KR102054782B1 - 광학적으로 투명한 전도성 금속 또는 금속 합금 박막의 형성 방법 및 그에 의해 제조된 필름 - Google Patents

광학적으로 투명한 전도성 금속 또는 금속 합금 박막의 형성 방법 및 그에 의해 제조된 필름 Download PDF

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KR102054782B1
KR102054782B1 KR1020177017028A KR20177017028A KR102054782B1 KR 102054782 B1 KR102054782 B1 KR 102054782B1 KR 1020177017028 A KR1020177017028 A KR 1020177017028A KR 20177017028 A KR20177017028 A KR 20177017028A KR 102054782 B1 KR102054782 B1 KR 102054782B1
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metal
film
metal alloy
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KR20170076787A (ko
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클락 아이 브라이트
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쓰리엠 이노베이티브 프로퍼티즈 컴파니
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00—Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073—Shielding materials
    • H05K9/0094—Shielding materials being light-transmitting, e.g. transparent, translucent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
    • B32B15/016—Layered products comprising a layer of metal all layers being exclusively metallic all layers being formed of aluminium or aluminium alloys
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3668—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties
    • C03C17/3676—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties specially adapted for use as electromagnetic shield
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/06—Alloys based on silver
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60B—VEHICLE WHEELS; CASTORS; AXLES FOR WHEELS OR CASTORS; INCREASING WHEEL ADHESION
    • B60B2310/00—Manufacturing methods
    • B60B2310/60—Surface treatment; After treatment
    • B60B2310/616—Coating with thin films
    • B60B2310/6162—Conductive films
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2280/00—Materials; Properties thereof
    • F05B2280/20—Inorganic materials, e.g. non-metallic materials
    • F05B2280/2004—Ceramics; Oxides
    • F05B2280/20042—Zinc oxides

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Laminated Bodies (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Chemically Coating (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
KR1020177017028A 2009-08-03 2010-07-26 광학적으로 투명한 전도성 금속 또는 금속 합금 박막의 형성 방법 및 그에 의해 제조된 필름 Active KR102054782B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US23082909P 2009-08-03 2009-08-03
US61/230,829 2009-08-03
PCT/US2010/043180 WO2011017037A2 (en) 2009-08-03 2010-07-26 Process for forming optically clear conductive metal or metal alloy thin films and films made therefrom

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020127004999A Division KR20120039042A (ko) 2009-08-03 2010-07-26 광학적으로 투명한 전도성 금속 또는 금속 합금 박막의 형성 방법 및 그에 의해 제조된 필름

Publications (2)

Publication Number Publication Date
KR20170076787A KR20170076787A (ko) 2017-07-04
KR102054782B1 true KR102054782B1 (ko) 2019-12-11

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KR1020177017028A Active KR102054782B1 (ko) 2009-08-03 2010-07-26 광학적으로 투명한 전도성 금속 또는 금속 합금 박막의 형성 방법 및 그에 의해 제조된 필름
KR1020127004999A Ceased KR20120039042A (ko) 2009-08-03 2010-07-26 광학적으로 투명한 전도성 금속 또는 금속 합금 박막의 형성 방법 및 그에 의해 제조된 필름

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Country Status (8)

