KR101790829B1 - 묘화 장치 및 물품의 제조 방법 - Google Patents

묘화 장치 및 물품의 제조 방법 Download PDF

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Publication number
KR101790829B1
KR101790829B1 KR1020140047828A KR20140047828A KR101790829B1 KR 101790829 B1 KR101790829 B1 KR 101790829B1 KR 1020140047828 A KR1020140047828 A KR 1020140047828A KR 20140047828 A KR20140047828 A KR 20140047828A KR 101790829 B1 KR101790829 B1 KR 101790829B1
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KR
South Korea
Prior art keywords
charged particle
substrate
shot
lines
shot area
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KR1020140047828A
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English (en)
Korean (ko)
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KR20140130028A (ko
Inventor
마사토 무라키
요시히로 히라타
Original Assignee
캐논 가부시끼가이샤
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Publication of KR20140130028A publication Critical patent/KR20140130028A/ko
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Publication of KR101790829B1 publication Critical patent/KR101790829B1/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. program control
    • H01J37/3023—Program control
    • H01J37/3026—Patterning strategy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31761—Patterning strategy
    • H01J2237/31766—Continuous moving of wafer

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020140047828A 2013-04-30 2014-04-22 묘화 장치 및 물품의 제조 방법 Active KR101790829B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2013-095960 2013-04-30
JP2013095960A JP6193611B2 (ja) 2013-04-30 2013-04-30 描画装置、及び物品の製造方法

Publications (2)

Publication Number Publication Date
KR20140130028A KR20140130028A (ko) 2014-11-07
KR101790829B1 true KR101790829B1 (ko) 2017-10-26

Family

ID=51789514

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140047828A Active KR101790829B1 (ko) 2013-04-30 2014-04-22 묘화 장치 및 물품의 제조 방법

Country Status (5)

Country Link
US (1) US9455124B2 (enExample)
JP (1) JP6193611B2 (enExample)
KR (1) KR101790829B1 (enExample)
CN (1) CN104134605B (enExample)
TW (1) TWI516858B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6289181B2 (ja) * 2013-06-26 2018-03-07 キヤノン株式会社 描画装置、及び、物品の製造方法
US9984853B2 (en) 2014-11-28 2018-05-29 Nuflare Technology, Inc. Method for generating writing data
JP6548982B2 (ja) * 2014-11-28 2019-07-24 株式会社ニューフレアテクノロジー 描画データの作成方法
JP6593090B2 (ja) * 2015-10-20 2019-10-23 株式会社ニューフレアテクノロジー 支持ケース及びマルチ荷電粒子ビーム描画装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110182161A1 (en) * 2008-08-01 2011-07-28 Hiroaki Suzuki Electron beam recording apparatus, controller for the same, and method for controlling same
JP2012243802A (ja) 2011-05-16 2012-12-10 Canon Inc 描画装置、および、物品の製造方法
US20130056647A1 (en) * 2011-09-01 2013-03-07 Nuflare Technology, Inc. Multi charged particle beam writing apparatus and multi charged particle beam writing method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62144323A (ja) 1985-12-19 1987-06-27 Toshiba Corp 荷電ビ−ム露光装置
JP4818501B2 (ja) * 2000-09-12 2011-11-16 三菱電機株式会社 電子ビーム露光装置
SG125923A1 (en) 2002-09-20 2006-10-30 Asml Netherlands Bv Lithographic marker structure, lithographic projection apparatus comprising such a lithographic marker structure and method for substrate alignment using such a lithographic marker structure
CN101681809B (zh) 2007-12-28 2012-04-25 株式会社尼康 曝光装置、曝光方法以及器件制造方法
JP5480496B2 (ja) 2008-03-25 2014-04-23 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画方法及び荷電粒子ビーム描画装置
EP2556527B1 (en) 2010-04-09 2017-03-22 Carl Zeiss Microscopy GmbH Charged particle detection system and multi-beamlet inspection system
JP5835892B2 (ja) * 2010-12-27 2015-12-24 キヤノン株式会社 荷電粒子線描画装置及びデバイス製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110182161A1 (en) * 2008-08-01 2011-07-28 Hiroaki Suzuki Electron beam recording apparatus, controller for the same, and method for controlling same
JP2012243802A (ja) 2011-05-16 2012-12-10 Canon Inc 描画装置、および、物品の製造方法
US20130056647A1 (en) * 2011-09-01 2013-03-07 Nuflare Technology, Inc. Multi charged particle beam writing apparatus and multi charged particle beam writing method

Also Published As

Publication number Publication date
US9455124B2 (en) 2016-09-27
US20140322653A1 (en) 2014-10-30
CN104134605B (zh) 2017-05-24
TWI516858B (zh) 2016-01-11
JP6193611B2 (ja) 2017-09-06
KR20140130028A (ko) 2014-11-07
CN104134605A (zh) 2014-11-05
TW201441758A (zh) 2014-11-01
JP2014216630A (ja) 2014-11-17

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