JP5073301B2 - Coating device - Google Patents

Description

  The present invention relates to a coating apparatus that supplies a coating material to a coating object held on a holding stage by an inkjet head having a plurality of inkjet nozzles.

  Conventionally, a method of manufacturing a color filter on a glass substrate using an inkjet head has been proposed (see Patent Document 1).

Specifically, at least a transparent colorant receiving layer is provided on a glass substrate, a region that should be between pixels of different colors is a non-colored region having color repellent properties, and pixels that are to have the same color are At adjacent locations, the color filter is manufactured by coloring the plurality of pixel portions that should have the same color by adding a coloring material without any breaks including the inter-pixel region.
Japanese Patent Laid-Open No. 9-68611

In general, in an inkjet head, each inkjet nozzle has non-uniformity (variation) in the ejection amount. Therefore, if a color filter is manufactured with non-uniformity in the ejection amount in the inkjet nozzle, the coating amount There is a problem that non-uniformity occurs.
Here, the non-uniformity of the ejection amount means that the ejection amount of each inkjet nozzle under the same condition has a variation of 2% (± 1%) or more among a plurality of inkjet nozzles.

  In order to prevent this problem, it is necessary to adjust the discharge amount of each inkjet nozzle mounted on the apparatus to be uniform when the apparatus is started up or when the inkjet head is replaced. In JP-A-2002-347224), since the inkjet nozzles are adjusted one by one, it takes a very long time to complete the adjustment of the inkjet head. There is a problem that the color filter cannot be manufactured until the adjustment work is completed.

  In addition, since all the ink jet nozzles cannot be adjusted at once, there is a problem that there is more variation.

  The present invention has been made in view of the above problems, and even when an inkjet nozzle having non-uniform discharge amount is used, a good product can be manufactured by supplying a coating material, And it aims at providing the coating device which can perform the adjustment work at the time of starting of an apparatus or an inkjet head replacement | exchange rapidly.

The coating apparatus of the present invention includes a holding stage for holding a coating object, an inkjet head having a plurality of inkjet nozzles for supplying a coating material to the coating object, and one operation from each inkjet nozzle to the coating object. Referring to the measuring means for measuring the amount of the coating material supplied in step 1, the holding means for holding the measured amount for each inkjet nozzle, and the holding data of the holding means, the coating material is supplied to the application object Control means for controlling the ink jet head so as to select an ink jet nozzle to perform, an ink jet head group having a plurality of the ink jet heads (51), and ink jet nozzles (52) in the ink jet head (51). Nozzle control means for changing the amount per discharge, and the inkjet head And a higher-level control means for controlling the nozzle control means so as to approach a predetermined amount de in (51) the sum of the amounts per discharge once ejected from the ink jet nozzles (52) for each ink-jet head (51) Is.

  In this case, when the coating material is supplied to the coating object held on the holding stage by the plurality of inkjet nozzles of the inkjet head, the measuring means performs one operation from each inkjet nozzle on the coating object. The amount of the coating material supplied in step 1 is measured, and the measured amount for each inkjet nozzle is held in the holding means.

  Next, when a coating material is supplied to a coating object held on a holding stage by a plurality of inkjet nozzles of an inkjet head, the control unit refers to the holding data of the holding unit and applies the coating material to the coating object. The inkjet head is controlled to select an inkjet nozzle for supplying the coating material.

  Therefore, the discharge amount non-uniformity (variation) of each inkjet nozzle can be recognized based on the amount measured by the measuring means.

  Then, by referring to the discharge amount non-uniformity (variation) data of each ink-jet nozzle, the ink-jet nozzle is selected by the control means, and the ink-jet head is controlled, whereby the non-uniformity (variation) of the discharge amount of each ink-jet nozzle. High-quality coating operation can be achieved without being affected by the above.

  Here, the control means may control the ink jet head so as to select the ink jet nozzle so that the supply amount of the coating material is constant, and the supply amount of the coating material is within an allowable error range. The inkjet head may be controlled so as to select an inkjet nozzle as much as possible. In the former case, the coating quality can be remarkably improved. Conversely, in the latter case, it is possible to achieve both the maintenance of the coating quality and the increase in the number of usable inkjet nozzles.

