TW200925588A - Defect inspecting device and its method thereof - Google Patents

Defect inspecting device and its method thereof Download PDF

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Publication number
TW200925588A
TW200925588A TW96146809A TW96146809A TW200925588A TW 200925588 A TW200925588 A TW 200925588A TW 96146809 A TW96146809 A TW 96146809A TW 96146809 A TW96146809 A TW 96146809A TW 200925588 A TW200925588 A TW 200925588A
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Taiwan
Prior art keywords
pattern
image capturing
image
defect detecting
capturing mechanism
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TW96146809A
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Chinese (zh)
Inventor
Kun-Xian Zheng
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Utechzone Co Ltd
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Priority to TW96146809A priority Critical patent/TW200925588A/en
Priority to JP2008268754A priority patent/JP2009139365A/en
Publication of TW200925588A publication Critical patent/TW200925588A/en

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Abstract

A defect inspecting device is used to inspect the defect of a diaphanous subject which is pervious to light. The defect inspecting device comprises a pattern unit, an image capturing mechanism, and a display unit. The pattern unit is intervally disposed at one side of the diaphanous subject and contains a pattern texture; the image capturing mechanism is disposed at the other side of the diaphanous subject and corresponded to the pattern unit; the image capturing mechanism is used for capturing the image rendered after the pattern texture passes through the diaphanous subject; the display unit is connected to the image capturing mechanism for receiving and displaying the image captured by the image capturing mechanism such that the defect on the diaphanous subject can be inspected.

