KR102037395B1 - 투과 광학계 검사 장치 및 이를 이용한 필름 결함 검사 방법 - Google Patents

투과 광학계 검사 장치 및 이를 이용한 필름 결함 검사 방법 Download PDF

Info

Publication number
KR102037395B1
KR102037395B1 KR1020170123370A KR20170123370A KR102037395B1 KR 102037395 B1 KR102037395 B1 KR 102037395B1 KR 1020170123370 A KR1020170123370 A KR 1020170123370A KR 20170123370 A KR20170123370 A KR 20170123370A KR 102037395 B1 KR102037395 B1 KR 102037395B1
Authority
KR
South Korea
Prior art keywords
dummy structure
test object
light
image
light source
Prior art date
Application number
KR1020170123370A
Other languages
English (en)
Korean (ko)
Other versions
KR20170115027A (ko
Inventor
오세진
이은규
이태규
Original Assignee
동우 화인켐 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 동우 화인켐 주식회사 filed Critical 동우 화인켐 주식회사
Priority to KR1020170123370A priority Critical patent/KR102037395B1/ko
Publication of KR20170115027A publication Critical patent/KR20170115027A/ko
Priority to CN201880060324.0A priority patent/CN111108367A/zh
Priority to JP2020516386A priority patent/JP2020535397A/ja
Priority to PCT/KR2018/010987 priority patent/WO2019059613A1/ko
Application granted granted Critical
Publication of KR102037395B1 publication Critical patent/KR102037395B1/ko

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8809—Adjustment for highlighting flaws

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR1020170123370A 2017-09-25 2017-09-25 투과 광학계 검사 장치 및 이를 이용한 필름 결함 검사 방법 KR102037395B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020170123370A KR102037395B1 (ko) 2017-09-25 2017-09-25 투과 광학계 검사 장치 및 이를 이용한 필름 결함 검사 방법
CN201880060324.0A CN111108367A (zh) 2017-09-25 2018-09-18 透射光学系统的检查装置及使用该装置的膜缺陷检查方法
JP2020516386A JP2020535397A (ja) 2017-09-25 2018-09-18 透過光学系の検査装置及びそれを用いたフィルムの欠陥検査方法
PCT/KR2018/010987 WO2019059613A1 (ko) 2017-09-25 2018-09-18 투과 광학계 검사 장치 및 이를 이용한 필름 결함 검사 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020170123370A KR102037395B1 (ko) 2017-09-25 2017-09-25 투과 광학계 검사 장치 및 이를 이용한 필름 결함 검사 방법

Publications (2)

Publication Number Publication Date
KR20170115027A KR20170115027A (ko) 2017-10-16
KR102037395B1 true KR102037395B1 (ko) 2019-10-28

Family

ID=60295940

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020170123370A KR102037395B1 (ko) 2017-09-25 2017-09-25 투과 광학계 검사 장치 및 이를 이용한 필름 결함 검사 방법

Country Status (4)