  In addition, the measuring unit picks up the application object supplied with the coating material from each inkjet nozzle and generates imaging data, and supplies the imaging object as an input to the application object from each inkjet nozzle. It is preferable to include an image processing means for calculating the area, diameter, or volume of the applied coating material. In this case, the amount of the coating material can be measured by the area, diameter, or volume of the coating material supplied from each inkjet nozzle to the coating object. Here, the imaging means may be a line scan camera or a two-dimensional CCD camera.

  Furthermore, the number of ejection heads in the inkjet head is preferably 10% or more larger than the number necessary for supplying the coating material to the application target, and a sufficient range of ejection head selection is ensured. Can do.

  The coating apparatus of the present invention has a specific effect that a high-quality coating operation can be achieved without being affected by non-uniformity (variation) in the discharge amount of the inkjet nozzle.

  Hereinafter, embodiments of a coating apparatus of the present invention will be described in detail with reference to the accompanying drawings. In the following description, a color filter manufacturing apparatus is described as an example.

  FIG. 1 is a perspective view showing an embodiment of a color filter manufacturing apparatus.

In this color filter manufacturing apparatus , a suction table 3, a coating gantry 4, a camera gantry 6, etc., which are one embodiment of a holding stage, are supported on a machine base 1.

  The suction table 3 holds the glass substrate 2 by suction. In order to achieve positioning of the glass substrate 2, the suction table 3 is driven to rotate by a drive mechanism and a guide mechanism (not shown) and is driven in the Y direction.

  The application gantry 4 holds the inkjet head bar 5 and is driven in the X direction by a drive mechanism and a guide mechanism (not shown) in order to apply a color material to the glass substrate 2. Moreover, in order to adjust the relative position with respect to the glass substrate 2, it drives to a Z direction and a Y direction by the drive mechanism and guide mechanism which are not shown in figure.

  The camera gantry 6 holds alignment cameras 7 and 8 for alignment of the glass substrate 2 and a scan camera 9 for detecting the color material supplied to the glass substrate 2. Therefore, it is driven in the X direction by a drive mechanism and a guide mechanism (not shown). Further, the alignment cameras 7 and 8 and the scan camera 9 are driven in the Y direction by a drive mechanism and a guide mechanism (not shown).

  The alignment cameras 7 and 8 detect marks (not shown) on the glass substrate 2, and the suction table 3 is rotated and / or moved in the Y direction based on the mark detection results by the alignment cameras 7 and 8. Thus, alignment of the glass substrate 2 can be achieved. The alignment error in the X direction can be achieved by adjusting the ejection timing.

However, a two-dimensional CCD camera can be employed instead of the scan camera 9.
X and Y represent directions orthogonal to each other set to define a plane parallel to the upper surface of the glass substrate 2 held by suction by the suction table 3, and Z represents a plane defined by X and Y. An orthogonal direction is shown.

FIG. 2 is a schematic view showing the configuration of the inkjet head bar 5.
The inkjet head bar 5 is formed by aligning a plurality of inkjet heads 51, and each inkjet head 51 is formed by aligning a plurality of inkjet nozzles 52. The alignment of the plurality of inkjet heads 51 is set such that the intervals in the X direction and the Y direction of all the inkjet nozzles 52 are set to predetermined intervals.

Here, the required number of inkjet nozzles 52 is determined as follows.
In the following, “in-pixel pigment film thickness” is the pigment film thickness [μm] required in the pixel, “pixel area” is the area per pixel [μm ² ], and “ink pigment density” Is the pigment concentration [%] in the ink, the “nozzle average discharge amount” is the average value [pl] of the amount that the inkjet nozzle discharges at one time, and the “nozzle discharge count for the pixel” is per pixel. The number of times one inkjet nozzle performs ejection [times], “necessary amount of ink per pixel” is the amount of ink applied per pixel, and “necessary number of nozzles” is necessary for applying pixels The number of ink jet nozzles.
The required ink amount for one pixel is calculated by the following equation.

Required amount of ink per pixel = (Pigment thickness in pixel × Pixel area × 100) / (Ink pigment density × 1000) = (Pigment thickness in pixel × Pixel area) / (Ink pigment density × 10)
Here, “× 100” corresponds to the unit of the ink pigment concentration being%, and “× 1000” is for converting [μm ³ ] into [pl].
From this, the required number of nozzles is calculated by the following equation.

