KR101759132B1 - 도포장치 및 도포방법 - Google Patents

도포장치 및 도포방법 Download PDF

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Publication number
KR101759132B1
KR101759132B1 KR1020090018628A KR20090018628A KR101759132B1 KR 101759132 B1 KR101759132 B1 KR 101759132B1 KR 1020090018628 A KR1020090018628 A KR 1020090018628A KR 20090018628 A KR20090018628 A KR 20090018628A KR 101759132 B1 KR101759132 B1 KR 101759132B1
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KR
South Korea
Prior art keywords
coating
head
discharge
application
nozzles
Prior art date
Application number
KR1020090018628A
Other languages
English (en)
Korean (ko)
Other versions
KR20090104661A (ko
Inventor
사토시 도모에다
시게루 도노
Original Assignee
도레 엔지니아린구 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도레 엔지니아린구 가부시키가이샤 filed Critical 도레 엔지니아린구 가부시키가이샤
Publication of KR20090104661A publication Critical patent/KR20090104661A/ko
Application granted granted Critical
Publication of KR101759132B1 publication Critical patent/KR101759132B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
    • B05C5/0216—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Coating Apparatus (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Optical Filters (AREA)
KR1020090018628A 2008-03-31 2009-03-04 도포장치 및 도포방법 KR101759132B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008092094A JP5475957B2 (ja) 2008-03-31 2008-03-31 塗布装置
JPJP-P-2008-092094 2008-03-31

Publications (2)

Publication Number Publication Date
KR20090104661A KR20090104661A (ko) 2009-10-06
KR101759132B1 true KR101759132B1 (ko) 2017-07-18

Family

ID=41303506

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090018628A KR101759132B1 (ko) 2008-03-31 2009-03-04 도포장치 및 도포방법

Country Status (3)

Country Link
JP (1) JP5475957B2 (zh)
KR (1) KR101759132B1 (zh)
TW (1) TW200940187A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11046078B2 (en) 2018-04-09 2021-06-29 Semes Co., Ltd. Method of discharging chemical liquid using an ink jet head

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6752577B2 (ja) * 2016-01-14 2020-09-09 東レエンジニアリング株式会社 インクジェット塗布装置及びインクジェット塗布方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005296854A (ja) 2004-04-13 2005-10-27 Sharp Corp 膜形成装置及び膜形成方法
JP2006061795A (ja) 2004-08-25 2006-03-09 Sharp Corp 液滴吐出方法および液滴吐出装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11245384A (ja) * 1998-02-27 1999-09-14 Canon Inc 記録装置および記録方法
JP4298836B2 (ja) * 1998-06-30 2009-07-22 東芝テック株式会社 インクジェット記録装置
JP4717342B2 (ja) * 2003-12-02 2011-07-06 キヤノン株式会社 インクジェット記録装置及び方法
JP2009233488A (ja) * 2008-03-25 2009-10-15 Fujifilm Corp インクジェットヘッド、塗布方法および塗布装置、ならびに放射線検出器の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005296854A (ja) 2004-04-13 2005-10-27 Sharp Corp 膜形成装置及び膜形成方法
JP2006061795A (ja) 2004-08-25 2006-03-09 Sharp Corp 液滴吐出方法および液滴吐出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11046078B2 (en) 2018-04-09 2021-06-29 Semes Co., Ltd. Method of discharging chemical liquid using an ink jet head

Also Published As

Publication number Publication date
TW200940187A (en) 2009-10-01
KR20090104661A (ko) 2009-10-06
JP2009240966A (ja) 2009-10-22
JP5475957B2 (ja) 2014-04-16

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