KR102038292B1 - 건조기 - Google Patents
건조기 Download PDFInfo
- Publication number
- KR102038292B1 KR102038292B1 KR1020137026728A KR20137026728A KR102038292B1 KR 102038292 B1 KR102038292 B1 KR 102038292B1 KR 1020137026728 A KR1020137026728 A KR 1020137026728A KR 20137026728 A KR20137026728 A KR 20137026728A KR 102038292 B1 KR102038292 B1 KR 102038292B1
- Authority
- KR
- South Korea
- Prior art keywords
- enclosure
- dryer
- air
- openings
- ducts
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 53
- 150000001875 compounds Chemical class 0.000 claims abstract description 32
- 239000012530 fluid Substances 0.000 claims abstract description 27
- 238000004891 communication Methods 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 10
- 230000001590 oxidative effect Effects 0.000 claims abstract 2
- 239000000203 mixture Substances 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 238000013022 venting Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 238000000605 extraction Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 239000012855 volatile organic compound Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000010981 drying operation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
- F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
- F26B15/12—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
- F26B15/18—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined the objects or batches of materials being carried by endless belts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/06—Controlling, e.g. regulating, parameters of gas supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
- F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
- F26B3/30—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun from infrared-emitting elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microbiology (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Solid Materials (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161475821P | 2011-04-15 | 2011-04-15 | |
US61/475,821 | 2011-04-15 | ||
US13/439,367 | 2012-04-04 | ||
US13/439,367 US9589817B2 (en) | 2011-04-15 | 2012-04-04 | Dryer |
PCT/US2012/033421 WO2012142351A1 (fr) | 2011-04-15 | 2012-04-13 | Séchoir |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20140025382A KR20140025382A (ko) | 2014-03-04 |
KR102038292B1 true KR102038292B1 (ko) | 2019-10-30 |
Family
ID=47005297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020137026728A KR102038292B1 (ko) | 2011-04-15 | 2012-04-13 | 건조기 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9589817B2 (fr) |
EP (1) | EP2697584B1 (fr) |
KR (1) | KR102038292B1 (fr) |
CN (1) | CN103547874B (fr) |
WO (1) | WO2012142351A1 (fr) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110212010A1 (en) * | 2009-09-02 | 2011-09-01 | Despatch Industries Limited Partnership | Apparatus and Method for Thermal Destruction of Volatile Organic Compounds |
US9598795B2 (en) | 2013-04-26 | 2017-03-21 | Illinois Tool Works Inc. | Fiber oxidation oven with multiple independently controllable heating systems |
WO2015030766A1 (fr) | 2013-08-29 | 2015-03-05 | Hewlett-Packard Development Company, L.P. | Séchage à humidité variable |
US10676847B2 (en) | 2014-11-07 | 2020-06-09 | Illinois Tool Works Inc. | Discharge nozzle plate for center-to-ends fiber oxidation oven |
US10458710B2 (en) | 2014-11-07 | 2019-10-29 | Illinois Tool Works Inc. | Supply plenum for center-to-ends fiber oxidation oven |
CN104642415B (zh) * | 2014-12-31 | 2015-12-09 | 曲阜师范大学 | 一种自动控制的食品干燥器 |
CN104613743B (zh) * | 2014-12-31 | 2016-02-03 | 曲阜师范大学 | 一种温度智能控制的烘干装置 |
IT201600074962A1 (it) * | 2016-07-18 | 2018-01-18 | Geico Spa | Impianto di essiccazione di oggetti verniciati |
CN110201860A (zh) * | 2019-05-24 | 2019-09-06 | 合肥百恒设备模具有限公司 | 一种汽车零部件干燥设备 |
CN113008009A (zh) * | 2020-11-24 | 2021-06-22 | 衡阳市金坤包装有限公司 | 一种瓦楞纸板生产设备 |
KR102472215B1 (ko) * | 2022-01-11 | 2022-11-30 | 주식회사 강원이솔루션 | 전기히터를 구비한, 이차전지 제조용 분말원료 건조장치 |
Citations (4)
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JP2002368500A (ja) * | 2001-06-04 | 2002-12-20 | Fuji Photo Film Co Ltd | プリント配線基板検査装置 |
KR100438250B1 (ko) | 2002-06-19 | 2004-07-02 | 주식회사 경호엔지니어링 종합건축사사무소 | 평면 이동식 열풍 건조로 |
KR100452134B1 (ko) | 2002-10-02 | 2004-10-14 | 이광석 | 인쇄물의 속성 건조장치 |
JP2007085702A (ja) * | 2005-09-26 | 2007-04-05 | Espec Corp | ガラス基板処理装置、ガラス基板処理システム及びガラス基板処理方法 |
Family Cites Families (44)
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GB153620A (en) | 1919-06-21 | 1920-10-21 | William Edward Clarke | Improvements in machines for drying varnished and gummed sheets, and the like |
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ITUD20070200A1 (it) * | 2007-10-24 | 2009-04-25 | Baccini S P A | Apparecchiatura per l'essiccazione di elementi a piastra per l'elettronica ed assimilabili e relativo procedimento |
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-
2012
- 2012-04-04 US US13/439,367 patent/US9589817B2/en active Active
- 2012-04-13 CN CN201280024616.1A patent/CN103547874B/zh active Active
- 2012-04-13 KR KR1020137026728A patent/KR102038292B1/ko active IP Right Grant
- 2012-04-13 EP EP12721027.6A patent/EP2697584B1/fr active Active
- 2012-04-13 WO PCT/US2012/033421 patent/WO2012142351A1/fr active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002368500A (ja) * | 2001-06-04 | 2002-12-20 | Fuji Photo Film Co Ltd | プリント配線基板検査装置 |
KR100438250B1 (ko) | 2002-06-19 | 2004-07-02 | 주식회사 경호엔지니어링 종합건축사사무소 | 평면 이동식 열풍 건조로 |
KR100452134B1 (ko) | 2002-10-02 | 2004-10-14 | 이광석 | 인쇄물의 속성 건조장치 |
JP2007085702A (ja) * | 2005-09-26 | 2007-04-05 | Espec Corp | ガラス基板処理装置、ガラス基板処理システム及びガラス基板処理方法 |
Also Published As
Publication number | Publication date |
---|---|
US9589817B2 (en) | 2017-03-07 |
CN103547874A (zh) | 2014-01-29 |
KR20140025382A (ko) | 2014-03-04 |
EP2697584A1 (fr) | 2014-02-19 |
US20120260518A1 (en) | 2012-10-18 |
CN103547874B (zh) | 2016-01-27 |
WO2012142351A1 (fr) | 2012-10-18 |
EP2697584B1 (fr) | 2015-08-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
AMND | Amendment | ||
E601 | Decision to refuse application | ||
AMND | Amendment | ||
E902 | Notification of reason for refusal | ||
AMND | Amendment | ||
X701 | Decision to grant (after re-examination) | ||
GRNT | Written decision to grant |