Ϊ289662 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種用於檢測玻璃基板背面之缺陷檢查裝置， 尤指一種利用稜鏡組(prisms)使光源產生折射及色散效果後，配合 背光板反射穿透玻璃基板之光源，並以CCD攝影機擷取由光所組 ， 成之影像轉換為類比之電壓訊號，以檢測玻璃基板背面是否有缺 陷。Ϊ 289662 IX. Description of the Invention: [Technical Field] The present invention relates to a defect inspection device for detecting the back surface of a glass substrate, and more particularly to a backlight using a prism to refract and disperse a light source. The plate reflects the light source that penetrates the glass substrate, and the CCD camera captures the light group, and the image is converted into an analog voltage signal to detect whether the back surface of the glass substrate is defective.
I 【先前技術】 近乎光學等級的玻璃基板在目前已被廣泛地應用，如應用於 平面顯示器、生物晶片、微機電、以及光通訊元件等領域中；製 作完成之玻璃基板，均為大尺寸規格出廠，繼而再因應各種用途 進行切割為適當之尺寸；然而，於進行切割前，為了維護玻璃基 板得以符合光學等級的品質，必須先行檢測玻璃基板是否有氣 泡、表面不平整、流紋等瑕疵。 翏閱第一圖所示，為習知人工檢測玻璃基板之示意圖，其中 白知技術以人工進行玻璃基板之檢測，其檢測設備10係以一強力 光源，如南素燈12等，於玻璃基板U表面進行強光照射，並由 仏測員13以目視的方式檢測玻璃基板11表面；此種利用人工 ^測破璃基板11之方式，可藉由強絲射下，將玻璃基板u具 有氣泡、表面不平整、流紋等之瑕疵，以目視的方式檢測出來。 以而f知人工檢測玻璃基板之設備及方法仍具有以下缺點： •利用習知人工進行玻璃基板檢測之設備及方法，往往僅能檢測 5 1289662 出就玻璃基板較為明顯之瑕疵，而對於玻璃基板表面形狀不平 整或材質不均勻等之較細微之瑕疵，通常以肉眼直接目視觀察 仍屬較不易得知者。 •锔4以人工進行玻璃基板檢測之设備及方法，必須將欲檢測之 玻璃基板直豎起至一適當角度，並傾靠固定於其置放架上，接 著，藉由強力光源照射下，再透過檢測員以目視之方式檢測該 玻璃基板之表面是否具有瑕疵；當將玻璃基板轉動至適當角度 時，必須特別留意玻璃基板易破碎之性質，以免於製程中造成 無法修復之損傷。 3·以人工方式檢測玻璃基板，必須承擔各個檢測員對於工作上不 同之細腻度所發生之誤判且不符合自動化需求之原則，又，以 人工方式彳欢測大尺寸規格之玻璃基板，為達到較高品質之準嫁 度，在在必須增加以目視檢測玻璃基板之作業時間，不僅耗費 人力及時間，同時亦降低生產效能，實不符合經濟效益。 現今玻璃基板檢測設備，為符合自動化生產之要求，大多已 採用光學取像裝置進行玻璃基板之檢測作業，而欲達到精準地檢 測值，必須針對玻璃基板之正反表面進行檢測作業；同時參閱第 一及二圖所示，為習知玻璃基板檢測設備之立體及側視示音圖， 該玻璃基板檢測設備20係包含第一光學取像裝置21、第二光學取 像裝置22及調焦裝置23，且玻璃基板25係裳設於基板架24上 方；利用該第一光學取像裝置21設置於玻璃基板乃之上方，以 進行玻璃基板25正面之表面檢測作業；又，配合一第二光學取像 6 1289662 衣置22設置於玻璃基板％之下方，以進行玻璃基板％反面之表 面檢測作業；該調焦裝置23係作為調整光學取像裝置之焦距用。 餐閱弟四圖所示，為習知玻璃基板檢測設備之作動示意圖，其係 利用兩組玻璃基板檢測設備20設置於檢測玻璃基板b之兩側， 雖…、利用光學取像裝置可大幅提升破璃基板之檢測作業速度， 但’習知_自動化餘之_基板檢備，於該檢測設備週 攻白已衣叹精被繁雜之作動轉，故，該檢測設備係已佔據多數 固定之作業空間，而不易進行更換或變動，因此，欲針對已裝設 完成之玻德嫌般備進行增設輕修健時，將造成諸多困 難及不便。 針對上述之問題，本發明提出一種用於檢測玻璃基板背面之 缺陷檢查裝置’錢棚—光紐職置使光誠生折射及色散 效果後’再由-光學取縣置擷取由光所域之影像轉換為類比 之電壓訊號，以檢測玻璃基板背面是否有缺陷。 【發明内容】 為克服前揭玻璃基板檢測設備及方法之弊端，本發明乃發明 一種用於檢測玻璃基板背面之缺陷檢查裝置，其係利用一光源投 射裝置使光源產生折射及色散效果，並由一光學取像裝置擷取由 光所組成之影像轉換為類比之電壓訊號，以針對玻璃基板背面進 行檢測是否具有瑕疵。 本發明之主要目的係在提供一種用於檢測玻璃基板背面之缺 陷檢查裝置’其係利用光源投射裝置設置於檢測玻璃基板之下 1289662 方，該光源投射裝置係包含由第一稜鏡及第二稜鏡所組成之稜鏡 組’與水平呈45度角且左右相對傾靠固設於稜鏡固定架上；該含 棱鏡組之光源投射裝置，可將照射於該稜鏡組之光源，藉由稜鏡 之基本功能，使光線發生折射及產生色散效果，達到控制光線行 進方向之目的，以便將光源照射於玻璃基板背面之表面影像投射 至光學取像裝置處，進行影像擷取同時檢查玻璃基板背面是否有 缺陷。 齡本發明之次要目的係在提供一種用於檢測玻璃基板背面之缺 陷檢查裝置’其係利用背光光源裝置設置於檢測玻璃基板之上 方，當正光光源裝置照射之光源通過第一稜鏡時，依照分光原理 產生色散後，該光源將折射穿透玻璃基板至背光光源裝置處，由 於背光光源裝置係為不透光之構件，故能將投射至背光光源裝置 處之光源，反射至光源投射裝置之第一稜鏡處，以利該光源繼續 订進至第二稜鏡且得以順利折射至光學取像裝置處，進行影像擁 _ 取及檢查玻璃基板背面是否有缺陷。 本發明之再次要目的係在提供一種用於檢測玻璃基板背面之 缺板查叙置’其係利用光學取像裝置設置於檢測玻璃基板之上 S ’备正光光職置提供之光源，透過光源投雜置及背光光源 衣置，最終彳于以順利折射至光學取像裝置處時，可以採CCD攝影 機擷取由光馳成之影像，藉轉換為類比之電壓訊號，以檢測 玻璃基板β岐否有缺陷；其巾，該光學取像裝置攝影機 之主要力冑b係可清楚地觀測出檢測玻璃基板之外觀及特徵且能 達到擷取衫像的精準性，另外，該光學取像裝置之ccd攝影機更 8 1289662 •体、"ΛR辆行線及面之掃描影像_，對於生產玻璃基板之 私巾，_ CCD攝職作為轉裝置，更顯為重要之要點。 綜上所述，藉由本發明所提供之一種用於檢測玻璃基板背面 缺叫查衣置’於實際製程中，可應用於檢測各式尺寸之玻璃 基=，且可隨實際需求架設概组該檢測玻璃基板背面之缺陷檢 置於玻^基板之利彳，以獲得最佳準確率之檢測狀態，對於 1玻璃基板製程之自動化，具有莫大之幫助；且，由於光學取 鲁魏置之體積較大’且結構精密複雜，將其設置於檢測玻璃基板 方除了可使維修谷易、組裝方便外，進而更能增加設備之 、又十彈[生荨目的，對於提南產業之生產效能及增力口產業競爭力實 為一大福音。 【實施方式】 有關於本發明係一種用於檢測玻璃基板背面之缺陷檢查裝 置’係藉由光源投射裝置使投射之光源發生折射及產生色散效果 後’透過一光學取像裝置擷取由光所組成之影像轉換為類比之電 壓訊號’以針對玻璃基板背面進行檢測。 參閱第五圖所示，為本發明玻璃基板背面檢查裝置之侧視示 意圖’該玻璃基板背面檢查裝置30係包含一光學取像裝置31、一 光源投射裝置32、一正光光源裝置33、一背光光源裝置34及一 玻璃基板35，其中，該玻璃基板35係設置於一基板架351上，且 鎖固於支架301上;該光學取像裝置31係由一固定架312鎖固於 9 1289662 支架ML上且包含一調焦裝置m，利用該光學取像裝置31設置 f 於檢測玻璃基板35之上方，可透過光源投射裝置32及背光光源 裝置34,將藉由支架貞固於支架i之正光光源裝置33之直 射光線於檢測玻璃基板35背面做表面影像擷取，以檢查玻璃基板 35背面是否有缺陷；該光源投射裝置32則係設置於檢測玻璃基板 35之下方’利用支架124鎖固於支架301上，且係藉由一組控制 光線方向之稜鏡組(prisms)及稜鏡固定架1所構成，該稜鏡組包 鲁 含第一稜鏡及1_及第二稜鏡121所組成，利用此第一稜鏡321及 第二稜鏡可用以控制光線行進方向，將光源照射於玻璃基板 35背面之表面影像，投射至光學取像裝置31 ;該正光光源裝置33 係置備一照明裝置，利用該正光光源裝置33產生之光線照射於玻 璃基板35背面以進行玻璃基板35背面缺陷之檢測；該背光光源 衣置34可為一背光板(Backlight)^4X，係利用一固定架342銷固於 光學取像裝置31且設置於檢測玻璃基板35之上方，與正光光源 • 裝置33提供光源配合，以達到檢查玻璃基板35表面之顯影效果。 