Necessary number of nozzles = (required ink amount per pixel) / (average nozzle ejection amount × number of nozzle ejections per pixel)
From the above equations, the required number of nozzles is calculated as follows.

Necessary number of nozzles = (in-pixel pigment film thickness × pixel area) / (ink pigment density × nozzle average ejection amount × number of nozzle ejections per pixel × 10)
In the present embodiment, the number of inkjet nozzles that is 10% or more greater than the required number of nozzles calculated as described above is provided.

  Further explanation will be given.

  If the average value of the amount ejected by an inkjet nozzle at one time is 20 pl and the required application amount of pixels is 200 pl, the required number of inkjet nozzles per pixel is 10. Therefore, the number more than 10% more than the required number of nozzles is 11 or more. And the choice of an inkjet nozzle can be expanded by making the number of inkjet nozzles more than the required number.

  However, when two drops are ejected from one inkjet nozzle, the required number of nozzles under the above conditions is five, so the number of inkjet nozzles is six or more (a number that is 20% more than the required number of nozzles). ), The options for selecting the ink jet nozzle can be expanded.

  When the required number of nozzles is 10 for a pixel, the arrangement of normal inkjet nozzles is as shown by # 1 to # 10 in FIG. 12, and the arrangement of inkjet nozzles is 762 or more when expressed in dpi. 846.6667 or less. Only 10 inkjet nozzles correspond to pixels, and there are as many as necessary.

  For example, when the discharge amounts of the inkjet nozzles # 1 to # 10 corresponding to the pixels are as shown in Table 1 (when there is a 10% discharge amount variation in each inkjet nozzle), The application amount for the pixel is 198.3223 pl, and the error with respect to the required application amount of 200 pl for the pixel is 1.777702 pl.

  However, as shown in FIG. 13, when the number of inkjet nozzles corresponding to the pixels is 11 (when 10% more inkjet nozzles # 1 to # 11 than the required number of nozzles are arranged), the arrangement of the inkjet nozzles is as follows. , Dpi, it is 846.6667 or more and 931.3333 or less. Since the required number of nozzles for a pixel is 10, as shown in Table 2, there are 11 combinations of usable inkjet nozzles. In Table 2, the leftmost nozzle number is the number of the unused inkjet nozzle, the discharge amount on the right is the discharge amount of the unused inkjet nozzle, and the total on the right depends on all the used inkjet nozzles. The total discharge amount, and the rightmost column is a combination of the numbers of all the ink jet nozzles used.

As can be seen from Table 2, the total discharge amount varies depending on the combination of the 10 inkjet nozzles used, and it is highly possible that a total discharge amount close to the required application amount of 200 pl of pixels can be realized. If the combination of # 9 and # 11 is employed, the error is 0.445066 pl, which is closest to the required application amount of 200 pl for the pixel.
FIG. 14 is a schematic view showing an example of an inkjet head in which inkjet nozzles are arranged at 1440 dpi.

The interval in the Y direction of the inkjet nozzles arranged at 1440 dpi is
25.4 [mm] / 1440 [dpi] = 0.017639 [mm] = 17.663889 [μm], and 16 inkjet nozzles # 1 to # 1 for a pixel having a length in the Y direction of 300 [μm] # 16 corresponds.

Therefore, there are 60% more inkjet nozzles than the required number of nozzles. Then, there are ₁₆ C ₁₀ = 8008 combinations for selecting 10 inkjet nozzles from 16 inkjet nozzles.

  Therefore, by selecting an optimal combination of 10 inkjet nozzles, it is possible to realize an application amount very close to the required application amount 200 pl of pixels.

  Since the inkjet nozzles 52 are arranged in an oblique direction with a predetermined number as a unit, the inkjet nozzles 52 are sequentially operated while driving the coating gantry 4 in the X direction, thereby linearly aligning in the Y direction. In this state, the color material can be applied.

  The ink-jet head bar 5 shown in FIG. 2 is for applying any of red (R), green (G), and blue (B) color materials. An inkjet head bar for applying the material is also provided.

