200914141 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種塗布裝置，係 噴嘴之噴墨頭，對保持台上所保持的 材。 【先前技術】 最近’資訊終端影像顯示技術之 畫面之影像顯示機器（顯示器）或小 細度之影像顯示機器也已被實用化、 況之中’對於能以低成本進行高品質 示機器之要求已日趨強烈。作爲因應 機器的關鍵元件有彩色濾光片，對於 方法及製造裝置也採行各式各樣之對 於如此彩色濾光片之製造方法及 習用技術之一，可列舉：藉由達成遮 而在基板等之上形成矩陣狀之遮光部 色材料塗布於此遮光部之格子內的技 製造方法及製造裝置中，RGB 3色之 於各個著色步驟中，爲了遮光等目的 遮蔽構件（遮罩）係視爲必要的。 另外，在步驟數上，基於所使用 ，是仍有製造成本高的問題。最近， 如上所述之技術的方法，即，使用裝 置，從噴墨頭之噴墨噴嘴，將著色材 經由具有複數個噴墨 塗布對象物供應塗葙 進展驚人，即使爲大 型之畫面，非常高精 予以製造。於如此狀 之影像顯示的影像顯 如此要求之影像顯示 此彩色濾光片之製造 策。 製造裝置中所開發的 光機能之各種材料， ，利用塗布技術將著 術。但是，於如此之 .著色步驟各自獨立， ，要求極高精確度的 之裝置及構件之觀點 已有提案一種可取代 備有噴墨頭之塗布裝 料供應/塗布於形成有 200914141 矩陣狀之遮光部基板等上面，以製造彩色濾光片（參照專 利文獻1、專利文獻2 )。 專利文獻N日本專利特開2002-273868號 專利文獻2 :円本專利特許第3 92 5 5 2 5號 【發明內容】 發明所欲解決之技術問題 即使畫面尺寸爲小的、塗布面積爲小的情形，若欲同 時並行地塗布於大量之基板上時，也是與將著色材料塗布 於大型顯示器之大基板上之情形相同地，必須將大量之著 色材料供應至塗布裝置。爲了使用噴墨頭有效地完成如上 述之塗布’必須藉1次塗布裝置之掃描（移動）將材料供 應/塗布於大的塗布區域（寬度），也必須並列配置複數個 塗布著色材料之噴墨頭。但是，若單純地將噴墨頭以複數 個作並列配置時，展開後的噴墨頭部整個橫向寬度將變大 〇 解決此問題之方法’於專利文獻1中，已揭示如下之 方法：針對噴墨頭之配列，是將各自的噴墨頭對掃描方向 傾斜配置。 另外，爲了以較少的塗布動作來實現如上所述之大的 塗布區域’配列必要數目之具有塗布寬度受到一定限制之 噴墨噴嘴的噴墨頭並安裝於移動之架台，由於要以i次塗 布動作（步驟）來塗布著色材料，成爲有需要大型塗布裝 置。如此之is形’根據複數個噴墨頭之配列，基於其配列 位置所造成之弊端，例如’因爲從噴墨噴嘴之墨水噴出量 200914141 不均勻所產生之塗布量偏異，其結果，有時會發生顏色不 均。 於專利文獻2中，在避免如此弊害之的一方案中揭示 ’藉由一種貝有較基板爲短的噴墨頭之塗布裝置以及導入 對一基板作複數次往復塗布方法，能夠抑制顏色不均之發 生。 然而，於專利文獻2之彩色濾光片的製造裝置中，噴 墨頭兩端之噴出量低的噴墨噴嘴，於原狀態下連續朝向噴 C ' 墨頭移動方向進行塗布。根據此構造所進行之塗布，藉由 塗布量低的噴墨噴嘴所塗布的區劃乃沿著移動方向連續， 將有發生線狀顏色缺陷之可能性。 另外，當以不使用噴出量低的部分之方式將噴墨頭配 歹!1 /配置於與移動方向成垂直之方向時，於噴墨頭之配置空 間產生大的空間浪費而導致裝置之大型化等。另外，不使 用所有的噴墨頭兩端之噴嘴係不經濟的。 有鑑於如此之狀況，本發明人等係在致力於適用於現 ί / 狀噴墨頭所進行塗布的塗布方法與裝置之開發當中確認了 如下之事實，即，於習知之噴噴墨頭中，從噴墨頭之一單 位中所構成的噴墨噴嘴列之各噴墨噴嘴的著色料噴出量將 具有偏異，尤其極靠近兩端，受限制的噴嘴之噴出量爲少 的。 而且，本發明之目的在於提供一種塗布方法及塗布裝 置，即使利用噴墨頭端部中之噴墨噴嘴不可避免所呈現之 著色材料噴出量少的噴墨噴嘴，也可實現彩色濾光片所要 200914141 求之色度容許値的千分之3以下精確度的塗布。此外，相 當於提供一種可實現所謂色度容許値的千分之3以下係指 換算成朝向一個像素之塗布量的容許値爲3%以內之塗布 方法及塗帝裝置。 另外，於噴墨噴嘴中，不可避免地呈現之噴出速度的 強弱分布將有周期性出現之情形，如此噴出速度之周期不 均勻亦影響彩色瀘光片所要求之色度。 解決問顯之技術丰跺 因此，於本發明中，提供一種噴墨頭桿，係配置複數 個具有複數個噴墨噴嘴之相同形狀的噴墨頭，其中’ 將相當於η分割該噴墨頭中之該噴墨噴嘴之區塊長度 的距離設爲L ; 於該噴墨頭桿之長邊方向，配置有將該複數個噴墨頭 排列於既定間隔的噴墨頭列； 於該噴墨頭桿之行進方向，配置有η+1以上的該噴墨 頭列，各自的該噴墨頭列係相互於該噴墨頭桿之長邊方向 僅錯開該距離L而予以配置。而且，提供一種塗布裝置， 係具有控制將墨水供應至其噴墨頭桿內之噴墨噴嘴的控制 部。 亦即，於本發明之塗布裝置中，作成下列構造：準備 必要數目之具有因應於每單位面積塗布量之噴墨噴嘴數目 的噴墨頭，除了實現其噴墨噴嘴所要求之配列間距密度以 外的物理性限制（亦即，能夠進行信賴性高、耐久性高， 並且進行穩定之塗布材噴出的裝置’係爲了構成噴墨噴嘴 200914141 之限制）之中’決定噴墨頭之分割數η，藉分割數η而將 該噴墨噴嘴分爲複數群，作成以（分割數η+ 1 )以上的列 來使噴墨頭予以平行配列。而且，作成下列構造：以其分 割的噴墨噴嘴之1分割罕位，沿著其噴墨噴嘴配列之長邊 方向’錯開相鄰列之噴墨頭位置而規則性連續配列，選擇 排列於各自塗布方向之列的噴墨頭內之噴墨噴嘴，控制塗 布材之噴出而予以動作。 根據如此之構造，於噴墨頭所配列之複數個噴墨噴嘴 中兩端之數個噴嘴、與位於噴墨頭中央部之其他噴墨噴嘴 之間，噴出速度上存在約10〜15%之差異，其結果，即使 來自兩端數個噴嘴之噴出量較其他噴墨噴嘴約少8 %之情 形下，藉由選擇要噴出之噴墨噴嘴，以按照塗布區域所必 需塗布材之塗布材量的噴出數目而進行所噴出的控制，使 朝向所塗布之基板的既定塗布區域中的各自區域之塗布量 控制於容許誤差範圍內，也將成爲可能的。 例如，組裝於代表性應用例之液晶顯示裝置的彩色濾 光片中，控制於彩色濾光片之RGB各穿透色色度容許値的 千分之3以內將成爲可能，尤其能夠防止起因於噴墨頭所 配列之兩端塗布量將不足、於塗布裝置移動方向之「線條 不均」、附色性差、「空白」將集中發生，製造在基板所 有區域皆具有既定色度之彩色濾光片。 亦即，本發明之塗布裝置係提供一種塗布裝置，係爲 了製造高品質之彩色濾光片，不需要昂貴之遮蔽構件（遮 罩）等之間接構件，於習知之塗布法中，伴隨剝離/去除於 200914141 前步驟所覆膜之著色材料等處理所發生之構件或時間的損 失也不會發生。藉此’可能製造低成本且高品質之彩色濾 光片。 另外，藉由將噴墨頭內之噴墨噴嘴分割成複數個，並 將噴墨頭之配置變更爲予以分割之區塊各錯開1區塊的配 置配列，以複數列配列成各色’進一步能夠減少裝備RGB 3 色分之噴墨頭的塗布部分掃描方向之裝置尺寸’也能夠實 現小型之塗布裝置。 ί: 於上述之塗布裝置中，該控制手段係作成下列之構造 :使塗布材之供應量成爲一定量之方式來選擇噴墨噴嘴的 同時，並列所配列之噴墨頭中’使較分割數第η列噴墨頭 之配列更外側部分的噴墨噴嘴之動作得以停止之方式來控 制該噴墨頭。 根據如此之構造，藉由選擇噴墨噴嘴’使塗布材之供 應量成爲一定，將朝向基板之塗布量予以平坦化的同時， 藉由使位於較從兩端起分割數第（η )列噴墨頭之噴墨噴嘴 ί" 更外側之噴墨頭噴墨噴嘴的噴出予以停止’能夠消除從位 於塗布範圍外之噴墨頭噴墨噴嘴之無效塗布材的噴出，基 於省資源之觀點，也能夠作成較佳之塗布裝置。 再者，於上述之塗布裝置中’該控制手段係作成下列 之構造：使塗布材之供應量合乎容許誤差範圍內之方式來 選擇噴墨噴嘴的同時，並列所配列之噴墨頭之中’使較第 η分割數之噴墨頭配列更外側部分的之噴墨噴嘴動作得以 停止之方式來控制該噴墨頭。 -1 0 - 200914141 根據如此之構造，藉由選擇噴墨噴嘴，使塗布材之供 應量控制於容許誤差範圍內而能夠使噴出量予以最適化的 同時，藉由使位於較從兩端起分割數第（η )列噴墨頭之噴 墨噴嘴更外側之噴墨頭噴墨噴嘴的噴出予以停止’能夠消 除從位於塗布範圍外之噴墨頭噴墨噴嘴之無效塗布材的噴 出，能夠更進一步提高省資源之效果。 另外，於上述之塗布裝置中，作成更具備下列之構造 :噴嘴控制手段，使從該噴墨頭桿中之該噴墨頭內之各噴 f ：ί 墨噴嘴所噴出的每1次噴出量改變；及上位控制手段，以 使從該噴墨頭內之各噴墨噴嘴所噴出的每1次噴出量之合 計値接近於每個噴墨頭既定量之方式來控制該噴嘴控制手 段。 根據如此之構造，藉由使從噴墨頭內之各噴墨噴嘴所 噴出的每1次噴出量予以改變的噴嘴控制手段，與以使從 噴墨頭內之各噴墨噴嘴所噴出的每1次噴出量控制於既定 量的上位控制手段’能夠在基板所有塗布區域而使1次噴 t 出量之偏異得以平坦化，不僅能夠減低在微小區域上之色 度偏異，於基板所有區域上，也能夠將色度偏異控制於既 定之範圍內。 而且，於上述之塗布裝置中，更具備下列之構造：量 測手段，量測藉1次動作而從各噴墨噴嘴所供應至該塗布 對象物之塗布材的量；及保持手段，更新/保持各噴墨噴嘴 中所量測之塗布材的量；其中，該控制手段係參照該保持 手段中之所更新/保持的保持資料，控制該噴墨頭以選擇要 200914141 將塗布材供應至該塗布對象物的噴墨頭。 根據如此之構造，藉由量測以1次噴出動作而從各噴 墨噴嘴所供應之塗布材的量，更新/保存並保持量測出的噴 出量資料’參照此資料以增減/微調噴墨噴嘴之選擇或噴出 量而控制噴出，能夠修正運轉中之噴出量變化的同時，也 連續均勻維持噴出量而予以塗布動作。 再者，於上述之噴墨頭桿中，作成下列之構造：該噴 墨頭係以固有寬度且具有著色材料噴出速度的強弱分布圖 案之情形’使該噴墨頭各錯開長邊方向上固有強弱分布之 寬度除以該噴墨頭配列數m之間距。 使用具有著色材料噴出速度的強弱分布圖案的噴墨頭 而以固有寬度噴出著色材料之情形，累積有噴墨頭中之此 噴出速度的強弱分布，產生總和之噴出速度的強弱分布圖 案將成爲顯著化之憂慮。然而，若根據如此之構造，藉由 各錯開噴墨頭長邊方向上固有強弱分布之寬度除以噴墨頭 配列數m之間距，即使累積有噴墨頭中之此噴出速度的強 弱分布，亦將相互抵消，能夠使總和之噴出速度的強弱分 布圖案變成不明顯。其結果，即使使用具有著色材料噴出 速度的強弱分布圖案之噴墨頭而以固有寬度噴出著色材料 之情形，也能夠簡單防止彩色濾光片之色度呈現周期不均 勻性。 【發明之實施形態】 針對有關本發明之塗布裝置之最佳實施形態，茲參照 圖示作以下的詳細說明。此外，以下有關塗布裝置之具體 -1 2 - 200914141 例，茲針對將塗布材（著色材料）塗布於塗布對象物（玻 璃基板）之彩色濾光片製造裝置作說明。 第1圖係有關本發明之一實施形態之塗布裝置（彩色 濾光片製造裝置）的外觀斜視圖。於此彩色濾光片製造裝 置中，在機台1上支撐有吸附台3(保持台）、塗布架4 與照相機架6。屬保持台之吸附台3係吸附保持玻璃基板2 者，爲了將此玻璃基板2定位於既定位置之位置，乃透過 未圖示之驅動機構、導引機構，而於Z軸周圍旋轉驅動的 同時，也予以驅動於Y方向。塗布架4係保持噴墨頭桿5 者，爲了在玻璃基板2之既定位置塗布著色材料，乃透過 未圖示之驅動機構、導引機構，而於X方向驅動的同時， 爲了調整對玻璃基板2之相對位置，乃透過未圖示之驅動 機構、導引機構，而驅動於Z方向、Y方向。 照相機架6係保持用於玻璃基板2之對準的對準照相 機7、8，同時亦保持用以檢測供應於玻璃基板2的著色材 料之量測手段的掃描照相機9 ’爲了對準、著色材料之檢 測，乃透過未圖示之驅動機構、導引機構’驅動於X方向 。另外，對準照相機7、8及掃描照相機9係乃透過未圖示 之驅動機構、導引機構’驅動於Y方向。對準照相機7、8 係檢測玻璃基板2的記號（未圖示）者’基於根據對準照 相機7、8所得到的記號檢測結果’使吸附台3旋轉，及/ 或向Y方向移動，能執行對玻璃基板2之對準。 X軸方向之對準誤差能藉由調整噴出時間點而加以修 正。於是，X軸、Y軸係用以規定平行於藉吸附台3所吸 -13- 200914141 附保持之玻璃基板2上面的平面所設定之相互垂直的軸，Z 軸係與根據X軸與Y軸所規定平面相垂直之軸。 此外’若採用二維CCD照相機來取代掃描照相機9， 則亦能量測滴落痕跡之高度，針對所使用的著色材料，根 據事先所得的滴落時之液滴形狀，可從其高度之量測値而 算出液滴之體積’能夠得知來自更高精確度之各噴墨噴嘴 的著色材料噴出量。 噴墨頭桿5係整列配置複數個噴墨頭5 1所構成者，各 噴墨頭5 1係於內部整列配置複數個噴墨噴嘴5 2所構成者 。而且’複數個噴墨頭51之配列係將1個噴墨頭51所配 列形成的所有噴墨噴嘴52分割成複數個區塊，將相鄰的噴 墨頭5 1之配列各錯開1區塊，X方向之間隔、γ方向之間 隔分別成爲既定間隔之方式來加以設定（參照第3圖）。 第2A〜2C圖係顯示噴墨頭桿5中之噴墨噴嘴52之一 配置例圖。於第2A圖中，以A-1〜A-4表示1個噴墨頭。 亦即’於此表示將1個噴墨頭分割成4個區塊（附加1至 4之字）之例子。將這樣的噴墨頭排成5列（a列〜E列） 並覆蓋可塗布之區域100。在覆蓋寬的塗布寬度之情形， 僅並列排列必要之此塗布區域1 0 0。亦即，僅必要並列配 置顯示於第2A圖之噴墨頭配置。 使裝備此噴墨頭51群之噴墨頭桿5朝向圖中箭號X 之方向往復移動，從各噴墨噴嘴52朝向玻璃基板2進行著 色材料之噴出/塗布。 於各列中’在噴墨頭彼此間空出相當於1區塊之間隔 -14- 200914141 係爲了減輕噴墨頭兩端部之噴墨噴嘴的噴出量較中央部之 噴墨噴嘴的噴出量爲少之影響。此外’將此間隔設爲距離 L。例如，區域1 〇 3之部分，在A列噴墨頭之情形係使用 端部之噴墨噴嘴。因而，此部分之塗布量係較原本欲塗布 的墨水量更爲減少。 但是，於可塗布相同區域之B〜D列的噴墨頭中’能 夠利用非噴墨頭端部之部分的噴墨噴嘴進行塗布。亦即’ 若觀察區域103時，利用由A-4、B-3、C-2、D-1之4個區 Γ' 塊所噴出的墨水予以塗布，僅來自A-4之墨水較來自其他 區塊之墨水爲少。但是，藉由使不足的墨水量成爲容許値 以下，能夠得到無顏色不均之彩色濾光片。亦即，本發明 具有下列特徵：將噴墨頭配置成對所有的塗布對象區域不 會發生，僅以噴墨頭之端部噴嘴負責塗布的部分。 於此，參照第3圖，更詳細說明噴墨頭之配列。第3 圖係於第2圖所示之噴墨頭桿的一部分。噴墨頭配置有5 列。方向X係顯示相同於第2圖之噴墨頭桿的行進方向。 爲提高塗布之間距以塗布高精細之圖案，必須縮短噴 墨頭噴嘴之距離。但是，設置於1個噴墨頭中的噴墨噴嘴 具有加工精確度等之限度，利用1個噴墨頭無法達成所希 望之塗布間距。因此，將複數個噴墨頭稍微錯開進行配列 ，作成藉複數個噴墨頭之噴墨噴嘴而可得到所希望之塗布 間距。 於第3圖中，使A列之噴墨頭區塊8 0與B列之噴墨 頭區塊8 1的噴墨噴嘴間僅錯開所希望之塗布間距P來加以 200914141 配置。而且，使塗布間距得以連續之方式來配置c 列之噴墨頭區塊82、83。若將1個噴墨頭之噴墨噴 距設爲HNP時’要連續配置所希望之間距p，是需要 列的噴墨頭。於第3圖中，利用4列的噴墨頭以確 望的間距之連續性。 於此4列噴墨頭之右端，再配置連續的4列噴 歸因於物理性限制，在空間上是有困難的。因此， 列之噴墨頭區塊84，進一步內插所希望之間距。其 符號80係相當於第2A圖之A-4，符號8 1係相當於 符號82係相當於C-2，符號83係相當於D-1，符敬 相當於E -1。 結果’因爲配置了用以實現所希望之間距P的 墨頭’將4個噴墨頭之噴墨噴嘴的位置設爲（1)〜 。此噴嘴位置係重複巡迴於噴墨頭之寬度方向。 接著，再度參照第2圖，藉第2C圖之第一群以 墨噴嘴52之配列。此外，於第2C圖所示之第一群 群係顯示從X方向觀察的區塊。於第2B圖的（1) 區塊、於（2)之B-3區塊、於（3)之C-2區塊、方' 之D -1區塊的噴墨噴嘴5 2係根據如第3圖之配列間 無間隙地塡補像素區域之方式來排列，並接受控制 僅噴出必要液滴數之著色材料。此噴墨噴嘴之配列 同的配列間距p而連接於所鄰接的區塊，若以第2 C 2群爲例’對應於第2B圖的（1)之E-1區塊、位方 之B-4區塊、位於（3)之C-3區塊、位於（4)之 列及D 嘴的間 HNP/P 保所希 墨頭， 配列E 結果， B-3， € 84係 4個噴 ^ ( 4 ) 說明噴 〜第五 之A-4 Η 4) 丨距Ρ， 指令， 也藉相 圖之第 令（2 ) D - 2區 -16- 200914141 塊的噴墨噴嘴52。第三、四、五群也成爲第2C圖所不之 噴嘴編號的配列。因而，附加記號E之噴墨頭5 1的噴墨噴 嘴5 2係內插噴嘴配列而實現因物理上之限制使得就算緊 貼連結其他A, B ; C 3 D之噴墨頭亦無法實現的噴嘴配列間 距。 因爲噴墨頭桿朝向X方向，所以針對某塗布對象列之 噴出時序係依E列、D列、C列、B列、A列之順序進行墨 水之噴出。若從屬噴墨頭桿行進方向之X側觀察噴墨頭時 ，得知於1個區塊中，必定是藉4個區塊塗布。若將此縱 行稱爲群時，若從行進方向X觀察時，看得到5個群。第 2C圖係將各個群的噴嘴配列位置之關係作成表格。 於此第2 A圖所示之區塊的配列例子中，如第3圖所示 ，排列形成於第5 E列噴墨頭5 1內的噴墨噴嘴5 2之各個 位置設定成每個分割的區塊各錯開1個間距。 如此方式’於第2A〜2C圖所示之噴墨頭桿中，作成 如下之構造：準備必要數目之具有按照每單位面積塗布量 之噴墨噴嘴52數目的噴墨頭51，在實現其噴墨噴嘴52所 要求之配列間距密度上的物理性限制中，決定噴墨頭5 1之 分割數η (於圖示之例子中，分割成4個），藉由分割數n 以將其噴墨噴嘴52分爲複數個群（4個區塊），將噴墨頭 5 1藉由（分割數η +1 )以上的列（於圖示之例子中爲5列 )平行配列。於此’所謂物理性限制，係指實際上配置複 數個噴墨噴嘴及壓電元件等之噴出裝置，且能使信賴性高 、耐久性高’同時穩定動作所需的空間限制。 -17- 200914141 此外，作成如下之構造：藉其分割之噴墨噴嘴5 2的1 個分割單位，沿著其噴墨噴嘴5 2之配列的長邊方向，使相 鄰列的噴墨頭5 1之位置各錯開1個間距來規則性地連續配 列，選擇排列於各自塗布方向之噴墨頭 5 1內的噴墨噴嘴 5 2，控制塗布材之噴出並使動作。 實際上’於噴墨頭5 1中所配列之複數個噴墨噴嘴5 2 內的兩端數個噴嘴，與位於噴墨頭中央部其他噴墨噴嘴之 間，在噴出速度上乃存在約10〜15%之差異，其結果，將 發生從兩端數個噴嘴之噴出量較其他噴墨噴嘴約少8%之 情形。但是’若根據如本發明之噴墨頭桿的構造，藉由選 擇要噴出之噴墨噴嘴’並按照必要塗布材的量之噴出數以 噴向塗布區域’成爲可將朝向所塗布之玻璃基板2既定塗 布區域中之各自區域的塗布量控制在容許誤差範圍內。 例如，於代表性應用例之液晶顯示裝置內所組裝之彩 色濾光片中，成爲可控制在彩色濾光片之RGB各穿透色色 度容許値的千分之3以內。尤其，防止於噴墨頭5 1所配列 之兩端，起因於塗布量不足而於塗布裝置移動方向而集中 發生「線條不均」、附色性差、「空白」的情形，能製造 在基板2所有區域具有既定色度之彩色濾光片。 亦即’本發明之塗布裝置爲了製造高品質之彩色濾光 片’並不需要高價之遮蔽構件（遮罩）等之間接構件，利 用習知塗布方法，也不會產生伴隨著將上述步驟所被覆膜 之著色材料剝離/去除等處理所衍生之構件或時間耗損。藉 此’可提供一種塗布裝置，能以低成本製造高品質的彩色 -18- 200914141 濾光片。另外，藉由使噴墨頭之配置成爲將噴墨頭51內之 噴墨噴嘴5 2分割成複數個，變更爲藉各1區塊的既定間距 錯開其所分割之區塊配置的配列，並藉複數列以配列成各 色，可進一步縮小裝備有R Γτ B 3色分的噴墨頭之塗布部分 的掃描方向之裝置尺寸，也能夠實現小型之塗布裝置。 另一方面，除了於第2Β圖所示之配列例子以外，此噴 墨噴嘴5 2之噴出位置的配列，亦可於第1列之噴墨頭5 1 (於第2 Β圖之情形爲Α列）中，於（2 ) 、 （ 3 )或（4 ) 之位置形成著色材料之滴落痕跡，與各自噴墨頭5 1之順序 /配置無關地設定組合，若藉由依照配列之噴墨頭5 1所連 續的設定塗布間距而噴出著色材料，能製作出與規格一致 的彩色濾光片。 另外，實施第1〜3列陰影之區塊係位於塗布對象物之 塗布區域的框外，係禁止著色材料噴出之必要的區塊，根 據透過控制手段適切控制，能夠避免著色材料之平白噴出 〇 第4A〜4C圖係顯示噴墨頭桿5中之噴墨噴嘴52的另 一配置例。於此例中，相同於第2A圖所示之例子，顯示藉 由將已分割成4個區塊的噴墨頭5 1以8列覆蓋塗布區域 1 〇 1的構造之情形。藉由連續並列配置此噴墨頭5 1，能夠 覆蓋玻璃基板等塗布對象物塗布寬度之觀點係相同於第2 圖之情形。 於此實施例中，由圖可明確得知，A〜D之噴墨頭區塊 與E〜Η之噴墨頭區塊係相同的。亦即，雖然該例之噴墨 -19- 200914141 頭總數爲少的，但是與附加符號E之噴墨頭噴嘴的形成位 置成爲不規則的情形不同’乃係利用相同規格之噴墨頭。 亦即’爲了消除該物理性限制，作成分隔1個噴墨頭之噴 嘴配列寬度距離的配置。 若將從實際噴墨噴嘴52之著色材料的噴出序列，亦即 各自的液滴噴出與顯示於上述第2圖之例子作比較時，從 第5〜8列之噴墨頭5 1所分割的區塊內之噴墨噴嘴5 2之配 列爲規則性的，噴墨頭5 1之噴墨噴嘴5 2之配置成爲規則 性配列，噴墨頭5 1之製作也無需特別配置之考量即容易完 成。 接著，根據本發明之塗布裝置，說明遍布整面塗布區 域以均勻塗布著色材料之構造。 (第1實施形態） 本發明之第1實施形態1係說明一種方法透過本發明 之塗布裝置適量地將著色材料塗布塡充於可對應代表性的 37吋大小之闻精細電視顯示器的寬度Ι80μιη、長度530μη] 大小之像素上。 此情形之噴墨噴嘴52的配列密度係1 44 0 dpi，針對與 塗布掃描方向成直角方向之配列係相同於顯示於第2B圖 、第4B圖之滴落痕跡的配置，所噴出的液滴相互位置錯開 ，亦即塗布間隔（間距）爲1 7 · 64 μιη之間距，從1個噴墨 噴嘴52之材料噴出量3 Op 1(微微升）、25個噴墨頭合計 1500pl，亦即，從噴墨噴嘴52噴出/塗布50發噴墨的噴墨 頭著色材料。 -20 - 200914141 此外，如上所述，本發明者們確認對於作爲彩色濾光 片之色度的容許値在整個有效畫面區域是千分之3，且對 用以實現此色度容許値之著色材料之塗布量偏差的容許値 爲3 %以下。以此作爲彩色濾光片之目標規格，針對符合 此規格的本發明之塗布裝置加以說明。 藉噴墨噴嘴5 2之事先滴落痕跡的量測，得知滴落在玻 璃基板2之液滴平均直徑爲40 μιη。因此，爲了避免著色材 料越過玻璃基板2上所形成的矩陣狀遮光部而混入鄰近之 像素，將從長度530μιη之像素兩端緣起到較著色材料滴落 痕跡之半徑値20μηι位置還更外側的區域設爲禁止噴出區 域。亦即，塗布係藉由從位於影像長度中央4 9 0 μ m之間的 噴墨噴嘴52起噴出，在玻璃基板2所形成的各像素中心進 行著色材料之噴出/塗布。因而，基於1440 dpi之噴墨噴嘴 5 2的配列/配置密度，可以將著色材料噴出/塗布於此一條 像素區域的噴墨噴嘴52之數目將成爲27。 另一方面，藉由依照控制裝置1 3所進行的控制，相對 於含有彩色濾光片有效畫面區域的整個玻璃基板2之各像 素，藉由將噴出指令傳送至由所對應的27個噴墨噴嘴52 選出的噴墨噴嘴 52，噴出/塗布著色材料，對於 5 3 0 μΐηΧ 180μιη大小之一條像素噴出150 Op 1的著色材料，進行總量 控制在3 %以內之著色材料噴出量容許値的噴出控制。 從各自噴墨噴嘴5 2之著色材料的噴出量係藉由經事 先進行各自裝備的噴墨頭5 1之試射所得的量測而預先加 以確認。或者，也可以根據後述之測試圖案檢查而加以量 -21 - 200914141 測。如此方式，於塗布開始前，基於最新狀態下之測試圖 案塗布中之滴落痕跡的直徑或體積等資料所儲存的數値， 或是上述事先量測各自噴墨頭51之噴墨噴嘴52噴出量的 資料，使彩色濾光片有效畫面區域中之色度規格得以滿足 之方式來進行噴墨噴嘴52之選擇與噴出數之控制。 第5圖係表示於本發明所用之噴墨頭5 1的寬度方向所 配列的噴墨噴嘴5 2之噴出速度的圖形。縱軸係液滴速度 (m/s )’橫軸係噴墨噴嘴之編號。於此，顯示測定1個噴 墨頭之液滴速度的結果，噴墨頭噴嘴係測定2 5 6個分。根 據此結果，藉由顯示兩端之噴嘴數的噴出速度約低10〜15 %。於此圖形所示之噴墨頭51的噴出速度，與從噴墨頭 5 1之著色材料噴出量的相關確認，已確認因低的噴出速度 所得的著色材料噴出量之降低最大爲8%。 另外’雖然1440dpi之噴墨噴嘴52的配列間距P爲 17.6 4 μιη ’但是，基於構成依照現狀基本噴墨頭方式所得的 噴墨噴嘴之構件尺寸/機構上等限制，此數字藉1個噴墨頭 來實現是有困難的。在此，藉由將噴墨噴嘴5 2之配列間隔 爲360dpi (間距爲70.56μιη)的噴墨頭重疊4列分，實現 Τ 1 440dpi 〇 另一方面，位於噴墨頭5 1所形成的2 5 6個噴墨噴嘴 52兩端的6個噴墨噴嘴52之噴出速度爲低的，著色材料 之噴出量低8%。另一方面，爲了確保每一條像素所要求 之噴出總量150〇pl，必需從噴墨噴嘴52噴出50發。亦即 ’包含從噴出量低的噴嘴之液滴，並且爲了達成對於一條 -22 - 200914141 像素之噴出量變動的變動値爲3%以內，從噴出量少的噴 墨噴嘴之著色材料的噴出數必須爲18發以下。 從位於像素上之噴墨噴嘴5 2的總噴出量變少之最差 情況’係如上所述之噴墨頭5 1端部之噴墨噴嘴5 2負責一 條像素塗布之情形。更詳言之，一條像素之著色材料的塗 布區域端部與噴墨頭5 1之端部的噴墨噴嘴5 2相一致之情 形。於此情形下’根據由著色材料容許噴出區域之長度 (49(^!1〇與1個噴墨頭中之噴墨噴嘴52的配列間距（7〇6_) 所算出之値6·95 (=490/7〇·6)，位於噴墨頭兩端的所有6 個噴墨噴嘴5 2皆於一條像素中緩慢移動。 從在噴墨頭5 1之端部所配列形成之噴出量低的噴墨 噴嘴52’ 3發著色材料之噴出/塗布將成爲必要。但是，相 對於容許限制數爲1 8以下之條件，實際上，由5 0發液滴 之用量’例如藉25個各自的噴墨噴嘴52，藉2發之噴出/ 塗布而完成。 因此’藉由將噴墨頭51分割成複數（η)個以作成分 割數（η) +1以上的列之噴墨頭51構造的塗布裝置，並藉 由以噴墨方式以將著色材料塗布於符合例如3 7吋以上之 類的大型高精細電視顯示器，能以低成本方式製造高精細/ 高品質之彩色濾光片。 於此情況中，相對於容許限制數1 8，因爲能夠將從噴 出量少的噴墨噴嘴52之著色材料的噴出/塗布而控制在最 多12發，容限度（margin)(安全率）將成爲1.5。 另外，要求有一條像素尺寸爲小的彩色濾光片之情形 -23 - 200914141 下’關於從噴出量少的噴墨噴嘴5 2所容許的總噴出數，係 相對於實現色度容許値之著色材料塗布量偏異的容許値Μ (百分率値），若將噴出量從較端部附近之其他噴墨噴嘴 5 2僅低V (百分率値）的噴墨噴嘴5 2所噴出的液滴總數J ’與利用每一像素之總噴出液滴數S之關係以控制於符合 下列（1)式之噴墨噴嘴52之選擇，及從其所選出之噴墨 噴嘴的噴出液滴數S，則可製造符合規格要求之彩色瀘光 片。 ( JxV ) /S ... ( 1 ) 實際上，根據此容許噴出液滴數，限制從1個噴墨噴 嘴52之噴出數，利用位於兩端噴出量低的噴墨噴嘴52與 除此以外之其他噴墨噴嘴5 2之噴出數和的數目以噴出/塗 布控制，進行符合彩色濾光片規格所需要之著色材料的塗 布。 顯示於第2A〜2C圖及第4A〜4C圖所示之噴墨頭桿5 係用於塗布紅（R)、綠（G)、藍（B)中任一種著色材 料，尤其，雖未圖示，但亦設置有爲了塗布其他著色材料 之噴墨頭桿。 第6圖係顯示爲了選擇噴墨噴嘴52而用以控制噴墨頭 桿5之構造的槪略方塊圖。於此圖之構造係具有：掃描照 相機9之量測手段；輸入利用掃描照相機9所得的拍攝資 料（例如，對應於使所有的噴墨噴嘴5 2予以動作狀態之拍 攝資料），算出從各噴墨噴嘴52所噴出的著色材料滴落痕 跡之位置（X軸座標、Y軸座標）及著色材料之直徑、面 -24- 200914141 積或體積之影像處理裝置1 1 ;記憶/保持所算出之著色材料 的直徑、面積或體積等之資料或噴出資料表之保持手段的 記憶體1 2 ;及考量已保持於記憶體1 2之著色材料的直徑 、面積或體積等之資料或噴出資料表內之資料以選擇要予 以動作之噴墨噴嘴5 2，使含有負責授受外部周邊裝置之資 料或控制信號等之輸入輸出界面等周邊電路或演算電路等 之噴墨頭桿5而予以驅動/停止之控制手段的控制裝置！ 3 〇 ^ 本發明之彩色濾光片製造裝置係藉由裝備如此之量測 手段（掃描照相機9 )及保持手段（記憶體1 2 )，能夠更 新每次進行根據噴墨頭桿5所造成之塗布動作而保持於記 憶體12中之面積、直徑或體積，當進行根據噴墨頭桿5所 造成之下1次塗布動作時，能夠考量最新之面積、直徑或 體積以選擇要予以動作之噴墨噴嘴5 2而控制輸出噴出指 令等之噴墨頭桿5的塗布動作。 此外，控制裝置1 3較佳爲根據量測從各自噴墨噴嘴 52噴出著色材料之滴落痕跡的體積等之資料、或從保持於 噴出資料表內之資料等記憶體1 2的各自噴墨噴嘴5 2之噴 出量資料，使應滴落於各自像素區域2 3之著色材料的供應 量成爲一定之方式，並根據要噴出之噴墨噴嘴52的選擇與 著色材料之液滴噴出數等，來將整個塗布區域上之著色材 料的供應量應予以平坦化’以控制相對應之噴墨頭5 1與噴 墨頭桿5，其結果，成爲符合作爲彩色濾光片之色度的要 求。 -25 - 200914141 或者’根據量測從各自噴墨噴嘴52噴出著色材料之滴 落痕跡而得的體積等之資料、或從於噴出資料表之資料等 記憶體12所保持的各自噴墨噴嘴52之噴出量資料，嚐試 以應滴落於各自像素區域2 3的著色材料供應量之最適化 作爲目標，較佳爲根據要噴出的對應噴墨噴嘴52之選擇與 從其噴墨噴嘴52之液滴數的噴出指令等，應使著色材料之 供應量成爲容許誤差範圍內，控制相對應之噴墨頭5 1及噴 墨頭桿5以使整個塗布區域之塗布量成爲色度之容許範圍 內’其結果，成爲符合作爲彩色濾光片之色度的要求。 在前者之情形下，能夠顯著提高著色材料之塗布品質 。相反的，在後者之情形，能夠兼顧著色材料之塗布品質 的維持與增加可使用之噴墨噴嘴52數目。 接著，說明上述構造之彩色濾光片製造裝置的作用。 第7圖係爲了說明著色材料之塗布及測試圖案之檢查處理 的時序圖。結束基板之搬出而進行基板搬入。其後，使照 相機架予以移動而進行對準記號之檢測。於復路中將照相 機架配置於既定位置之後，利用塗布架以進行往路塗布。 於第1次之塗布中，也可以塗布測試圖案，此情形係 爲了塗布的測試圖案之檢查而再度使照相機架予以移動。 若測試結束後，進行第2次塗布。還有，不進行測試圖案 檢查之情形，當然也可以僅爲第1次之往復塗布。 第8圖係顯示在玻璃基板2上已形成6個彩色濾光片 CF的狀態，而且’每個各著色材料之測試圖案Tp已形成 於較彩色濾光片CF更外側之剩餘區域。 -26 - 200914141 第9圖係放大顯示測試圖案TP形成部之圖形，經由照 相機架6所檢查之物，係顯示根據3色分之噴墨噴嘴5 2所 形成的測試圖案TP。此測試圖案TP係在玻璃基板上，由 各噴墨噴嘴5 2所噴出的著色材料之滴落痕跡形狀物。 著色材料彼此間係相互分離並呈鋸齒狀滴落。藉由如 此方式，能透過照相機架6之掃描照相機9以檢查測試圖 案TP，量測墨水滴落痕跡之X、Y座標，同時在必要時， 亦量測墨水滴落痕跡之直徑、面積或體積。而且，墨水滴 落痕跡之形狀不正確或未滴落等之噴出不良被檢測出之情 形下，如後所述，能夠立即進行必要之處理（彩色濾光片 之製造中斷、噴墨頭51之更換等），故能夠使不良製品在 最小限度內。 因爲滴落痕跡爲鋸齒狀，所以噴出的著色材料彼此間 之間隔爲大的，於量測時之影像處理具有裕度，能夠提高 檢查精確度。 第1 〇圖係說明測試圖案之一檢查處理例子的流程圖 。還有，於第7圖之時序圖中，基於第10圖之流程圖的處 理則未顯75。 (測試圖案之檢查順序） 根據第1 0圖，說明有關測試圖案之檢查順序。 於步驟SP1，藉由未圖示之搬入機器人等，進行朝向 吸附台3之測定用玻璃基板的搬入後，於步驟SP2，藉由 未圖示之外形限制手段，進行測試用玻璃基板之槪略定位 。而且，於步驟S P 3，藉由吸附台3，測試用玻璃基板將被 -27 - 200914141 吸附’之後’於步驟S P4，使照相機架6予以往動，於步 驟S P 5 ’測試用玻璃基板之對準記號被檢測出，γ方向之 定位與Θ (繞Z軸之旋轉點）方向之對準，於步驟SP6，使 照相機架6予以復動。 接著’於步驟SP7，使塗布架4予以往動/復動的同時 ，塗布架4之X座標値被輸出，於步驟8 P 8，根據X座標 値’判定塗布架4是否到達測試圖案塗布位置的同時，塗 布架4未到達測試圖案塗布位置之情形下，再度進行步驟 SP7、步驟SP8之處理。 於步驟S P 8 ’判定塗布架4已到達測試圖案塗布位置 之情形下’於步驟SP9’使塗布架4之移動停止，噴墨頭 桿5之所有噴墨噴嘴52噴出著色材料之液滴，於步驟Spi〇 ’塗布架4將復動，在待機位置予以停止。 接著’進行測試圖案（TP )之拍攝及檢查。於此，於 步驟SP 1 1，使照相機架6予以往動，於步驟SP丨2，判定照 相機架6是否到達測試圖案檢查位置。在照相機架6尙未 到達圖案檢査位置之情形下，再度進行步驟S P n、步驟 SP12之處理。 而且，於步驟s P 1 2 ’判定照相機架6到達測試圖案檢 查位置之情形下，於步驟SP 1 3，使照相機架6予以停止， 於步驟SP 1 4，使掃描照相機9向Y方向移動，檢測測試圖 案的同時，直到終端拍攝測試圖案，之後，掃描照相機$ 將回到Y方向。 結束步驟s P 1 4之處理後，於步驟s P 1 5，使照相機架6 -28 - 200914141 予以復動，於待機位置予以停止。藉由如此一連串之處理 ，測試圖案（TP )拍攝及檢查作業將結束，於步驟s P 1 6 ’ 玻璃基板2之吸附狀態將被解除、排出。 另外，與步驟SP〗5、步驟SP16之處理並行，於步驟 SP 1 7，影像處理根據掃描照相機9所得的檢測信號，量測/ 演算X、Y座標與著色材料之滴落痕跡的直徑、面積及/或 體積，於步驟SP 1 8，輸入從測試圖案之著色材料滴落痕跡 檢測出的座標位置資訊等，於步驟SP19，輸入玻璃基板2 上所有像素的位置資訊（座標値），於步驟SP20，輸入其 他之參數，於步驟SP2 1，進行資料表之演算/作成，於步驟 SP 22，將演算結果記憶於噴出資料表中，結束影像處理及 量測/演算的一連串之處理。 (彩色濾光片之製造順序） 接著，藉由顯示於第11圖之彩色濾光片的製造流程圖 ’說明有關彩色濾光片之製造處理的順序。 爲了實現裝置之有效運轉，期望從塗布架之既定開始 位置起’以「一筆畫」就結束塗布動作之方式來設定噴墨 噴嘴有效之寬度，而對必要之塗布區域，使塗布架1次往 復動作後就完成。 首先’於步驟SP31，朝向根據未圖示之搬入機器人等 之吸附台3以進行玻璃基板2搬入後，於步驟SP32，根據 未圖示之外形限制手段，進行玻璃基板2之槪略定位。而 且，於步驟S P 3 3，藉由吸附台3，玻璃基板2將被吸附， 之後’於步驟SP34，使照相機架6予以往動，於步驟SP35 -29- 200914141 ，玻璃基板2之對準記號被檢測出，藉由進行γ方向、θ 方向之定位，進行玻璃基板2之對準，於步驟S Ρ 3 6 ,使照 相機架6予以復動。 然後，於步驟SP3 7，判定爲往路塗布或復路塗布。 於步驟SP37，判定爲往路塗布之情形下，於步驟SP38 ，使塗布架4予以往動的同時，輸出塗布架4之X座標値 ;相反的，於步驟SP3 7，判定爲復路塗布之情形下，於步 驟SP39，使塗布架4予以復動。 然後’步驟SP38之處理（往動）、或是步驟SP39之 處理（復動）予以進行後，於步驟SP40，判定塗布是否已 進行至塗布區域之終端。 於步驟S P 4 0，判定塗布尙未進行至塗布區域終端之情 形下，於步驟SP4 1，比較塗布架4之X座標輸出信號與噴 出資料表’於步驟SP42，判定X座標與噴出資料是否相— 致。於此，若X座標與噴出資料相一致時，於步驟SP43 ’著色材料之液滴將經由噴墨噴嘴5 2予以噴出，若X座標 與噴出資料不一致時，則回到步驟S P 3 7。 針對此步驟S P 4 3中之著色材料的液滴噴出動作，以下 ，詳加說明。 如第2圖之說明所述，於噴墨頭桿5所配列的複數列 之噴墨頭5 1兩端的噴墨頭5 1之中，從最外側起，較以區 塊分割的數目之第（η )列噴墨頭5 1爲外側區塊之第1〜3 列陰影的區塊係位於塗布對象物之塗布區域框外，必須禁 止噴出著色材料’藉由根據控制裝置13所導致之適切控制 -30 - 200914141 ，使位於此部分之噴墨噴嘴52所有的噴出予以停止，避免 著色材料平白噴出而加以構成。 針對其他之噴墨噴嘴5 2 ,藉由控制裝置1 3，從各噴墨 噴嘴5 2所噴出的滴落痕跡丽量測出的著色材料體積等之 資料、或噴出資料表係根據從已被保存於記憶體1 2的各噴 墨噴嘴52之噴出量資料，使應滴落於各自像素區域23之 著色材料供應量成爲一定之方式來選擇要噴出之噴墨噴嘴 52的同時，使著色材料之液滴噴出數成爲適當之方式，來 使相應的噴墨頭51及噴墨頭桿5進行動作，進行著色材料 液滴噴出動作之控制。其結果，著色材料液之供應量係以 整個塗布區域予以平坦化，能夠符合作爲彩色濾光片之色 度要求的規格。 或者，藉由控制裝置13，從各噴墨噴嘴52所噴出的 滴落痕跡而量測出的著色材料之體積等資料、或噴出資料 表係根據從已保存於記憶體12的各噴墨噴嘴52之噴出量 資料，嚐試以應滴落於各自像素區域23之著色材料供應量 最適化爲目標，將著色材料之供應量控制於容許誤差範圍 內之方式，來選擇要噴出之噴墨噴嘴52，同時’使從其噴 墨噴嘴52之液滴噴出數成爲適當之方式來使相對應的噴 墨頭5 1及噴墨頭桿5予以動作，進行著色材料之液滴噴出 動作的控制。其結果，能夠使著色材料之供應量收斂於容 許誤差範圍內，使整個塗布區域之塗布量收斂於符合作爲 彩色濾光片要求的色度容許範圍內之方式來進行。 接著，於步驟s P 4 0 ’根據X座標値以判定塗布是否已 200914141 進行至終端。 而且，於步驟SP42，判定X座標與噴出資料未—致之 情形，另外，進行步驟SP43處理之情形下，再度回到步驟 SP37，進行往路、復路之判定。 於步驟SP40，判定塗布已進行至終端之情形下，於步 驟SP44，判定是否爲第1次往路的塗布’爲第1次往路塗 布之情形下，於步驟SP45，使塗布架4移向測試圖案塗布 位置，於步驟SP46，藉由噴墨頭桿5以形成測試圖案。具 體而言，使噴墨頭桿5移向X方向，同時，藉由從所有的 噴墨頭51之噴墨噴嘴52，選擇進行噴出動作之噴墨噴嘴 52以噴出/塗布著色材料，而形成鋸齒狀之測試圖案。 於步驟SP44，判定不是第1次往路塗布之情形，另外 ，進行步驟SP16處理之情形下，於步驟SP47，判定是否 已進行爲了塗布整個塗布區域之既定次數的塗布。 於步驟S P 4 7，判定塗布次數未到達既定次數之情形下 ，於步驟SP48，使塗布架4停止，使噴墨頭桿5移向Y方 向，再度進行步驟SP47之判定。Y方向之移動距離係根據 依照噴墨頭桿5之規格所導致之噴墨噴嘴52的有效塗布寬 度而加以決定，利用偶數次之掃描，使塗布區域全寬無間 隙地完成塗布。 另外，於步驟s P 4 7，判定已進行既定次數塗布之情形 下，於步驟SP49，結束塗布處理，於步驟SP5〇’藉上述第 1 〇圖說明的「TP拍攝流程」而得到，根據從所有的噴墨噴 嘴52噴出的著色材料滴落痕跡之影像，雖然各自噴墨噴嘴 -32 - 200914141 52之噴出不良，進行是否已超過塗布區域上成爲對象之像 素單位範圍所容許的數目之判定。 判定之結果，已確認超過容許範圍之噴墨噴嘴5 2的噴 出不良發生密度之情形下，移向洗淨流稈，若爲容許範圍 內，於步驟SP51，解除因吸附台3所造成之玻璃基板2之 吸附，藉由未圖示之搬出機器人等搬出玻璃基板2 ’於此 狀態下結束一連串之處理。 另一方面，於步驟SP37 ’被判定爲復路之情形下’與 步驟SP39之塗布架的復路移動並行，經由第1〇圖所說明 的「TP拍攝流程」，移向該步驟SP49之塗布結束的處理 〇 於上述之例子中，係說明相對於吸附台3，使塗布架4 移向X方向的實施形態，但是，亦可建構成固定塗布架4 而使吸附台3移動。 (第2實施形態） 於上述第1實施形態中，僅藉由選擇噴墨噴嘴5 2，使 相對於彩色濾光片上之像素的總塗布量接近於必要塗布量 之方式來控制，未進行使從噴墨噴嘴52所噴出的每1次噴 出量予以改變之控制。但是，較佳爲更具備下列手段： 噴嘴控制手段（未圖示），將具有複數個噴墨頭5 1之 噴墨頭桿5設置於塗布架4，使從噴墨頭51內之噴墨噴嘴 52所噴出的每1次噴出量改變；與上位控制手段（未圖示） ，以使從噴墨頭51內之各噴墨噴嘴52所噴出的每1次噴 出量之合計値接近於每個噴墨頭51既定量之方式來控制 -33 - 200914141 該噴嘴控制手段。 例如’噴嘴控制手段係藉由使外加於噴墨噴嘴5 2之驅 動電壓予以改變’使每1次噴出之噴出量改變。 另外’例知上位控制手段係輸入根據掃描照相機9所 得的噴出量不均与性資料等，接近於以噴墨頭51內之各噴 墨噴嘴52之每1次噴出的合計噴出量（噴墨頭51之每1 次噴出的噴出量）爲目標噴出量之方式，來進行相對於各 噴墨噴嘴5 2之控制手段的動作指令。 此情形下，能夠使塗布量符合每個噴墨頭5 1。若進一 步說明’即使特定之噴墨頭5 1受到墨水黏度等之影響而使 噴出量變低之情形下’藉由根據上位控制手段以設定相對 於各噴嘴控制手段的動作指令，並根據噴嘴控制手段以改 變外加於噴墨噴嘴5 2之驅動電壓等，也能夠抑制與其他噴 墨頭51之間的噴出量偏差。除了能夠期待穩定噴出量之噴 墨頭51兩端的數個噴墨噴嘴52以外，噴墨頭51內之噴墨 噴嘴5 2也位於內側之噴墨噴嘴5 2中，當然，雖然具有微 小的偏差，但是對於如此微小之噴出量偏差，能夠根據顯 示於上述第1實施形態之形態加以因應。 (第3實施形態） 如上所述，能夠藉第1及第2實施形態所示之噴墨噴 嘴5 2之區塊組成，遍佈整面塗布區域以均勻塗布著色材料 。然而，根據噴墨頭51，其零件製程中之零件加工的特異 現象，可列舉：對於從各噴墨噴嘴5 2所噴出的著色材料之 噴出速度，看得到特徵上強弱分布。使用具有如此噴出速 -34 - 200914141 度之周期性固有強弱分布特性之噴墨頭51以構成噴墨頭 桿5之情形，根據噴墨噴嘴52之區塊組成的方法，擔憂屬 特徵之噴出速度的強弱分布特性將累積，其結果，彩色爐 光片之色度上的周期不均勻性將顯現。 例如，第1 2圖係從利用1個噴墨頭所量測之各自噴嘴 所噴出的著色材料噴出速度的強弱分布，將其作成單純圖 案所示之圖形。於此，所用之噴墨頭5 1係以固有強弱分布 之寬度（於噴墨頭中所形成的每12個噴嘴）且具有著色材 料之噴出速度的強弱分布圖案。如該第12圖所示，得知著 色材料之噴出速度爲上述之固有強弱分布，於本例中爲每 1 2個呈現強弱分布。 第1 3 A圖之圖形係藉無對策之方式組合配列具有從第 12圖所示之1個噴墨頭之各噴嘴著色材料噴出速度的強弱 分布（變動）圖案之複數個噴墨頭之圖形。於第1實施形 態所用之噴墨頭桿5係如第3圖所示，由於所分割的每個 區塊中，使噴墨頭5 1各錯開1間距，使用藉每1 2個具有 著色材料噴出速度的強弱分布圖案之噴墨頭51以噴出著 色材料之情形下，噴墨頭51中之此噴出速度的強弱分布將 被累積，如第1 4 A圖所示，認爲總和之噴出速度的強弱分 布圖案係已顯著化之圖形。 如此之情形，消除總和之噴出速度的強弱分布圖案顯 著化問題之方法，如第1 3 B圖所示，使特徵的強弱分布得 以消除，較佳爲採用如下之方法：使應錯開固有噴出量之 波峰而組合於各自噴墨頭之複數個噴墨頭51各錯開固有 -35 - 200914141 強弱分布之寬度除以配列數m之分割長度1 ° 於此，分割長度1更佳爲採用最接近於下列數値：在 噴墨噴嘴行進方向，以列作配置的噴墨頭之噴墨頭噴嘴間 錯開之間距的整數倍。藉由配列複數個噴墨頭’因爲得到 既定之塗布間距’若使分割長度1成爲間距之整數倍時’ 因而能夠無塗布間距的錯開’並且減低噴墨頭之噴出速度 的強弱分布。 第13B圖及第14B圖係顯示實施改善著色材料噴出速 度的強弱分布圖案對策之事例。於此’以固有強弱分布之 寬度（每12個）且將具有著色材料噴出速度的強弱分布圖 案之噴墨頭5 1除以配列數5的各間距錯開而予以組合。因 爲此固有強弱分布之寬度係起因於噴墨噴嘴製作時之加工 步驟，並非特定之値。因而，如第1 2圖’實際上錯開之距 離係嚐試分析噴出速度的強弱分布狀態而成爲認定之既定 距離。由第14 B圖可得知，即使累積有噴墨頭51中之此 噴出速度的強弱分布（變動），予以相互抵消’總和之噴 出速度的強弱分布（變動）圖案也將變成不顯著。其結果 ，即使以固有強弱分布之寬度且具有著色材料噴出速度之 強弱分布圖案的噴墨頭5 1而噴出著色材料之情形下’也能 夠簡單地防止彩色濾光片之色度呈現周期不均勻性。 〔產業上利用之可能性〕 以上，針對本發明之塗布裝置，說明代表性應用例可 適用於液晶顯示裝置等之彩色濾光片製造之實例，此塗布 裝置不僅爲如此之彩色濾光片的製造裝置，也能夠適用於 -36 - 200914141 其他平面構件上塗布著色材料或覆膜材料之裝置。 【圖式簡單說明】 第1圖係有關本發明申請案之一實施形態之塗布裝置 的外觀斜視圖。 第2A〜2C圖係顯示噴墨頭桿中之噴墨噴嘴區塊分割 的構造與配列一例之圖形；第2A圖係顯示區塊分割之構造 ，第2B圖係顯示所分割的區塊噴出位置之配列；第2C圖 係顯示於噴出位置所噴出的各區塊構造之表。 第3圖係槪略顯示對應於第2A圖之噴墨頭桿中之噴墨 噴嘴配置例的構造圖。 第4A〜4C圖係顯示噴墨頭桿中之噴墨噴嘴區塊分割 的構造與配列另一例之圖形；第4 A圖係顯示區塊分割之構 造，第4B圖係顯示所分割的區塊噴出位置之配列；第4C 圖係顯示於噴出位置所噴出的各區塊構造之表。 第5圖係顯示從噴墨頭中之各噴墨噴嘴所噴出的著色 材料噴出速度之圖形。 第6圖係顯示使噴墨噴嘴得以選擇/噴出動作的控制機 構部構造方塊圖。 第7圖係塗布動作及塗布圖案之檢查處理動作的時序 圖。 第8圖係顯示將6個彩色濾光片與測試圖案塗布於玻 璃基板上狀態的平面圖。 第9圖係顯示部分放大第8圖中之測試圖案形成部的 放大平面圖。 -37 - 200914141 第1 〇圖係爲了說明測試圖案之檢查處理順序的流程 圖（一例）。 第1 1圖係爲了說明彩色濾光片之製造處理順序的流 程圖（一例）。 第1 2圖係使利用第2 Α圖所示之噴墨噴嘴之配列所量 測的著色材料噴出速度的強弱分布予以單純圖案化之圖形 〇 第13A〜13B圖係藉有/無對策之方式來組合從第12 圖所示之1個噴墨頭的各噴嘴之著色材料噴出速度的強弱 分布圖案；第13A圖係顯示藉無對策之方式予以組合，從 配列的複數個噴墨頭之各噴墨噴嘴所噴出的著色材料噴出 速度的強弱分布之圖形；第13B圖係顯示從實施均等錯開 噴墨頭橫向位置之對策所配列之情形的各噴墨噴嘴所噴出 的著色材料噴出速度的強弱分布之圖形。 第14A〜14B圖係顯示各噴墨頭之著色材料噴出速度 總和之圖形；第1 4 A圖係顯示從無對策之各噴墨噴嘴所噴 出的著色材料噴出速度總和之圖形；第1 4B圖係顯示從實 施均等錯開所組合的噴墨頭橫向位置之對策之情形的各噴 墨噴嘴所噴出的著色材料噴出量之總和。 【主要元件符號說明】 1 機台 2 玻璃基板 3 吸附台（保持台） 4 塗布架 -38 - 噴墨頭桿 照相機架 對準照相機 掃描照相機 影像處理裝置 記憶體 控制裝置 像素區域 噴墨頭 噴墨噴嘴 噴墨頭區塊 噴墨頭區塊 噴墨頭區塊 噴墨頭區塊 塗布區域 區域 -39 -BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating apparatus which is an ink jet head of a nozzle for holding a material held on a stage. [Prior Art] Recently, the image display device (display) or the small-size image display device of the screen of the information terminal image display technology has been put into practical use, and the requirements for high-quality display machines at low cost are required. It has become increasingly strong. As a color filter for the key components of the device, various methods for manufacturing such a color filter and a conventional technique are also adopted for the method and the manufacturing device, and the substrate can be exemplified by achieving the mask. In the technique manufacturing method and manufacturing apparatus in which the light-shielding color material in which the matrix is formed is applied to the grid of the light-shielding portion, the RGB three colors are used in the respective coloring steps, and the shielding member (mask) is shielded for the purpose of shielding light or the like. As necessary. In addition, in terms of the number of steps, there is still a problem of high manufacturing cost based on the use. Recently, the method of the above-described technique, that is, using a device, from the inkjet nozzle of the inkjet head, the coloring material is supplied through a plurality of inkjet coating objects, and the coating is progressing, even for a large screen, very high. Made with precision. The image displayed in such a picture shows the image required to display the color filter. The various materials of the optical function developed in the manufacturing apparatus will be processed by the coating technique. But, so. The coloring steps are independent, and the viewpoint of the device and the member requiring extremely high precision has been proposed to replace or apply the coating charge provided with the ink jet head to the light-shielding substrate or the like on which the matrix of 200914141 is formed, A color filter is produced (see Patent Document 1 and Patent Document 2). Patent Document No. JP-A-2002-273868 Patent Document 2: Japanese Patent Laid-Open No. 3 92 5 5 2 5 SUMMARY OF INVENTION Technical Problem to be Solved by the Invention Even if the screen size is small and the coating area is small In the case where it is intended to be applied to a large number of substrates simultaneously in parallel, as in the case where the coloring material is applied to a large substrate of a large display, a large amount of the coloring material must be supplied to the coating device. In order to efficiently perform the coating as described above by using the ink jet head, it is necessary to supply/coat the material to a large coating