JP5964693B2 - 物質捕集方法及び物質捕集装置 - Google Patents

物質捕集方法及び物質捕集装置 Download PDF

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Publication number
JP5964693B2
JP5964693B2 JP2012179666A JP2012179666A JP5964693B2 JP 5964693 B2 JP5964693 B2 JP 5964693B2 JP 2012179666 A JP2012179666 A JP 2012179666A JP 2012179666 A JP2012179666 A JP 2012179666A JP 5964693 B2 JP5964693 B2 JP 5964693B2
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Prior art keywords
workpiece
fluid flow
fluid
nozzle
substance
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JP2012179666A
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Japanese (ja)
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JP2014024117A (ja
JP2014024117A5 (enExample
Inventor
ウィリー ジェレミー
ウィリー ジェレミー
スパラ スティーブン
スパラ スティーブン
Original Assignee
エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/02—Devices for removing scrap from the cutting teeth of circular or non-circular cutters
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L9/00—Details or accessories of suction cleaners, e.g. mechanical means for controlling the suction or for effecting pulsating action; Storing devices specially adapted to suction cleaners or parts thereof; Carrying-vehicles specially adapted for suction cleaners
    • A47L9/28—Installation of the electric equipment, e.g. adaptation or attachment to the suction cleaner; Controlling suction cleaners by electric means
    • A47L9/2836—Installation of the electric equipment, e.g. adaptation or attachment to the suction cleaner; Controlling suction cleaners by electric means characterised by the parts which are controlled
    • A47L9/2842—Suction motors or blowers
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L9/00—Details or accessories of suction cleaners, e.g. mechanical means for controlling the suction or for effecting pulsating action; Storing devices specially adapted to suction cleaners or parts thereof; Carrying-vehicles specially adapted for suction cleaners
    • A47L9/28—Installation of the electric equipment, e.g. adaptation or attachment to the suction cleaner; Controlling suction cleaners by electric means
    • A47L9/2857—User input or output elements for control, e.g. buttons, switches or displays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B47/00—Constructional features of components specially designed for boring or drilling machines; Accessories therefor
    • B23B47/34—Arrangements for removing chips out of the holes made; Chip- breaking arrangements attached to the tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0042—Devices for removing chips
    • B23Q11/006—Devices for removing chips by sucking and blowing simultaneously
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B27—WORKING OR PRESERVING WOOD OR SIMILAR MATERIAL; NAILING OR STAPLING MACHINES IN GENERAL
    • B27G—ACCESSORY MACHINES OR APPARATUS FOR WORKING WOOD OR SIMILAR MATERIALS; TOOLS FOR WORKING WOOD OR SIMILAR MATERIALS; SAFETY DEVICES FOR WOOD WORKING MACHINES OR TOOLS
    • B27G3/00—Arrangements for removing bark-zones, chips, waste, or dust, specially designed for use in connection with wood-working machine or in wood-working plants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Forests & Forestry (AREA)
  • Laser Beam Processing (AREA)
  • Cleaning In General (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
JP2012179666A 2012-07-26 2012-08-14 物質捕集方法及び物質捕集装置 Active JP5964693B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/558,571 2012-07-26
US13/558,571 US9259802B2 (en) 2012-07-26 2012-07-26 Method and apparatus for collecting material produced by processing workpieces

Publications (3)

Publication Number Publication Date
JP2014024117A JP2014024117A (ja) 2014-02-06
JP2014024117A5 JP2014024117A5 (enExample) 2015-10-01
JP5964693B2 true JP5964693B2 (ja) 2016-08-03

Family

ID=49993448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012179666A Active JP5964693B2 (ja) 2012-07-26 2012-08-14 物質捕集方法及び物質捕集装置

Country Status (3)

Country Link
US (1) US9259802B2 (enExample)
JP (1) JP5964693B2 (enExample)
KR (1) KR101970016B1 (enExample)

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JP2015217424A (ja) * 2014-05-19 2015-12-07 日本車輌製造株式会社 複合溶接装置
JP7071118B2 (ja) * 2014-08-19 2022-05-18 ルミレッズ ホールディング ベーフェー ダイレベルのレーザリフトオフ中の機械的損傷を減少させるサファイアコレクタ
EP3295479B1 (en) * 2015-05-13 2018-09-26 Lumileds Holding B.V. Sapphire collector for reducing mechanical damage during die level laser lift-off
KR102362753B1 (ko) * 2015-07-24 2022-02-11 주식회사 포스코 집진 장치 및 이를 구비한 방향성 전기강판의 자구미세화 설비
US9776218B2 (en) * 2015-08-06 2017-10-03 Asml Netherlands B.V. Controlled fluid flow for cleaning an optical element
JP6516624B2 (ja) * 2015-08-11 2019-05-22 株式会社ディスコ レーザ加工装置
KR101717543B1 (ko) * 2015-08-24 2017-03-21 주식회사 에스엔씨테크 안전 장치를 구비한 cnc 장치
KR102698971B1 (ko) 2015-08-26 2024-08-27 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 기체 흐름에 대한 레이저 스캔 시퀀싱 및 방향
CN105057282A (zh) * 2015-08-30 2015-11-18 明光万佳联众电子有限公司 一种倒吹气机
CN116213918A (zh) 2015-09-09 2023-06-06 伊雷克托科学工业股份有限公司 镭射处理设备、镭射处理工件的方法及相关配置
JP6205022B1 (ja) * 2016-06-28 2017-09-27 株式会社アマダホールディングス レーザ加工ヘッド
KR102401037B1 (ko) 2016-12-30 2022-05-24 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 레이저 가공 장치에서 광학계의 수명을 연장하는 방법 및 시스템
JP6450783B2 (ja) * 2017-01-19 2019-01-09 ファナック株式会社 レーザ加工ヘッド用ノズル
KR102092712B1 (ko) * 2017-02-24 2020-03-24 에이피시스템 주식회사 레이저 처리 장치 및 방법
JP6508549B2 (ja) * 2017-05-12 2019-05-08 パナソニックＩｐマネジメント株式会社 レーザ加工装置
KR102379215B1 (ko) * 2017-10-31 2022-03-28 삼성디스플레이 주식회사 레이저 장치
CN107695539A (zh) * 2017-11-16 2018-02-16 深圳市国人光速科技有限公司 一种双振镜fpc紫外激光切割设备
EP3774166A4 (en) 2018-06-05 2022-01-19 Electro Scientific Industries, Inc. LASER PROCESSING DEVICE, METHOD OF OPERATION THEREOF AND METHOD OF PROCESSING WORKPIECES USING SAME
KR102677888B1 (ko) * 2019-01-28 2024-06-26 삼성디스플레이 주식회사 석션 장치 및 그것을 포함하는 패널 가공 장치
WO2021237095A1 (en) * 2020-05-22 2021-11-25 Bold Laser Automation, Inc. High velocity vacuum system for laser ablation
JP7479761B2 (ja) * 2020-07-22 2024-05-09 株式会社ディスコ レーザー加工装置
CN116323072A (zh) * 2020-11-13 2023-06-23 伊雷克托科学工业股份有限公司 具有碎屑清除系统和整合的射束收集器的激光加工设备及其操作方法
KR102617770B1 (ko) * 2021-06-02 2023-12-28 주식회사 제이엠씨 홀 형성 시스템 및 홀 형성 방법
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Also Published As

Publication number Publication date
JP2014024117A (ja) 2014-02-06
KR20140013874A (ko) 2014-02-05
KR101970016B1 (ko) 2019-04-17
US9259802B2 (en) 2016-02-16
US20140026351A1 (en) 2014-01-30

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