KR102124247B1 - 유체 수송 장치 - Google Patents

유체 수송 장치 Download PDF

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Publication number
KR102124247B1
KR102124247B1 KR1020180072987A KR20180072987A KR102124247B1 KR 102124247 B1 KR102124247 B1 KR 102124247B1 KR 1020180072987 A KR1020180072987 A KR 1020180072987A KR 20180072987 A KR20180072987 A KR 20180072987A KR 102124247 B1 KR102124247 B1 KR 102124247B1
Authority
KR
South Korea
Prior art keywords
fluid
pipeline
unit
drive chamber
pressure
Prior art date
Application number
KR1020180072987A
Other languages
English (en)
Korean (ko)
Other versions
KR20200067995A (ko
Inventor
추안-창 펭
치-후이 라이
Original Assignee
사이언테크 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 사이언테크 코포레이션 filed Critical 사이언테크 코포레이션
Publication of KR20200067995A publication Critical patent/KR20200067995A/ko
Application granted granted Critical
Publication of KR102124247B1 publication Critical patent/KR102124247B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/0005—Control, e.g. regulation, of pumps, pumping installations or systems by using valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/0066—Control, e.g. regulation, of pumps, pumping installations or systems by changing the speed, e.g. of the driving engine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/08—Pipe-line systems for liquids or viscous products
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D5/00—Protection or supervision of installations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Water Supply & Treatment (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020180072987A 2017-09-05 2018-06-25 유체 수송 장치 KR102124247B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW106130345 2017-09-05
TW106130345A TWI644023B (zh) 2017-09-05 2017-09-05 流體輸送裝置

Publications (2)

Publication Number Publication Date
KR20200067995A KR20200067995A (ko) 2020-06-15
KR102124247B1 true KR102124247B1 (ko) 2020-06-18

Family

ID=65432056

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180072987A KR102124247B1 (ko) 2017-09-05 2018-06-25 유체 수송 장치

Country Status (3)

Country Link
KR (1) KR102124247B1 (zh)
CN (1) CN109424557B (zh)
TW (1) TWI644023B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI730301B (zh) * 2019-03-06 2021-06-11 點晶科技股份有限公司 流體驅動裝置
CN114203572A (zh) * 2020-09-02 2022-03-18 长鑫存储技术有限公司 晶圆清洗设备和晶圆清洗系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008303417A (ja) 2007-06-06 2008-12-18 Toshiba Corp めっき成膜装置およびめっき成膜方法
KR100934364B1 (ko) * 2007-12-07 2009-12-30 세메스 주식회사 약액 공급 장치

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5149341A (en) * 1991-08-23 1992-09-22 Taylor John A Paper coater skip prevention and deaeration apparatus and method
JP2611183B2 (ja) * 1994-06-07 1997-05-21 工業技術院長 流体循環脱気装置
FI20055713L (fi) * 2005-12-30 2007-07-01 Metso Paper Inc Menetelmä ja laittesto kaasun poistamiseksi päällystysaineesta
TWM330117U (en) * 2007-07-31 2008-04-11 Xie Qiang Technology Co Ltd Bubble breaking device
TWM350394U (en) * 2008-07-14 2009-02-11 Xiu-Mei Ceng Foam breaking machine
TWM345635U (en) * 2008-07-16 2008-12-01 Chan-Jung Wang Foam elimination device
CN101444648B (zh) * 2008-12-30 2010-12-01 成都威力生生物科技有限公司 用于血液透析机中的负压除气装置
KR20110099510A (ko) * 2010-03-02 2011-09-08 주식회사 엘지실트론 약액 순환 장치 및 기포 제거 장치
TWI383830B (zh) * 2010-05-26 2013-02-01 Zhen Ding Technology Co Ltd 除泡裝置
JP6445893B2 (ja) * 2015-02-18 2018-12-26 株式会社Ｓｃｒｅｅｎホールディングス 脱気装置、塗布装置、および脱気方法
CN106224218A (zh) * 2016-08-02 2016-12-14 宁波巨神制泵实业有限公司 一种排水泵控制报警设备及利用该设备的监视预警系统

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008303417A (ja) 2007-06-06 2008-12-18 Toshiba Corp めっき成膜装置およびめっき成膜方法
KR100934364B1 (ko) * 2007-12-07 2009-12-30 세메스 주식회사 약액 공급 장치

Also Published As

Publication number Publication date
CN109424557A (zh) 2019-03-05
KR20200067995A (ko) 2020-06-15
TWI644023B (zh) 2018-12-11
CN109424557B (zh) 2021-03-09
TW201912942A (zh) 2019-04-01

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