area (width) by scanning (moving) of the coating device once, and it is also necessary to arrange a plurality of ink jets for coating the coloring material in parallel. head. However, when the ink jet heads are arranged in parallel in a plurality of ink jet heads, the entire lateral width of the ink jet head after unwinding becomes larger, and a method for solving the problem is described. In Patent Document 1, the following method has been disclosed: The arrangement of the ink jet heads is such that the respective ink jet heads are arranged obliquely to the scanning direction. In addition, in order to realize a large coating area as described above with a small number of coating operations, an ink jet head having a necessary number of ink jet nozzles having a limited coating width is disposed and mounted on the moving stage, since it is necessary to The coating operation (step) to apply the coloring material becomes a large-scale coating apparatus. Such an is-shaped 'according to the arrangement of a plurality of ink-jet heads, based on the disadvantages caused by the arrangement position, for example, 'the coating amount due to the unevenness of the ink ejection amount 200914141 from the ink-jet nozzle is different, and as a result, sometimes Color unevenness will occur. In Patent Document 2, in a solution for avoiding such a drawback, it is disclosed that "a coating device having a short ink jet head and a plurality of reciprocating coating methods for introducing a substrate can suppress color unevenness. It happened. However, in the apparatus for manufacturing a color filter of Patent Document 2, the ink jet nozzle having a low discharge amount at both ends of the ink jet head is continuously applied in the direction in which the ink jet head moves in the original state. According to the coating performed by this configuration, the region coated by the ink jet nozzle having a low coating amount is continuous along the moving direction, and there is a possibility that a linear color defect occurs. In addition, when the ink jet head is disposed in a direction perpendicular to the moving direction without using a portion having a low discharge amount, a large space is wasted in the arrangement space of the ink jet head, resulting in a large apparatus. And so on. In addition, it is not economical to use nozzles at both ends of the ink jet head. In view of such a situation, the present inventors have confirmed the fact that in the development of a coating method and apparatus which are applied to the application of the inkjet head, it is known in the conventional inkjet head. The amount of coloring material ejected from each of the ink-jet nozzles of the ink-jet nozzle row constituted by one unit of the ink-jet head will be different, especially in the end, and the discharge amount of the restricted nozzle is small. Further, an object of the present invention is to provide a coating method and a coating apparatus which can realize a color filter even if an ink jet nozzle which inevitably exhibits a small amount of coloring material to be ejected by an ink jet nozzle in an end portion of an ink jet head is used. 200914141 The color is allowed to be coated with an accuracy of less than 3 parts per thousand. Further, it is preferable to provide a coating method and a coating apparatus which are equivalent to 3% or less of the allowable enthalpy of the coating amount to one pixel, in order to provide a so-called chromaticity tolerance 値. Further, in the ink jet nozzle, the distribution of the intensity of the ejection speed which is inevitably exhibited will periodically occur, and the uneven period of the ejection speed also affects the chromaticity required for the color calender. In order to solve the problem, in the present invention, an ink jet head is provided which is provided with a plurality of ink jet heads having the same shape of a plurality of ink jet nozzles, wherein 'will be equivalent to η split the ink jet head The distance of the block length of the ink jet nozzle is set to L; in the longitudinal direction of the ink jet head, an ink jet head array in which the plurality of ink jet heads are arranged at a predetermined interval is disposed; In the traveling direction of the head bar, the ink jet head array of n+1 or more is disposed, and each of the ink jet head rows is disposed so as to be shifted from the longitudinal direction of the ink jet head bar by only the distance L. Moreover, a coating apparatus is provided which has a control portion for controlling the supply of ink to the ink jet nozzles in the head of the ink jet head. That is, in the coating apparatus of the present invention, the following configuration is prepared: preparing the necessary number of ink jet heads having the number of ink jet nozzles in accordance with the coating amount per unit area, in addition to realizing the arrangement pitch density required for the ink jet nozzles thereof. The physical limitation (that is, the device capable of performing high-reliability and high durability, and performing stable coating of the coating material 'in order to constitute the limitation of the inkjet nozzle 200914141) determines the number of divisions η of the inkjet head. The ink jet nozzles are divided into a plurality of groups by the number of divisions η, and the ink jet heads are arranged in parallel in a column of (the number of divisions η + 1 ) or more. Further, a configuration is adopted in which the ink jet nozzles divided by the first portion are in a rare position, and the ink jet head positions in the adjacent rows are shifted along the longitudinal direction of the ink jet nozzle array to be regularly arranged in a row, and are arranged in a row. The ink jet nozzles in the ink jet head in the coating direction operate by controlling the discharge of the coating material. According to such a configuration, between the nozzles at the both ends of the plurality of ink jet nozzles arranged in the ink jet head and the other ink jet nozzles located at the central portion of the ink jet head, there is about 10 to 15% of the discharge speed. As a result, even if the discharge amount from the nozzles at both ends is about 8% less than that of the other ink jet nozzles, the amount of the coating material required for the coating material according to the coating area is selected by selecting the ink jet nozzle to be ejected. It is also possible to control the ejection by the number of ejections so as to control the coating amount of the respective regions in the predetermined coating region of the applied substrate to within the allowable error range. For example, in the color filter of the liquid crystal display device of the representative application example, it is possible to control the RGB color perforation chromaticity of the color filter to be within 3/1000 of the 値, especially to prevent the ejection. The amount of coating at both ends of the ink head will be insufficient, the "line unevenness" in the moving direction of the coating device, the poor color matching, and the "blank" will be concentrated, and a color filter having a predetermined color in all areas of the substrate will be produced. . That is, the coating apparatus of the present invention provides a coating apparatus for producing a high-quality color filter without requiring an expensive joint member such as a shielding member (mask), and in the conventional coating method, with peeling/ Loss of components or time that occurs during processing such as removal of the colored material of the film deposited in the previous step of 200914141 does not occur. Thereby, it is possible to manufacture a low-cost and high-quality color filter. In addition, the ink jet nozzles in the ink jet head are divided into a plurality of ink jet heads, and the arrangement of the ink jet heads is changed to an arrangement arrangement in which the blocks to be divided are shifted by one block, and the plurality of columns are arranged in a plurality of colors to further It is also possible to realize a small coating apparatus by reducing the size of the apparatus for scanning the scanning portion of the coating portion of the ink jet head equipped with RGB 3 color points. ί: In the above coating apparatus, the control means is configured to select the inkjet nozzle while the supply amount of the coating material is a certain amount, and to divide the number of divisions in the inkjet heads arranged in parallel The ink jet head is controlled in such a manner that the action of the ink jet nozzle of the outer column portion of the nth column ink jet head is stopped. According to such a configuration, by selecting the ink-jet nozzle 'the supply amount of the coating material is constant, the amount of coating toward the substrate is flattened, and the number of columns (n) is separated by the number of divisions from the both ends. The ink jet nozzle of the ink head ί" the discharge of the ink jet head of the ink jet head is stopped, which can eliminate the ejection of the ineffective coating material from the ink jet head ink jet nozzle outside the coating range, based on the viewpoint of saving resources, A preferred coating device can be made. Further, in the above coating apparatus, the control means is configured to select an ink jet nozzle while juxtaposing the supply amount of the coating material within a tolerance range, and juxtaposed among the ink jet heads arranged in the same manner. The ink jet head is controlled such that the ink jet head of the ink jet head which is arranged in the outer side of the n-th division is stopped. -1 0 - 200914141 According to such a configuration, by selecting the ink jet nozzle, the supply amount of the coating material is controlled within the allowable error range, and the discharge amount can be optimized while being separated from the both ends. The ejection of the inkjet head inkjet nozzles on the outer side of the ink jet nozzles of the (n)th column inkjet head is stopped, and the ejection of the ineffective coating material from the inkjet head inkjet nozzles outside the coating range can be eliminated, and the inkjet nozzle can be eliminated. Further improve the effect of saving resources. Further, in the above coating apparatus, the nozzle control means is provided to each of the discharge amounts ejected from the respective ink jet nozzles in the ink jet head in the ink jet head. And a higher-level control means for controlling the nozzle control means such that the total amount of discharge per ejection from each of the ink-jet nozzles in the ink-jet head is close to the amount of each ink-jet head. According to such a configuration, the nozzle control means for changing the amount of discharge per one ejection from each of the ink-jet nozzles in the ink-jet head, and the ejection of each of the ink-jet nozzles from the ink-jet head The primary discharge amount is controlled by a predetermined amount of upper control means', and the deviation of the primary injection amount can be flattened in all the coating regions of the substrate, and the chromaticity deviation in the minute region can be reduced, and the substrate can be reduced. In the region, it is also possible to control the chromaticity deviation within a predetermined range. Further, the coating apparatus described above further includes a measuring means for measuring the amount of the coating material supplied from the respective inkjet nozzles to the coating object by one operation; and