Description

200925588 九、發明說明: 【發明所屬之技術領域】 本發明是有關於一種檢測裝置,特別是指一種用以檢 測透光待測物缺陷之檢測裝置及方法。 【先前技術】 如圖1所示,一般習知用於檢測偏光片之缺陷的缺陷 檢測裝置,通常包含一光源u、一透鏡12、一影像擷取機 構13及一顯示單元14,光源u所發出的光線會投射在偏 光片2上形成一照明區,藉由透鏡ι2及影像擷取機構13 掘取照明區的影像,以將照明區中具有對比差異處的缺陷 檢出。藉由光源11的轉動以使照明區於偏光片2上移動, 能依序掃描整片偏光片2以將所有缺陷位置完整檢出。 然而’由於偏光片2上的缺陷種類繁多’前述缺陷檢 測裝置對於表面形態(m〇rph〇i〇gy)變異如壓痕、波紋或是表 面凹凸等缺陷而言,因在光線照射下之對比差異度不高, 導致檢出率相對不高。 【發明内容】 本發明之一目的,在於提供一種用以檢測透光待測物 缺陷的缺陷檢測裝置。 本發明之另一目的,在於提供一種用以檢測透光待測 物缺陷的缺陷檢測方法。 本發明的其他目的和優點可以從本發明所揭露的技術 特徵中得到進一步的了解。 為達上述之一或部份或全部目的或是其他目的,本發 200925588 明之實施例所揭露之缺陷檢測裝置,用以檢測一透光待測 物的缺陷,透光待測物可供光線穿透,缺陷檢測裝置包含 圖案單元、一影像擁取機構及一顯示單元,圖案單元間 隔設置於透光待測物一側並包括一圖案紋路,影像擷取機 構間隔設置於透光待測物另一側並與圖案單元位置相對, 影像擷取機構用以擷取圖案紋路通過透光待測物後的影像 顯示單元與影像擷取機構相連接用以接收並顯示影像掘 取機構所擷取的影像,以供檢視透光待測物是否有缺陷。 於本發明之一實施例中,圖案紋路是由多數條線條交 錯所構成的網格,所述線條是呈垂直交錯狀。 於本發明之一實施例中,影像擷取機構包括一用以對 圖案單元的圖案紋路進行對焦的鏡片組,及一用以擷取鏡 片組對焦後所形成的影像的取像單元。 於本發明之一實施例中,各線條寬度為1〇〇am,且所 述線條中每二線條的間距為250从m。各線條寬度也可為 0.5mm’且所述線條中每二線條的間距也可為imm。 本發明之實施例中的缺陷檢測裝置,藉由檢視取像單 元擷取圖案紋路通過透光待測物後的影像,能判斷透光待 測物是否有表面形態的缺陷,且能透過該影像所產生的形 變來判斷透光待測物的缺陷位置及程度。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效,在 以下配合參考圖式之一個較佳實施例的詳細說明中,將可 清楚的呈現。以下實施例中所提到的方向用語,例如·上 6 200925588 、下、左、右、刚或後等’僅是參考附加圖式的方向。因 此,使用的方向用語是用來說明並非用來限制本發明。 如圖2所示,是本發明缺陷檢測裝置之較佳實施例, 該缺陷檢測裝置3用以檢測一透光待測物4的缺陷,在本 實施例中,透光待測物4為一可供光線穿透的偏光片,然 而,透光待/則物4也可為其他種類的透光物,並不受限於 本實施例所揭露的為限。 如圖2及圖3所示,缺陷檢測裝置3包含一圖案單元 ® 31、一影像棟取機構32及一顯示單元33。圖案單元31為 一透明片體,其包括有一圖案紋路311,圖案紋路311 -¾ 由多數條黑色線條垂直交錯所構成的網格圖案,當然在設 計上圖案紋路311也可為平行線條、同心圓線、螺旋線或是 具有任何可清楚辨識之圖紋或圖案,圖案單元31也可為非 透明片體,而線條也不以黑色為限,只要可清楚辨識線條 形狀即可。此外,在本實施例中,各線條寬度為⑽鋒, 且所述線條中每二線條的間距為25G^m,在實際實施時, 各線條寬度也可為〇.5mm,而所述線條中每二線條的間距 也可為1mm,當然隨著應用場合的不同,各線條的寬度以 及線條的間距在設計上也可不同,並不以本實施例中所揭 露的為限。 影像擷取機構32設置於圖案單元31上方,其包括一 鏡片組321及一取像單元322,鏡片組321可為至少一片以 上的聚焦透鏡,其主要用以使光線成像於取像單元322上 ,取像單元322主要用以棟取影像,在本實施例中取像單 7 200925588 元322為—電荷耦合裝置(CCD) ’但也可為其他種類之用以 擷取影像的裝置。 顯示單元33與影像擷取機構32的取像單元322相連 接’用以接收並顯示取像單元322所擷取的影像,顯示單 元33可為液晶顯示器(LCD)或其他種類的顯示器。 以下將針對缺陷檢測裝置3的檢測方法進行說明,如 圖2及圖4所示,如步驟71中,置放透光待測物4於圖案 單元31及影像擷取機構32的鏡片組321之間,鏡片組321 可對圖案單元31的圖案紋路311進行對焦,使取像單元 322可擷取鏡片組321對焦後所形成的影像。通常為了保護 透光待測物4 ’透光待測物4的上、下兩側分別會黏貼有_ 離型膜5與-保護膜6,其中離型膜5與保護骐6分別為透 光材質,在一般具有光源的環境下,透過鏡片組321對焦 於圖案紋路311後,取像單元322即可擷取圖案紋路3ιι通 過保護膜6、透光待測物4及離型膜5後的影像。然而,在 檢測過程中’也可在透光待測物4未黏貼離型膜5與保護 膜6前即進行檢測的動作。 接著,如步驟72中,取像單元322可將所擷取的影像 !)顯示單元3 3上,以供品管人員檢視透光待測物4是 否有缺陷。 2'® 5及圖6所示’在影像擷取機構32掏取圖 案紋路311影像的過程巾,若透光待測物4的表面有如圖$ 所示的凸部41或凹部42等表面形態的缺陷,則圖案紋路 311在經過凸部41及凹部42時,會因凸部41及凹部^的 8 200925588 輪廓影響而改變圖案紋路311的成像路徑,使得鏡片組321 成像於取像單元322上的影像會呈現如圖6所示之部分扭 曲形變的影像311,,亦即受到光程差因素的影響,使得透 光待測物4的表面缺陷造成取像單元322所擷取之影像 311’上會產生形變。由於影像311’上的形變位置會對應於透 光待測物4的凸部41及凹部42位置,因此品管人員透過 顯示單元33上所呈現的影像311,即可得知透光待測物4的 缺陷位置及程度。 特別說明的是,缺陷檢測裝置3除了可檢測透光待測 物4的凸部41及凹部42等表面形態的缺陷外,也可檢測 如壓痕或波紋等表面形態的缺陷,其檢測的方式與前述的 檢測方式相同,當透光待測物4表面有壓痕或波紋等缺陷 時,取像單元322所擷取之影像311’會產生形變,影像 311上網格大小明顯與其他區域不同之處即為塵痕或波紋等 缺陷所在的位置。 歸納上述,本實施例的缺陷檢測裝置3,藉由檢視取像 單元322擁取圖案紋路311通過透光待測物4後的影像,能 判斷透光待測物4是否有表面形態的缺陷,且能透過該影 像所產生的形變來判斷透光待測物4的缺陷位置及程度, 故確實能達到本發明所訴求之目的。 惟以上所述者’僅為本發明之較佳實施例而已,當不 能以此限定本發明實施之範圍,即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾,皆仍 屬本發明專利涵蓋之範圍内。另外本發明的任一實施例或 9 200925588 申請專利範圍不須達成本發明所揭露之 主目的或優點志 特點。此外’摘要部分和標題僅是用來輔助專利文件搜尋 之用,並非用來限制本發明之權利範圍。 寸 【圖式簡單說明】 圖1是習知一種表面缺陷檢測裝置之示意圖; 圖2是本發明缺陷檢測裝置之較佳實施例的一示意圖 圖3是本發明之較佳實施例之圖案單元的一示意圖; 圖4是本發明之較佳實施例之檢測方法的一流程圖; 圖5是本發明之較佳實施例的一示意圖,說明透光待 測物的缺陷;及 圖6是本發明之較佳實施例的一示意圖,說明影像擷 取機構的取像單元所擷取之產生形變後的影像。 200925588 【主要元件符號說明】 3 ....... …缺陷檢測裝置 33…… …顯示單元 31…… …圖案單元 4 ....... …透光待測物 311 ···· …圖案紋路 41....... …凸部 311,… …影像 42....... …凹部 32…… …影像擷取機構 5 ........ …離型膜 321 ···· 鏡片組 6 ........ …保護膜 322 ···· …取像單元 71 〜72·· ••步驟200925588 IX. Description of the Invention: [Technical Field] The present invention relates to a detecting device, and more particularly to a detecting device and method for detecting a defect of a light-transmitting object to be tested. [Prior Art] As shown in FIG. 1 , a defect detecting device for detecting a defect of a polarizer generally includes a light source u, a lens 12, an image capturing mechanism 13 and a display unit 14, and a light source u The emitted light is projected on the polarizer 2 to form an illumination area, and the image of the illumination area is captured by the lens ι2 and the image capturing mechanism 13 to detect defects having contrasts in the illumination area. By rotating the light source 11 to move the illumination area on the polarizer 2, the entire polarizer 2 can be sequentially scanned to completely detect all defect positions. However, 'due to the wide variety of defects on the polarizer 2', the defect detecting device has a contrast with respect to surface morphology (m〇rph〇i〇gy) such as indentation, corrugation or surface unevenness due to light irradiation. The difference is not high, resulting in a relatively low detection rate. SUMMARY OF THE INVENTION An object of the present invention is to provide a defect detecting device for detecting a defect of a light-transmitting object to be tested. Another object of the present invention is to provide a defect detecting method for detecting a defect of a light-transmitting test object. Other objects and advantages of the present invention will become