KR101970016B1 - 작업편을 가공함으로써 생성된 재료를 수집하는 방법 및 장치 - Google Patents
작업편을 가공함으로써 생성된 재료를 수집하는 방법 및 장치 Download PDFInfo
- Publication number
- KR101970016B1 KR101970016B1 KR1020120108674A KR20120108674A KR101970016B1 KR 101970016 B1 KR101970016 B1 KR 101970016B1 KR 1020120108674 A KR1020120108674 A KR 1020120108674A KR 20120108674 A KR20120108674 A KR 20120108674A KR 101970016 B1 KR101970016 B1 KR 101970016B1
- Authority
- KR
- South Korea
- Prior art keywords
- fluid flow
- workpiece
- fluid
- nozzle
- machining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 title claims abstract description 93
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000012545 processing Methods 0.000 title description 15
- 239000012530 fluid Substances 0.000 claims abstract description 156
- 230000006698 induction Effects 0.000 claims abstract description 15
- 238000003754 machining Methods 0.000 claims description 46
- 230000001133 acceleration Effects 0.000 claims description 11
- 238000004891 communication Methods 0.000 claims description 8
- 230000001939 inductive effect Effects 0.000 claims description 7
- 239000007858 starting material Substances 0.000 claims description 5
- 230000003068 static effect Effects 0.000 claims description 5
- 238000012546 transfer Methods 0.000 claims description 2
- 238000005270 abrasive blasting Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 239000006227 byproduct Substances 0.000 description 27
- 239000012080 ambient air Substances 0.000 description 8
- 230000036961 partial effect Effects 0.000 description 7
- 239000003570 air Substances 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- -1 steam Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 230000003467 diminishing effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/02—Devices for removing scrap from the cutting teeth of circular or non-circular cutters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
- A47L9/00—Details or accessories of suction cleaners, e.g. mechanical means for controlling the suction or for effecting pulsating action; Storing devices specially adapted to suction cleaners or parts thereof; Carrying-vehicles specially adapted for suction cleaners
- A47L9/28—Installation of the electric equipment, e.g. adaptation or attachment to the suction cleaner; Controlling suction cleaners by electric means
- A47L9/2836—Installation of the electric equipment, e.g. adaptation or attachment to the suction cleaner; Controlling suction cleaners by electric means characterised by the parts which are controlled
- A47L9/2842—Suction motors or blowers
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
- A47L9/00—Details or accessories of suction cleaners, e.g. mechanical means for controlling the suction or for effecting pulsating action; Storing devices specially adapted to suction cleaners or parts thereof; Carrying-vehicles specially adapted for suction cleaners
- A47L9/28—Installation of the electric equipment, e.g. adaptation or attachment to the suction cleaner; Controlling suction cleaners by electric means
- A47L9/2857—User input or output elements for control, e.g. buttons, switches or displays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B47/00—Constructional features of components specially designed for boring or drilling machines; Accessories therefor
- B23B47/34—Arrangements for removing chips out of the holes made; Chip- breaking arrangements attached to the tool
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1462—Nozzles; Features related to nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0042—Devices for removing chips
- B23Q11/006—Devices for removing chips by sucking and blowing simultaneously
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B27—WORKING OR PRESERVING WOOD OR SIMILAR MATERIAL; NAILING OR STAPLING MACHINES IN GENERAL