同呀麥閱第六圖所示，為本發明玻璃基板背面檢查裝置之原 里示心圖（）’其主要係利用稜鏡組使光線發生折射及產生色散效 果，稜鏡(prism)係由兩個或兩個以上的折射平面構成的透明元 件而稜鏡的基本功能除了使光線發生折射外，另一功能係使光 線產生色散效果，由於不同波長的入射光，在稜鏡内之折射率係 為不同古文所產生的偏向角亦不相同，稜鏡此種因波長而改變 偏向角的現象，係為稜鏡的分光原理，亦稱為稜鏡的色散，本發 明即係利賴鏡改變絲角度，使光線轉變方向，本發明之光源 1289662 投射裝置32包含由第一稜鏡迎及第二稜鏡繼斤組成之棱鏡 組，該棱鏡組係與水平呈45度角且左右相對傾靠固設於稜鏡固定 架m上，當正光光源震置33之光源直射至第一稜鏡迦時，藉 由稜鏡之基本功能，使光線發生折射及產生色散效果後，將正光 光源裝置33照射之光源依照分光原理，折射穿透玻璃基板35到 達背光光職置34 ;由於背光光源裝置34係為不透光之構件，故 可利用該裝置之背光板趾將第—麟迎色紐投射至該背光 光源裝置34之絲反射回第—魏现上；而由與水平呈45度 角且相對帛—魏默傾靠固設於稜鏡ϋ定架323上μ一方之 第二稜鏡逛，恰可接收由背絲源裝置34反射至第一稜鏡翅 之光源折射至第—稜鏡延上，而由於料二稜鏡趣接收之光 源碰觸第二魏里時，係為45度之人射纽，該人㈣度已大 於臨界角’因此光源反射時，其方向已改變了 9G度，故可將光源 順利折射至光學取像裝置31處。 —同日待閱第七圖所不，為本發明玻璃基板背面檢查裝置之原 =不:圖(一)’其係當正光光源裝置％之光源直射至第一棱鏡塑 時’错由稜鏡之基本魏，使親發生折射及產生色散效果後， 將^光光源裝置33照射之絲、依照分光顧，折射到達玻璃基板 、5 :面之表面’而由於該玻璃基板％具有壞點垃現象，阻礙光 源繼續仃進，導致絲無法糊料玻喊板％到達背光光源裝 置34 ’而該壞點逛現象將透過光學取像裝置被檢測出。 同=參閱第八圖所示，為本發明玻璃基板背面檢查裝置之之 作動不思圖’於生產玻璃基板35之快速製程作業中，可裝設一組 1289662 光學取像裝置40於檢測玻璃基板流程之前部作業，該光學取像裝 置40係裝設於玻璃基板35之上方，以針對玻璃基板35正面之表 面檢測作業，該光學取像裝置40可透過CCD攝影機檢視玻璃基 板35之表面及外觀，並同時裝設一組本發明之玻璃基板背面檢查 裝置30於該前部作業之後，利用本發明光學取像裝置31設置於 檢測玻璃基板35之上方，該光學取像裝置31可採CCD攝影機將 正光光源裝置33提供之光源，透過光源投射裝置32及背光光源 裝置34，最終得以順利折射至光學取像裝置31處時，由€〇：>攝 影機擷取由光所組成之影像，其中，CCD攝影機之主要功能，係 可清楚地觀測出檢測玻璃基板35之外觀及特徵，且能達到擷取影 像的精準性，該光學轉裝置31可透過CCD攝影機擷取由光所 組成之影像，並藉由轉換為類比之電壓訊號，以利檢測玻璃基板 35背面是否含有缺陷；另外，該光學取像裝置31 iCCD攝影機 更可單獨或同時進行線及面之掃描影像感測，對於生產玻璃基板 35之快速製程中，具有重大幫助。 利用本發明之用於檢測玻璃基板背面之缺陷檢查裝置，可將 其玻璃基板背©檢絲置3〇隨實際需求架設複數組於玻璃基板 35之旁侧，以獲得最佳準確率之檢測狀態；又，本發明之玻璃基 板月面檢查裝置30之旁側，可依實際需求架設光學取像裝置， 利用裝設複數組光學取像裝置31及配合本發明之玻璃基板背面檢 一衣置30可達到同日^檢查玻璃基板35正、反面之缺陷檢測目 的，且本發明可適用於檢測各式尺寸之玻璃基板35，對於生產玻 璃基板35製程之自動化，具有莫大之幫助；且，由於光學取像裝 12 1289662 置μ之m較大’且結顺m，树明者突破料裝設方法， ^其設置於制玻板35之上方，_亦可檢_璃基板％ 二面之缺陷檢查’除可使維修容易、組裝方便外，進而更能增加 之設計彈性等目的’對於提高產業之生產效能及增加產業競 爭力實為一大福音。I [Prior Art] Near-optical grade glass substrates have been widely used in applications such as flat panel displays, biochips, microelectromechanics, and optical communication components. The finished glass substrates are all large-size. It is factory-cut and then cut to the appropriate size for various purposes; however, in order to maintain the optical grade quality of the glass substrate before cutting, it is necessary to first detect whether the glass substrate has bubbles, surface irregularities, flow patterns, and the like. Referring to the first figure, it is a schematic diagram of a manual detection of a glass substrate, wherein the white sensing technology manually detects the glass substrate, and the detecting device 10 is a strong light source, such as a Nansu lamp 12, etc., on the glass substrate. The surface of the U is irradiated with strong light, and the surface of the glass substrate 11 is visually detected by the tester 13; such that the glass substrate 11 can be shot by a strong wire by means of a manual measurement of the glass substrate 11 The surface is not flat, the flow pattern, etc., is detected visually. Therefore, the apparatus and method for manually detecting a glass substrate still have the following disadvantages: • The apparatus and method for performing glass substrate inspection by conventional manuals can only detect 5 1289662 out of the glass substrate, and the glass substrate is more obvious. The fineness of the surface shape or the unevenness of the material is usually not directly known by the naked eye. • 锔4 equipment and method for manual glass substrate inspection, the glass substrate to be tested must be erected to an appropriate angle, and fixed to its placement frame, and then illuminated by a strong light source. Then, the surface of the glass substrate is visually detected by the inspector to have flaws; when the glass substrate is rotated to an appropriate angle, special attention must be paid to the fragile nature of the glass substrate to avoid irreparable damage during the process. 