KR102200854B9 - 메탈 마스크용 소재 및 그 제조 방법 - Google Patents

메탈 마스크용 소재 및 그 제조 방법

Info

Publication number
KR102200854B9
KR102200854B9 KR1020197005475A KR20197005475A KR102200854B9 KR 102200854 B9 KR102200854 B9 KR 102200854B9 KR 1020197005475 A KR1020197005475 A KR 1020197005475A KR 20197005475 A KR20197005475 A KR 20197005475A KR 102200854 B9 KR102200854 B9 KR 102200854B9
Authority
KR
South Korea
Prior art keywords
manufacturing
metal mask
mask
metal
Prior art date
Application number
KR1020197005475A
Other languages
English (en)
Other versions
KR102200854B1 (ko
KR20190034263A (ko
Inventor
아키히로 오모리
타쿠야 오카모토
야스유키 이이다
Original Assignee
히다찌긴조꾸가부시끼가이사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=61305126&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR102200854(B9) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 히다찌긴조꾸가부시끼가이사 filed Critical 히다찌긴조꾸가부시끼가이사
Publication of KR20190034263A publication Critical patent/KR20190034263A/ko
Application granted granted Critical
Publication of KR102200854B1 publication Critical patent/KR102200854B1/ko
Publication of KR102200854B9 publication Critical patent/KR102200854B9/ko

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/08Ferrous alloys, e.g. steel alloys containing nickel
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D8/00Modifying the physical properties by deformation combined with, or followed by, heat treatment
    • C21D8/02Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips
    • C21D8/0221Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips characterised by the working steps
    • C21D8/0236Cold rolling
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D8/00Modifying the physical properties by deformation combined with, or followed by, heat treatment
    • C21D8/02Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips
    • C21D8/04Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips to produce plates or strips for deep-drawing
    • C21D8/0421Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips to produce plates or strips for deep-drawing characterised by the working steps
    • C21D8/0436Cold rolling
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/02Ferrous alloys, e.g. steel alloys containing silicon
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/04Ferrous alloys, e.g. steel alloys containing manganese
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/46Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for sheet metals
KR1020197005475A 2016-08-31 2017-08-31 메탈 마스크용 소재 및 그 제조 방법 KR102200854B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016169880 2016-08-31
JPJP-P-2016-169880 2016-08-31
PCT/JP2017/031348 WO2018043641A1 (ja) 2016-08-31 2017-08-31 メタルマスク用素材およびその製造方法

Publications (3)

Publication Number Publication Date
KR20190034263A KR20190034263A (ko) 2019-04-01
KR102200854B1 KR102200854B1 (ko) 2021-01-11
KR102200854B9 true KR102200854B9 (ko) 2022-07-20

Family

ID=61305126

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020197005475A KR102200854B1 (ko) 2016-08-31 2017-08-31 메탈 마스크용 소재 및 그 제조 방법

Country Status (5)

Country Link
EP (1) EP3508604B1 (ko)
JP (1) JP6807038B2 (ko)
KR (1) KR102200854B1 (ko)
CN (1) CN109642289B (ko)
WO (1) WO2018043641A1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2019098168A1 (ja) 2017-11-14 2019-11-14 大日本印刷株式会社 蒸着マスクを製造するための金属板、金属板の検査方法、金属板の製造方法、蒸着マスク、蒸着マスク装置及び蒸着マスクの製造方法
KR20210049888A (ko) 2018-09-27 2021-05-06 닛테츠 케미컬 앤드 머티리얼 가부시키가이샤 메탈 마스크 재료 및 그의 제조 방법과 메탈 마스크
CN116987977B (zh) * 2023-09-25 2024-01-02 安泰科技股份有限公司 一种fmm掩模用铁镍基精密合金材料、合金带材及冶炼工艺