the holding means, updating / Maintaining the amount of the coating material measured in each of the inkjet nozzles; wherein the control means refers to the updated/held retention data in the holding means, and controls the inkjet head to select to supply the coating material to the 200914141 An ink jet head to which an object is applied. According to such a configuration, by measuring the amount of the coating material supplied from each of the ink-jet nozzles in one ejection operation, the amount of the discharge amount measured/updated and held is 'reviewed by this data to increase/decrease/fine-tune the spray. The ejection of the ink nozzle is controlled or the amount of discharge is controlled, and the change in the discharge amount during the operation can be corrected, and the discharge amount can be continuously and uniformly maintained to perform the coating operation. Further, in the above-described ink jet head, a configuration is adopted in which the ink jet head has a natural width and a strong distribution pattern of a coloring material discharge speed, and the ink jet heads are each shifted in the longitudinal direction. The width of the strong and weak distribution is divided by the distance between the number of the inkjet heads. In the case where the coloring material is ejected with an intrinsic width using an ink jet head having a strong distribution pattern of the coloring material ejection speed, the intensity distribution of the ejection speed in the ink jet head is accumulated, and the intensity distribution pattern in which the total ejection speed is generated becomes remarkable. Worrying about it. However, according to such a configuration, by dividing the width of the inherent strength distribution in the longitudinal direction of the ink jet head by the distance between the number of the ink jet heads, even if the distribution of the discharge speed in the ink jet head is accumulated, It will also cancel each other out, and the intensity distribution pattern of the discharge speed of the sum can be made inconspicuous. As a result, even when the coloring material is ejected with a specific width by using an ink jet head having a strong distribution pattern of the coloring material discharge speed, it is possible to easily prevent the chromaticity of the color filter from exhibiting period unevenness. [Embodiment of the Invention] The best mode for carrying out the coating apparatus according to the present invention will now be described in detail with reference to the drawings. In the following, a specific color filter manufacturing apparatus for applying a coating material (coloring material) to a coating object (glass substrate) will be described. Fig. 1 is a perspective view showing the appearance of a coating apparatus (color filter manufacturing apparatus) according to an embodiment of the present invention. In the color filter manufacturing apparatus, the adsorption stage 3 (holding stage), the coating frame 4, and the camera holder 6 are supported on the machine table 1. In the adsorption stage 3 of the holding stage, the glass substrate 2 is sucked and held, and the glass substrate 2 is positioned at a predetermined position, and is driven by a drive mechanism and a guide mechanism (not shown) to rotate around the Z-axis. Also driven in the Y direction. In order to adjust the pair of glass substrates, the coating frame 4 holds the inkjet heads 5 in order to apply a coloring material to a predetermined position of the glass substrate 2, and is driven in the X direction by a driving mechanism or a guiding mechanism (not shown). The relative position of 2 is driven in the Z direction and the Y direction by a drive mechanism and a guide mechanism (not shown). The camera holder 6 holds the alignment cameras 7 and 8 for alignment of the glass substrate 2 while also maintaining the scanning camera 9' for measuring the coloring material supplied to the glass substrate 2 for alignment and coloring materials. The detection is driven in the X direction by a drive mechanism and a guide mechanism (not shown). Further, the alignment cameras 7, 8 and the scanning camera 9 are driven in the Y direction by a drive mechanism (not shown) and a guide mechanism '. The alignment cameras 7 and 8 detect the marks (not shown) of the glass substrate 2, 'the detection table 3 is rotated based on the result of the mark detection obtained by the alignment cameras 7 and 8', and/or the Y direction is moved. The alignment of the glass substrate 2 is performed. The alignment error in the X-axis direction can be corrected by adjusting the ejection time point. Thus, the X-axis and the Y-axis are used to define mutually perpendicular axes set parallel to the plane above the glass substrate 2 held by the adsorption stage 3, and the Z-axis and the Y-axis are based on the X-axis and the Y-axis. The axis perpendicular to the specified plane. In addition, if a two-dimensional CCD camera is used instead of the scanning camera 9, the height of the dripping mark is also measured, and the amount of the drop can be used according to the shape of the droplet when the drop is obtained in advance. The volume of the droplets is calculated by measuring the amount of the coloring material from each of the inkjet nozzles of higher accuracy. The ink jet head 5 is configured by arranging a plurality of ink jet heads 5 1 in a row, and each of the ink jet heads 5 1 is configured by arranging a plurality of ink jet nozzles 5 2 in a row. Further, the arrangement of the plurality of ink jet heads 51 divides all of the ink jet nozzles 52 formed by one ink jet head 51 into a plurality of blocks, and shifts the arrangement of the adjacent ink jet heads 51 by one block. The interval between the X direction and the interval of the γ direction are set so as to be equal intervals (see Fig. 3). Figs. 2A to 2C are views showing an arrangement of one of the ink jet nozzles 52 in the ink jet head 5. In Fig. 2A, one ink jet head is indicated by A-1 to A-4. That is, this shows an example in which one ink jet head is divided into four blocks (additional characters of 1 to 4). Such an ink jet head is arranged in five rows (columns to columns E) and covers the coatable region 100. In the case of covering a wide coating width, only the necessary coating area 100 is arranged side by side. That is, it is only necessary to arrange the ink jet head arrangement shown in Fig. 2A in parallel. The ink jet head 5 equipped with the ink jet head 51 group is reciprocated in the direction of the arrow X in the drawing, and the coloring material is ejected/coated from each of the ink jet nozzles 52 toward the glass substrate 2. In each column, 'the interval between the ink-jet heads corresponding to one block is -14-200914141. In order to reduce the discharge amount of the ink-jet nozzles at both ends of the ink-jet head, the discharge amount of the ink-jet nozzles at the central portion is reduced. For less impact. In addition, this interval is set to the distance L. For example, in the case of the area 1 〇 3, in the case of the ink head of the A column, the ink jet nozzle at the end is used. Therefore, the coating amount of this portion is more reduced than the amount of ink originally intended to be applied. However, in the ink jet heads of the B to D columns which can coat the same region, it is possible to apply the ink jet nozzles of the portions of the non-inking end portions. That is, if the area 103 is observed, it is coated with ink ejected from the four blocks of A-4, B-3, C-2, and D-1, and only the ink from A-4 is from other sources. The ink in the block is small. However, by making the amount of ink insufficient to be 値 or less, a color filter having no color unevenness can be obtained. That is, the present invention has the feature that the ink jet head is disposed so that the coating target region does not occur, and only the portion where the nozzle of the ink jet head is responsible for coating is used. Here, the arrangement of the ink jet heads will be described in more detail with reference to FIG. Figure 3 is a portion of the inkjet head shown in Figure 2. The inkjet head is configured with 5 columns. The direction X shows the direction of travel of the inkjet head similar to that of Fig. 2. In order to increase the coating distance to apply a high-definition pattern, it is necessary to shorten the distance of the nozzle of the ink jet head. However, the ink jet nozzle provided in one ink jet head has a limit of processing accuracy and the like, and the desired coating pitch cannot be achieved by one ink jet head. Therefore, a plurality of ink-jet heads are slightly shifted and arranged, and an ink-jet nozzle of a plurality of ink-jet heads is formed to obtain a desired coating pitch. In Fig. 3, the ink jet head block 80 of the A column and the ink jet nozzle of the ink jet head block 8 1 of the B column are placed at a desired coating pitch P by the 200914141 arrangement. Further, the ink-jet head blocks 82, 83 of the c-column are arranged in such a manner that the coating pitch is continuous. If the ink jet pitch of one ink jet head is set to HNP, the ink jet heads which are required are arranged in order to continuously arrange the desired pitch p. In Fig. 3, the ink jet heads of 4 columns are used for the continuity of the desired pitch. At the right end of the four-column ink-jet head, the arrangement of four consecutive rows of sprays is difficult due to physical limitations. Therefore, the ink jet head block 84 is arranged to further interpolate the desired distance. The symbol 80 corresponds to A-4 in Fig. 2A, the symbol 8 1 corresponds to symbol 82 corresponds to C-2, the symbol 83 corresponds to D-1, and the symbol corresponds to E -1. As a result, the positions of the ink-jet nozzles of the four ink-jet heads were set to (1)~ because the ink heads for realizing the desired pitch P were disposed. This nozzle position is repeatedly patrolled in the width direction of the inkjet head. Next, referring again to Fig. 2, the first group of ink nozzles 52 of Fig. 2C are arranged. Further, the first cluster shown in Fig. 2C shows the block viewed from the X direction. In the (1) block of FIG. 2B, the B-3 block of (2), the C-2 block of (3), and the D-1 block of the square ', the inkjet nozzle 52 is based on The arrangement of Fig. 3 is arranged such that the pixel regions are complemented without gaps, and the coloring material that controls the ejection of only the necessary number of droplets is received. The ink jet nozzles are arranged in the same arrangement pitch p and are connected to the adjacent blocks. If the second C 2 group is taken as an example, it corresponds to the E-1 block of the (1) of FIG. 2B and the B of the square. -4 block, block C-3 in (3), HNP/P in the mouth of (4) and D mouth, with E result, B-3, €84 series 4 sprays ^ ( 4 ) Explain the spray ~ Fifth A-4 Η 4) 丨 distance, command, also by the phase diagram of the order (2) D - 2 area -16 - 200914141 block inkjet nozzle 52. The third, fourth, and fifth groups also become the array of nozzle numbers that are not included in Figure 2C. Therefore, the ink jet nozzle 52 of the ink jet head 51 of the additional mark E is interposed with the nozzle array to realize physical limitation so that the ink jet head which is in close contact with other A, B and C 3 D can not be realized. The nozzles are arranged in a pitch. Since the ink jet head is oriented in the X direction, the ejection timing for a certain