KR102026610B1 - 회로기판을 검사하는 병렬 테스터를 위한 위치설정장치 및 회로기판을 검사하는 병렬 테스터 - Google Patents
회로기판을 검사하는 병렬 테스터를 위한 위치설정장치 및 회로기판을 검사하는 병렬 테스터 Download PDFInfo
- Publication number
- KR102026610B1 KR102026610B1 KR1020187005630A KR20187005630A KR102026610B1 KR 102026610 B1 KR102026610 B1 KR 102026610B1 KR 1020187005630 A KR1020187005630 A KR 1020187005630A KR 20187005630 A KR20187005630 A KR 20187005630A KR 102026610 B1 KR102026610 B1 KR 102026610B1
- Authority
- KR
- South Korea
- Prior art keywords
- circuit board
- adapter
- inspection
- test
- parallel tester
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
- G01R31/2815—Functional tests, e.g. boundary scans, using the normal I/O contacts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
- G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Tests Of Electronic Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015113046.7 | 2015-08-07 | ||
| DE102015113046.7A DE102015113046A1 (de) | 2015-08-07 | 2015-08-07 | Positioniereinrichtung für einen Paralleltester zum Testen von Leiterplatten und Paralleltester zum Testen von Leiterplatten |
| PCT/EP2016/063989 WO2017025230A1 (de) | 2015-08-07 | 2016-06-17 | Positioniereinrichtung für einen paralleltester zum testen von leiterplatten und paralleltester zum testen von leiterplatten |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20180034582A KR20180034582A (ko) | 2018-04-04 |
| KR102026610B1 true KR102026610B1 (ko) | 2019-09-30 |
Family
ID=56194469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020187005630A Active KR102026610B1 (ko) | 2015-08-07 | 2016-06-17 | 회로기판을 검사하는 병렬 테스터를 위한 위치설정장치 및 회로기판을 검사하는 병렬 테스터 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20180217200A1 (https=) |
| EP (1) | EP3332261A1 (https=) |
| JP (1) | JP2018523825A (https=) |
| KR (1) | KR102026610B1 (https=) |
| CN (1) | CN107923938B (https=) |
| DE (1) | DE102015113046A1 (https=) |
| HK (1) | HK1248820A1 (https=) |
| TW (2) | TWI674414B (https=) |
| WO (1) | WO2017025230A1 (https=) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017102700A1 (de) * | 2017-02-10 | 2018-09-13 | Atg Luther & Maelzer Gmbh | Prüfvorrichtung und Verfahren zum Prüfen von Leiterplatten |
| CN107656517B (zh) * | 2017-09-15 | 2024-05-17 | 郑州众智科技股份有限公司 | 控制器自动化检测装置 |
| JP7160051B6 (ja) * | 2017-12-28 | 2022-11-11 | 日本電産リード株式会社 | 検査装置及び検査方法 |
| TWI662873B (zh) * | 2018-08-09 | 2019-06-11 | 揚博科技股份有限公司 | 噴射驅動型電路板旋轉載具 |
| TWI676031B (zh) * | 2018-09-06 | 2019-11-01 | 致茂電子股份有限公司 | 滑移式電子元件測試裝置 |
| CN109188178B (zh) * | 2018-10-18 | 2024-11-22 | 昆山佰奥智能装备股份有限公司 | 极性检测机构 |
| TWI827809B (zh) * | 2019-04-04 | 2024-01-01 | 丹麥商卡普雷斯股份有限公司 | 測量測試樣本之電性的方法,以及多層測試樣本 |
| CN110082625B (zh) * | 2019-05-24 | 2024-07-12 | 深圳市鸿圆机械电器设备有限公司 | 探针自动检测设备及其检测方法 |
| TWI692644B (zh) * | 2019-06-18 | 2020-05-01 | 旺矽科技股份有限公司 | 電子元件針測裝置 |
| KR102270760B1 (ko) * | 2019-11-29 | 2021-06-30 | 에이엠티 주식회사 | 미세 피치를 갖는 디바이스의 테스트장치 |
| CN111103308A (zh) * | 2019-12-24 | 2020-05-05 | 瞿勇 | 一种电路板焊点检测仪摄像用定位装置 |