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0762217B2 (ja) * 1990-07-17 1995-07-05 日本鋼管株式会社 シャドウマスク用Fe―Ni合金薄板およびその製造方法
JP2842022B2 (ja) * 1992-02-13 1998-12-24 日本鋼管株式会社 Fe−Ni系シャドウマスク用薄板およびその製造方法
JPH1060525A (ja) * 1996-08-26 1998-03-03 Nkk Corp 板形状および耐熱収縮性に優れた低熱膨張合金薄板の製 造方法
DE60040004D1 (de) * 1999-06-10 2008-10-02 Nippon Yakin Kogyo Co Ltd Material auf fe-ni-basis für lochmaske
JP2001038403A (ja) * 1999-07-28 2001-02-13 Nisshin Steel Co Ltd シャドウマスク用薄板の製造方法
JP3327903B2 (ja) * 1999-07-28 2002-09-24 日本冶金工業株式会社 Fe−Ni系シャドウマスク用材料
JP2001179305A (ja) * 2000-12-18 2001-07-03 Toshiba Corp シャドウマスク用原板の製造方法
JP2002241901A (ja) * 2001-02-13 2002-08-28 Nkk Corp シャドウマスク用素材及びその製造方法
JP3556942B2 (ja) * 2001-08-23 2004-08-25 日鉱金属加工株式会社 エッチング後の形状が良好なシャドウマスク用条材
JP2005144466A (ja) * 2003-11-12 2005-06-09 Jfe Steel Kk エッチング性に優れたシャドウマスク用Fe−Ni系合金薄板の製造方法
JP4164828B2 (ja) * 2004-09-29 2008-10-15 日立金属株式会社 Fe−Ni系合金薄板材の製造方法
JP5294072B2 (ja) 2009-03-18 2013-09-18 日立金属株式会社 エッチング加工用素材の製造方法及びエッチング加工用素材
JP5721691B2 (ja) 2012-11-20 2015-05-20 Jx日鉱日石金属株式会社 メタルマスク材料及びメタルマスク
JP6628082B2 (ja) * 2015-01-20 2020-01-08 日立金属株式会社 Fe−Ni系合金薄板の製造方法
CN105803333A (zh) * 2015-01-20 2016-07-27 日立金属株式会社 Fe-Ni系合金薄板的制造方法

Also Published As

Publication number Publication date
KR102200854B1 (ko) 2021-01-11
EP3508604B1 (en) 2020-12-09
EP3508604A4 (en) 2020-01-01
CN109642289A (zh) 2019-04-16
WO2018043641A1 (ja) 2018-03-08
KR20190034263A (ko) 2019-04-01
JP6807038B2 (ja) 2021-01-06
CN109642289B (zh) 2021-06-01
EP3508604A1 (en) 2019-07-10
JPWO2018043641A1 (ja) 2019-06-24

Similar Documents

Publication Publication Date Title
KR20180084871A (ko) 착용 물품 및 이의 제조 방법
KR102217049B9 (ko) 메탈 마스크용 소재 및 그 제조 방법
KR102071840B9 (ko) 메탈 마스크 기재, 메탈 마스크, 및 메탈 마스크의 제조 방법
KR102123317B9 (ko) 금속판, 금속판의 제조 방법, 및 금속판을 사용하여 마스크를 제조하는 방법
KR20180084975A (ko) 디스플레이 장치 및 그 제조방법
FR3032314B1 (fr) Actionneur de positionnement et procede de fabrication
SG11202004253QA (en) Oil-and-fat composition and manufacturing method thereof
KR20180084922A (ko) 레지스트패턴 형성방법 및 레지스트재료
KR20180085010A (ko) 표면 실장 인덕터 및 그 제조 방법
EP3508285A4 (en) MATERIAL FOR METAL MASK, AND MANUFACTURING METHOD THEREOF
DK3121318T3 (da) Beklædningsgenstand og fremgangsmåde til fremstilling
HK1208301A2 (en) Mask and manufacturing method thereof
KR20180084834A (ko) 장치 및 그러한 장치의 제조 방법
SG11202001133XA (en) Pellicle and method for manufacturing pellicle
TWI799375B (zh) 零件製造用膜及零件的製造方法
KR102200854B9 (ko) 메탈 마스크용 소재 및 그 제조 방법
FI20165503A (fi) Kypärä ja menetelmä sen valmistamiseksi
PT3122497T (pt) Método de fabrico de um material de metal poroso para aplicações biomédicas
HK1219716A1 (zh) 種高導熱陶瓷材料及其製造方法
DK3152503T3 (da) Luftfordeler til sprøjtetørring og en fremgangsmåde til fremstilling af en luftfordeler omfattende metalformgivning
KR102244229B9 (ko) Fe-Ni계 합금 박판의 제조 방법 및 Fe-Ni계 합금 박판
SI3325839T1 (sl) Oblikovani material in postopek proizvodnje
SG10201605276WA (en) Inorganic material film, photomask blank, and method for manufacturing photomask
DK3414087T3 (da) Emballagemateriale og fremgangsmåde til fremstilling af det samme
SG10201703694SA (en) Positioning apparatus, lithography apparatus, and method of manufacturing article

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
Z072 Maintenance of patent after cancellation proceedings: certified copy of decision transmitted [new post grant opposition system as of 20170301]
Z131 Decision taken on request for patent cancellation [new post grant opposition system as of 20170301]