application target row is ejected in the order of E column, D column, C column, B column, and A column. When the ink jet head is viewed from the X side of the traveling direction of the ink jet head, it is known that it is applied by four blocks in one block. When this ordinate is referred to as a group, when viewed from the traveling direction X, five groups are seen. In Fig. 2C, the relationship between the nozzle arrangement positions of the respective groups is tabulated. In the arrangement example of the block shown in Fig. 2A, as shown in Fig. 3, the positions of the ink jet nozzles 5 2 arranged in the fifth E-column head 5 1 are set to be divided for each division. Each block is staggered by 1 pitch. In the ink jet head shown in Figs. 2A to 2C, a configuration is made in which a necessary number of ink jet heads 51 having the number of ink jet nozzles 52 per unit area are prepared, and the spray is realized. In the physical limitation of the arrangement pitch density required for the ink nozzles 52, the number of divisions η of the inkjet heads 5 1 (divided into four in the illustrated example) is determined, and the number n is divided to eject the inks. The nozzle 52 is divided into a plurality of groups (four blocks), and the ink jet heads 5 1 are arranged in parallel by a column (the number of divisions η +1 ) or more (5 columns in the illustrated example). Here, the term "physical limitation" refers to a discharge device in which a plurality of ink jet nozzles and piezoelectric elements are actually disposed, and which has high reliability and high durability, and a space limitation required for stable operation. -17- 200914141 Further, a configuration is made in which the ink jet heads 5 of adjacent columns are arranged along the longitudinal direction of the arrangement of the ink jet nozzles 5 2 by one division unit of the ink jet nozzles 5 2 divided therein The positions of 1 are arranged in a regular manner by being shifted by one pitch, and the ink jet nozzles 5 2 arranged in the ink jet heads 51 of the respective application directions are selected to control the discharge of the coating material and to operate. Actually, there are a plurality of nozzles at both ends of the plurality of ink-jet nozzles 5 2 arranged in the ink-jet head 51, and between the other ink-jet nozzles located at the center of the ink-jet head, there is about 10 at the discharge speed. A difference of ~15% results in a situation in which the ejection amount of a plurality of nozzles from both ends is about 8% less than that of other inkjet nozzles. However, according to the configuration of the ink jet head according to the present invention, by selecting the ink jet nozzles to be ejected and ejecting the number of necessary coating materials to spray the coating area, the glass substrate can be applied toward the coated glass substrate. 2 The coating amount of the respective regions in the predetermined coating region is controlled within the allowable error range. For example, in the color filter assembled in the liquid crystal display device of the representative application example, it is possible to control within 3 thousandth of the RGB color permissible color chromaticity of the color filter. In particular, it is possible to prevent the two ends of the ink jet heads 51 from being disposed on the substrate 2 due to insufficient coating amount and concentrated "line unevenness" in the direction in which the coating device moves, and the color difference is poor or "blank". All areas have color filters of a given color. That is, the coating device of the present invention does not require an expensive joint member such as a shielding member (mask) in order to manufacture a high-quality color filter, and the conventional coating method does not occur along with the above steps. Component or time loss derived from treatment such as peeling/removal of the colored material of the coating film. By this, a coating device can be provided which can manufacture high-quality color -18-200914141 filters at low cost. In addition, by arranging the ink jet heads to divide the ink jet nozzles 52 in the ink jet head 51 into a plurality of pieces, the arrangement is changed to the arrangement of the divided blocks by the predetermined pitch of each of the blocks. By arranging the plurality of columns to match the respective colors, it is possible to further reduce the size of the apparatus in the scanning direction of the coated portion of the ink jet head equipped with R Γτ B 3 color points, and it is also possible to realize a small coating apparatus. On the other hand, in addition to the arrangement example shown in Fig. 2, the arrangement of the discharge positions of the ink jet nozzles 5 2 may be in the ink jet heads 5 of the first row (in the case of the second drawing, Α In the column), a drop mark of the coloring material is formed at the position of (2), (3) or (4), and the combination is set regardless of the order/arrangement of the respective inkjet heads 51, and the inkjet according to the arrangement is arranged. The coloring material is ejected by continuously setting the coating pitch of the first 51, and a color filter matching the specifications can be produced. In addition, the blocks in which the hatching of the first to third rows are placed outside the frame of the application region of the application target are prohibited, and the necessary blocks for discharging the coloring material are prohibited, and the coloring material can be prevented from being ejected by the transparent control means. 4A to 4C are views showing another example of the arrangement of the ink jet nozzles 52 in the ink jet head 5. In this example, similarly to the example shown in Fig. 2A, the case where the ink-jet head 51 which has been divided into four blocks covers the coating region 1 〇 1 in eight rows is shown. The viewpoint of covering the application width of the coating object such as a glass substrate by the arrangement of the ink jet heads 5 1 in parallel is the same as in the second drawing. In this embodiment, it is clear from the figure that the ink jet head blocks of A to D are the same as the ink jet head blocks of E to Η. That is, although the total number of ink jets -19-200914141 in this example is small, it differs from the case where the formation position of the ink jet head nozzle of the additional symbol E is irregular, which is an ink jet head of the same specification. That is, in order to eliminate this physical limitation, an arrangement for dividing the width of the nozzles of one ink jet head is made. When the ejection sequence of the coloring material from the actual inkjet nozzle 52, that is, the respective droplet discharges, is compared with the example shown in the second drawing, the inkjet heads 5 1 of the fifth to eighth columns are divided. The arrangement of the ink jet nozzles 5 2 in the block is regular, and the arrangement of the ink jet nozzles 5 2 of the ink jet heads 51 is regularly arranged, and the production of the ink jet heads 5 is also easy to complete without special consideration. . Next, according to the coating apparatus of the present invention, a configuration in which the coloring material is uniformly applied throughout the entire coating area will be described. (First Embodiment) A first embodiment of the present invention describes a method in which a coloring material is applied in an appropriate amount by a coating device of the present invention to a width of 可80 μm, which is comparable to a representative 37-inch size fine television display. The length is 530μη] on the size of the pixel. In this case, the arrangement density of the ink jet nozzles 52 is 1 44 0 dpi, and the arrangement of the ink jet nozzles 52 in the direction perpendicular to the coating scanning direction is the same as that in the arrangement of the dropping marks shown in FIGS. 2B and 4B. The mutual positions are shifted, that is, the coating interval (pitch) is a distance of 1 7 · 64 μm, and the amount of material ejected from one inkjet nozzle 52 is 3 Op 1 (picoliter), and 25 inkjet heads are 1500 pl in total, that is, 50 inkjet inkjet head coloring materials are ejected/coated from the inkjet nozzles 52. -20 - 200914141 Further, as described above, the inventors confirmed that the allowable 値 for the chromaticity of the color filter is 3 parts per thousand in the entire effective picture area, and the coloring for realizing the chromaticity tolerance is achieved. The allowable enthalpy of the coating amount deviation of the material is 3% or less. As a target specification of the color filter, the coating apparatus of the present invention conforming to this specification will be described. The average droplet diameter of the droplets dropped on the glass substrate 2 was 40 μm by the measurement of the pre-drop marks of the ink-jet nozzle 52. Therefore, in order to prevent the coloring material from being mixed into the adjacent pixel by the matrix-shaped light-shielding portion formed on the glass substrate 2, the distance from the both end edges of the pixel of 530 μm to the outer side of the radius of the coloring material drop mark 値20 μηι is further Set to prohibit the ejection area. That is, the coating is ejected from the ink jet nozzles 52 located between the center of the image length of 490 μm, and the coloring material is ejected/coated at the center of each pixel formed by the glass substrate 2. Therefore, based on the arrangement/displacement density of the ink jet nozzles 5 2 of 1440 dpi, the number of ink jet nozzles 52 which can eject/coat the coloring material in one pixel region will become 27. On the other hand, by the control by the control device 13, the ejection command is transmitted to the corresponding 27 ink-jets by the respective pixels of the entire glass substrate 2 including the effective filter region of the color filter. The ink jet nozzle 52 selected by the nozzle 52 ejects/coats the coloring material, and ejects a coloring material of 150 Op 1 for one pixel of a size of 530 μΐηΧ 180 μm, and performs a total amount of the coloring material within a volume of 3 % to allow ejection of the coloring material. control. The discharge amount of the coloring material from the respective ink-jet nozzles 5 2 is confirmed in advance by measurement obtained by performing the test of the ink-jet heads 51 of the respective devices. Alternatively, it may be measured according to the test pattern inspection described later -21 - 200914141. In this manner, before the start of coating, the number of samples stored based on the diameter or volume of the dripping marks in the test pattern coating in the latest state, or the above-described ink jet nozzles 52 of the respective ink jet heads 51 are ejected. The amount of data is controlled such that the selection of the ink ejection nozzles 52 and the number of ejections are performed in such a manner that the chromaticity specifications in the effective filter area of the color filter are satisfied. Fig. 5 is a graph showing the discharge speed of the ink jet nozzles 52 arranged in the width direction of the ink jet head 51 used in the present invention. The vertical axis is the droplet velocity (m/s). The horizontal axis is the number of the inkjet nozzle. Here, the result of measuring the droplet velocity of one ink jet head was measured, and the ink jet head nozzle was measured for 2 5 6 points. According to this result, the discharge speed by the number of nozzles at both ends is about 10 to 15% lower. The discharge speed of the ink jet head 51 shown in this figure was confirmed in relation to the discharge amount of the coloring material from the ink jet head 51, and it was confirmed that the decrease in the discharge amount of the coloring material due to the low discharge speed was at most 8%. Further, although the arrangement pitch P of the ink jet nozzles 52 of 1440 dpi is 17. 