  FIG. 3 is a schematic block diagram showing a configuration for controlling the inkjet head bar 5 in order to select the inkjet nozzle 52.

  The configuration shown in FIG. 3 is an image processing device that calculates the area, diameter, or volume of a color material using image data captured by the scan camera 9 (for example, image data corresponding to a state in which all inkjet nozzles 52 are operated) as an input. 11. To select a memory (discharge data table) 12 that holds the calculated area, diameter, or volume, and to select an inkjet nozzle 52 that should be operated in consideration of the area, diameter, or volume held in the memory 12 A control device 13 for controlling the inkjet head bar 5 is provided.

  Accordingly, the area, diameter, or volume held in the memory 12 can be updated each time the application operation by the ink jet head bar 5 is performed, and the latest application operation by the ink jet head bar 5 can be performed. The inkjet head bar 5 can be controlled to select the inkjet nozzle 52 to be operated in view of area, diameter, or volume.

  The control device 13 may control the inkjet head bar 5 so as to select the inkjet nozzle 52 so that the supply amount of the color material is constant, and the supply amount of the color material is within an allowable error range. The inkjet head bar 5 may be controlled so as to select the inkjet nozzle 52 as much as possible.

  In the former case, the coating quality of the color material can be remarkably improved. On the contrary, in the latter case, it is possible to achieve both the maintenance of the coating quality of the color material and the increase in the number of usable inkjet nozzles.

  Next, the operation of the color filter manufacturing apparatus having the above configuration will be described.

FIG. 4 is a timing chart for explaining the color material application process and the test pattern inspection process, FIG. 8 is a flowchart for explaining the ejection data table creation process, and FIG. 9 is a flowchart for explaining the color filter manufacturing process.
First, the color filter manufacturing process will be described with reference to FIG.

  In step SP1, after the glass substrate 2 is carried into the suction table 3 by a carrying robot (not shown) or the like, in step SP2, the camera gantry 6 is moved forward to detect the mark on the glass substrate 2, and the detection result is obtained. Accordingly, the glass substrate 2 is positioned by operating the loading robot or the like. In step SP3, the glass substrate 2 is sucked by the suction table 3, and then the camera gantry 6 is moved forward in step SP4. In step SP5, the glass substrate 2 is aligned. In step SP6, the camera gantry 6 is moved. To return.

Next, in step SP7, it is determined whether the application is forward or inward. If it is determined that the application is forward, the application gantry 4 is moved forward and the X coordinate value is output in step SP8. If it is determined in step SP7 that the return coating is to be performed, the coating gantry 4 is moved back in step SP9. Then, after the processing of step SP8 or step SP9 is performed, it is determined in step SP10 whether application has been performed to the end based on the X coordinate value. Here, the necessary inkjet nozzle 52 may be selected so as to select the inkjet nozzle 52 so as to make the supply amount of the color material constant, or the inkjet nozzle so as to keep the supply amount of the color material within an allowable error range. 52 may be selected. In the former case, the coating quality can be remarkably improved. On the other hand, in the latter case, both the maintenance of the coating quality and the increase in the number of usable inkjet nozzles 52 can be achieved.

  When detecting the X coordinate value, the relative movement between the coating gantry 4 and the glass substrate 2 is stopped. Therefore, the landing mark immediately below the ink jet nozzle 52 hole transfers the nozzle hole arrangement, and a slight deviation occurs due to the bending at the time of ejection, but since detection is performed based on the actual landing mark, no problem occurs. .

  FIG. 11 is a diagram illustrating an example of a landing mark from the inkjet nozzle 52.

  FIG. 11 shows landing marks determined by nozzle rows and nozzle numbers, P is a pixel pitch, and L1 to L5 are intervals in the nozzle row application direction.

  FIG. 10 is a diagram showing an example of a discharge data table, in which the number of application scans, application direction pixel numbers, application direction pixel positions, nozzle rows, application gantry X coordinate values, and the discharge patterns of all nozzles are set. X0 is an initial movement amount, Pg is a pixel pitch, L1 to Ln are intervals in the nozzle row application direction, and m is a natural number of 2 or more.