3. The manual inspection of the glass substrate must bear the principle that each inspector has misjudged the different degrees of detail in the work and does not meet the automation requirements. Moreover, the glass substrate of the large size specification is manually measured. Achieving a higher quality of the standard of marriage, in the need to increase the time to visually inspect the glass substrate, not only labor and time, but also reduce production efficiency, it does not meet economic benefits. In today's glass substrate testing equipment, in order to meet the requirements of automated production, most of the optical imaging devices have been used for the inspection of glass substrates. To achieve accurate detection values, it is necessary to test the front and back surfaces of the glass substrate; As shown in FIGS. 1 and 2, a stereoscopic and side view sounding diagram of a conventional glass substrate detecting apparatus includes a first optical image capturing device 21, a second optical image capturing device 22, and a focusing device. 23, the glass substrate 25 is disposed above the substrate holder 24; the first optical image capturing device 21 is disposed above the glass substrate to perform surface inspection of the front surface of the glass substrate 25; The image pickup unit 22 is disposed below the glass substrate % to perform the surface inspection operation of the glass substrate % reverse side; the focus adjustment device 23 serves as a focal length for adjusting the optical image pickup device. As shown in the fourth figure of the meal, it is a schematic diagram of the operation of the conventional glass substrate detecting device, which is provided on both sides of the detecting glass substrate b by using two sets of glass substrate detecting devices 20, which can be greatly improved by using the optical image capturing device. The speed of the detection of the broken glass substrate, but the 'study _ automated _ _ substrate inspection, in the detection equipment week, the sigh is ridiculously moved, so the detection equipment has occupied most of the fixed operations Space is not easy to change or change. Therefore, it will cause many difficulties and inconveniences when it comes to adding a light repair to the installed glass. In view of the above problems, the present invention provides a defect inspection device for detecting the back surface of a glass substrate, which is used after the light refracting and dispersing effect of the light shed. The image is converted to an analog voltage signal to detect defects on the back side of the glass substrate. SUMMARY OF THE INVENTION In order to overcome the disadvantages of the front glass substrate detecting apparatus and method, the present invention is an inspecting device for detecting a back surface of a glass substrate, which uses a light source projecting device to cause a light source to refract and disperse, and An optical image capturing device converts an image composed of light into an analog voltage signal to detect whether the back surface of the glass substrate has flaws. The main object of the present invention is to provide a defect