KR101870490B1 - 단결정 실리콘을 사용하여 형성된 구조체 - Google Patents

단결정 실리콘을 사용하여 형성된 구조체 Download PDF

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Publication number
KR101870490B1
KR101870490B1 KR1020147022311A KR20147022311A KR101870490B1 KR 101870490 B1 KR101870490 B1 KR 101870490B1 KR 1020147022311 A KR1020147022311 A KR 1020147022311A KR 20147022311 A KR20147022311 A KR 20147022311A KR 101870490 B1 KR101870490 B1 KR 101870490B1
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South Korea
Prior art keywords
layer
cavity
delete delete
substrate
gap
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Korean (ko)
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KR20140112068A (ko
Inventor
발렌틴 코센코
에드워드 리 맥베인
시프리언 에메카 유조
페즈만 모나게미
세르게이 사바스티오크
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인벤사스 코포레이션
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Priority claimed from US13/362,898 external-priority patent/US8757897B2/en
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Publication of KR20140112068A publication Critical patent/KR20140112068A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Micromachines (AREA)
  • Weting (AREA)
  • Optical Integrated Circuits (AREA)
KR1020147022311A 2012-01-10 2013-01-07 단결정 실리콘을 사용하여 형성된 구조체 Active KR101870490B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201261585217P 2012-01-10 2012-01-10
US61/585,217 2012-01-10
US13/362,898 US8757897B2 (en) 2012-01-10 2012-01-31 Optical interposer
US13/362,898 2012-01-31
US13/454,713 US9323010B2 (en) 2012-01-10 2012-04-24 Structures formed using monocrystalline silicon and/or other materials for optical and other applications
US13/454,713 2012-04-24
PCT/US2013/020562 WO2013106285A2 (en) 2012-01-10 2013-01-07 Structures formed using monocrystalline silicon and/or other materials for optical and other applications

Publications (2)

Publication Number Publication Date
KR20140112068A KR20140112068A (ko) 2014-09-22
KR101870490B1 true KR101870490B1 (ko) 2018-06-22

Family

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Family Applications (2)

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KR1020147022311A Active KR101870490B1 (ko) 2012-01-10 2013-01-07 단결정 실리콘을 사용하여 형성된 구조체
KR1020147022313A Active KR101955060B1 (ko) 2012-01-10 2013-01-07 광학 인터포저 및 그 제조 방법

Family Applications After (1)

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KR1020147022313A Active KR101955060B1 (ko) 2012-01-10 2013-01-07 광학 인터포저 및 그 제조 방법

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Country Link
US (1) US9323010B2 (enExample)
EP (2) EP2802915B1 (enExample)
JP (1) JP5970081B2 (enExample)
KR (2) KR101870490B1 (enExample)
CN (2) CN104169768B (enExample)
TW (2) TWI553368B (enExample)
WO (2) WO2013106288A1 (enExample)

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TW201333562A (zh) 2013-08-16
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CN104364688A (zh) 2015-02-18
EP2802915B1 (en) 2017-04-12
JP2015515113A (ja) 2015-05-21
KR101955060B1 (ko) 2019-03-06
EP2802916A2 (en) 2014-11-19
US9323010B2 (en) 2016-04-26
US20130177274A1 (en) 2013-07-11
WO2013106285A2 (en) 2013-07-18
KR20140112069A (ko) 2014-09-22
TWI539191B (zh) 2016-06-21
EP2802916B1 (en) 2020-03-11
TWI553368B (zh) 2016-10-11
CN104169768A (zh) 2014-11-26
WO2013106285A3 (en) 2013-09-26
TW201333567A (zh) 2013-08-16
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CN104364688B (zh) 2016-08-24
CN104169768B (zh) 2016-03-02

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