KR101729471B1 - 가스 종들의 혼합을 향상시키기 위한 소형 장치 - Google Patents

가스 종들의 혼합을 향상시키기 위한 소형 장치 Download PDF

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KR101729471B1
KR101729471B1 KR1020157029242A KR20157029242A KR101729471B1 KR 101729471 B1 KR101729471 B1 KR 101729471B1 KR 1020157029242 A KR1020157029242 A KR 1020157029242A KR 20157029242 A KR20157029242 A KR 20157029242A KR 101729471 B1 KR101729471 B1 KR 101729471B1
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South Korea
Prior art keywords
block
gas
mixing
mixing chamber
base block
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Korean (ko)
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KR20150129006A (ko
Inventor
존 더블유. 레인
베린 다란
라마찬드라 머시 군투리
마리우쉬 그레고르
브하스완 만주나트
프라산트 바수데바
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어플라이드 머티어리얼스, 인코포레이티드
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    • B01F5/0077—
    • B01F15/0429—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • B01F23/191—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means characterised by the construction of the controlling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/105—Mixing heads, i.e. compact mixing units or modules, using mixing valves for feeding and mixing at least two components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/45—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads
    • B01F25/452—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces
    • B01F25/4521—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through orifices in elements, e.g. flat plates or cylinders, which obstruct the whole diameter of the tube
    • B01F25/45211—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through orifices in elements, e.g. flat plates or cylinders, which obstruct the whole diameter of the tube the elements being cylinders or cones which obstruct the whole diameter of the tube, the flow changing from axial in radial and again in axial
    • B01F3/028—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • B01F35/83—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices
    • B01F35/833—Flow control by valves, e.g. opening intermittently
    • B01F5/0689—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/58—Mixing semiconducting materials, e.g. during semiconductor or wafer manufacturing processes
    • B01F2215/0096—

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Accessories For Mixers (AREA)
KR1020157029242A 2013-03-15 2014-02-21 가스 종들의 혼합을 향상시키기 위한 소형 장치 Active KR101729471B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/834,625 US9327252B2 (en) 2013-03-15 2013-03-15 Compact device for enhancing the mixing of gaseous species
US13/834,625 2013-03-15
PCT/US2014/017577 WO2014149351A1 (en) 2013-03-15 2014-02-21 Compact device for enhancing the mixing of gaseous species

Publications (2)

Publication Number Publication Date
KR20150129006A KR20150129006A (ko) 2015-11-18
KR101729471B1 true KR101729471B1 (ko) 2017-04-25

Family

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KR1020157029242A Active KR101729471B1 (ko) 2013-03-15 2014-02-21 가스 종들의 혼합을 향상시키기 위한 소형 장치

Country Status (6)

Country Link
US (1) US9327252B2 (https=)
JP (1) JP6474778B2 (https=)
KR (1) KR101729471B1 (https=)
CN (1) CN105190834B (https=)
TW (1) TWI582264B (https=)
WO (1) WO2014149351A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11118262B2 (en) * 2018-10-11 2021-09-14 Asm Ip Holding B.V. Substrate processing apparatus having a gas-mixing manifold
CN111197698A (zh) * 2018-11-20 2020-05-26 长鑫存储技术有限公司 气体传输系统
US12516414B2 (en) 2019-03-19 2026-01-06 Asm Ip Holding B.V. Reactor manifolds
US11492701B2 (en) * 2019-03-19 2022-11-08 Asm Ip Holding B.V. Reactor manifolds

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050092247A1 (en) 2003-08-29 2005-05-05 Schmidt Ryan M. Gas mixer and manifold assembly for ALD reactor

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US1992581A (en) * 1931-08-08 1935-02-26 Fulton Sylphon Co Fluid conditioning apparatus
US1924038A (en) * 1933-03-06 1933-08-22 Ind Patents Ltd Mixing device
US3089683A (en) * 1960-06-08 1963-05-14 Horace F Thomas Mixer for viscous liquids
JPS449800Y1 (https=) * 1966-10-10 1969-04-21
DE2252201A1 (de) * 1972-10-25 1974-05-22 5090 Leverkusen Vorrichtung zum herstellen von formteilen aus schnell miteinander reagierenden chemischen komponenten
JPH01266715A (ja) * 1988-04-18 1989-10-24 Hitachi Ltd 薄膜成長装置
JPH05347259A (ja) * 1992-06-12 1993-12-27 Ishikawajima Harima Heavy Ind Co Ltd 宇宙暴露部実験用気相成長装置
JPH08264464A (ja) * 1995-03-24 1996-10-11 Shin Etsu Handotai Co Ltd 気相成長方法
JP3865813B2 (ja) * 1995-12-01 2007-01-10 有限会社エーディ 流体混合装置
US6068703A (en) 1997-07-11 2000-05-30 Applied Materials, Inc. Gas mixing apparatus and method
US6211253B1 (en) * 1998-05-20 2001-04-03 Ernesto Marelli Process for producing emulsions, particularly emulsions of liquid fuels and water, and apparatus used in the process
JP2000262876A (ja) * 1999-03-15 2000-09-26 Toshiba Corp 流体の伝熱・混合促進機構および同機構を用いた流体機器
JP2002018257A (ja) * 2000-07-03 2002-01-22 Hikoroku Sugiura マイクロミキサー
WO2004073850A1 (en) 2003-02-14 2004-09-02 Tokyo Electron Limited Gas feeding apparatus
JP4459541B2 (ja) * 2003-03-11 2010-04-28 富士通株式会社 薄膜形成装置
WO2006078666A2 (en) * 2005-01-18 2006-07-27 Asm America, Inc. Reaction system for growing a thin film
WO2008140785A1 (en) 2005-04-19 2008-11-20 Sdc Materials, Inc. Water cooling system and heat transfer system
US7513681B2 (en) * 2005-07-22 2009-04-07 Saint-Gobain Performance Plastic Corporation Static mixing device
US20090120364A1 (en) 2007-11-09 2009-05-14 Applied Materials, Inc. Gas mixing swirl insert assembly
US7871587B2 (en) * 2008-12-23 2011-01-18 Mks Instruments, Inc. Reactive chemical containment system
US8568529B2 (en) 2009-04-10 2013-10-29 Applied Materials, Inc. HVPE chamber hardware

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050092247A1 (en) 2003-08-29 2005-05-05 Schmidt Ryan M. Gas mixer and manifold assembly for ALD reactor

Also Published As

Publication number Publication date
CN105190834B (zh) 2017-11-03
US20140269156A1 (en) 2014-09-18
WO2014149351A1 (en) 2014-09-25
TWI582264B (zh) 2017-05-11
US9327252B2 (en) 2016-05-03
CN105190834A (zh) 2015-12-23
TW201441416A (zh) 2014-11-01
JP6474778B2 (ja) 2019-02-27
KR20150129006A (ko) 2015-11-18
JP2016515925A (ja) 2016-06-02

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