KR102091849B1 - 콘덴서 마이크로폰 및 그 제조방법 - Google Patents

콘덴서 마이크로폰 및 그 제조방법 Download PDF

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Publication number
KR102091849B1
KR102091849B1 KR1020190032413A KR20190032413A KR102091849B1 KR 102091849 B1 KR102091849 B1 KR 102091849B1 KR 1020190032413 A KR1020190032413 A KR 1020190032413A KR 20190032413 A KR20190032413 A KR 20190032413A KR 102091849 B1 KR102091849 B1 KR 102091849B1
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KR
South Korea
Prior art keywords
back plate
membrane
tubular
condenser microphone
tubular projection
Prior art date
Application number
KR1020190032413A
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English (en)
Korean (ko)
Inventor
강영진
이준석
Original Assignee
(주)다빛센스
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Publication date
Application filed by (주)다빛센스 filed Critical (주)다빛센스
Priority to CN201911200224.6A priority Critical patent/CN111263282B/zh
Application granted granted Critical
Publication of KR102091849B1 publication Critical patent/KR102091849B1/ko

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2231/00—Details of apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor covered by H04R31/00, not provided for in its subgroups

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
KR1020190032413A 2018-11-30 2019-03-21 콘덴서 마이크로폰 및 그 제조방법 KR102091849B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911200224.6A CN111263282B (zh) 2018-11-30 2019-11-29 电容式传声器及其制作方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20180151673 2018-11-30
KR1020180151673 2018-11-30

Publications (1)

Publication Number Publication Date
KR102091849B1 true KR102091849B1 (ko) 2020-03-20

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ID=69958168

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020190032413A KR102091849B1 (ko) 2018-11-30 2019-03-21 콘덴서 마이크로폰 및 그 제조방법
KR1020190032416A KR102091854B1 (ko) 2018-11-30 2019-03-21 콘덴서 마이크로폰 및 그 제조방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020190032416A KR102091854B1 (ko) 2018-11-30 2019-03-21 콘덴서 마이크로폰 및 그 제조방법

Country Status (2)

Country Link
KR (2) KR102091849B1 (zh)
CN (1) CN111263282B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112492486A (zh) * 2020-12-03 2021-03-12 青岛歌尔智能传感器有限公司 麦克风芯片、mems麦克风及电子装置
KR102350898B1 (ko) * 2020-10-19 2022-01-14 (주)다빛센스 멤스 전극 형성 방법

Citations (4)

* Cited by examiner, † Cited by third party
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KR20160127212A (ko) 2015-04-23 2016-11-03 (주)이미지스테크놀로지 멤스 마이크로폰 및 그 제조방법
KR101776752B1 (ko) * 2016-09-02 2017-09-08 현대자동차 주식회사 마이크로폰
KR20180064960A (ko) * 2017-06-08 2018-06-15 (주)다빛센스 음성전달장치 및 그 제조방법
KR20180066577A (ko) * 2016-12-09 2018-06-19 (주)다빛센스 어쿠스틱 센서 및 그 제조방법

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US7961897B2 (en) * 2005-08-23 2011-06-14 Analog Devices, Inc. Microphone with irregular diaphragm
US8569850B2 (en) * 2006-10-11 2013-10-29 Sensfab Pte Ltd Ultra low pressure sensor
CN201042076Y (zh) * 2007-04-29 2008-03-26 歌尔声学股份有限公司 电容式麦克风
CN101389155A (zh) * 2007-09-12 2009-03-18 美律实业股份有限公司 硅晶电容式麦克风
CN101568057A (zh) * 2009-05-27 2009-10-28 瑞声声学科技(深圳)有限公司 电容麦克风
EP2502427B1 (en) * 2009-11-16 2016-05-11 InvenSense, Inc. Microphone with backplate having specially shaped through-holes
KR101109095B1 (ko) * 2009-12-29 2012-01-31 주식회사 비에스이 멤스 마이크로폰 및 그 제조방법
JP4947220B2 (ja) * 2010-05-13 2012-06-06 オムロン株式会社 音響センサ及びマイクロフォン
US9148712B2 (en) * 2010-12-10 2015-09-29 Infineon Technologies Ag Micromechanical digital loudspeaker
US8860154B2 (en) * 2011-03-11 2014-10-14 Goertek Inc. CMOS compatible silicon differential condenser microphone and method for manufacturing the same
CN203279171U (zh) * 2013-05-03 2013-11-06 歌尔声学股份有限公司 Mems麦克风
CN103686570B (zh) * 2013-12-31 2017-01-18 瑞声声学科技(深圳)有限公司 Mems麦克风
JP6264969B2 (ja) * 2014-03-14 2018-01-24 オムロン株式会社 音響トランスデューサ
US10158951B2 (en) * 2014-06-27 2018-12-18 Goertek Inc. Silicon microphone with suspended diaphragm and system with the same
EP3192279A4 (en) * 2014-09-12 2018-06-27 Robert Bosch GmbH Mems device with acoustic leak control features
US10250998B2 (en) * 2016-10-26 2019-04-02 Solid State Systems Co., Ltd. Micro-electro-mechanical systems (MEMS) device and method for fabricating the MEMS
KR102322257B1 (ko) * 2017-05-11 2021-11-04 현대자동차 주식회사 마이크로폰 및 그 제조 방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160127212A (ko) 2015-04-23 2016-11-03 (주)이미지스테크놀로지 멤스 마이크로폰 및 그 제조방법
KR101776752B1 (ko) * 2016-09-02 2017-09-08 현대자동차 주식회사 마이크로폰
KR20180066577A (ko) * 2016-12-09 2018-06-19 (주)다빛센스 어쿠스틱 센서 및 그 제조방법
KR20180064960A (ko) * 2017-06-08 2018-06-15 (주)다빛센스 음성전달장치 및 그 제조방법

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102350898B1 (ko) * 2020-10-19 2022-01-14 (주)다빛센스 멤스 전극 형성 방법
CN112492486A (zh) * 2020-12-03 2021-03-12 青岛歌尔智能传感器有限公司 麦克风芯片、mems麦克风及电子装置
CN112492486B (zh) * 2020-12-03 2022-03-25 青岛歌尔智能传感器有限公司 麦克风芯片、mems麦克风及电子装置

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Publication number Publication date
CN111263282A (zh) 2020-06-09
KR102091854B1 (ko) 2020-03-20
CN111263282B (zh) 2021-11-09

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