KR102163086B1 - 비등가 길이 포어암들을 가진 다-축 로봇 장치, 전자 디바이스 제조 시스템들, 및 전자 디바이스 제조시 기판들을 운반하기 위한 방법들 - Google Patents

비등가 길이 포어암들을 가진 다-축 로봇 장치, 전자 디바이스 제조 시스템들, 및 전자 디바이스 제조시 기판들을 운반하기 위한 방법들 Download PDF

Info

Publication number
KR102163086B1
KR102163086B1 KR1020157016956A KR20157016956A KR102163086B1 KR 102163086 B1 KR102163086 B1 KR 102163086B1 KR 1020157016956 A KR1020157016956 A KR 1020157016956A KR 20157016956 A KR20157016956 A KR 20157016956A KR 102163086 B1 KR102163086 B1 KR 102163086B1
Authority
KR
South Korea
Prior art keywords
forearm
boom
wrist
center
fore arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020157016956A
Other languages
English (en)
Korean (ko)
Other versions
KR20150092196A (ko
Inventor
제프리 씨. 허진스
이즈야 크레머맨
제프리 에이. 브로딘
데이먼 키이스 콕스
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20150092196A publication Critical patent/KR20150092196A/ko
Application granted granted Critical
Publication of KR102163086B1 publication Critical patent/KR102163086B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/12—Machines characterised by the modularity of some components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/19—Drive system for arm
    • Y10S901/23—Electric motor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49009—Dynamoelectric machine
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20317—Robotic arm including electric motor

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Motor Or Generator Frames (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
KR1020157016956A 2012-11-30 2013-11-26 비등가 길이 포어암들을 가진 다-축 로봇 장치, 전자 디바이스 제조 시스템들, 및 전자 디바이스 제조시 기판들을 운반하기 위한 방법들 Active KR102163086B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261732196P 2012-11-30 2012-11-30
US61/732,196 2012-11-30
PCT/US2013/072048 WO2014085479A1 (en) 2012-11-30 2013-11-26 Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing

Publications (2)

Publication Number Publication Date
KR20150092196A KR20150092196A (ko) 2015-08-12
KR102163086B1 true KR102163086B1 (ko) 2020-10-07

Family

ID=50824133

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020157016957A Active KR102094390B1 (ko) 2012-11-30 2013-11-26 모터 모듈들, 다중-축 모터 구동 조립체들, 다중-축 로봇 장치, 및 전자 디바이스 제조 시스템들 및 방법들
KR1020207008382A Active KR102214398B1 (ko) 2012-11-30 2013-11-26 모터 모듈들, 다중-축 모터 구동 조립체들, 다중-축 로봇 장치, 및 전자 디바이스 제조 시스템들 및 방법들
KR1020157016956A Active KR102163086B1 (ko) 2012-11-30 2013-11-26 비등가 길이 포어암들을 가진 다-축 로봇 장치, 전자 디바이스 제조 시스템들, 및 전자 디바이스 제조시 기판들을 운반하기 위한 방법들

Family Applications Before (2)

Application Number Title Priority Date Filing Date
KR1020157016957A Active KR102094390B1 (ko) 2012-11-30 2013-11-26 모터 모듈들, 다중-축 모터 구동 조립체들, 다중-축 로봇 장치, 및 전자 디바이스 제조 시스템들 및 방법들
KR1020207008382A Active KR102214398B1 (ko) 2012-11-30 2013-11-26 모터 모듈들, 다중-축 모터 구동 조립체들, 다중-축 로봇 장치, 및 전자 디바이스 제조 시스템들 및 방법들

Country Status (6)

Country Link
US (2) US9742250B2 (enExample)
JP (2) JP6336467B2 (enExample)
KR (3) KR102094390B1 (enExample)
CN (2) CN104823272B (enExample)
TW (2) TWI609557B (enExample)
WO (2) WO2014085483A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102686013B1 (ko) 2024-04-23 2024-07-17 주식회사 진성산업 반전이송 가능한 구조를 갖는 로봇암 장치