apparent from the technical features disclosed herein. In order to achieve one or a part or all of the above or other purposes, the defect detecting device disclosed in the embodiment of the present invention is used to detect a defect of a light-transmitting object to be tested, and the light-transmitting object to be tested can be worn by light. The defect detecting device comprises a pattern unit, an image capturing mechanism and a display unit. The pattern unit is disposed on one side of the transparent object to be tested and includes a pattern line, and the image capturing mechanism is spaced apart from the light-transmitting object to be tested. One side is opposite to the position of the pattern unit, and the image capturing mechanism is used to capture the pattern line. The image display unit after transmitting the object to be tested is connected to the image capturing mechanism for receiving and displaying the image capturing mechanism. Image for viewing whether the light-transmitting test object is defective. In one embodiment of the invention, the pattern texture is a grid of intersecting lines of a plurality of lines, the lines being vertically staggered. In an embodiment of the invention, the image capturing mechanism includes a lens group for focusing the pattern lines of the pattern unit, and an image capturing unit for capturing an image formed by focusing the lens group. In one embodiment of the invention, each line has a width of 1 〇〇 am, and the spacing of each of the lines is 250 from m. The width of each line may also be 0.5 mm' and the spacing of every two lines in the line may also be imm. The defect detecting device in the embodiment of the present invention can detect whether the transparent object to be tested has a surface shape defect by the image capturing unit capturing the pattern grain and transmitting the image after transmitting the object to be tested, and can transmit the image through the image. The resulting deformation determines the position and extent of the defect of the light-transmitting object to be tested. The above and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments. The directional terms mentioned in the following embodiments, for example, upper 6 200925588, lower, left, right, just or after, are merely directions referring to the additional drawings. Therefore, the directional terminology used is for the purpose of illustration and not limitation. As shown in FIG. 2, it is a preferred embodiment of the defect detecting device of the present invention. The defect detecting device 3 is configured to detect a defect of the light-transmitting object to be tested 4. In the embodiment, the light-transmitting object to be tested 4 is a The light-transmitting polarizer can be used for the light-transmitting polarizer. However, the light-transmitting/receiving material 4 can also be other kinds of light-transmitting materials, and is not limited to the disclosure of the embodiment. As shown in FIG. 2 and FIG. 3, the defect detecting device 3 includes a pattern unit ® 31, an image building mechanism 32, and a display unit 33. The pattern unit 31 is a transparent sheet body, and includes a pattern pattern 311. The pattern lines 311 - 3⁄4 are formed by a grid pattern in which a plurality of black lines are vertically staggered. Of course, the pattern lines 311 can also be parallel lines and concentric circles. The line, the spiral or any pattern or pattern that can be clearly recognized, the pattern unit 31 can also be a non-transparent sheet, and the lines are not limited to black, as long as the line shape can be clearly recognized. In addition, in this embodiment, each line width is (10) front, and the spacing of each two lines in the line is 25 G^m. In actual implementation, each line width may also be 〇.5 mm, and in the line The spacing of each of the two lines may also be 1 mm. Of course, the width of each line and the spacing of the lines may be different in design depending on the application, and are not limited to those disclosed in the embodiment. The image capturing mechanism 32 is disposed above the pattern unit 31 and includes a lens group 321 and an image capturing unit 322. The lens group 321 can be at least one or more focusing lenses for imaging light onto the image capturing unit 322. The image capturing unit 322 is mainly used for capturing images. In this embodiment, the image capturing unit 7 200925588 322 is a charge coupled device (CCD) 'but other types of devices for capturing images may be used. The display unit 33 is connected to the image capturing unit 322 of the image capturing mechanism 32 for receiving and displaying the image captured by the image capturing unit 322. The display unit 33 can be a liquid crystal display (LCD) or other kind of display. The detection method of the defect detecting device 3 will be described below. As shown in FIG. 2 and FIG. 4, in step 71, the light-transmitting DUT 4 is placed on the lens unit 321 of the pattern unit 31 and