JP2014024117A5 - - Google Patents
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- Publication number
- JP2014024117A5 JP2014024117A5 JP2012179666A JP2012179666A JP2014024117A5 JP 2014024117 A5 JP2014024117 A5 JP 2014024117A5 JP 2012179666 A JP2012179666 A JP 2012179666A JP 2012179666 A JP2012179666 A JP 2012179666A JP 2014024117 A5 JP2014024117 A5 JP 2014024117A5
- Authority
- JP
- Japan
- Prior art keywords
- fluid flow
- fluid
- workpiece
- nozzle
- substance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 45
- 239000000463 material Substances 0.000 claims 19
- 239000000126 substance Substances 0.000 claims 15
- 230000006698 induction Effects 0.000 claims 6
- 238000000034 method Methods 0.000 claims 4
- 230000003068 static effect Effects 0.000 claims 4
- 230000001133 acceleration Effects 0.000 claims 3
- 238000004891 communication Methods 0.000 claims 3
- 230000006837 decompression Effects 0.000 claims 2
- 238000003754 machining Methods 0.000 claims 2
- 238000013459 approach Methods 0.000 claims 1
- 230000001939 inductive effect Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/558,571 | 2012-07-26 | ||
| US13/558,571 US9259802B2 (en) | 2012-07-26 | 2012-07-26 | Method and apparatus for collecting material produced by processing workpieces |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014024117A JP2014024117A (ja) | 2014-02-06 |
| JP2014024117A5 true JP2014024117A5 (enExample) | 2015-10-01 |
| JP5964693B2 JP5964693B2 (ja) | 2016-08-03 |
Family
ID=49993448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012179666A Active JP5964693B2 (ja) | 2012-07-26 | 2012-08-14 | 物質捕集方法及び物質捕集装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9259802B2 (enExample) |
| JP (1) | JP5964693B2 (enExample) |
| KR (1) | KR101970016B1 (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6171545B2 (ja) * | 2013-05-09 | 2017-08-02 | 大日本印刷株式会社 | レーザ加工煙清浄装置、レーザ加工装置 |
| JP2015217424A (ja) * | 2014-05-19 | 2015-12-07 | 日本車輌製造株式会社 | 複合溶接装置 |
| JP7071118B2 (ja) * | 2014-08-19 | 2022-05-18 | ルミレッズ ホールディング ベーフェー | ダイレベルのレーザリフトオフ中の機械的損傷を減少させるサファイアコレクタ |
| EP3295479B1 (en) * | 2015-05-13 | 2018-09-26 | Lumileds Holding B.V. | Sapphire collector for reducing mechanical damage during die level laser lift-off |
| KR102362753B1 (ko) * | 2015-07-24 | 2022-02-11 | 주식회사 포스코 | 집진 장치 및 이를 구비한 방향성 전기강판의 자구미세화 설비 |
| US9776218B2 (en) * | 2015-08-06 | 2017-10-03 | Asml Netherlands B.V. | Controlled fluid flow for cleaning an optical element |
| JP6516624B2 (ja) * | 2015-08-11 | 2019-05-22 | 株式会社ディスコ | レーザ加工装置 |
| KR101717543B1 (ko) * | 2015-08-24 | 2017-03-21 | 주식회사 에스엔씨테크 | 안전 장치를 구비한 cnc 장치 |
| KR102698971B1 (ko) | 2015-08-26 | 2024-08-27 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | 기체 흐름에 대한 레이저 스캔 시퀀싱 및 방향 |
| CN105057282A (zh) * | 2015-08-30 | 2015-11-18 | 明光万佳联众电子有限公司 | 一种倒吹气机 |
| CN116213918A (zh) | 2015-09-09 | 2023-06-06 | 伊雷克托科学工业股份有限公司 | 镭射处理设备、镭射处理工件的方法及相关配置 |
| JP6205022B1 (ja) * | 2016-06-28 | 2017-09-27 | 株式会社アマダホールディングス | レーザ加工ヘッド |
| KR102401037B1 (ko) | 2016-12-30 | 2022-05-24 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | 레이저 가공 장치에서 광학계의 수명을 연장하는 방법 및 시스템 |
| JP6450783B2 (ja) * | 2017-01-19 | 2019-01-09 | ファナック株式会社 | レーザ加工ヘッド用ノズル |
| KR102092712B1 (ko) * | 2017-02-24 | 2020-03-24 | 에이피시스템 주식회사 | 레이저 처리 장치 및 방법 |
| JP6508549B2 (ja) * | 2017-05-12 | 2019-05-08 | パナソニックＩｐマネジメント株式会社 | レーザ加工装置 |
| KR102379215B1 (ko) * | 2017-10-31 | 2022-03-28 | 삼성디스플레이 주식회사 | 레이저 장치 |
| CN107695539A (zh) * | 2017-11-16 | 2018-02-16 | 深圳市国人光速科技有限公司 | 一种双振镜fpc紫外激光切割设备 |
| EP3774166A4 (en) | 2018-06-05 | 2022-01-19 | Electro Scientific Industries, Inc. | LASER PROCESSING DEVICE, METHOD OF OPERATION THEREOF AND METHOD OF PROCESSING WORKPIECES USING SAME |
| KR102677888B1 (ko) * | 2019-01-28 | 2024-06-26 | 삼성디스플레이 주식회사 | 석션 장치 및 그것을 포함하는 패널 가공 장치 |
| WO2021237095A1 (en) * | 2020-05-22 | 2021-11-25 | Bold Laser Automation, Inc. | High velocity vacuum system for laser ablation |
| JP7479761B2 (ja) * | 2020-07-22 | 2024-05-09 | 株式会社ディスコ | レーザー加工装置 |
| CN116323072A (zh) * | 2020-11-13 | 2023-06-23 | 伊雷克托科学工业股份有限公司 | 具有碎屑清除系统和整合的射束收集器的激光加工设备及其操作方法 |