Families Citing this family (75)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10086511B2 (en) * 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
USD723239S1 (en) * 2012-08-30 2015-02-24 Entegris, Inc. Wafer carrier ring
US9190306B2 (en) * 2012-11-30 2015-11-17 Lam Research Corporation Dual arm vacuum robot
US9149936B2 (en) 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
CN103192384B (zh) * 2013-03-11 2015-08-19 上海交通大学 一种集成旋转变压器的静态真空轴系装置
TWI632013B (zh) * 2013-03-15 2018-08-11 美商伊雷克托科學工業股份有限公司 用以處理工件上或之內的特徵的雷射處理設備和用於雷射處理工件的方法
US10427303B2 (en) * 2013-03-15 2019-10-01 Applied Materials, Inc. Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing
US20150068350A1 (en) * 2013-09-10 2015-03-12 Seiko Epson Corporation Robot arm and robot
JP6337432B2 (ja) 2013-09-10 2018-06-06 セイコーエプソン株式会社 関節駆動装置及びロボット
BR112016008189B1 (pt) 2013-10-23 2021-07-27 Prysmian S.P.A. Cabo de energia, e, método para extrair subprodutos de reticulação de uma camada eletricamente isolante reticulada
WO2015073658A1 (en) 2013-11-13 2015-05-21 Brooks Automation, Inc. Sealed switched reluctance motor
JP6679482B2 (ja) 2013-11-13 2020-04-15 ブルックス オートメーション インコーポレイテッド ブラシレス電気機械の制御方法および装置
TWI695447B (zh) 2013-11-13 2020-06-01 布魯克斯自動機械公司 運送設備
US9948155B2 (en) 2013-11-13 2018-04-17 Brooks Automation, Inc. Sealed robot drive
US9724834B2 (en) * 2014-01-05 2017-08-08 Applied Materials, Inc. Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing
JP6474971B2 (ja) * 2014-07-03 2019-02-27 株式会社ダイヘン ワーク搬送装置
DE102014009892B4 (de) * 2014-07-04 2018-05-30 gomtec GmbH Antriebseinheit mit magnetischer Schnittstelle
JP7079604B2 (ja) * 2015-02-06 2022-06-02 パーシモン テクノロジーズ コーポレイション 不等リンク長を有するアームを有するロボット
USD767234S1 (en) * 2015-03-02 2016-09-20 Entegris, Inc. Wafer support ring
JP7074977B2 (ja) 2015-03-12 2022-05-25 パーシモン テクノロジーズ コーポレイション エンドエフェクタの従動運動を伴うロボット
US10134623B2 (en) 2015-07-13 2018-11-20 Brooks Automation, Inc. On the fly automatic wafer centering method and apparatus
US10748799B2 (en) * 2015-07-13 2020-08-18 Brooks Automation, Inc. Substrate transport apparatus with interchangeable motor modules
CN105108387A (zh) * 2015-08-31 2015-12-02 苏州斯尔特微电子有限公司 一种电子焊接机上的翻转臂
US9799544B2 (en) 2015-10-23 2017-10-24 Applied Materials, Inc. Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
CN105391210B (zh) * 2015-12-28 2017-11-21 苏州大学 内转子电机
CN105702607B (zh) * 2016-03-17 2018-09-25 东方晶源微电子科技（北京）有限公司 机械臂和检查系统
CN106003134B (zh) * 2016-05-26 2020-09-29 中国科学院等离子体物理研究所 一种用于真空高温环境下的转动关节
CN106003027B (zh) * 2016-06-03 2019-03-01 广州视源电子科技股份有限公司 机械臂运动路径的设置方法和系统
TWI724971B (zh) 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
CN106041919A (zh) * 2016-07-11 2016-10-26 深圳众为兴技术股份有限公司 一种吊装式机器人结构
TWI813479B (zh) * 2017-02-07 2023-08-21 美商布魯克斯自動機械美國公司 基材運送方法及設備
US20180308728A1 (en) * 2017-02-07 2018-10-25 Brooks Automation, Inc. Method and apparatus for substrate transport
US10312770B2 (en) * 2017-02-25 2019-06-04 Applied Motion Products, Inc. Motor with integrated connector enclosure
JP6862233B2 (ja) * 2017-03-27 2021-04-21 日本電産サンキョー株式会社 産業用ロボット
CN107953363B (zh) * 2017-05-10 2021-09-07 Abb瑞士股份有限公司 一种用于多关节机器人的臂及多关节机器人
EP3410577A1 (de) * 2017-06-02 2018-12-05 Siemens Aktiengesellschaft Leitungsdurchführung
US10629472B2 (en) 2017-08-17 2020-04-21 Persimmon Technologies Corporation Material handling robot