the image capturing mechanism 32. The lens group 321 can focus the pattern line 311 of the pattern unit 31 so that the image capturing unit 322 can capture the image formed by the lens group 321 after focusing. Generally, in order to protect the light-transmitting test object 4, the upper and lower sides of the light-transmitting test object 4 are respectively adhered with a release film 5 and a protective film 6, wherein the release film 5 and the protective film 6 are respectively transparent. The material, in the environment generally having a light source, is focused on the pattern line 311 through the lens group 321 , and the image capturing unit 322 can capture the pattern line 3 ι through the protective film 6 , the light-transmitting object 4 and the release film 5 image. However, during the detection process, the detection operation can be performed immediately before the light-transmitting test object 4 is adhered to the release film 5 and the protective film 6. Then, in step 72, the image capturing unit 322 can display the captured image on the display unit 3 3 for the quality control personnel to check whether the transparent object to be tested 4 is defective. 2'® 5 and FIG. 6 show a process towel for capturing the image pattern 311 image by the image capturing mechanism 32, and if the surface of the light-transmitting object 4 has a surface shape such as a convex portion 41 or a concave portion 42 as shown in FIG. The defect of the pattern pattern 311 changes the imaging path of the pattern line 311 due to the convex portion 41 and the contour of the concave portion 41 and the recessed portion 42 so that the lens group 321 is imaged on the image capturing unit 322. The image will exhibit a partially distorted image 311 as shown in FIG. 6, that is, affected by the optical path difference factor, such that the surface defect of the transparent object 4 causes the image 311' captured by the image capturing unit 322. There will be deformation on the top. Since the deformation position on the image 311' corresponds to the position of the convex portion 41 and the concave portion 42 of the transparent object 4, the quality control person can know the light-transmitting object through the image 311 presented on the display unit 33. 4 defect location and extent. In particular, the defect detecting device 3 can detect defects of surface morphology such as the convex portion 41 and the concave portion 42 of the light-transmitting object 4, and can also detect defects such as indentations or corrugations, and the manner of detection thereof. The image 311' captured by the image capturing unit 322 is deformed when the surface of the light-transmitting object to be tested 4 has defects such as indentation or waviness, and the size of the mesh on the image 311 is obviously different from other regions. The location is where the defects such as dust marks or ripples are located. In summary, the defect detecting device 3 of the present embodiment can determine whether the transparent object to be tested 4 has a surface shape defect by the image capturing unit 322 taking the pattern grain 311 and transmitting the image after the object 4 is transmitted. Moreover, the position and degree of the defect of the light-transmitting object 4 can be judged by the deformation generated by the image, so that the object of the present invention can be achieved. However, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention, All remain within the scope of the invention patent. In addition, any of the embodiments of the present invention or the scope of the patent application of the present invention is not required to achieve the subject matter or advantages of the present invention. Further, the 'summary section' and the headings are only used to assist in the search of patent documents and are not intended to limit the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a conventional surface defect detecting device; FIG. 2 is a schematic view of a preferred embodiment of the defect detecting device of the present invention; FIG. 3 is a schematic view of a preferred embodiment of the present invention. Figure 4 is a flow chart of a method for detecting a preferred embodiment of the present invention; Figure 5 is a schematic view of a preferred embodiment of the present invention, illustrating a defect of a light-transmitting object to be tested; and Figure 6 is a view of the present invention A schematic diagram of a preferred embodiment illustrates a deformed image captured by an image capturing unit of the image capturing mechanism. 200925588 [Description of main component symbols] 3 . . . ... defect detecting device 33 ... ... display unit 31 ... ... pattern unit 4 . . . ... light transmissive object 311 ···· ...pattern line 41....... ... convex portion 311, ... image 42....... recess portion 32 ... image capturing mechanism 5 ........ release film 321 ···· Lens group 6 ........ Protective film 322 ·····Image taking unit 71 to 72··••Step

