KR101948943B1 - Icp 장치 및 분광 분석 장치와 질량 분석 장치 - Google Patents

Icp 장치 및 분광 분석 장치와 질량 분석 장치 Download PDF

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Publication number
KR101948943B1
KR101948943B1 KR1020130071401A KR20130071401A KR101948943B1 KR 101948943 B1 KR101948943 B1 KR 101948943B1 KR 1020130071401 A KR1020130071401 A KR 1020130071401A KR 20130071401 A KR20130071401 A KR 20130071401A KR 101948943 B1 KR101948943 B1 KR 101948943B1
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KR
South Korea
Prior art keywords
gas
plasma
bonnet
correction
capillary
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KR1020130071401A
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English (en)
Korean (ko)
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KR20140001125A (ko
Inventor
오사무 마츠자와
겐이치 아카마츠
노부오 나카노
유타카 잇쿠
히데노리 다나베
가츠미 나츠이
Original Assignee
가부시키가이샤 히다치 하이테크 사이언스
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Publication of KR20140001125A publication Critical patent/KR20140001125A/ko
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Publication of KR101948943B1 publication Critical patent/KR101948943B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Plasma & Fusion (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
KR1020130071401A 2012-06-27 2013-06-21 Icp 장치 및 분광 분석 장치와 질량 분석 장치 KR101948943B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012144604A JP5965743B2 (ja) 2012-06-27 2012-06-27 Ｉｃｐ装置及び分光分析装置並びに質量分析装置
JPJP-P-2012-144604 2012-06-27

Publications (2)

Publication Number Publication Date
KR20140001125A KR20140001125A (ko) 2014-01-06
KR101948943B1 true KR101948943B1 (ko) 2019-02-15

Family

ID=49897722

Family Applications (1)

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KR1020130071401A KR101948943B1 (ko) 2012-06-27 2013-06-21 Icp 장치 및 분광 분석 장치와 질량 분석 장치

Country Status (3)

Country Link
JP (1) JP5965743B2 (ja)
KR (1) KR101948943B1 (ja)
CN (1) CN103515184B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018185987A1 (ja) * 2017-04-06 2018-10-11 株式会社アルバック イオン源及びイオン注入装置
CN108732234B (zh) * 2017-04-24 2020-09-29 上海新昇半导体科技有限公司 等离子体发生装置
CN110603441B (zh) * 2017-05-12 2022-06-03 胜高股份有限公司 喷雾室、试样雾化导入装置、分析装置和试样中的成分分析方法
CN107464735A (zh) * 2017-06-28 2017-12-12 中国地质科学院水文地质环境地质研究所 一种新型氯/溴同位素质谱仪及其分析方法
CN108181374A (zh) * 2018-02-08 2018-06-19 聚光科技(杭州)股份有限公司 等离子体-质谱分析系统的工作方法
CN110519904B (zh) * 2019-08-16 2020-09-29 中国地质大学（武汉） 一种基于集磁器的icp等离子源形成装置及方法
CN110677972A (zh) * 2019-10-17 2020-01-10 中国人民解放军国防科技大学 用于SiC光学镜面加工的等离子体发生器及其应用方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5642190A (en) 1995-09-01 1997-06-24 Thermo Jarrell Ash Corp. Dual-axis plasma imaging system for use in spectroscopic analysis
JP2003194723A (ja) 2001-12-27 2003-07-09 Rikogaku Shinkokai プラズマトーチ
JP2010197207A (ja) * 2009-02-25 2010-09-09 Shimadzu Corp 発光分光分析方法及び発光分光分析装置
WO2011140168A1 (en) * 2010-05-05 2011-11-10 Perkinelmer Health Sciences, Inc. Inductive devices and low flow plasmas using them

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584062U (ja) * 1981-06-30 1983-01-11 日本ジヤ−レル・アツシユ株式会社 高周波誘導プラズマト−チ管
GB8602463D0 (en) * 1986-01-31 1986-03-05 Vg Instr Group Mass spectrometer
US4926021A (en) * 1988-09-09 1990-05-15 Amax Inc. Reactive gas sample introduction system for an inductively coupled plasma mass spectrometer
JPH0782918B2 (ja) * 1991-11-11 1995-09-06 株式会社三社電機製作所 インダクションプラズマトーチ
JPH11111491A (ja) * 1997-10-01 1999-04-23 Yokogawa Analytical Systems Inc プラズマ発生器
EP0930810A1 (fr) * 1997-12-29 1999-07-21 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Torche à plasma à injecteur réglable et installation d'analyse d'un gaz utilisant une telle torche
JP2004327243A (ja) * 2003-04-24 2004-11-18 Tdk Corp Ｉｃｐ質量分析装置及び質量分析方法
JP2010197080A (ja) * 2009-02-23 2010-09-09 Sii Nanotechnology Inc 誘導結合プラズマ分析装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5642190A (en) 1995-09-01 1997-06-24 Thermo Jarrell Ash Corp. Dual-axis plasma imaging system for use in spectroscopic analysis
JP2003194723A (ja) 2001-12-27 2003-07-09 Rikogaku Shinkokai プラズマトーチ
JP2010197207A (ja) * 2009-02-25 2010-09-09 Shimadzu Corp 発光分光分析方法及び発光分光分析装置
WO2011140168A1 (en) * 2010-05-05 2011-11-10 Perkinelmer Health Sciences, Inc. Inductive devices and low flow plasmas using them

Also Published As

Publication number Publication date
KR20140001125A (ko) 2014-01-06
CN103515184B (zh) 2017-06-16
JP2014009961A (ja) 2014-01-20
JP5965743B2 (ja) 2016-08-10
CN103515184A (zh) 2014-01-15

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