KR KR1020180005984A patent/KR102205384B1/ko active IP Right Grant
- 2018-01-18 CN CN201810050019.5A patent/CN108335998B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014042042A (ja) | 2007-09-06 | 2014-03-06 | Hitachi Kokusai Electric Inc | 半導体製造装置及び基板処理方法 |
JP2012080081A (ja) | 2010-09-09 | 2012-04-19 | Tokyo Electron Ltd | 縦型熱処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JP6735686B2 (ja) | 2020-08-05 |
KR20180086139A (ko) | 2018-07-30 |
CN108335998B (zh) | 2023-04-07 |
JP2018117103A (ja) | 2018-07-26 |
CN108335998A (zh) | 2018-07-27 |
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