| KR102617770B1 (ko) * | 2021-06-02 | 2023-12-28 | 주식회사 제이엠씨 | 홀 형성 시스템 및 홀 형성 방법 |
| JP3236603U (ja) | 2021-12-29 | 2022-03-02 | 日本発條株式会社 | マスキング治具 |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3005860A1 (de) | 1980-02-16 | 1981-09-03 | Robert Bosch Gmbh, 7000 Stuttgart | Handwerkzeugmaschine, insbesondere blechnager |
| US4315133A (en) | 1980-05-12 | 1982-02-09 | Gte Automatic Electric Laboratories, Inc. | Apparatus protecting a lens from airborne particulates |
| US4837443A (en) * | 1987-10-15 | 1989-06-06 | The Perkin-Elmer Corporation | Guard ring for a differentially pumped seal apparatus |
| FR2627409A1 (fr) * | 1988-02-24 | 1989-08-25 | Lectra Systemes Sa | Appareil de coupe laser muni d'un dispositif d'evacuation des fumees |
| US4897520A (en) | 1988-10-31 | 1990-01-30 | American Telephone And Telegraph Company, At&T Technologies, Inc. | Laser debris vacuum scoop |
| US5780806A (en) | 1995-07-25 | 1998-07-14 | Lockheed Idaho Technologies Company | Laser ablation system, and method of decontaminating surfaces |
| JPH09141482A (ja) * | 1995-11-22 | 1997-06-03 | Mazda Motor Corp | レーザ加工装置 |
| US5925024A (en) | 1996-02-16 | 1999-07-20 | Joffe; Michael A | Suction device with jet boost |
| JPH1099978A (ja) | 1996-09-27 | 1998-04-21 | Hitachi Ltd | レーザー加工装置 |
| US5973764A (en) | 1997-06-19 | 1999-10-26 | Svg Lithography Systems, Inc. | Vacuum assisted debris removal system |
| US5906760A (en) | 1997-11-04 | 1999-05-25 | Robb; David K. | Exhaust system for a laser cutting device |
| JP3673639B2 (ja) * | 1998-03-11 | 2005-07-20 | 日本たばこ産業株式会社 | レーザ加工機用集塵装置 |
| JP2000317670A (ja) * | 1999-05-10 | 2000-11-21 | Matsushita Electric Ind Co Ltd | 集塵装置、集塵方法、レーザ加工装置、およびレーザ加工方法 |
| JP2001321979A (ja) | 2000-05-12 | 2001-11-20 | Matsushita Electric Ind Co Ltd | レーザー穴加工機の加工粉集塵装置 |
| US6494965B1 (en) | 2000-05-30 | 2002-12-17 | Creo Products Inc. | Method and apparatus for removal of laser ablation byproducts |
| US20020130115A1 (en) | 2001-03-13 | 2002-09-19 | Lawson William E. | Debris removal apparatus for use in laser ablation |
| FR2830478B1 (fr) | 2001-10-05 | 2003-12-05 | Commissariat Energie Atomique | Dispositif de decoupe laser |
| DE10305258A1 (de) * | 2002-02-08 | 2003-08-21 | Creo Inc | Verfahren und Vorrichtung zum Schutz von optischen Elementen |
| US6683277B1 (en) | 2002-12-20 | 2004-01-27 | Osram Opto Semiconductors | Laser ablation nozzle assembly |
| JP2004223542A (ja) | 2003-01-21 | 2004-08-12 | Disco Abrasive Syst Ltd | レーザー加工方法およびレーザー加工装置 |
| US7230636B2 (en) | 2003-03-10 | 2007-06-12 | Dainippon Screen Mfg. Co., Ltd. | Image recording apparatus with jet and suction |
| US20050061378A1 (en) | 2003-08-01 | 2005-03-24 | Foret Todd L. | Multi-stage eductor apparatus |
| DE10355996A1 (de) | 2003-11-27 | 2005-06-30 | Stork Prints Austria Gmbh | Verfahren zur Herstellung von Flexodruckplatten mittels Lasergravur sowie dazu ge-eignete Vorrichtung |
| GB2414954B (en) * | 2004-06-11 | 2008-02-06 | Exitech Ltd | Process and apparatus for ablation |
| US20080067160A1 (en) | 2006-09-14 | 2008-03-20 | Jouni Suutarinen | Systems and methods for laser cutting of materials |
| US20080213978A1 (en) | 2007-03-03 | 2008-09-04 | Dynatex | Debris management for wafer singulation |
| US7300337B1 (en) | 2006-10-25 | 2007-11-27 | Storm Pneumtic Tool Co., Ltd. | Grinding machine with a dust collector |
| US7947919B2 (en) | 2008-03-04 | 2011-05-24 | Universal Laser Systems, Inc. | Laser-based material processing exhaust systems and methods for using such systems |
| JP3143457U (ja) | 2008-05-12 | 2008-07-24 | 日立造船株式会社 | レーザ加工機用集塵装置 |
| US8207472B2 (en) | 2008-06-18 | 2012-06-26 | Electro Scientific Industries, Inc. | Debris capture and removal for laser micromachining |
| US20100269853A1 (en) | 2009-04-27 | 2010-10-28 | Applied Materials, Inc. | Debris-extraction exhaust system |
-
2012
- 2012-07-26 US US13/558,571 patent/US9259802B2/en active Active
- 2012-08-14 JP JP2012179666A patent/JP5964693B2/ja active Active
- 2012-09-28 KR KR1020120108674A patent/KR101970016B1/ko active Active
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