| US11221360B1 (en) | 2020-06-12 | 2022-01-11 | Lat Enterprises, Inc. | Multiple circuit board tester |
| DE102020117586B4 (de) * | 2020-07-03 | 2022-03-24 | Deutronic Elektronik Gmbh | Vorrichtung zum Prüfen von Bauteilen elektrischer Maschinen, insbesondere Statoren und Rotoren |
| CN112578265B (zh) * | 2020-11-25 | 2022-03-15 | 苏州市高威电子有限公司 | 一种中继测试治具 |
| KR102900039B1 (ko) * | 2020-12-22 | 2025-12-16 | (주)테크윙 | 전자부품 전달장치 및 전자부품 처리용 핸들러 |
| TWI759159B (zh) * | 2021-03-26 | 2022-03-21 | 經登企業股份有限公司 | 磁性感測器及限位裝置 |
| CN113466659B (zh) * | 2021-06-28 | 2022-05-31 | 昆山兢美电子科技有限公司 | 一种印刷电路板检测用飞针测试装置 |
| CN113532316B (zh) * | 2021-07-05 | 2023-01-20 | 深圳市先地图像科技有限公司 | 一种能同时检测多块pcb板形位偏差的装置及检测方法 |
| CN113655364B (zh) * | 2021-07-06 | 2024-03-19 | 合肥宇隆光电科技有限公司 | 一种接触型pcba开路短路测试装置及其测试方法 |
| CN113866587B (zh) * | 2021-08-20 | 2024-05-24 | 苏州国科测试科技有限公司 | 一种飞针测试设备 |
| TWI811770B (zh) * | 2021-08-23 | 2023-08-11 | 鴻勁精密股份有限公司 | 輸送機構、測試裝置、檢知方法及其應用之作業機 |
| CN115166570B (zh) * | 2022-06-23 | 2025-05-06 | 深圳创华智能科技有限公司 | 自动测试装置 |
| CN115078974A (zh) * | 2022-07-23 | 2022-09-20 | 隋大明 | 一种线路板测试平台 |
| KR102770186B1 (ko) * | 2022-07-25 | 2025-02-20 | 한국서부발전 주식회사 | 전동식 엑추에이터 고장 진단 테스트 장치 |
| CN115826630B (zh) * | 2023-02-20 | 2023-05-12 | 中国机械总院集团江苏分院有限公司 | 物料盒队列位置交换的控制方法和装置 |
| US12584950B2 (en) * | 2023-12-07 | 2026-03-24 | Rohde & Schwarz Gmbh & Co. Kg | Positioning apparatus for positioning a device under test |
| KR102801402B1 (ko) * | 2024-01-09 | 2025-04-29 | 경남대학교 산학협력단 | 패널접착 및 기판검사용 프레싱 장치 |
| CN118859024B (zh) * | 2024-08-05 | 2025-01-14 | 江苏神州半导体科技有限公司 | 一种射频电源测试装置 |
| CN118818267B (zh) * | 2024-09-12 | 2024-11-19 | 四川弘智远大科技有限公司 | 一种基于机械定位的电路板的测试装置 |
| CN119199192B (zh) * | 2024-09-14 | 2025-11-04 | 四川泛华航空仪表电器有限公司 | 一种用于机载设备的便携式自动测试适配器及系统 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000055971A (ja) * | 1998-06-02 | 2000-02-25 | Nippon Densan Riido Kk | 基板検査装置及び基板検査装置における基板と検査ヘッドとの相対位置調整方法 |
| US20060164071A1 (en) * | 2002-09-20 | 2006-07-27 | Werner Huber | Slidable mounting plate |
Family Cites Families (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4463310A (en) * | 1980-07-11 | 1984-07-31 | Rca Corporation | Apparatus for detecting the presence of components on a printed circuit board |
| JPS59120969A (ja) * | 1982-12-28 | 1984-07-12 | Fujitsu Ltd | 部品テスト用フイクスチユア装置 |
| JPS63124969A (ja) | 1986-11-14 | 1988-05-28 | Kyoei Sangyo Kk | プリント配線板検査機用オフグリツドアダプタ |
| GB8700754D0 (en) * | 1987-01-14 | 1987-02-18 | Int Computers Ltd | Test apparatus for printed circuit boards |
| JPS63299243A (ja) * | 1987-05-29 | 1988-12-06 | Tokyo Electron Ltd | プロ−ブカ−ドアダプタ |
| JPH0740578B2 (ja) * | 1987-05-30 | 1995-05-01 | 東京エレクトロン株式会社 | ウエハプロ−バ |
| JP2724231B2 (ja) * | 1990-02-16 | 1998-03-09 | 株式会社日立製作所 | プリント基板用自動調整検査装置及び直交型ロボット並びにcim |
| US5408189A (en) | 1990-05-25 | 1995-04-18 | Everett Charles Technologies, Inc. | Test fixture alignment system for printed circuit boards |
| JPH0438480A (ja) | 1990-06-03 | 1992-02-07 | Kyoei Sangyo Kk | プリント配線板検査機用アダプタ上下タイプ |