- B27G—ACCESSORY MACHINES OR APPARATUS FOR WORKING WOOD OR SIMILAR MATERIALS; TOOLS FOR WORKING WOOD OR SIMILAR MATERIALS; SAFETY DEVICES FOR WOOD WORKING MACHINES OR TOOLS
- B27G3/00—Arrangements for removing bark-zones, chips, waste, or dust, specially designed for use in connection with wood-working machine or in wood-working plants
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Forests & Forestry (AREA)
- Laser Beam Processing (AREA)
- Cleaning In General (AREA)
- Auxiliary Devices For Machine Tools (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/558,571 | 2012-07-26 | ||
| US13/558,571 US9259802B2 (en) | 2012-07-26 | 2012-07-26 | Method and apparatus for collecting material produced by processing workpieces |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20140013874A KR20140013874A (ko) | 2014-02-05 |
| KR101970016B1 true KR101970016B1 (ko) | 2019-04-17 |
Family
ID=49993448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020120108674A Active KR101970016B1 (ko) | 2012-07-26 | 2012-09-28 | 작업편을 가공함으로써 생성된 재료를 수집하는 방법 및 장치 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9259802B2 (enExample) |
| JP (1) | JP5964693B2 (enExample) |
| KR (1) | KR101970016B1 (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6171545B2 (ja) * | 2013-05-09 | 2017-08-02 | 大日本印刷株式会社 | レーザ加工煙清浄装置、レーザ加工装置 |
| JP2015217424A (ja) * | 2014-05-19 | 2015-12-07 | 日本車輌製造株式会社 | 複合溶接装置 |
| JP7071118B2 (ja) * | 2014-08-19 | 2022-05-18 | ルミレッズ ホールディング ベーフェー | ダイレベルのレーザリフトオフ中の機械的損傷を減少させるサファイアコレクタ |
| EP3295479B1 (en) * | 2015-05-13 | 2018-09-26 | Lumileds Holding B.V. | Sapphire collector for reducing mechanical damage during die level laser lift-off |
| KR102362753B1 (ko) * | 2015-07-24 | 2022-02-11 | 주식회사 포스코 | 집진 장치 및 이를 구비한 방향성 전기강판의 자구미세화 설비 |
| US9776218B2 (en) * | 2015-08-06 | 2017-10-03 | Asml Netherlands B.V. | Controlled fluid flow for cleaning an optical element |
| JP6516624B2 (ja) * | 2015-08-11 | 2019-05-22 | 株式会社ディスコ | レーザ加工装置 |
| KR101717543B1 (ko) * | 2015-08-24 | 2017-03-21 | 주식회사 에스엔씨테크 | 안전 장치를 구비한 cnc 장치 |
| KR102698971B1 (ko) | 2015-08-26 | 2024-08-27 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | 기체 흐름에 대한 레이저 스캔 시퀀싱 및 방향 |
| CN105057282A (zh) * | 2015-08-30 | 2015-11-18 | 明光万佳联众电子有限公司 | 一种倒吹气机 |
| CN116213918A (zh) | 2015-09-09 | 2023-06-06 | 伊雷克托科学工业股份有限公司 | 镭射处理设备、镭射处理工件的方法及相关配置 |
| JP6205022B1 (ja) * | 2016-06-28 | 2017-09-27 | 株式会社アマダホールディングス | レーザ加工ヘッド |
| KR102401037B1 (ko) | 2016-12-30 | 2022-05-24 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | 레이저 가공 장치에서 광학계의 수명을 연장하는 방법 및 시스템 |
| JP6450783B2 (ja) * | 2017-01-19 | 2019-01-09 | ファナック株式会社 | レーザ加工ヘッド用ノズル |
| KR102092712B1 (ko) * | 2017-02-24 | 2020-03-24 | 에이피시스템 주식회사 | 레이저 처리 장치 및 방법 |
| JP6508549B2 (ja) * | 2017-05-12 | 2019-05-08 | パナソニックIpマネジメント株式会社 | レーザ加工装置 |
| KR102379215B1 (ko) * | 2017-10-31 | 2022-03-28 | 삼성디스플레이 주식회사 | 레이저 장치 |
| CN107695539A (zh) * | 2017-11-16 | 2018-02-16 | 深圳市国人光速科技有限公司 | 一种双振镜fpc紫外激光切割设备 |
| EP3774166A4 (en) | 2018-06-05 | 2022-01-19 | Electro Scientific Industries, Inc. | LASER PROCESSING DEVICE, METHOD OF OPERATION THEREOF AND METHOD OF PROCESSING WORKPIECES USING SAME |
| KR102677888B1 (ko) * | 2019-01-28 | 2024-06-26 | 삼성디스플레이 주식회사 | 석션 장치 및 그것을 포함하는 패널 가공 장치 |
| WO2021237095A1 (en) * | 2020-05-22 | 2021-11-25 | Bold Laser Automation, Inc. | High velocity vacuum system for laser ablation |
| JP7479761B2 (ja) * | 2020-07-22 | 2024-05-09 | 株式会社ディスコ | レーザー加工装置 |
| CN116323072A (zh) * | 2020-11-13 | 2023-06-23 | 伊雷克托科学工业股份有限公司 | 具有碎屑清除系统和整合的射束收集器的激光加工设备及其操作方法 |
| KR102617770B1 (ko) * | 2021-06-02 | 2023-12-28 | 주식회사 제이엠씨 | 홀 형성 시스템 및 홀 형성 방법 |
| JP3236603U (ja) | 2021-12-29 | 2022-03-02 | 日本発條株式会社 | マスキング治具 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070039493A (ko) | 2004-06-11 | 2007-04-12 | 엑사이텍 리미티드 | 애블레이션을 위한 방법 및 장치 |
