KR101911724B1 - 이동체 장치, 물체 처리 디바이스, 노광 장치, 플랫 패널 디스플레이 제조 방법, 및 디바이스 제조 방법 - Google Patents

이동체 장치, 물체 처리 디바이스, 노광 장치, 플랫 패널 디스플레이 제조 방법, 및 디바이스 제조 방법 Download PDF

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KR101911724B1
KR101911724B1 KR1020137008686A KR20137008686A KR101911724B1 KR 101911724 B1 KR101911724 B1 KR 101911724B1 KR 1020137008686 A KR1020137008686 A KR 1020137008686A KR 20137008686 A KR20137008686 A KR 20137008686A KR 101911724 B1 KR101911724 B1 KR 101911724B1
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KR20130114123A (ko
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야스오 아오키
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가부시키가이샤 니콘
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67138—Apparatus for wiring semiconductor or solid state device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Atmospheric Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Toxicology (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020137008686A 2010-09-07 2011-09-05 이동체 장치, 물체 처리 디바이스, 노광 장치, 플랫 패널 디스플레이 제조 방법, 및 디바이스 제조 방법 Active KR101911724B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US38043310P 2010-09-07 2010-09-07
US61/380,433 2010-09-07
US13/223,970 2011-09-01
US13/223,970 US20120064460A1 (en) 2010-09-07 2011-09-01 Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method
PCT/JP2011/070667 WO2012033212A1 (en) 2010-09-07 2011-09-05 Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method

Related Child Applications (1)

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KR1020187030215A Division KR102072074B1 (ko) 2010-09-07 2011-09-05 이동체 장치, 물체 처리 디바이스, 노광 장치, 플랫 패널 디스플레이 제조 방법, 및 디바이스 제조 방법

Publications (2)

Publication Number Publication Date
KR20130114123A KR20130114123A (ko) 2013-10-16
KR101911724B1 true KR101911724B1 (ko) 2018-10-29

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KR1020137008686A Active KR101911724B1 (ko) 2010-09-07 2011-09-05 이동체 장치, 물체 처리 디바이스, 노광 장치, 플랫 패널 디스플레이 제조 방법, 및 디바이스 제조 방법
KR1020187030215A Active KR102072074B1 (ko) 2010-09-07 2011-09-05 이동체 장치, 물체 처리 디바이스, 노광 장치, 플랫 패널 디스플레이 제조 방법, 및 디바이스 제조 방법
KR1020207002447A Active KR102216234B1 (ko) 2010-09-07 2011-09-05 이동체 장치, 물체 처리 디바이스, 노광 장치, 플랫 패널 디스플레이 제조 방법, 및 디바이스 제조 방법

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KR1020207002447A Active KR102216234B1 (ko) 2010-09-07 2011-09-05 이동체 장치, 물체 처리 디바이스, 노광 장치, 플랫 패널 디스플레이 제조 방법, 및 디바이스 제조 방법

Country Status (7)

Country Link
US (1) US20120064460A1 (enExample)
JP (4) JP5909934B2 (enExample)
KR (3) KR101911724B1 (enExample)
CN (2) CN103097957B (enExample)
HK (1) HK1222921A1 (enExample)
TW (4) TWI661501B (enExample)
WO (1) WO2012033212A1 (enExample)

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KR102584657B1 (ko) * 2015-03-31 2023-10-04 가부시키가이샤 니콘 노광 장치, 플랫 패널 디스플레이의 제조 방법, 디바이스 제조 방법, 및 노광 방법
KR102766023B1 (ko) * 2015-09-30 2025-02-10 가부시키가이샤 니콘 노광 장치, 플랫 패널 디스플레이의 제조 방법, 및 디바이스 제조 방법, 그리고 노광 방법
WO2017057589A1 (ja) * 2015-09-30 2017-04-06 株式会社ニコン 移動体装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法、並びに物体の移動方法
KR102676391B1 (ko) * 2015-09-30 2024-06-18 가부시키가이샤 니콘 노광 장치, 노광 방법, 플랫 패널 디스플레이의 제조 방법, 및 디바이스 제조 방법
CN106814551B (zh) * 2015-11-30 2019-04-12 上海微电子装备（集团）股份有限公司 一种基板交接装置及交接方法
JP6874314B2 (ja) * 2016-09-30 2021-05-19 株式会社ニコン 物体保持装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法
CN109952537B (zh) 2016-10-20 2021-12-24 分子印记公司 在压印光刻过程中定位基板
CN107193142A (zh) * 2017-07-19 2017-09-22 武汉华星光电技术有限公司 配向膜固化系统
CN107228127B (zh) * 2017-07-21 2023-06-06 天津航天机电设备研究所 一种气浮轴承
KR102481264B1 (ko) * 2018-01-04 2022-12-26 삼성전자주식회사 디스플레이 장치 및 디스플레이 모듈의 힌지 조립체
JP7473195B2 (ja) * 2020-09-14 2024-04-23 株式会社ブイ・テクノロジー 集束荷電粒子ビーム装置
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