| JPH05196681A (ja) * | 1991-06-26 | 1993-08-06 | Digital Equip Corp <Dec> | 連続移動する電気回路の相互接続試験方法及び装置 |
| JPH0687074B2 (ja) * | 1992-09-30 | 1994-11-02 | 日東精工株式会社 | 両面基板検査装置 |
| DE9416526U1 (de) | 1994-05-20 | 1995-06-08 | Luther & Maelzer Gmbh, 31515 Wunstorf | Vorrichtung zum Prüfen von elektrischen Leiterplatten unter Verwendung eines Prüfadapters mit Prüfstiften |
| DE4438316A1 (de) * | 1994-05-20 | 1995-11-23 | Luther & Maelzer Gmbh | System und Verfahren zum Prüfen der korrekten Position einer Kontaktinseln und Leiterbahnen aufweisenden Leiterplatte in einer Prüfvorrichtung |
| DE29616272U1 (de) | 1996-09-18 | 1998-01-29 | atg test systems GmbH, 97877 Wertheim | Adapter zum Prüfen von elektrischen Leiterplatten |
| TW360790B (en) | 1996-10-28 | 1999-06-11 | Atg Test Systems Gmbh | Printed circuit board test apparatus and method |
| IT1290345B1 (it) * | 1997-02-18 | 1998-10-22 | Circuit Line Spa | Metodo e dispositivo per la correzione dell'errore di allineamento fra aghi di test e punti di test nella fase di test elettrico di |
| JP3090630B2 (ja) * | 1997-05-30 | 2000-09-25 | ユーエイチティー株式会社 | Bga、csp等におけるicチップ実装基板の導通検査システム |
| JPH1116964A (ja) * | 1997-06-27 | 1999-01-22 | Micronics Japan Co Ltd | プローバ |
| US6356093B2 (en) * | 1998-06-02 | 2002-03-12 | Nidec-Read Corporation | Printed circuit board testing apparatus |
| DE19949504C1 (de) * | 1999-10-14 | 2001-06-28 | Dornier Gmbh | Linearführung |
| DE20005123U1 (de) * | 2000-03-20 | 2001-08-02 | atg test systems GmbH & Co. KG Reicholzheim, 97877 Wertheim | Vorrichtung zum Prüfen von Leiterplatten |
| DE10043728C2 (de) * | 2000-09-05 | 2003-12-04 | Atg Test Systems Gmbh | Verfahren zum Prüfen von Leiterplatten und Verwendung einer Vorrichtung zum Ausführen des Verfahrens |
| JP2003090862A (ja) * | 2001-09-17 | 2003-03-28 | Murata Mfg Co Ltd | ヘッド位置決め装置 |
| CN2533473Y (zh) * | 2002-02-06 | 2003-01-29 | 台康资讯股份有限公司 | 电路板pci介面自动测试机 |
| US7009381B2 (en) * | 2002-03-21 | 2006-03-07 | Agilent Technologies, Inc. | Adapter method and apparatus for interfacing a tester with a device under test |
| CA2476389A1 (en) * | 2002-03-22 | 2003-10-09 | Electro Scientific Industries, Inc. | Test probe alignment apparatus |
| DE10220343B4 (de) * | 2002-05-07 | 2007-04-05 | Atg Test Systems Gmbh & Co. Kg Reicholzheim | Vorrichtung und Verfahren zum Prüfen von Leiterplatten und Prüfsonde |
| CN2548164Y (zh) * | 2002-05-21 | 2003-04-30 | 华为技术有限公司 | 印刷电路板通用加载夹具 |
| JP2004061264A (ja) * | 2002-07-29 | 2004-02-26 | Fuji Photo Film Co Ltd | インサーキットテスタ及びプリント基板テスト方法 |
| DE10260238B4 (de) * | 2002-12-20 | 2007-04-05 | Atg Test Systems Gmbh & Co.Kg | Adapter zum Testen einer oder mehrerer Leiteranordnungen und Verfahren |
| US6864698B2 (en) * | 2003-03-24 | 2005-03-08 | Teradyne, Inc. | Hybrid cooling system for automatic test equipment |
| CN100394190C (zh) * | 2003-12-03 | 2008-06-11 | 联能科技(深圳)有限公司 | 可变密度印刷电路板测试装置 |
| US7019549B2 (en) * | 2004-04-23 | 2006-03-28 | Intersection Technologies Corporation | Apparatus and method for electrical contact testing of substrates |