Country Link
US (1) US9012044B2 (enExample)
EP (1) EP2462791B1 (enExample)
JP (1) JP5612685B2 (enExample)
KR (2) KR102054782B1 (enExample)
CN (1) CN102474999B (enExample)
BR (1) BR112012002495A2 (enExample)
SG (1) SG178225A1 (enExample)
WO (1) WO2011017037A2 (enExample)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1127381B1 (en) 1998-11-02 2015-09-23 3M Innovative Properties Company Transparent conductive oxides for plastic flat panel displays
SG178225A1 (en) * 2009-08-03 2012-03-29 3M Innovative Properties Co Process for forming optically clear conductive metal or metal alloy thin films and films made therefrom
US8530011B2 (en) * 2010-12-13 2013-09-10 Southwall Technologies Inc. Insulating glass unit with crack-resistant low-emissivity suspended film
JP5931447B2 (ja) * 2012-01-11 2016-06-08 三菱航空機株式会社 航空機の窓、航空機、航空機の窓の組立方法。
US9709349B2 (en) 2012-11-15 2017-07-18 The Board Of Trustees Of The Leland Stanford Junior University Structures for radiative cooling
US8941095B2 (en) 2012-12-06 2015-01-27 Hrl Laboratories, Llc Methods for integrating and forming optically transparent devices on surfaces
US20140170422A1 (en) * 2012-12-14 2014-06-19 Intermolecular Inc. Low emissivity coating with optimal base layer material and layer stack
US20150202846A1 (en) * 2014-01-17 2015-07-23 Pleotint, L.L.C. Reflective and conductive coatings directly on pvb
US9776379B2 (en) 2014-04-29 2017-10-03 Pleotint, L.L.C. Absorbing solar control interlayers
US10088251B2 (en) 2014-05-21 2018-10-02 The Board Of Trustees Of The Leland Stanford Junior University Radiative cooling with solar spectrum reflection
EP3146528A4 (en) * 2014-05-23 2018-01-03 The Regents of The University of Michigan Ultra-thin doped noble metal films for optoelectronics and photonics applications
JP6435540B2 (ja) * 2014-09-19 2018-12-12 信越ポリマー株式会社 電磁波シールドフィルム、電磁波シールドフィルム付きフレキシブルプリント配線板、およびそれら製造方法
CN105225728B (zh) * 2015-09-29 2017-01-04 惠州易晖光电材料股份有限公司 一种低电阻透明导电薄膜及其制备方法
JP5973099B1 (ja) * 2016-02-26 2016-08-23 加川　清二 近傍界電磁波吸収フィルム
JP6027281B1 (ja) * 2016-04-01 2016-11-16 清二 加川 近傍界電磁波吸収フィルム
CN105916365A (zh) * 2016-05-13 2016-08-31 天诺光电材料股份有限公司 柔性透明导电视窗
CN106898434B (zh) * 2017-02-28 2018-08-10 厦门大学 一种导电加热透明电极的制造方法
CN110741491A (zh) * 2017-09-20 2020-01-31 应用材料公司 用于形成电化学储能装置的部件的方法和处理系统及氧化腔室
US11492708B2 (en) 2018-01-29 2022-11-08 The Boeing Company Cold spray metallic coating and methods
CN108323146B (zh) * 2018-04-11 2019-07-02 京东方科技集团股份有限公司 玻璃组件及制造方法、玻璃窗
US12120896B2 (en) * 2018-07-05 2024-10-15 Basf Coatings Gmbh Transparent conductive film
CN111204988B (zh) * 2018-11-21 2023-09-29 中国建筑材料科学研究总院有限公司 一种柔性薄膜型热控涂层及其制备方法
CN109461518A (zh) * 2018-11-30 2019-03-12 明达光电(厦门)有限公司 一种透明导电膜及其制备方法
AU2019414511B2 (en) 2018-12-27 2025-05-08 SkyCool Systems, Inc. Cooling panel system
CN111491499B (zh) * 2019-01-28 2022-10-21 臻鼎科技股份有限公司 电磁屏蔽膜及其制作方法
KR102894085B1 (ko) 2019-03-28 2025-12-02 비트로 플랫 글래스 엘엘씨 가열가능한 차량 전면 유리
EP3956614A1 (en) 2019-04-17 2022-02-23 Skycool Systems, Inc. Radiative cooling systems
CN110944418B (zh) * 2019-11-28 2021-12-21 宁波材料所杭州湾研究院 一种高温透明柔性的电加热膜及其制备方法
CN115362392A (zh) 2020-02-14 2022-11-18 维特罗平板玻璃有限责任公司 低薄层电阻涂层
CN116635243A (zh) * 2020-12-02 2023-08-22 3M创新有限公司 微切削图案化转移制品
JP7086247B1 (ja) * 2021-03-26 2022-06-17 大阪瓦斯株式会社 放射冷却装置
US12351899B2 (en) 2021-05-28 2025-07-08 Corning Incorporated Transparent article with a body and metal oxide disposed directly on the body, facilitating deposition of an electrically conductive and transparent ultra-thin metal film of a noble metal, and method of forming the same
US12350905B2 (en) 2021-10-11 2025-07-08 Vitro Flat Glass Llc Heat-treatable coating having reduced haze
CN114447152B (zh) * 2022-01-24 2025-03-25 苏州迈为科技股份有限公司 异质结太阳能电池及其制备方法
US12365990B2 (en) * 2022-03-03 2025-07-22 The Boeing Company Cold sprayed electrical circuits and methods thereof
US12065742B2 (en) 2022-03-03 2024-08-20 The Boeing Company Composite laminates with metal layers and methods thereof

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5521765A (en) 1994-07-07 1996-05-28 The Boc Group, Inc. Electrically-conductive, contrast-selectable, contrast-improving filter
US20030049464A1 (en) * 2001-09-04 2003-03-13 Afg Industries, Inc. Double silver low-emissivity and solar control coatings
JP2006074052A (ja) 2004-09-01 2006-03-16 Samsung Corning Co Ltd 電磁波遮蔽フィルム及びその製造方法
JP2007299672A (ja) 2006-05-01 2007-11-15 Asahi Glass Co Ltd 導電性積層体およびプラズマディスプレイ用保護板
WO2008083308A1 (en) 2006-12-28 2008-07-10 3M Innovative Properties Company Nucleation layer for thin film metal layer formation
WO2009067263A1 (en) 2007-11-23 2009-05-28 Agc Flat Glass North America, Inc. Low emissivity coating with low solar heat gain coefficient, enhanced chemical and mechanical properties and method of making the same
WO2009085741A2 (en) * 2007-12-28 2009-07-09 3M Innovative Properties Company Infrared reflecting films for solar control and other uses