inspection device for detecting the back surface of a glass substrate, which is disposed on the side of the detection glass substrate by using a light source projection device, the light source projection device includes the first and second The 稜鏡 group formed by the ' is at a 45-degree angle with respect to the horizontal direction and is tilted relative to the left and right to be fixed on the cymbal holder; the light source projection device including the prism group can illuminate the light source irradiated to the cymbal group Due to the basic function of the ray, the light is refracted and the dispersion effect is achieved, and the direction of the light travel is controlled, so that the surface image of the light source irradiated on the back surface of the glass substrate is projected to the optical image capturing device, and the image is captured while checking the glass. Whether there is a defect on the back of the substrate. The second object of the present invention is to provide a defect inspection device for detecting the back surface of a glass substrate, which is disposed above the detection glass substrate by using a backlight source device, and when the light source illuminated by the positive light source device passes through the first flaw, After the dispersion is generated according to the principle of splitting, the light source will refract through the glass substrate to the backlight source device. Since the backlight source device is a opaque member, the light source projected to the backlight source device can be reflected to the light source projection device. At the first turn, the light source continues to be customized to the second side and is smoothly refracted to the optical image taking device, and the image is taken and the back surface of the glass substrate is inspected for defects. A further object of the present invention is to provide a light source for detecting the back surface of a glass substrate, which is provided on the detecting glass substrate by an optical image capturing device, and a light source provided by the light source. When the immersing and backlighting light source is placed, and finally slid into the optical image capturing device, the CCD camera can be used to capture the image formed by the light, and converted into an analog voltage signal to detect the glass substrate β岐. Whether there is a defect; the towel, the main force of the optical imaging device camera can clearly observe the appearance and characteristics of the glass substrate and can achieve the accuracy of capturing the shirt image, and the optical imaging device Ccd camera more 8 1289662 • Body, " Λ R vehicle line and surface scan image _, for the production of glass substrates, _ CCD camera as a turning device, more important points. In summary, the invention provides a method for detecting the back surface of a glass substrate, which is used in the actual process, and can be applied to the detection of glass bases of various sizes, and can be set up according to actual needs. Detecting the defect on the back side of the glass substrate and checking it on the glass substrate to obtain the best accurate detection state, which is of great help to the automation of the glass substrate process; and, due to the optical volume of the Lu Wei set, The large size and the complicated structure are arranged on the glass substrate for inspection. In addition to making the maintenance of the valley easy and easy to assemble, it can increase the equipment and the ten bombs. The competitiveness of the industry is a great boon. [Embodiment] In