| CN1715942A (zh) * | 2004-06-30 | 2006-01-04 | 华泰电子股份有限公司 | 电子产品的测试装置及方法 |
| CN2757135Y (zh) * | 2004-12-07 | 2006-02-08 | 环隆电气股份有限公司 | 电路板的测试治具 |
| CN101000362A (zh) * | 2006-01-10 | 2007-07-18 | 英业达股份有限公司 | 电路板测试台 |
| WO2008042248A2 (en) * | 2006-09-29 | 2008-04-10 | Teradyne, Inc. | Method and apparatus for cooling non-native instrument in automatic test equipment |
| EP2114634A4 (en) * | 2007-02-23 | 2010-11-17 | Intest Corp | TESTING HEAD MANIPULATOR |
| TW201008787A (en) * | 2008-08-19 | 2010-03-01 | Silverbrook Res Pty Ltd | Diagnostic probe assembly for printhead integrated circuitry |
| CN201419914Y (zh) * | 2009-04-02 | 2010-03-10 | 鸿富锦精密工业(深圳)有限公司 | 电路板供给装置及应用其之电路板测试系统 |
| DE102009016181A1 (de) * | 2009-04-03 | 2010-10-14 | Atg Luther & Maelzer Gmbh | Kontaktierungseinheit für eine Testvorrichtung zum Testen von Leiterplatten |
| TWI402932B (zh) * | 2009-05-27 | 2013-07-21 | Star Techn Inc | 具有多軸載台之半導體元件測試裝置 |
| EP2341353A1 (en) * | 2010-01-05 | 2011-07-06 | Research In Motion Limited | Self-aligning test fixture for printed circuit board |
| CN201852912U (zh) * | 2010-09-03 | 2011-06-01 | 界鸿科技股份有限公司 | 电子元件测试机构 |
| DE102013102564A1 (de) * | 2013-03-13 | 2014-09-18 | Dtg International Gmbh | Traverseneinheit für eine Prüfvorrichtung für Leiterplatten, sowie Prüfvorrichtung damit |
| JP6338085B2 (ja) * | 2014-03-20 | 2018-06-06 | 日本電産リード株式会社 | 可撓性基板検査装置 |
-
2015
- 2015-08-07 DE DE102015113046.7A patent/DE102015113046A1/de not_active Withdrawn
-
2016
- 2016-06-17 HK HK18108182.1A patent/HK1248820A1/zh unknown
- 2016-06-17 CN CN201680045624.2A patent/CN107923938B/zh active Active
- 2016-06-17 EP EP16731566.2A patent/EP3332261A1/de not_active Withdrawn
- 2016-06-17 KR KR1020187005630A patent/KR102026610B1/ko active Active
- 2016-06-17 JP JP2018506102A patent/JP2018523825A/ja active Pending
- 2016-06-17 US US15/747,016 patent/US20180217200A1/en not_active Abandoned
- 2016-06-17 WO PCT/EP2016/063989 patent/WO2017025230A1/de not_active Ceased
- 2016-07-29 TW TW107121865A patent/TWI674414B/zh active
- 2016-07-29 TW TW105124019A patent/TWI631345B/zh active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000055971A (ja) * | 1998-06-02 | 2000-02-25 | Nippon Densan Riido Kk | 基板検査装置及び基板検査装置における基板と検査ヘッドとの相対位置調整方法 |
| US20060164071A1 (en) * | 2002-09-20 | 2006-07-27 | Werner Huber | Slidable mounting plate |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201835579A (zh) | 2018-10-01 |
| DE102015113046A1 (de) | 2017-02-09 |
| KR20180034582A (ko) | 2018-04-04 |
| HK1248820A1 (zh) | 2018-10-19 |
| WO2017025230A1 (de) | 2017-02-16 |
| EP3332261A1 (de) | 2018-06-13 |
| US20180217200A1 (en) | 2018-08-02 |
| JP2018523825A (ja) | 2018-08-23 |
| CN107923938A (zh) | 2018-04-17 |
| CN107923938B (zh) | 2021-04-30 |
| TWI674414B (zh) | 2019-10-11 |
| TW201712346A (zh) | 2017-04-01 |
| TWI631345B (zh) | 2018-08-01 |
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