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Claims (1)

200925588 十、申請專利範圍: 1 · 一種缺陷檢測裝置,用以檢測一透光待測物的缺陷,該 透光待測物可供光線穿透,該缺陷檢測裝置包含: 一圖案單元,間隔設置於該透光待測物一側並包括 一圖案紋路; 一影像擷取機構’間隔設置於該透光待測物另一侧 並與該圖案單元位置相對,該影像擷取機構用以擷取該 圖案紋路通過該透光待測物後的影像;及 顯示單元’與該影像擷取機構相連接用以接收並 顯示該影像擷取機構所擷取的影像,以供檢視該透光待 測物是否有缺陷。 2.依據申吻專利範圍第i項所述之缺陷檢測裝置,其中, 該圖案紋路是由多數條線條交錯所構成的網格。 依據申吻專利範圍第2項所述之缺陷檢測裝置,其中, 所述線條是呈垂直交錯狀。 •依據申印專利範圍第3項所述之缺陷檢測裝置,直中, 該影像擷取機構包括一用以對該圖案單元的圖案紋路進 仃對焦的鏡片組’及-用以擷取該鏡片組對焦後所形成 的影像的取像單元。 5.依據中請專利範圍第3項所述之缺陷檢測裝置,其中, ^該線條寬度為lG”m,且所述線條中每二線條的間距 為 250 ju m。 6·依據中請專利範園第3項所述之缺陷檢測裝置,宜中, 各該線條寬度為〇_5mm,且所述線條中每二線條的間距 12 200925588 為 lmm 〇 7. —種缺陷檢測方法,該方法包含下述步驟: (A) 置放—透光待測物於一影像擷取機構與一圖案單 元之間’該圖案單元包括一圖案紋路,該影像擷取機構 可操取該圖案紋路通過該透光待測物後的影像;及 (B) 顯示該影像擷取機構所擷取的影像,以檢視該 透光待測物是否有缺陷。 8. 依據申請專利範圍第7項所述之缺陷檢測方法,其中, 該圖案紋路是由多數條線條交錯所構成的網格。 9. 依據申請專利範圍第8項所述之缺陷檢測方法,其中, 所述線條是呈垂直交錯狀。 1 〇·依據申請專利範圍第9項所述之缺陷檢測方法,其中, 該影像擷取機構包括一用以對該圖案單元的圖案紋路進 订對焦的鏡片組,及一用以擷取該鏡片組對焦後所形成 的影像的取像單元。 11.依據申請專利範圍第9項所述之缺陷檢測方法,其中, 各該線條寬度為100"m,且所述線條中每二線條的間距 為 250 // m 〇 12·依據中請專利範圍第9項所述之缺陷檢測方法,其中, t該線條寬度為0.5mm,且所述線條中每二線條的間距 為 1 nun 〇 η.依據中請專利範圍第1G項所述之缺陷檢測方法, 是由一與該影像掏取機構相連接的顯示 收並顯示該影像擷取機構所擷取的影像。 13200925588 X. Patent application scope: 1 · A defect detecting device for detecting a defect of a light-transmitting object to be tested, the light-transmitting object to be tested is capable of penetrating light, the defect detecting device comprising: a pattern unit, and an interval setting And the image capturing mechanism is disposed on the other side of the transparent object to be tested and is opposite to the position of the pattern unit, and the image capturing mechanism is used for capturing The image pattern is connected to the image after the object to be tested; and the display unit is coupled to the image capturing mechanism for receiving and displaying the image captured by the image capturing mechanism for viewing the light transmission to be tested Whether the object is defective. 2. The defect detecting device according to the item of claim 1, wherein the pattern line is a mesh formed by a plurality of lines being staggered. The defect detecting device according to claim 2, wherein the lines are vertically staggered. The defect detecting device according to the third aspect of the patent application scope, wherein the image capturing mechanism comprises a lens group for focusing the pattern of the pattern unit, and - for capturing the lens The image capturing unit of the image formed by the group after focusing. 5. The defect detecting device according to claim 3, wherein the line width is lG"m, and the spacing between each of the lines is 250 jum. In the defect detecting device according to item 3 of the garden, preferably, the line width is 〇_5 mm, and the spacing 12 of each line in the line is 12 mm 25 〇 7. The defect detecting method includes the following method The steps are as follows: (A) placing the light-transmitting object to be tested between an image capturing mechanism and a pattern unit. The pattern unit includes a pattern pattern, and the image capturing mechanism can manipulate the pattern pattern to pass the light transmission. The image after the object to be tested; and (B) displaying the image captured by the image capturing mechanism to check whether the light transmitting object is defective. 8. The defect detecting method according to claim 7 The pattern texture is a grid formed by a plurality of lines interlaced. 9. The defect detection method according to claim 8, wherein the lines are vertically staggered. Patent scope item 9 The image capturing mechanism includes a lens group for binding a pattern of the pattern unit, and an image capturing unit for capturing an image formed by focusing the lens group. 11. The defect detecting method according to claim 9, wherein each of the lines has a width of 100 " m, and a spacing of each of the lines is 250 // m 〇12. The defect detecting method according to Item 9, wherein the line width is 0.5 mm, and the distance between each of the lines is 1 nun 〇η. According to the defect detecting method described in the 1Gth item of the patent scope , is a display connected to the image capturing mechanism and displays the image captured by the image capturing mechanism.
TW96146809A 2007-12-07 2007-12-07 Defect inspecting device and its method thereof TW200925588A (en)