the present invention, a defect inspection device for detecting the back surface of a glass substrate is refracted by a light source projection device to cause a light source to be refracted and a dispersion effect is generated, and the light is captured by an optical image capturing device. The composed image is converted to an analog voltage signal 'for detection on the back side of the glass substrate. Referring to FIG. 5, it is a side view of the glass substrate back surface inspection device of the present invention. The glass substrate back surface inspection device 30 includes an optical image capturing device 31, a light source projection device 32, a positive light source device 33, and a backlight. The light source device 34 and a glass substrate 35 are disposed on a substrate holder 351 and locked to the bracket 301. The optical image capturing device 31 is locked by a fixing frame 312 to the 9 1289662 bracket. The ML includes a focusing device m, and the optical imaging device 31 is disposed above the detecting glass substrate 35, and is permeable to the positive light of the bracket i by the light source projection device 32 and the backlight source device 34. The direct light of the light source device 33 is surface-imaged on the back surface of the detecting glass substrate 35 to check whether there is a defect on the back surface of the glass substrate 35. The light source projecting device 32 is disposed under the detecting glass substrate 35, and is locked by the bracket 124. The bracket 301 is composed of a set of prisms and a cymbal holder 1 for controlling the direction of the light, and the 稜鏡 group includes the first 稜鏡 and the first 1 and the second 稜鏡 121 The first 稜鏡321 and the second 利用 can be used to control the direction of light travel, and the light source is irradiated onto the surface image of the back surface of the glass substrate 35 and projected onto the optical image capturing device 31. The positive light source device 33 is provided In the illuminating device, the light generated by the positive light source device 33 is irradiated on the back surface of the glass substrate 35 to detect the back surface defect of the glass substrate 35. The backlight source device 34 can be a backlight (Backlight) ^4X, using a fixing frame The 342 pin is fixed to the optical image capturing device 31 and disposed above the detecting glass substrate 35, and is provided with a light source provided by the positive light source device 33 to check the developing effect of the surface of the glass substrate 35. As shown in the sixth figure of the same, the original diagram () of the glass substrate back inspection device of the present invention mainly uses the ruthenium group to refract light and produce a dispersion effect, and the prism is A transparent element composed of two or more refraction planes, and the basic function of 稜鏡 in addition to refracting light, the other function is to make the light have a dispersion effect, due to the incident light of different wavelengths, the refractive index in the 稜鏡The deflection angles produced by different ancient texts are also different. The phenomenon of changing the deflection angle due to the wavelength is the principle of splitting light of yttrium, also known as the dispersion of yttrium. The angle of the wire, the direction of the light is changed, the light source 1886662 of the present invention includes a prism group consisting of a first welcoming and a second squaring, the prism group being at an angle of 45 degrees to the horizontal and leaning relative to each