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
JP6873881B2 (ja) * 2017-10-13 2021-05-19 日本電産サンキョー株式会社 産業用ロボット
US12469739B2 (en) 2017-10-27 2025-11-11 Applied Materials, Inc. Methods of operating a spatial deposition tool
TWI729319B (zh) 2017-10-27 2021-06-01 美商應用材料股份有限公司 具有空間分離的單個晶圓處理環境
JP6962790B2 (ja) * 2017-11-09 2021-11-05 日本電産サンキョー株式会社 ワーク搬送システム及びその制御方法
US10155309B1 (en) * 2017-11-16 2018-12-18 Lam Research Corporation Wafer handling robots with rotational joint encoders
KR101956617B1 (ko) * 2017-11-23 2019-03-12 (주)한국미래기술 병렬형 집적 구동장치
KR101983563B1 (ko) * 2017-11-23 2019-05-29 (주)한국미래기술 병렬형 집적 구동장치
US10943805B2 (en) 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
JP7078479B2 (ja) * 2018-07-13 2022-05-31 株式会社安川電機 搬送ロボットおよびロボットシステム
CN109018783A (zh) * 2018-07-20 2018-12-18 湖南瑭桥科技发展有限公司 一种新型垃圾车机械手折叠臂定向控制器
CN215731596U (zh) * 2018-09-21 2022-02-01 应用材料公司 用于处理基板的系统
KR20210071094A (ko) * 2018-11-19 2021-06-15 매슨 테크놀로지 인크 워크피스 처리를 위한 시스템 및 방법
TWM579415U (zh) 2019-03-08 2019-06-11 華碩電腦股份有限公司 功能組件以及包含其之電子裝置
CN118123797A (zh) 2019-03-11 2024-06-04 柿子技术公司 不对称双末端执行器机械臂
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
KR102696424B1 (ko) 2019-07-12 2024-08-16 어플라이드 머티어리얼스, 인코포레이티드 동시 기판 이송을 위한 로봇
US11476135B2 (en) 2019-07-12 2022-10-18 Applied Materials, Inc. Robot for simultaneous substrate transfer
US11443973B2 (en) * 2019-07-12 2022-09-13 Applied Materials, Inc. Robot for simultaneous substrate transfer
US11574826B2 (en) 2019-07-12 2023-02-07 Applied Materials, Inc. High-density substrate processing systems and methods
US11117265B2 (en) * 2019-07-12 2021-09-14 Applied Materials, Inc. Robot for simultaneous substrate transfer
TWI797461B (zh) * 2019-07-26 2023-04-01 日商新川股份有限公司 封裝裝置
CN111546321A (zh) * 2020-06-15 2020-08-18 含山县大力精密机械有限公司 一种适用于高负载的横向搬运机器臂及方法
US20210407837A1 (en) * 2020-06-30 2021-12-30 Applied Materials, Inc. Robot apparatus and systems, and methods for transporting substrates in electronic device manufacturing
US12255089B2 (en) * 2020-07-02 2025-03-18 Applied Materials, Inc. Robot apparatus, systems, and methods for transporting substrates in electronic device manufacturing
US11602064B2 (en) 2020-09-01 2023-03-07 Applied Materials, Inc. Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
US12076859B2 (en) * 2020-10-14 2024-09-03 Applied Materials, Inc. Infinite rotation of vacuum robot linkage through timing belt with isolated environment
TW202218831A (zh) * 2020-11-06 2022-05-16 日商發那科股份有限公司 水平多關節機器人
CN112563178B (zh) * 2021-02-23 2021-06-29 宁波群芯微电子有限责任公司 芯片转移机械手
TWI782507B (zh) * 2021-04-28 2022-11-01 富力特科技股份有限公司 具薄型脆性基材擦碰震盪感測器的入匣機械臂及感測器
JP7730710B2 (ja) * 2021-10-04 2025-08-28 ニデックインスツルメンツ株式会社 製造システム
KR102552870B1 (ko) * 2021-10-29 2023-07-10 주식회사 라온테크 직접구동 모터 기반의 웨이퍼 이송 로봇 장치
CN118661249A (zh) * 2021-12-03 2024-09-17 朗姆研究公司 用于多站式半导体处理室的直接拾取式机器人
JP7636369B2 (ja) * 2022-05-27 2025-02-26 株式会社安川電機 搬送ロボットおよびロボットシステム
WO2025050119A1 (en) * 2023-09-01 2025-03-06 Brooks Automation Us, Llc Substrate processing apparatus
KR20250142028A (ko) * 2024-03-21 2025-09-30 (주) 코모텍 다중 모터 모듈 결합체 및 이를 구비하는 반도체 웨이퍼 이송 장치
JP2025152652A (ja) * 2024-03-28 2025-10-10 シンフォニアテクノロジー株式会社 コアレスモータユニット及びコアレスモータの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020094265A1 (en) 2000-11-30 2002-07-18 Hirata Corporation Substrate conveyer robot