6 4 μηη' However, this number is difficult to realize by one ink jet head based on the member size/mechanism limit of the ink jet nozzle which is obtained in accordance with the current basic ink jet head method. Here, the spacing of the ink jet nozzles 5 2 is 360 dpi (the pitch is 70. The ink jet head of 56 μm is overlapped by 4 columns to achieve Τ 1 440 dpi. On the other hand, the ejection speeds of the six ink jet nozzles 52 located at two ends of the 256 ink jet nozzles 52 formed by the ink jet head 51 are low. The amount of coloring material sprayed is 8% lower. On the other hand, in order to secure a total discharge amount of 150 pl for each pixel, it is necessary to eject 50 shots from the ink jet nozzle 52. In other words, the amount of the coloring material of the inkjet nozzle having a small amount of discharge is included, and the number of droplets from the nozzles having a low discharge amount is 3% or less, and the variation is 3% within the discharge amount of one -22 - 200914141 pixels. Must be 18 or less. The worst case where the total ejection amount of the ink jet nozzles 52 located on the pixels becomes small is the case where the ink jet nozzles 52 of the end portions of the ink jet heads 51 are as described above for one pixel coating. More specifically, the end portion of the coating region of the coloring material of one pixel coincides with the ink jet nozzle 52 of the end portion of the ink jet head 51. In this case, 'based on the length of the discharge area allowed by the colored material (49 (^! 1 〇 and the arrangement pitch of the ink-jet nozzles 52 in one ink-jet head (7〇6_)) 値6·95 (= 490/7〇·6), all of the six ink-jet nozzles 52 located at both ends of the ink-jet head are slowly moved in one pixel. The ink-jet having a low discharge amount is formed from the array at the end of the ink-jet head 51. It is necessary to eject/coat the coloring material of the nozzle 52'3. However, with respect to the condition that the allowable limit number is 18 or less, in fact, the amount of droplets by 50' is used, for example, by 25 respective ink jet nozzles. 52 is completed by the discharge/coating of the two shots. Therefore, the coating apparatus configured by dividing the ink jet head 51 into a plurality of (n) ink jet heads 51 having a number of divisions (η) +1 or more is used. Further, by applying a coloring material to a large-scale high-definition television display conforming to, for example, 37 Å or more by an inkjet method, a high-definition/high-quality color filter can be manufactured in a low-cost manner. In this case, The coloring material of the inkjet nozzle 52 which is capable of being discharged from a small amount with respect to the allowable limit number of eight Discharge / coating 12 is controlled in a maximum of hair, volume limit (margin) (safety factor) becomes 1. 5. In addition, it is required to have a color filter having a small pixel size. -23 - 200914141 The following is a description of the total number of ejections allowed from the inkjet nozzles 52 having a small discharge amount, which is relative to the color tolerance. The allowable 値Μ (percent 値) of the material coating amount deviation, the total number of droplets ejected from the ink jet nozzle 52 which is only a low V (percent 値) by the other ink jet nozzles 5 2 near the end portion 'With the relationship of the total number of discharged droplets S of each pixel to control the selection of the inkjet nozzles 52 conforming to the following formula (1), and the number of ejection droplets S of the inkjet nozzles selected therefrom, Manufacture of colored calenders that meet specifications. ( JxV ) /S . . . (1) Actually, the number of discharged droplets is allowed to be limited, and the number of ejections from one inkjet nozzle 52 is limited, and the inkjet nozzles 52 having a low discharge amount at both ends and the other inkjet nozzles 5 2 are used. The number of discharges is controlled by the discharge/coating to coat the colored material required to meet the color filter specifications. The inkjet head 5 shown in FIGS. 2A to 2C and 4A to 4C is used to apply any of red (R), green (G), and blue (B) coloring materials, in particular, although not shown. Shown, but also provided with an inkjet head for coating other coloring materials. Fig. 6 is a schematic block diagram showing the configuration for controlling the ink jet head 5 in order to select the ink jet nozzle 52. The structure of the figure has a measuring means for scanning the camera 9; and the photographing data obtained by the scanning camera 9 is input (for example, corresponding to the photographing data for causing all the ink jet nozzles 52 to operate), and the respective photographs are calculated. The position of the coloring material dropping mark (X-axis coordinate, Y-axis coordinate) and the coloring material diameter of the ink nozzle 52, and the surface processing device 1 1 of the product or volume of the surface -24-200914141; memory/holding calculated color The data of the diameter, area or volume of the material or the memory of the means for holding the data sheet 1 2 ; and the data of the diameter, area or volume of the colored material which has been held in the memory 12 or the data in the ejection data sheet The data is controlled to drive/stop the ink jet head 5 which is to be operated, and the ink jet head 5 including an input/output interface such as an input/output interface for receiving an external peripheral device or the like, and the like. Means of control! 3 〇^ The color filter manufacturing apparatus of the present invention can be updated each time according to the inkjet head 5 by being equipped with such a measuring means (scanning camera 9) and holding means (memory 1 2) The area, diameter or volume held in the memory 12 by the coating operation, when performing the next coating operation according to the inkjet head 5, the latest area, diameter or volume can be considered to select the spray to be actuated The ink nozzle 52 controls the application operation of the ink jet head 5 such as the discharge command. Further, the control device 13 preferably picks up data such as the volume of the dripping marks of the coloring material ejected from the respective ink jet nozzles 52, or the respective ink jets of the memory 1 such as the material held in the ejecting data table. The discharge amount of the nozzle 52 is such that the supply amount of the coloring material to be dropped in the respective pixel regions 23 is constant, and the number of droplets ejected from the inkjet nozzle 52 to be ejected and the number of droplets ejected from the coloring material are The supply amount of the coloring material on the entire coating area should be flattened to control the corresponding ink jet head 51 and the ink jet head 5, and as a result, it is required to conform to the chromaticity of the color filter. -25 - 200914141 or 'the measurement of the volume or the like obtained by ejecting the dripping marks of the coloring material from the respective ink jet nozzles 52, or the respective ink jet nozzles 52 held by the memory 12 such as the data of the ejection data sheet. The ejection amount data is attempted to optimize the supply amount of the coloring material to be dropped in the respective pixel regions 23, preferably based on the selection of the corresponding ink ejection nozzle 52 to be ejected and the liquid from the ink ejection nozzle 52 thereof. The ejection command of the number of drops, etc., should be such that the supply amount of the coloring material becomes within the allowable error range, and the corresponding ink jet head 51 and the ink jet head 5 are controlled so that the coating amount of the entire coating area becomes within the allowable range of chromaticity. The result is that it meets the requirements for color chromaticity as a color filter. In the former case, the coating quality of the coloring material can be remarkably improved. On the contrary, in the latter case, the maintenance of the coloring material can be maintained and the number of ink jet nozzles 52 that can be used can be increased. Next, the operation of the color filter manufacturing apparatus of the above configuration will be described. Fig. 7 is a timing chart for explaining the coating process of the coloring material and the inspection process of the test pattern. The substrate is carried out by carrying out the substrate removal. Thereafter, the photo frame is moved to detect the alignment mark. After the photographic frame is placed in a predetermined position in the re-route, the coating frame is used for coating. In the first application, a test pattern may also be applied, in which case the camera holder is again moved for inspection of the applied test pattern. If the test is completed, the second coating is performed. Further, in the case where the test pattern inspection is not performed, of course, it may be only the first reciprocal coating. Fig. 8 shows a state in which six color filters CF have been formed on the glass substrate 2, and that the test pattern Tp of each of the coloring materials has been formed in the remaining area outside the color filter CF. -26 - 200914141 Fig. 9 is an enlarged view of the pattern of the test pattern TP forming portion, and the test pattern TP formed by the three-color ink jet nozzle 52 is displayed by the object examined by the photo frame 6. This test pattern TP is a drop mark shape of a coloring material ejected from each of the ink jet nozzles 52 on a glass substrate. The coloring materials are separated from each other and dripped in a zigzag shape. In this manner, the scanning camera 9 of the camera holder 6 can be used to inspect the test pattern TP, measure the X and Y coordinates of the ink drop mark, and, if necessary, measure the diameter, area or volume of the ink drop mark. . Further, in the case where the shape of the ink drop mark is not correct or the ejection failure such as dripping is detected, the necessary processing can be immediately performed as described later (the manufacturing of the color filter is interrupted, and the ink jet head 51 is used. Replacement, etc., so that defective products can be minimized. Since the dripping marks are in a zigzag shape, the distance between the ejected coloring materials is large, and the image processing at the time of measurement has a margin, which can improve the inspection accuracy. The first diagram is a flow chart illustrating an example of a check processing of a test pattern. Further, in the timing chart of Fig. 7, the processing based on the flowchart of Fig. 10 is not shown at 75. (Checking order of test patterns) According to Fig. 10, the inspection sequence of the test patterns will be described. In step SP1, after the loading of the measuring glass substrate toward the adsorption stage 3 is carried out by a loading robot or the like (not shown), in step SP2, the glass substrate for the test is performed by the external limiting means (not shown). Positioning. Further, in step SP3, the