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CN102853991A (en) * 2012-08-28 2013-01-02 珠海格力电器股份有限公司 Online automatic detection device for elbow assembly method of air conditioner heat exchanger
CN111103309A (en) * 2018-10-26 2020-05-05 苏州乐佰图信息技术有限公司 Method for detecting flaws of transparent material object
TWI835085B (en) * 2022-03-04 2024-03-11 梭特科技股份有限公司 Method for detecting defect between wafer or die and substrate

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CN102608132B (en) * 2012-04-09 2014-06-11 昆山胜泽光电科技有限公司 Multi-type glass flaw detection device and detection method
CN107884422B (en) * 2017-01-04 2023-08-11 浙江舜宇光学有限公司 Optical detection device

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CN102853991A (en) * 2012-08-28 2013-01-02 珠海格力电器股份有限公司 Online automatic detection device for elbow assembly method of air conditioner heat exchanger
CN102853991B (en) * 2012-08-28 2015-11-25 珠海格力电器股份有限公司 Online automatic detection device for elbow assembly method of air conditioner heat exchanger
CN111103309A (en) * 2018-10-26 2020-05-05 苏州乐佰图信息技术有限公司 Method for detecting flaws of transparent material object
TWI835085B (en) * 2022-03-04 2024-03-11 梭特科技股份有限公司 Method for detecting defect between wafer or die and substrate

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