Country Link
JP (1) JP2020535397A (ja)
KR (1) KR102037395B1 (ja)
CN (1) CN111108367A (ja)
WO (1) WO2019059613A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111929317A (zh) * 2020-07-08 2020-11-13 昆山之奇美材料科技有限公司 一种偏光膜缺陷检测系统及方法
CN115165920B (zh) * 2022-09-06 2023-06-16 南昌昂坤半导体设备有限公司 一种三维缺陷检测方法及检测设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101566129B1 (ko) 2014-12-12 2015-11-06 인하대학교 산학협력단 라인 스캔 방식의 모아레 3차원 형상 측정 장치 및 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07110302A (ja) * 1993-10-13 1995-04-25 Hajime Sangyo Kk 透明板の欠陥検出装置
JP4495327B2 (ja) * 2000-10-05 2010-07-07 株式会社メック 欠陥検出装置及び方法
JP4613086B2 (ja) * 2005-03-25 2011-01-12 倉敷紡績株式会社 欠陥検査装置
KR101082699B1 (ko) * 2008-08-27 2011-11-15 제일모직주식회사 광학필름용 검사장치
JP5178561B2 (ja) * 2009-02-06 2013-04-10 Ｈｏｙａ株式会社 パターン検査方法、パターン検査装置、フォトマスク製造方法、およびパターン転写方法
JP2012002792A (ja) * 2010-06-18 2012-01-05 Micro Brain:Kk 透明フィルム検査装置及び欠陥検出方法
KR101340345B1 (ko) * 2012-02-17 2013-12-13 주식회사 미르기술 패턴 무늬 보상기능을 갖는 비전검사장치
KR20140089201A (ko) * 2013-01-04 2014-07-14 동우 화인켐 주식회사 요철형 결함의 검출 방법 및 이를 이용한 투과 광학계 검사 장치
JP6085188B2 (ja) * 2013-02-15 2017-02-22 株式会社Ｓｃｒｅｅｎホールディングス パターン検査装置
JP2014234999A (ja) * 2013-05-30 2014-12-15 住友化学株式会社 欠陥検査装置及び光学表示デバイスの生産システム
KR20150086633A (ko) * 2014-01-20 2015-07-29 동우 화인켐 주식회사 광학 필름의 검사 장치 및 방법
KR102200303B1 (ko) * 2014-08-19 2021-01-07 동우 화인켐 주식회사 광학 필름 검사 장치
KR101637019B1 (ko) * 2014-10-28 2016-07-21 에이클로버 주식회사 일체형 영상기반 자동 표면검사장치
KR20170010675A (ko) 2015-07-20 2017-02-01 주식회사 엘지화학 광학필름 검사장치 및 광학필름 검사방법

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101566129B1 (ko) 2014-12-12 2015-11-06 인하대학교 산학협력단 라인 스캔 방식의 모아레 3차원 형상 측정 장치 및 방법

Also Published As

Publication number Publication date
WO2019059613A1 (ko) 2019-03-28
KR20170115027A (ko) 2017-10-16
JP2020535397A (ja) 2020-12-03
CN111108367A (zh) 2020-05-05

Similar Documents

Publication Publication Date Title
KR101177299B1 (ko) 평판 유리 표면 이물질 검사 장치
KR101300132B1 (ko) 평판 유리 이물질 검사 장치 및 검사 방법
KR102200303B1 (ko) 광학 필름 검사 장치
KR101082699B1 (ko) 광학필름용 검사장치
JP2007303829A (ja) 画像検査装置およびこの画像検査装置を用いた画像検査方法
TWI629665B (zh) 缺陷檢查方法及缺陷檢測系統
TWI628429B (zh) 缺陷檢測系統及方法
KR102037395B1 (ko) 투과 광학계 검사 장치 및 이를 이용한 필름 결함 검사 방법
KR20140148067A (ko) 광학 필름의 결함 판별 방법
JP2012107952A (ja) 光学ムラ検査装置
JP6119784B2 (ja) 異物検査方法
TW200925588A (en) Defect inspecting device and its method thereof
KR102045818B1 (ko) 투과 광학계 검사 장치 및 이를 이용한 결함 검사 방법
JP4994053B2 (ja) 基板検査装置及び基板検査方法
KR101436572B1 (ko) 광삼각법을 이용한 3차원형상 측정장치
JP2011226939A (ja) 基板検査方法及び装置
JP2010175283A (ja) 面画像生成装置
JP2014095617A (ja) パターン測定装置およびパターン測定方法
TWM477571U (zh) 一種用以擷取一物件影像的擷取裝置以及影像檢測裝置
KR20140089201A (ko) 요철형 결함의 검출 방법 및 이를 이용한 투과 광학계 검사 장치
KR20180016757A (ko) 광학 필름의 결함 검사 방법 및 장치
KR20100059550A (ko) 평판 검사 장치 및 그 방법
KR101103347B1 (ko) 평판 유리 표면 이물질 검사 장치
JP2011117793A (ja) 表面性状測定方法および表面性状測定装置
KR102180648B1 (ko) 3차원 단층촬영 검사 장치 및 방법

Legal Events

Date Code Title Description
A201 Request for examination
A302 Request for accelerated examination
E902 Notification of reason for refusal
AMND Amendment
E601 Decision to refuse application
AMND Amendment
J201 Request for trial against refusal decision
J301 Trial decision

Free format text: TRIAL NUMBER: 2018101002649; TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20180625

Effective date: 20190712

S901 Examination by remand of revocation
GRNO Decision to grant (after opposition)
GRNT Written decision to grant