test glass substrate is adsorbed by -27 - 200914141 by the adsorption stage 3, and then in step S P4, the camera frame 6 is moved forward, and the test glass substrate is tested in step SP 5 ' The alignment mark is detected, and the positioning in the γ direction is aligned with the direction of Θ (the rotation point around the Z axis), and the camera holder 6 is moved back in step SP6. Then, in step SP7, while the coating frame 4 is moved/re-shifted, the X coordinate mark of the coating frame 4 is output, and in step 8 P8, it is determined according to the X coordinate 値' whether the coating frame 4 reaches the test pattern coating position. At the same time, in the case where the coating frame 4 does not reach the test pattern application position, the processing of steps SP7 and SP8 is performed again. In the case where it is determined in step SP 8 'the coating frame 4 has reached the test pattern application position, the movement of the coating frame 4 is stopped in step SP9', and all the ink ejection nozzles 52 of the inkjet head 5 eject droplets of the coloring material, The step Spi 〇 'coating frame 4 will be doubled and stopped at the standby position. Then, the shooting and inspection of the test pattern (TP) is performed. Here, in step SP 1 1, the camera holder 6 is moved forward, and in step SP2, it is determined whether or not the photo frame 6 has reached the test pattern inspection position. In the case where the camera frame 6 has not reached the pattern inspection position, the processing of steps S P n and SP12 is performed again. Further, in a case where it is determined in step s P 1 2 ' that the camera holder 6 has reached the test pattern inspection position, the camera holder 6 is stopped in step SP 13 , and the scanning camera 9 is moved in the Y direction in step SP 14 . While the test pattern is being detected, until the terminal captures the test pattern, then the scan camera $ will return to the Y direction. After the processing of step s P 1 4 is completed, in step s P 1 5, the camera frames 6-28 - 200914141 are double-shifted and stopped at the standby position. By such a series of processes, the test pattern (TP) shooting and inspection operation is completed, and the adsorption state of the glass substrate 2 is released and discharged in step s P 1 6 '. In addition, in parallel with the processing of step SP5 and step SP16, in step SP17, the image processing measures/calculates the diameter and area of the drop marks of the X, Y coordinates and the coloring material according to the detection signal obtained by the scanning camera 9. And/or volume, in step SP18, inputting coordinate position information detected from the dripping mark of the coloring material of the test pattern, etc., in step SP19, inputting position information (coordinates) of all the pixels on the glass substrate 2, in step SP20, input other parameters, perform calculation/creation of the data table in step SP2 1. In step SP22, the calculation result is memorized in the ejection data table, and the series processing of image processing and measurement/calculation is ended. (Manufacturing procedure of color filter) Next, the procedure of the manufacturing process of the color filter will be described by a manufacturing flow chart of the color filter shown in Fig. 11. In order to achieve efficient operation of the device, it is desirable to set the effective width of the inkjet nozzle from the predetermined starting position of the coating frame to "end the coating operation" by "one stroke", and to make the coating frame reciprocate once for the necessary coating area. It will be completed after the action. First, in step SP31, the glass substrate 2 is carried in the adsorption stage 3 according to a loading robot or the like (not shown), and in step SP32, the glass substrate 2 is slightly positioned in accordance with the external restriction means (not shown). Moreover, in step SP3 3, the glass substrate 2 is adsorbed by the adsorption stage 3, and then the camera frame 6 is moved forward in step SP34, and the alignment marks of the glass substrate 2 are performed in steps SP35-29-200914141. It is detected that the alignment of the glass substrate 2 is performed by positioning in the γ direction and the θ direction, and the camera holder 6 is moved back in step S Ρ 36 . Then, in step SP3, it is determined that the coating is applied or re-coated. In step SP37, if it is determined that the road is applied, in step SP38, the coating frame 4 is moved forward, and the X coordinate mark of the coating frame 4 is output; on the contrary, in the case of step SP3, it is determined that the coating is applied in the re-coating process. At step SP39, the coating frame 4 is moved back. Then, after the processing of step SP38 (forward movement) or the processing of step SP39 (reaction), it is judged at step SP40 whether or not the coating has proceeded to the end of the coating region. In step SP40, if it is determined that the coating defect has not proceeded to the end of the coating area, in step SP4, the X coordinate output signal of the coating frame 4 and the ejection data table are compared in step SP42, and it is determined whether the X coordinate and the ejection data are in phase. - To. Here, when the X coordinate coincides with the discharge data, the droplet of the coloring material is ejected through the inkjet nozzle 52 in step SP43. If the X coordinate does not coincide with the ejection data, the process returns to step S P 37. The droplet discharge operation of the coloring material in this step S P 4 3 will be described in detail below. As described in the description of Fig. 2, among the ink jet heads 51 at both ends of the ink jet heads 51 of the plurality of columns arranged in the ink jet head 5, the number of the segments divided by the outermost portion is larger from the outermost side. The (η) column inkjet head 51 is a block in which the first to third columns of the outer block are shaded outside the frame of the application region of the object to be coated, and it is necessary to prohibit the ejection of the coloring material 'by the control device 13 Control -30 - 200914141, the ejection of all the ink jet nozzles 52 located in this portion is stopped, and the coloring material is prevented from being ejected in a straight white manner. With respect to the other ink jet nozzles 5 2, the information of the coloring material volume or the like of the dripping marks ejected from the respective ink jet nozzles 52 by the control device 13 or the ejection data sheet is based on The discharge amount data of each of the ink-jet nozzles 52 stored in the memory 12 is selected so that the ink-jet nozzle 52 to be ejected is selected so as to be constant in the amount of the coloring material to be dropped in the respective pixel regions 23, and the coloring material is made The number of droplet discharges is appropriately performed to operate the corresponding inkjet head 51 and the head bar 5 to control the droplet discharge operation of the coloring material. As a result, the supply amount of the coloring material liquid is flattened over the entire coating area, and can meet the specifications required as the color of the color filter. Alternatively, the information such as the volume of the coloring material measured by the dripping marks ejected from the respective ink ejecting nozzles 52 by the control device 13 or the ejecting data sheet is based on the respective ink ejecting nozzles stored in the memory 12 The ejection amount data of 52 is selected to optimize the supply amount of the coloring material to be dropped in the respective pixel regions 23, and the ink supply nozzle 52 to be ejected is selected in such a manner that the supply amount of the coloring material is controlled within the allowable error range. At the same time, the corresponding inkjet head 51 and the inkjet head 5 are operated to appropriately control the number of droplet discharges from the inkjet nozzles 52, and the droplet discharge operation of the coloring material is controlled. As a result, the supply amount of the coloring material can be made to converge within the allowable error range, and the coating amount of the entire coating region can be made to converge to conform to the chromaticity tolerance range required for the color filter. Next, in step s P 4 0 ', according to the X coordinate 値, it is determined whether or not the coating has been carried out to the terminal. Further, in step SP42, it is determined that the X coordinate and the ejection data are not in the same state, and if the processing in step SP43 is performed, the processing returns to step SP37 again to determine the forward path and the backward path. When it is determined in step SP40 that the coating has been carried out to the terminal, in step SP44, it is determined whether or not the coating of the first pass is applied to the first pass, and in step SP45, the coating frame 4 is moved to the test pattern. The coating position is formed by the ink jet head 5 at step SP46 to form a test pattern. Specifically, the ink jet head 5 is moved in the X direction, and the ink jet nozzle 52 that performs the discharge operation is selected from the ink jet nozzles 52 of all the ink jet heads 51 to eject/coat the coloring material. Jagged test pattern. In step SP44, it is determined that the coating is not applied for the first time, and in the case where the processing of step SP16 is performed, it is determined in step SP47 whether or not coating has been performed for a predetermined number of times to apply the entire coating region. In the case where it is determined in step S P 47 that the number of application times has not reached the predetermined number of times, in step SP48, the coat frame 4 is stopped, the ink jet head lever 5 is moved in the Y direction, and the determination in step SP47 is performed again. The moving distance in the Y direction is determined in accordance with the effective coating width of the ink jet nozzle 52 in accordance with the specifications of the ink jet head 5, and the application of the coating area is performed with a full width without gaps by an even number of scans. In addition, when it is determined in step s P 4 7 that the application has been performed for a predetermined number of times, the coating process is terminated in step SP49, and is obtained in step SP5 by the "TP shooting flow" described in the first drawing. The image of the dripping mark of the coloring material ejected from all of the ink jet nozzles 52 is judged whether or not the ejection amount of the respective ink jet nozzles -32 - 200914141 52 is exceeded, and whether or not the number of pixels per the target area of the application region is exceeded is determined. As a result of the determination, when it is confirmed that the discharge failure density of the inkjet nozzles 5 2 exceeding the allowable range is shifted to the cleaning flow stalk, if it is within the allowable range, the glass caused by the adsorption stage 3 is released in step SP51. In the state in which the substrate 2 is adsorbed, the glass substrate 2' is carried out by a carry-out robot or the like (not shown). On the other hand, in the case where the step SP37' is determined to be a return path, in parallel with the return movement of the coat rack of the step SP39, the "TP shooting flow" described in the first drawing is moved to the end of the coating of the step SP49. In