Family Cites Families (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3529074A (en) 1968-05-07 1970-09-15 Sierracin Corp External busbar system
US5097800A (en) 1983-12-19 1992-03-24 Spectrum Control, Inc. High speed apparatus for forming capacitors
US5032461A (en) 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US5125138A (en) 1983-12-19 1992-06-30 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making same
US4842893A (en) 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US5018048A (en) 1983-12-19 1991-05-21 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making
US4722515A (en) 1984-11-06 1988-02-02 Spectrum Control, Inc. Atomizing device for vaporization
US4645714A (en) 1984-12-24 1987-02-24 Minnesota Mining And Manufacturing Company Corrosion-resistant silver mirror
EP0242460A1 (en) 1985-01-18 1987-10-28 SPECTRUM CONTROL, INC. (a Pennsylvania corporation) Monomer atomizer for vaporization
US4954371A (en) 1986-06-23 1990-09-04 Spectrum Control, Inc. Flash evaporation of monomer fluids
US5332888A (en) 1986-08-20 1994-07-26 Libbey-Owens-Ford Co. Sputtered multi-layer color compatible solar control coating
US4786783A (en) 1987-08-11 1988-11-22 Monsanto Company Electrically heatable laminated window
US4782216A (en) 1987-08-11 1988-11-01 Monsanto Company Electrically heatable laminated window
US5324374A (en) 1988-07-27 1994-06-28 Saint Gobain Vitrage Laminated glass with an electroconductive layer
US5062939A (en) 1990-03-29 1991-11-05 The United States Of America As Represented By The Secretary Of The Navy Selective metallization of carbonyl-containing polymer films
US5306547A (en) 1990-12-14 1994-04-26 Southwall Technologies Inc. Low transmission heat-reflective glazing materials
JP2825736B2 (ja) 1993-07-30 1998-11-18 京セラ株式会社 誘電体磁器組成物および半導体素子収容用パッケージ
EP0758482B1 (en) 1993-10-04 2003-03-05 3M Innovative Properties Company Cross-linked acrylate coating material useful for forming capacitor dielectrics and oxygen barriers
US5440446A (en) 1993-10-04 1995-08-08 Catalina Coatings, Inc. Acrylate coating material
US6083628A (en) 1994-11-04 2000-07-04 Sigma Laboratories Of Arizona, Inc. Hybrid polymer film
IL122244A0 (en) 1995-06-26 1998-04-05 Minnesota Mining & Mfg Multilayer polymer film with additional coatings or layers
FR2738772B1 (fr) 1995-09-15 1997-10-24 Saint Gobain Vitrage Vitrage feuillete d'isolation acoustique
JPH10100303A (ja) 1996-06-07 1998-04-21 Nippon Sheet Glass Co Ltd 透明導電膜付き基板およびそれを用いた表示素子
US6132882A (en) 1996-12-16 2000-10-17 3M Innovative Properties Company Damped glass and plastic laminates
US6045864A (en) 1997-12-01 2000-04-04 3M Innovative Properties Company Vapor coating method
US6808658B2 (en) 1998-01-13 2004-10-26 3M Innovative Properties Company Method for making texture multilayer optical films
CN1104325C (zh) 1998-01-13 2003-04-02 美国3M公司 改性共聚聚酯和改进的多层反射薄膜
DE19848751C1 (de) 1998-10-22 1999-12-16 Ver Glaswerke Gmbh Schichtsystem für transparente Substrate
EP1127381B1 (en) 1998-11-02 2015-09-23 3M Innovative Properties Company Transparent conductive oxides for plastic flat panel displays
JP3477148B2 (ja) * 1999-12-02 2003-12-10 カーディナル・シージー・カンパニー 耐曇り性透明フィルム積層体
EP1267318A4 (en) 2000-02-01 2005-12-14 Mitsui Chemicals Inc DISPLAY FILTER, DISPLAY, AND PRODUCTION METHOD THEREFOR
US6811867B1 (en) 2000-02-10 2004-11-02 3M Innovative Properties Company Color stable pigmented polymeric films
US7238401B1 (en) 2000-06-09 2007-07-03 3M Innovative Properties Company Glazing element and laminate for use in the same
US6797396B1 (en) 2000-06-09 2004-09-28 3M Innovative Properties Company Wrinkle resistant infrared reflecting film and non-planar laminate articles made therefrom
US6576349B2 (en) 2000-07-10 2003-06-10 Guardian Industries Corp. Heat treatable low-E coated articles and methods of making same
JP2002123182A (ja) 2000-08-10 2002-04-26 Nisshinbo Ind Inc プラズマディスプレイパネル用前面板及びその製造方法
US6929864B2 (en) 2002-08-17 2005-08-16 3M Innovative Properties Company Extensible, visible light-transmissive and infrared-reflective film and methods of making and using the film
US7215473B2 (en) 2002-08-17 2007-05-08 3M Innovative Properties Company Enhanced heat mirror films
US6933051B2 (en) * 2002-08-17 2005-08-23 3M Innovative Properties Company Flexible electrically conductive film
US6818291B2 (en) * 2002-08-17 2004-11-16 3M Innovative Properties Company Durable transparent EMI shielding film
US7241506B2 (en) * 2003-06-10 2007-07-10 Cardinal Cg Company Corrosion-resistant low-emissivity coatings
KR20070111493A (ko) 2005-02-25 2007-11-21 아사히 가라스 가부시키가이샤 전자파 차폐 적층체 및 이것을 이용한 디스플레이 장치
WO2006105419A1 (en) * 2005-03-31 2006-10-05 Cardinal Cg Company Haze-resistant low-emissivity coatings
US7597962B2 (en) * 2005-06-07 2009-10-06 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Coated article with IR reflecting layer and method of making same
KR20080100447A (ko) * 2006-03-09 2008-11-18 가부시키가이샤 브리지스톤 광 투과성 전자파 실드재의 제조 방법, 광 투과성 전자파 실드재 및 디스플레이용 필터
US20080095988A1 (en) * 2006-10-18 2008-04-24 3M Innovative Properties Company Methods of patterning a deposit metal on a polymeric substrate
WO2008060453A2 (en) * 2006-11-09 2008-05-22 Agc Flat Glass North America, Inc. Optical coating with improved durability
US8334452B2 (en) * 2007-01-08 2012-12-18 Guardian Industries Corp. Zinc oxide based front electrode doped with yttrium for use in photovoltaic device or the like
JP4969268B2 (ja) * 2007-02-19 2012-07-04 三菱重工業株式会社 航空機用窓材およびその製造方法
CN101627063B (zh) 2007-03-09 2012-05-30 3M创新有限公司 适用于微结构化光学膜的三苯基单体
CN101939669A (zh) * 2007-10-30 2011-01-05 3M创新有限公司 用于光学显示滤光片的带电磁干扰屏蔽的多层堆叠光学带通膜
US7824777B2 (en) * 2008-03-26 2010-11-02 Southwall Technologies, Inc. Robust optical filter utilizing pairs of dielectric and metallic layers
US8350451B2 (en) * 2008-06-05 2013-01-08 3M Innovative Properties Company Ultrathin transparent EMI shielding film comprising a polymer basecoat and crosslinked polymer transparent dielectric layer
SG178225A1 (en) * 2009-08-03 2012-03-29 3M Innovative Properties Co Process for forming optically clear conductive metal or metal alloy thin films and films made therefrom
KR20120041238A (ko) * 2009-08-03 2012-04-30 쓰리엠 이노베이티브 프로퍼티즈 컴파니 반사방지성 투명 ｅｍｉ 차폐 광학 필터