If it is determined in step SP10 that the application has not been performed to the end, in step SP11 , the X coordinate value output signal of the application gantry 4 is compared with the discharge data table, and in step SP12 , the X coordinate is determined. It is determined whether or not the value and the discharge data match, and if it is determined that the X coordinate value and the discharge data match, a discharge operation by the inkjet nozzle 52 is performed in step SP13 .

Then, when the process of step SP13 is performed, or when it is determined in step SP12 that the X coordinate value and the discharge data do not match, the determination of step SP10 is performed again.

If it is determined in step SP10 that the application has been performed up to the end, it is determined in step SP14 whether or not the application is the first outbound.

If it is determined that the first coating is applied, the application gantry 4 is moved to the test pattern application position in step SP15, and a test pattern is formed in step SP16 (specifically, for example, A staggered test pattern is formed by movement in the X direction and selection of the inkjet nozzles 52).
If it is determined in step SP14 that it is not the first application in the outward path, or if the process in step SP16 is performed, it is determined in step SP17 whether or not a predetermined number of applications have been performed. If it is determined that the predetermined number of times of application has not been performed, in step SP18, the application gantry 4 is stopped, the inkjet head bar 5 is moved in the Y direction, and the determination in step SP7 is performed again. The movement distance in the Y direction may be a distance substantially equal to the landing mark.
On the contrary, if it is determined in step SP17 that the predetermined number of times of application has been performed, the application is terminated in step SP19, and in step SP20, the suction of the glass substrate 2 is released and the discharge process is performed. A series of processing ends.

In summary,
After the glass substrate 2 is carried into the suction table 3, the camera gantry 6 is moved forward to detect the mark on the glass substrate 2, and the suction table 3 is operated according to the detection result, whereby the glass substrate 2 is moved. Achieve the alignment. Thereafter, the camera gantry 6 is moved back.

  Next, the coating gantry 4 is moved forward, and the inkjet head bar 5 is controlled so as to select the necessary inkjet nozzle 52 with reference to the ejection data table, and the first outbound coating is performed.

  Thereafter, the coating gantry 4 is moved back in the Y direction slightly, and the inkjet head bar 5 is controlled so as to select the necessary inkjet nozzle 52 by referring to the ejection data table, so that the first return pass is performed. During the coating, the camera gantry 6 is moved forward, the test pattern of the glass substrate 2 is inspected by the scan camera 9, and then the camera gantry 6 is moved back. Further, the ejection data table is updated using the inspection result.

  Thereafter, the application gantry 4 is moved forward in the Y direction slightly, and the inkjet head bar 5 is controlled so as to select the necessary inkjet nozzle 52 by referring to the ejection data table. Apply the outward coating.

  Thereafter, the coating gantry 4 is moved backward in the Y direction slightly, and a second return pass is performed by controlling the inkjet head bar 5 so as to select a necessary inkjet nozzle 52 with reference to the ejection data table. Apply.

  Thereafter, the suction holding of the glass substrate 2 is stopped, and the glass substrate 2 is unloaded from the suction table 3.

  Thereafter, a desired number of color filters can be manufactured by repeatedly performing the series of processes described above.

  That is, when the color material is applied once, the color material adheres at an interval equal to the interval between the ink jet nozzles 52, so that the color material is not continuously applied.