| JP3143457U (ja) | 2008-05-12 | 2008-07-24 | 日立造船株式会社 | レーザ加工機用集塵装置 |
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| DE3005860A1 (de) | 1980-02-16 | 1981-09-03 | Robert Bosch Gmbh, 7000 Stuttgart | Handwerkzeugmaschine, insbesondere blechnager |
| US4315133A (en) | 1980-05-12 | 1982-02-09 | Gte Automatic Electric Laboratories, Inc. | Apparatus protecting a lens from airborne particulates |
| US4837443A (en) * | 1987-10-15 | 1989-06-06 | The Perkin-Elmer Corporation | Guard ring for a differentially pumped seal apparatus |
| FR2627409A1 (fr) * | 1988-02-24 | 1989-08-25 | Lectra Systemes Sa | Appareil de coupe laser muni d'un dispositif d'evacuation des fumees |
| US4897520A (en) | 1988-10-31 | 1990-01-30 | American Telephone And Telegraph Company, At&T Technologies, Inc. | Laser debris vacuum scoop |
| US5780806A (en) | 1995-07-25 | 1998-07-14 | Lockheed Idaho Technologies Company | Laser ablation system, and method of decontaminating surfaces |
| JPH09141482A (ja) * | 1995-11-22 | 1997-06-03 | Mazda Motor Corp | レーザ加工装置 |
| US5925024A (en) | 1996-02-16 | 1999-07-20 | Joffe; Michael A | Suction device with jet boost |
| JPH1099978A (ja) | 1996-09-27 | 1998-04-21 | Hitachi Ltd | レーザー加工装置 |
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| US5906760A (en) | 1997-11-04 | 1999-05-25 | Robb; David K. | Exhaust system for a laser cutting device |
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| JP2000317670A (ja) * | 1999-05-10 | 2000-11-21 | Matsushita Electric Ind Co Ltd | 集塵装置、集塵方法、レーザ加工装置、およびレーザ加工方法 |
| JP2001321979A (ja) | 2000-05-12 | 2001-11-20 | Matsushita Electric Ind Co Ltd | レーザー穴加工機の加工粉集塵装置 |
| US6494965B1 (en) | 2000-05-30 | 2002-12-17 | Creo Products Inc. | Method and apparatus for removal of laser ablation byproducts |
| US20020130115A1 (en) | 2001-03-13 | 2002-09-19 | Lawson William E. | Debris removal apparatus for use in laser ablation |
| FR2830478B1 (fr) | 2001-10-05 | 2003-12-05 | Commissariat Energie Atomique | Dispositif de decoupe laser |
| DE10305258A1 (de) * | 2002-02-08 | 2003-08-21 | Creo Inc | Verfahren und Vorrichtung zum Schutz von optischen Elementen |
| US6683277B1 (en) | 2002-12-20 | 2004-01-27 | Osram Opto Semiconductors | Laser ablation nozzle assembly |
| JP2004223542A (ja) | 2003-01-21 | 2004-08-12 | Disco Abrasive Syst Ltd | レーザー加工方法およびレーザー加工装置 |
| US7230636B2 (en) | 2003-03-10 | 2007-06-12 | Dainippon Screen Mfg. Co., Ltd. | Image recording apparatus with jet and suction |
| US20050061378A1 (en) | 2003-08-01 | 2005-03-24 | Foret Todd L. | Multi-stage eductor apparatus |
| DE10355996A1 (de) | 2003-11-27 | 2005-06-30 | Stork Prints Austria Gmbh | Verfahren zur Herstellung von Flexodruckplatten mittels Lasergravur sowie dazu ge-eignete Vorrichtung |
| US20080067160A1 (en) | 2006-09-14 | 2008-03-20 | Jouni Suutarinen | Systems and methods for laser cutting of materials |
| US20080213978A1 (en) | 2007-03-03 | 2008-09-04 | Dynatex | Debris management for wafer singulation |
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-
2012
- 2012-07-26 US US13/558,571 patent/US9259802B2/en active Active
- 2012-08-14 JP JP2012179666A patent/JP5964693B2/ja active Active
- 2012-09-28 KR KR1020120108674A patent/KR101970016B1/ko active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070039493A (ko) | 2004-06-11 | 2007-04-12 | 엑사이텍 리미티드 | 애블레이션을 위한 방법 및 장치 |
| JP3143457U (ja) | 2008-05-12 | 2008-07-24 | 日立造船株式会社 | レーザ加工機用集塵装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014024117A (ja) | 2014-02-06 |
| KR20140013874A (ko) | 2014-02-05 |
| JP5964693B2 (ja) | 2016-08-03 |
| US9259802B2 (en) | 2016-02-16 |
| US20140026351A1 (en) | 2014-01-30 |
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