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5521765A (en) 1994-07-07 1996-05-28 The Boc Group, Inc. Electrically-conductive, contrast-selectable, contrast-improving filter
US20030049464A1 (en) * 2001-09-04 2003-03-13 Afg Industries, Inc. Double silver low-emissivity and solar control coatings
JP2006074052A (ja) 2004-09-01 2006-03-16 Samsung Corning Co Ltd 電磁波遮蔽フィルム及びその製造方法
JP2007299672A (ja) 2006-05-01 2007-11-15 Asahi Glass Co Ltd 導電性積層体およびプラズマディスプレイ用保護板
WO2008083308A1 (en) 2006-12-28 2008-07-10 3M Innovative Properties Company Nucleation layer for thin film metal layer formation
WO2009067263A1 (en) 2007-11-23 2009-05-28 Agc Flat Glass North America, Inc. Low emissivity coating with low solar heat gain coefficient, enhanced chemical and mechanical properties and method of making the same
WO2009085741A2 (en) * 2007-12-28 2009-07-09 3M Innovative Properties Company Infrared reflecting films for solar control and other uses

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US9012044B2 (en) 2015-04-21
EP2462791B1 (en) 2019-11-06
US20120125660A1 (en) 2012-05-24
EP2462791A2 (en) 2012-06-13
KR20170076787A (ko) 2017-07-04
BR112012002495A2 (pt) 2019-09-24
CN102474999A (zh) 2012-05-23
WO2011017037A2 (en) 2011-02-10
CN102474999B (zh) 2016-09-07
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JP2013501378A (ja) 2013-01-10
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