However, when the processing according to the above timing chart is performed, since the coating is performed by slightly changing the position in the Y direction, finally, on the glass substrate 2 as shown in FIGS. The color material can be continuously applied in the corresponding pixel region 23 of the black matrix 22 formed in the above.
Next, the ejection data table creation process will be described with reference to FIG.
In step SP1, the test substrate is carried into the suction table 3. In step SP2, the test substrate is positioned. In step SP3, the test substrate is sucked and held on the suction table 3. In step SP4, the camera gantry 6 is positioned. In step SP5, the test substrate is aligned, and in step SP6, the camera gantry 6 is moved back.
In step SP7, the coating gantry 4 is moved forward and the X coordinate value is output. In step SP8, it is determined whether or not the test pattern application position has been reached. If it is determined, the process of step SP7 is performed again.
If it is determined in step SP8 that the test pattern application position has been reached, in step SP9, the application gantry 4 is stopped, and a single drop of color material is ejected from all the inkjet holes (all the inkjet nozzles 52 in the application gantry 4). In step SP10, the application gantry 4 is moved backward and stopped at the standby position.
In step SP11, the camera gantry 6 is moved forward. In step SP12, it is determined whether or not the test pattern inspection position has been reached. If it is determined that the test pattern inspection position has not been reached, the determination is again made. The process of step SP11 is performed.
If it is determined in step SP12 that the test pattern inspection position has been reached, the camera gantry 6 is stopped in step SP13, and in step SP14, the scan camera 9 is moved in the Y direction to detect the test pattern. After detecting the pattern, the scan camera 9 is moved back in the Y direction.
After the process of step SP14, the camera gantry 6 is moved backward and stopped at the standby position in step SP15. In step SP16, the adsorption of the test substrate is released and discharged, and the series of processes is completed.
In parallel with the processing of step SP15 and step SP16, in step SP17, the detection signal from the scan camera 9 is image-processed, the X and Y coordinates are calculated, and in step SP18, detection is performed from the color material landing mark of the test pattern. In step SP19, the position information of all pixels on the test substrate is input, and in step SP20, other parameters are input. In SP21, the data table is calculated / created. In step SP22, the position information (coordinate values), the area, diameter or volume of the color material landing mark, and the calculation result are stored in the discharge data table, and a series of processing is performed. finish.

  Then, referring to the memory (ejection data table) 12, the ink jet head bar 5 is selected so that the ink jet nozzle 52 is selected so that the supply amount of the color material by the two forward pass coatings and the two reverse pass coatings is constant. By controlling, the coating quality of the color material can be improved. Further, the inkjet head bar 5 is selected so as to select the inkjet nozzle 52 with reference to the memory (ejection data table) 12 so that the supply amount of the color material by the two forward coatings and the two backward coatings is within the allowable error range. By controlling the above, it is possible to achieve both the coating quality of the color material and the number of selectable inkjet nozzles 52.

Further, since the necessary inkjet nozzles 52 are selected with reference to the ejection data table, the coating quality of the color material can be improved.
FIG. 6 shows a state in which six color filters CF are formed on the glass substrate 2, and a test pattern TP for each color material is formed in a surplus area outside the color filter CF. .

FIG. 7 is an enlarged view of the test pattern TP forming portion, and shows the test pattern TP formed only by the first forward coating and the first backward coating as being inspected by the camera gantry 6. .

Therefore, the color materials are separated from each other and are staggered.
Then, the test pattern TP can be inspected by the scan camera 9 of the camera gantry 6, and the non-uniformity (variation) of the ejection amount of the inkjet nozzle can be confirmed for each application. The combination of the inkjet nozzles 52 that achieves the optimum coating amount can be selected, and the production of defective products can be minimized.

  Further, by forming a staggered pattern, the interval between the color materials can be increased, and the image processing can be given a certain amount of space, so that the inspection accuracy can be increased.

  Further, since the test pattern TP is inspected by the scan camera 9 of the camera gantry 6 during the coating operation by operating the coating gantry 4, extra time is required for inspecting the test pattern TP. In addition, it is possible to prevent inconvenience that the tact time becomes long.

In addition, since the test pattern TP is inspected by the scan camera 9 of the camera gantry 6 based on the test pattern TP formed on the glass substrate 2, it is inspected accurately how the color material is applied. be able to.
The embodiment in which the application gantry 4 is moved in the X direction with respect to the suction table 2 has been described above. However, the application gantry 4 can be fixed and the suction table 3 can be moved. is there.

In the above embodiment, the ink jet nozzle is selected so that the total application amount for pixels is made close to the required application amount, and the amount per discharge discharged from the ink jet nozzle 52 is changed. It doesn't go at all.
However, an inkjet head bar 5 having a plurality of inkjet heads 51 is provided in the coating gantry 4, and a nozzle control unit (not shown) that changes the amount per ejection ejected from the inkjet nozzles 52 in the inkjet head 51. A high-order control unit (not shown) that controls the nozzle control unit so that the total amount per discharge discharged from each inkjet nozzle 52 in the inkjet head 51 approaches a predetermined amount for each inkjet head 51; Is preferably further provided.