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03154791A (ja) 1989-11-14 1991-07-02 Sumitomo Eaton Noba Kk ロボット用多関節アーム
JPH0536809A (ja) 1991-07-31 1993-02-12 Mitsubishi Electric Corp 半導体基板処理装置に於ける半導体基板搬送アーム
JPH05109866A (ja) * 1991-10-16 1993-04-30 Nec Corp ウエハ移載ロボツト
US5765444A (en) 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
US6102164A (en) 1996-02-28 2000-08-15 Applied Materials, Inc. Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
JP3495903B2 (ja) * 1998-01-30 2004-02-09 多摩川精機株式会社 真空モータ
JP2000069741A (ja) * 1998-08-19 2000-03-03 Komatsu Ltd 真空用アクチュエータ
US6543306B1 (en) 1998-12-04 2003-04-08 Daihen Corporation Conveying device
US6485250B2 (en) 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP4445075B2 (ja) * 1999-10-06 2010-04-07 東京エレクトロン株式会社 真空モータ及び搬送装置
US6601468B2 (en) * 2000-10-24 2003-08-05 Innovative Robotic Solutions Drive system for multiple axis robot arm
JP2002158272A (ja) * 2000-11-17 2002-05-31 Tatsumo Kk ダブルアーム基板搬送装置
JP3890896B2 (ja) * 2001-01-24 2007-03-07 株式会社明電舎 基板搬送用ロボット
CN1369948A (zh) 2001-02-13 2002-09-18 许俊甫 内齿轮外旋转的轮鼓式马达
AU2002327249A1 (en) 2001-07-13 2003-01-29 Brooks Automation, Inc. Substrate transport apparatus with multiple independent end effectors
JP2003170384A (ja) 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
US7891935B2 (en) * 2002-05-09 2011-02-22 Brooks Automation, Inc. Dual arm robot
JP3825024B2 (ja) * 2003-09-02 2006-09-20 ミネベア株式会社 クローポール型ステッピングモータ
JP2006014578A (ja) * 2004-05-24 2006-01-12 Minebea Co Ltd ステッピングモータ
JP4303162B2 (ja) * 2004-05-25 2009-07-29 ミネベア株式会社 アクチュエータ
JP4274473B2 (ja) * 2004-06-14 2009-06-10 ミネベア株式会社 アクチュエータ
JP4974118B2 (ja) * 2005-02-12 2012-07-11 アプライド マテリアルズ インコーポレイテッド 多軸真空モータアセンブリ
JP4766955B2 (ja) * 2005-08-23 2011-09-07 株式会社デンソー シフトレンジ切替装置
US7927062B2 (en) 2005-11-21 2011-04-19 Applied Materials, Inc. Methods and apparatus for transferring substrates during electronic device manufacturing
US8061232B2 (en) 2006-08-11 2011-11-22 Applied Materials, Inc. Methods and apparatus for a robot wrist assembly
CN103862463B (zh) 2007-05-31 2017-08-15 应用材料公司 延伸双scara机械手连接装置的伸出距离的方法及设备
JP5172225B2 (ja) * 2007-06-21 2013-03-27 ミネベア株式会社 Ｐｍ型ステッピングモータ
JPWO2009034795A1 (ja) * 2007-09-10 2010-12-24 株式会社アルバック 基板搬送ロボット、真空処理装置
US7975568B2 (en) * 2008-04-24 2011-07-12 Asm Technology Singapore Pte Ltd Robotic arm driving mechanism
JP5581338B2 (ja) * 2009-01-11 2014-08-27 アプライド マテリアルズ インコーポレイテッド 電子デバイス製造において基板を搬送するためのロボットシステム、装置、および方法
WO2010081009A2 (en) 2009-01-11 2010-07-15 Applied Materials, Inc. Systems, apparatus and methods for making an electrical connection to a robot and electrical end effector thereof
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
GB0902394D0 (en) * 2009-02-13 2009-04-01 Isis Innovation Electric machine- cooling
JP2011199121A (ja) * 2010-03-23 2011-10-06 Ulvac Japan Ltd 搬送装置
TWI586500B (zh) 2010-10-08 2017-06-11 布魯克斯自動機械公司 機器人運送裝置及基板處理裝置
US9076829B2 (en) 2011-08-08 2015-07-07 Applied Materials, Inc. Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
US9076830B2 (en) 2011-11-03 2015-07-07 Applied Materials, Inc. Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
US9202733B2 (en) * 2011-11-07 2015-12-01 Persimmon Technologies Corporation Robot system with independent arms
WO2013090181A1 (en) 2011-12-12 2013-06-20 Applied Materials, Inc Fully-independent robot systems, apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US9245783B2 (en) * 2013-05-24 2016-01-26 Novellus Systems, Inc. Vacuum robot with linear translation carriage