the above-described example, an embodiment in which the coating frame 4 is moved in the X direction with respect to the adsorption stage 3 will be described. However, the coating frame 4 may be fixed and the adsorption stage 3 may be moved. (Second Embodiment) In the first embodiment, the ink jet nozzle 52 is selected so that the total coating amount of the pixels on the color filter is controlled to be close to the required coating amount, and is not performed. The amount of discharge per one discharge from the inkjet nozzle 52 is controlled. However, it is preferable to further provide the following means: a nozzle control means (not shown) for arranging the ink jet head 5 having a plurality of ink jet heads 51 on the coating frame 4 to eject the ink from the ink jet head 51 The discharge amount per discharge of the nozzle 52 is changed, and the upper control means (not shown) is such that the total amount of discharge per ejection from each of the inkjet nozzles 52 in the inkjet head 51 is close to each The ink jet head 51 controls the nozzle control means in a quantitative manner. For example, the "nozzle control means changes the driving voltage applied to the ink jet nozzle 52" to change the discharge amount per one discharge. In addition, it is known that the upper-level control means inputs the total discharge amount of the discharge amount of each of the ink-jet nozzles 52 in the ink-jet head 51 in accordance with the discharge amount unevenness and the property data obtained by the scanning camera 9 (ink-jetting) The discharge amount per one discharge of the head 51 is a target discharge amount, and an operation command with respect to the control means of each inkjet nozzle 52 is performed. In this case, the amount of coating can be made to conform to each of the inkjet heads 51. In the case where the ejection amount is lowered even if the specific ink jet head 51 is affected by the ink viscosity or the like, the operation command with respect to each nozzle control means is set according to the upper control means, and according to the nozzle control means The variation in the discharge amount with the other ink jet heads 51 can also be suppressed by changing the driving voltage applied to the ink jet nozzles 52 and the like. The ink jet nozzles 5 2 in the ink jet head 51 are also located in the ink jet nozzles 5 2 on the inner side, except for a plurality of ink jet nozzles 52 at both ends of the ink jet head 51 capable of stably discharging the amount, although of course, there is a slight deviation. However, such a slight discharge amount deviation can be responded to according to the form shown in the first embodiment. (Third Embodiment) As described above, the coloring material can be uniformly applied over the entire surface coating region by the block composition of the ink jet nozzles 5 2 shown in the first and second embodiments. However, according to the ink jet head 51, the specific phenomenon of the processing of the parts in the part manufacturing process can be seen as a characteristic intensity distribution for the discharge speed of the coloring material ejected from each of the ink jet nozzles 52. With the ink jet head 51 having the periodic intrinsic strength distribution characteristic of such a discharge speed of -34 - 200914141 degrees to constitute the ink jet head 5, the ejection speed of the characteristic is concerned according to the method of the block composition of the ink jet nozzle 52. The strong and weak distribution characteristics will accumulate, and as a result, periodic non-uniformity in the chromaticity of the colored calender will appear. For example, Fig. 1 is a graph showing the intensity distribution of the coloring material ejected from the nozzles measured by one of the ink jet heads, and the pattern is shown as a simple pattern. Here, the ink jet head 51 used has a width which is inherently strong and weak (every 12 nozzles formed in the ink jet head) and has a strong distribution pattern of the discharge speed of the coloring material. As shown in Fig. 12, it is found that the discharge speed of the colored material is the above-described inherent strength distribution, and in this example, each of the two shows a strong distribution. In the graph of Fig. 3A, a pattern of a plurality of ink jet heads having a strong distribution (variation) pattern of the ejection speed of each of the nozzle coloring materials of one ink jet head shown in Fig. 12 is arranged in a non-stratified manner. . In the ink jet head 5 used in the first embodiment, as shown in Fig. 3, in each of the divided blocks, the ink jet heads 51 are shifted by one pitch, and each of the two coloring materials is used. In the case where the ink jet head 51 of the discharge rate of the intensity distribution pattern is ejected with the coloring material, the distribution of the intensity of the ejection speed in the ink jet head 51 is accumulated, as shown in Fig. 14A, and the discharge speed of the sum is considered. The strong and weak distribution pattern is a graph that has been marked. In such a case, the method of eliminating the problem of saliency of the distribution pattern of the sum of the discharge speeds of the sum, as shown in Fig. 13B, eliminates the distribution of the intensity of the feature, preferably by using the following method: The plurality of ink jet heads 51 combined with the respective ink jet heads are shifted intrinsically -35 - 200914141 The width of the strong and weak distribution is divided by the division length of the number of divisions m 1°, and the division length 1 is preferably the closest to The following numbers are: In the direction in which the ink jet nozzle travels, an integral multiple of the distance between the nozzles of the ink jet heads of the ink jet heads arranged as a configuration. By arranging a plurality of ink-jet heads ’ because a predetermined coating pitch is obtained, when the division length 1 is an integral multiple of the pitch, the shift of the coating pitch can be eliminated and the distribution of the discharge speed of the ink-jet head can be reduced. Figs. 13B and 14B show examples of measures for improving the intensity distribution pattern of the coloring material discharge speed. Here, the width of the intrinsic strength distribution (every 12) is divided by the pitch of the ink jet head 5 1 having the intensity distribution pattern of the coloring material divided by the number of the arrays 5 . Because the width of the inherent strength distribution is due to the processing steps in the fabrication of the ink jet nozzle, it is not specific. Therefore, the distance which is actually shifted as shown in Fig. 1 '2' attempts to analyze the strength distribution state of the discharge speed and becomes the established distance. As can be seen from Fig. 14B, even if the intensity distribution (variation) of the ejection speed in the ink jet head 51 is accumulated, the intensity distribution (variation) pattern of the ejection speeds which cancel each other out is also inconspicuous. As a result, even in the case where the coloring material is ejected by the ink jet head 51 having the width of the intrinsic strength distribution and the strong distribution pattern of the coloring material discharge speed, it is possible to simply prevent the chromaticity of the color filter from appearing unevenly. Sex. [Possibility of Industrial Use] The coating apparatus of the present invention has been described as an example in which a representative application example can be applied to the manufacture of a color filter such as a liquid crystal display device, and the coating device is not limited to such a color filter. The manufacturing apparatus can also be applied to a device for applying a coloring material or a coating material to other planar members of -36 - 200914141. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the appearance of a coating apparatus according to an embodiment of the present application. 2A to 2C are diagrams showing the structure of the ink jet nozzle block division in the ink jet head and the pattern of the arrangement example; the 2A diagram shows the structure of the division of the block, and the 2B diagram shows the discharge position of the divided block; The arrangement of the 2C is a table showing the structure of each block ejected at the ejection position. Fig. 3 is a structural view schematically showing an arrangement example of an ink jet nozzle in the ink jet head corresponding to Fig. 2A. 4A to 4C are diagrams showing the structure of the ink jet nozzle block division in the ink jet head and the pattern of another example; the 4A diagram shows the structure of the block division, and the 4B diagram shows the divided block. The arrangement of the ejection positions; the 4C figure shows the table of the structure of each block ejected at the ejection position. Fig. 5 is a graph showing the ejection speed of the coloring material ejected from each of the ink jet nozzles in the ink jet head. Fig. 6 is a block diagram showing the construction of a control mechanism for causing the ink jet nozzle to be selected/discharged. Fig. 7 is a timing chart showing the inspection operation of the coating operation and the coating pattern. Fig. 8 is a plan view showing a state in which six color filters and test patterns are applied on a glass substrate. Fig. 9 is an enlarged plan view showing a portion of the test pattern forming portion in Fig. 8 which is partially enlarged. -37 - 200914141 The first diagram is a flow chart (example) for explaining the inspection processing sequence of the test pattern. Fig. 1 is a flow chart (an example) for explaining the manufacturing process of the color filter. Fig. 12 is a diagram in which the intensity distribution of the coloring material ejection speed measured by the arrangement of the inkjet nozzles shown in Fig. 2 is simply patterned. Figs. 13A to 13B are by way of no/no countermeasure The intensity distribution pattern of the coloring material ejection speed of each of the nozzles of one inkjet head shown in Fig. 12 is combined; the 13A diagram shows that the inkjet heads of the plurality of inkjet heads are arranged by means of no countermeasures. The pattern of the distribution of the strength of the discharge speed of the coloring material ejected by the inkjet nozzle; and Fig. 13B shows the intensity of the ejection speed of the coloring material ejected by each of the inkjet nozzles in the case where the countermeasures for equally displacing the lateral position of the inkjet head are performed. The graphic of the distribution. Figs. 14A to 14B are graphs showing the sum of the ejection speeds of the coloring materials of the respective ink jet heads; Fig. 14A shows the sum of the ejection speeds of the coloring materials ejected from the respective ink jet nozzles without countermeasures; Fig. 14B The sum of the discharge amounts of the coloring materials ejected by the respective ink ejecting nozzles in the case where the measures for equally shifting the lateral positions of the ink jet heads are uniformly shifted are displayed. [Main component symbol description] 1 Machine 2 Glass substrate 3 Adsorption station (holding table) 4 Coating frame -38 - Inkjet head Camera frame Alignment camera Scan camera Image processing device Memory control device Pixel area Inkjet headjet Nozzle inkjet head block inkjet head block inkjet head block inkjet head block coating area area -39 -