  For example, the nozzle control unit changes the discharge amount per discharge by changing the drive voltage applied to the inkjet nozzle 52.

The upper control unit receives, for example, discharge amount non-uniformity data obtained by the scan camera 9 as an input, and the total discharge amount per discharge of each ink jet nozzle 52 in the ink jet head 51 (of the ink jet head 51). The operation command to each nozzle control unit is supplied so that the discharge amount per discharge) approaches the target discharge amount.
In this case, the coating amount can be adjusted for each inkjet head 51. More specifically, even when a specific inkjet head 51 is affected by the viscosity of the ink and the discharge amount becomes low, an operation command for each nozzle control unit is set by the upper control unit, and the nozzle control unit sets the inkjet nozzle. By changing the drive voltage applied to the nozzle 52, it is possible to suppress variations in the discharge amount with the other inkjet heads 51.

  The inkjet nozzles in the inkjet head naturally have variations, but such variations can be dealt with by the above-described embodiment.

It is a perspective view which shows one Embodiment of a color filter manufacturing apparatus. It is an enlarged view which shows the structure of an inkjet head bar roughly. It is a schematic block diagram which shows the structure for controlling an inkjet head bar in order to select an inkjet nozzle. It is a timing chart explaining a color material application process and a test pattern inspection process. It is the schematic which shows an example in the state in which the color material was apply | coated. Schematic showing a state in which a color filter and a test pattern are formed on a glass substrate It is. It is the schematic which expands and shows a test pattern formation part. It is a flowchart explaining an ejection data table creation process. It is a flowchart explaining a color filter manufacturing process. It is a figure which shows an example of a discharge data table. It is a figure which shows an example of the landing trace from an inkjet nozzle. It is the schematic which shows the state by which the number of inkjet nozzles equal to the required number of nozzles is arrange | positioned. It is the schematic which shows the state by which the number of inkjet nozzles one more than the required number of nozzles is arrange | positioned. It is the schematic which shows an example of the inkjet head by which the inkjet nozzle is arrange | positioned by 1440 dpi.

Explanation of symbols

2 Glass substrate 3 Suction table 5 Inkjet head bar 9 Scan camera 11 Image processing device 12 Memory 13 Control device 51 Inkjet head 52 Inkjet nozzle

Claims (7)

A holding stage (3) for holding a coating object (2);
An inkjet head (51) having a plurality of inkjet nozzles (52) for supplying a coating material to the application object (2);
Measuring means (9) (11) for measuring the amount of the coating material supplied to the coating object (2) from each inkjet nozzle (52) in one operation;
Holding means (12) for holding the measured amount of each inkjet nozzle;
Control means (13) for controlling the ink-jet head (51) so as to select an ink-jet nozzle (52) for supplying the coating material (2) with reference to the data held by the holding means (12). a),
A group of inkjet heads having a plurality of inkjet heads (51); and a nozzle control means for changing the amount per ejection discharged from the inkjet nozzles (52) in the inkjet head (51);
Upper control means for controlling the nozzle control means so that the total amount per discharge discharged from each ink jet nozzle (52) in the ink jet head (51) approaches a predetermined amount for each ink jet head (51); A coating apparatus comprising: The coating apparatus according to claim 1, wherein the control means (13) controls the inkjet head (51) so as to select the inkjet nozzle (52) so as to make the supply amount of the coating material constant. The coating device according to claim 1, wherein the control means (13) controls the inkjet head (51) so as to select the inkjet nozzle (52) so that the supply amount of the coating material is within an allowable error range. . The measuring means (9) (11) includes an imaging means (9) for imaging the application object (2) supplied with the coating material from each inkjet nozzle (52) and generating imaging data, and the imaging data. The application according to claim 1, further comprising an image processing means (11) for calculating an area, a diameter, or a volume of an application material supplied from each inkjet nozzle (52) to the application object (2) as an input. apparatus. The coating apparatus according to claim 4, wherein the imaging means (9) is a line scan camera. The coating apparatus according to claim 4, wherein the imaging means (9) is a two-dimensional CCD camera. The number of the inkjet nozzles (52) in the inkjet head (51) is a number that is 10% or more higher than the number necessary for supplying the coating material to the coating object (2). A coating apparatus according to any one of the above.

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