other. It is fixed on the cymbal holder m. When the light source of the positive light source is polarized to the first sacred place, the light source is refracted and the dispersion effect is generated by the basic function of 稜鏡, and the positive light source device is installed. According to the principle of splitting light, the light source of the 33 illuminating penetrates the glass substrate 35 to reach the backlight position 34; since the backlight source device 34 is a opaque member, the backlight of the device can be used to the first The wire projected to the backlight source device 34 is reflected back to the first stage, and is placed at a 45 degree angle with respect to the horizontal direction, and is opposite to the 帛-Weimmer, and is fixed on the second side of the set frame 323. Walking, just receiving the light source reflected by the back wire source device 34 to the first fin is refracted to the first 稜鏡, and the light source is 45 when the light source receives the second Weili. The person's (4) degree is greater than the critical angle'. Therefore, when the light source is reflected, its direction has been changed by 9G degrees, so that the light source can be smoothly refracted to the optical imaging device 31. - Waiting for the seventh picture on the same day, the original of the glass substrate back inspection device of the present invention is not: Figure (1) 'When the source of the positive light source device is directly directed to the first prism, the wrong one is wrong. After the primary Wei, the pro-refraction and the dispersion effect are generated, the light irradiated by the light source device 33 is refracted to reach the surface of the glass substrate, 5: face according to the separation, and since the glass substrate% has a bad point phenomenon, The light source is prevented from continuing to advance, causing the wire to fail to paste the glass plate to reach the backlight source device 34' and the bad spot phenomenon will be detected by the optical image capturing device. Same as the reference to Fig. 8, which is the operation of the back surface inspection device for the glass substrate of the present invention. In the rapid manufacturing process for producing the glass substrate 35, a set of 1128662 optical imaging device 40 can be installed on the inspection glass substrate. In the front part of the process, the optical image capturing device 40 is mounted above the glass substrate 35 to detect the surface of the front surface of the glass substrate 35. The optical image capturing device 40 can view the surface and appearance of the glass substrate 35 through the CCD camera. At the same time, a set of the glass substrate back surface inspection device 30 of the present invention is installed on the front surface of the glass substrate 35, and the optical image pickup device 31 is disposed above the detection glass substrate 35. The optical image pickup device 31 can adopt a CCD camera. When the light source provided by the positive light source device 33 is transmitted through the light source projection device 32 and the backlight source device 34, and finally smoothly refracted to the optical image capturing device 31, the image is composed of light by the camera: The main function of the CCD camera is to clearly observe the appearance and characteristics of the glass substrate 35, and to achieve the accuracy of capturing images. The optical rotating device 31 can capture an image composed of light through a CCD camera and convert it into an analog voltage signal to detect whether the back surface of the glass