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020094265A1 (en) 2000-11-30 2002-07-18 Hirata Corporation Substrate conveyer robot

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102686013B1 (ko) 2024-04-23 2024-07-17 주식회사 진성산업 반전이송 가능한 구조를 갖는 로봇암 장치

Also Published As

Publication number Publication date
US20140150592A1 (en) 2014-06-05
TW201434244A (zh) 2014-09-01
TW201429652A (zh) 2014-08-01
KR20150092196A (ko) 2015-08-12
KR102094390B1 (ko) 2020-03-27
JP6382213B2 (ja) 2018-08-29
WO2014085479A1 (en) 2014-06-05
TWI609557B (zh) 2017-12-21
CN104823272A (zh) 2015-08-05
CN104812534A (zh) 2015-07-29
KR20200034008A (ko) 2020-03-30
US20140154038A1 (en) 2014-06-05
JP2016502393A (ja) 2016-01-21
KR102214398B1 (ko) 2021-02-08
WO2014085483A1 (en) 2014-06-05
KR20150093178A (ko) 2015-08-17
JP6336467B2 (ja) 2018-06-06
TWI598195B (zh) 2017-09-11
CN104823272B (zh) 2017-07-14
JP2016500473A (ja) 2016-01-12
CN104812534B (zh) 2018-05-11
US9742250B2 (en) 2017-08-22
US9325228B2 (en) 2016-04-26

Similar Documents

Publication Publication Date Title
KR102163086B1 (ko) 비등가 길이 포어암들을 가진 다-축 로봇 장치, 전자 디바이스 제조 시스템들, 및 전자 디바이스 제조시 기판들을 운반하기 위한 방법들
US12263587B2 (en) Dual arm robot
US9033644B2 (en) Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub
US10814475B2 (en) Dual robot including spaced upper arms and interleaved wrists and systems and methods including same
US8784033B2 (en) Robot systems, apparatus and methods for transporting substrates
US9076830B2 (en) Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
US9117865B2 (en) Robot systems, apparatus, and methods having independently rotatable waists
JP7280309B2 (ja) 搬送装置および処理装置
TWI704038B (zh) 用於在進行電子設備製造時輸送基板的機械手組件、基板處理裝置及方法

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20150625

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20181031

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20200108

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20200702

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20200928

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20200928

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20230828

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20240826

Start annual number: 5

End annual number: 5