KR101803109B1 - 링 조명을 갖는 다크 필드 검사 시스템 - Google Patents

링 조명을 갖는 다크 필드 검사 시스템 Download PDF

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KR101803109B1
KR101803109B1 KR1020127004139A KR20127004139A KR101803109B1 KR 101803109 B1 KR101803109 B1 KR 101803109B1 KR 1020127004139 A KR1020127004139 A KR 1020127004139A KR 20127004139 A KR20127004139 A KR 20127004139A KR 101803109 B1 KR101803109 B1 KR 101803109B1
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inspection system
dark field
beam forming
wafer
light
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KR20120052994A (ko
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규오헹 자오
메디 베즈이라바니
스콧 영
크리스 바스카
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케이엘에이-텐코 코포레이션
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020127004139A 2009-07-22 2010-07-16 링 조명을 갖는 다크 필드 검사 시스템 Active KR101803109B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22771309P 2009-07-22 2009-07-22
US61/227,713 2009-07-22
PCT/US2010/042354 WO2011011291A1 (en) 2009-07-22 2010-07-16 Dark field inspection system with ring illumination

Publications (2)

Publication Number Publication Date
KR20120052994A KR20120052994A (ko) 2012-05-24
KR101803109B1 true KR101803109B1 (ko) 2017-11-29

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KR1020127004139A Active KR101803109B1 (ko) 2009-07-22 2010-07-16 링 조명을 갖는 다크 필드 검사 시스템

Country Status (8)

Country Link
US (1) US9176072B2 (https=)
EP (1) EP2457251A4 (https=)
JP (2) JP5639169B2 (https=)
KR (1) KR101803109B1 (https=)
CN (1) CN102473663B (https=)
IL (1) IL217178A (https=)
TW (1) TWI536012B (https=)
WO (1) WO2011011291A1 (https=)

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US12422379B2 (en) 2021-10-20 2025-09-23 Lg Energy Solution, Ltd. Side surface inspection device of cylindrical battery

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CN112697794A (zh) * 2019-10-23 2021-04-23 上海微电子装备（集团）股份有限公司 一种掩模版检测装置、光刻设备及掩模版检测方法
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CN112179909B (zh) * 2020-10-19 2024-09-20 中国工程物理研究院激光聚变研究中心 微型大视场超分辨显微成像装置
WO2022176208A1 (ja) 2021-02-22 2022-08-25 株式会社 ジャパンセル 所定光生成方法、所定光利用方法、所定光を利用したサービス提供方法、測定／イメージング方法、光学特性変換素子、光源部、計測部、測定装置、所定光利用装置およびサービス提供システム
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CN117538333A (zh) * 2023-12-26 2024-02-09 苏州矽行半导体技术有限公司 镜头阵列和晶圆检测设备
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CN119556513B (zh) * 2024-12-16 2026-02-10 中国科学院空天信息创新研究院 一种基于空心方环激光照明的水下成像装置
KR102874969B1 (ko) * 2025-06-24 2025-10-23 주식회사 블루타일랩 워피지 검사를 위한 빔 패턴 분석 장치 및 이를 포함하는 웨이퍼 검사 장치

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Publication number Priority date Publication date Assignee Title
US12422379B2 (en) 2021-10-20 2025-09-23 Lg Energy Solution, Ltd. Side surface inspection device of cylindrical battery

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Publication number Publication date
EP2457251A4 (en) 2017-11-08
IL217178A0 (en) 2012-02-29
JP5639169B2 (ja) 2014-12-10
JP2014222239A (ja) 2014-11-27
US20110169944A1 (en) 2011-07-14
CN102473663A (zh) 2012-05-23
JP2012533756A (ja) 2012-12-27
CN102473663B (zh) 2016-11-09
JP6072733B2 (ja) 2017-02-01
KR20120052994A (ko) 2012-05-24
US9176072B2 (en) 2015-11-03
TWI536012B (zh) 2016-06-01
IL217178A (en) 2017-04-30
TW201132960A (en) 2011-10-01
WO2011011291A1 (en) 2011-01-27
EP2457251A1 (en) 2012-05-30

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