substrate 35 contains defects. In addition, the optical image capturing device 31 iCCD camera is further Scanning image sensing of lines and faces can be performed separately or simultaneously, which is of great help in the rapid process of producing glass substrate 35. By using the defect inspection device for detecting the back surface of the glass substrate of the present invention, the glass substrate back can be placed on the side of the glass substrate 35 to obtain the best accurate detection state. Moreover, on the side of the glass substrate lunar surface inspection device 30 of the present invention, an optical image capturing device can be installed according to actual needs, and the optical imaging device 31 and the glass substrate back surface of the present invention are provided. The purpose of detecting defects on the front and back sides of the glass substrate 35 can be achieved on the same day, and the present invention can be applied to detecting the glass substrates 35 of various sizes, which is of great help for the automation of the process for producing the glass substrate 35; Like 12 1289662, the μ is larger, and the junction is smoother. The tree is set to break through the material installation method. ^ It is placed above the glass plate 35, and _ can also be checked for the defect of the two sides of the glass substrate. In addition to making maintenance easy and easy to assemble, and thus increasing the flexibility of design, it is a great boon for improving the production efficiency of the industry and increasing the competitiveness of the industry.
13 !289662 μ【圖式簡單說明】 弟圖為習知人工檢測玻璃基板之示意圖。 第二圖為習知玻璃基板檢測設備之立體示意圖。 第三圖為習知玻璃基板檢測設備之侧視示意圖。 第四圖為習知玻璃基板檢測設備之作動示意圖。 弟五圖為本發明玻璃基板背面檢查裝置之側視示意圖。 =六圖為本發·璃基《面檢錢置之原理示意圖 弟七圖為本發明玻璃基板背面檢查裝置之 一立 第八圖為本發明玻璃基板背面檢查裝置'、理不意圖(二) ^ 之作動示意圖。 【主要元件符號說明】 10玻¥基板檢測設備 11玻璃基板 12鹵素燈 13檢測員 20玻璃基板檢測設備 21第一光學取像裝置 22第二光學取像裝置 23調焦裝置 24基板架 25玻璃基板 30玻璃基板背面檢查裝置 14 1289662 31光學取像裝置 m調焦裝置 312固定架 32光源投射裝置 m第一棱鏡 及2第二稜鏡 稜鏡固定架 公4支架 33正光光源裝置 m支架 34背光光源裝置 MI背光板 342固定架 35玻璃基板 351基板架 352壞點 40光學取像裝置13 !289662 μ [Simple description of the drawing] The drawing is a schematic diagram of a conventional manual detection of a glass substrate. The second figure is a schematic perspective view of a conventional glass substrate detecting device. The third figure is a side view of a conventional glass substrate testing apparatus. The fourth figure is a schematic diagram of the operation of the conventional glass substrate detecting device. The fifth figure is a side view of the glass substrate back surface inspection device of the present invention. = 六图本发·璃基"The principle of the face inspection money set. The seventh figure is one of the back inspection devices for the glass substrate of the present invention. The eighth picture is the back inspection device for the glass substrate of the present invention, which is not intended (2) ^ Schematic diagram of the action. [Main component symbol description] 10 glass substrate inspection device 11 glass substrate 12 halogen lamp 13 inspector 20 glass substrate detecting device 21 first optical image capturing device 22 second optical image capturing device 23 focusing device 24 substrate frame 25 glass substrate 30 glass substrate back inspection device 14 1289662 31 optical image capture device m focusing device 312 mount 32 light source projection device m first prism and 2 second cymbal mount 4 bracket 33 positive light source device m bracket 34 backlight source Device MI backlight board 342 fixing frame 35 glass substrate 351 substrate holder 352 bad point 40 optical image capturing device