JP6474778B2 - ガス状化学種の混合を増進するための小型デバイス - Google Patents

ガス状化学種の混合を増進するための小型デバイス Download PDF

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Publication number
JP6474778B2
JP6474778B2 JP2016500323A JP2016500323A JP6474778B2 JP 6474778 B2 JP6474778 B2 JP 6474778B2 JP 2016500323 A JP2016500323 A JP 2016500323A JP 2016500323 A JP2016500323 A JP 2016500323A JP 6474778 B2 JP6474778 B2 JP 6474778B2
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Japan
Prior art keywords
gas
block
outlet
base block
mixing chamber
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JP2016500323A
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English (en)
Japanese (ja)
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JP2016515925A5 (https=
JP2016515925A (ja
Inventor
ジョン ダブリュ． レイン，
ジョン ダブリュ． レイン，
ベリン ダラン，
ベリン ダラン，
ラーマチャンドラ ムルティー グントゥリ，
ラーマチャンドラ ムルティー グントゥリ，
マリウス グレーゴール，
マリウス グレーゴール，
バースワン マンジュナート，
バースワン マンジュナート，
プラシャント ヴァスデーヴァ，
プラシャント ヴァスデーヴァ，
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Applied Materials Inc
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Applied Materials Inc
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Publication of JP2016515925A5 publication Critical patent/JP2016515925A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • B01F23/191—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means characterised by the construction of the controlling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/105—Mixing heads, i.e. compact mixing units or modules, using mixing valves for feeding and mixing at least two components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/45—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads
    • B01F25/452—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces
    • B01F25/4521—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through orifices in elements, e.g. flat plates or cylinders, which obstruct the whole diameter of the tube
    • B01F25/45211—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through orifices in elements, e.g. flat plates or cylinders, which obstruct the whole diameter of the tube the elements being cylinders or cones which obstruct the whole diameter of the tube, the flow changing from axial in radial and again in axial
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • B01F35/83—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices
    • B01F35/833—Flow control by valves, e.g. opening intermittently
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/58—Mixing semiconducting materials, e.g. during semiconductor or wafer manufacturing processes

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Accessories For Mixers (AREA)
JP2016500323A 2013-03-15 2014-02-21 ガス状化学種の混合を増進するための小型デバイス Active JP6474778B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/834,625 US9327252B2 (en) 2013-03-15 2013-03-15 Compact device for enhancing the mixing of gaseous species
US13/834,625 2013-03-15
PCT/US2014/017577 WO2014149351A1 (en) 2013-03-15 2014-02-21 Compact device for enhancing the mixing of gaseous species

Publications (3)

Publication Number Publication Date
JP2016515925A JP2016515925A (ja) 2016-06-02
JP2016515925A5 JP2016515925A5 (https=) 2017-03-30
JP6474778B2 true JP6474778B2 (ja) 2019-02-27

Family

ID=51526541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016500323A Active JP6474778B2 (ja) 2013-03-15 2014-02-21 ガス状化学種の混合を増進するための小型デバイス

Country Status (6)

Country Link
US (1) US9327252B2 (https=)
JP (1) JP6474778B2 (https=)
KR (1) KR101729471B1 (https=)
CN (1) CN105190834B (https=)
TW (1) TWI582264B (https=)
WO (1) WO2014149351A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11118262B2 (en) * 2018-10-11 2021-09-14 Asm Ip Holding B.V. Substrate processing apparatus having a gas-mixing manifold
CN111197698A (zh) * 2018-11-20 2020-05-26 长鑫存储技术有限公司 气体传输系统
US12516414B2 (en) 2019-03-19 2026-01-06 Asm Ip Holding B.V. Reactor manifolds
US11492701B2 (en) * 2019-03-19 2022-11-08 Asm Ip Holding B.V. Reactor manifolds

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1992581A (en) * 1931-08-08 1935-02-26 Fulton Sylphon Co Fluid conditioning apparatus
US1924038A (en) * 1933-03-06 1933-08-22 Ind Patents Ltd Mixing device
US3089683A (en) * 1960-06-08 1963-05-14 Horace F Thomas Mixer for viscous liquids
JPS449800Y1 (https=) * 1966-10-10 1969-04-21
DE2252201A1 (de) * 1972-10-25 1974-05-22 5090 Leverkusen Vorrichtung zum herstellen von formteilen aus schnell miteinander reagierenden chemischen komponenten
JPH01266715A (ja) * 1988-04-18 1989-10-24 Hitachi Ltd 薄膜成長装置
JPH05347259A (ja) * 1992-06-12 1993-12-27 Ishikawajima Harima Heavy Ind Co Ltd 宇宙暴露部実験用気相成長装置
JPH08264464A (ja) * 1995-03-24 1996-10-11 Shin Etsu Handotai Co Ltd 気相成長方法
JP3865813B2 (ja) * 1995-12-01 2007-01-10 有限会社エーディ 流体混合装置
US6068703A (en) 1997-07-11 2000-05-30 Applied Materials, Inc. Gas mixing apparatus and method
US6211253B1 (en) * 1998-05-20 2001-04-03 Ernesto Marelli Process for producing emulsions, particularly emulsions of liquid fuels and water, and apparatus used in the process
JP2000262876A (ja) * 1999-03-15 2000-09-26 Toshiba Corp 流体の伝熱・混合促進機構および同機構を用いた流体機器
JP2002018257A (ja) * 2000-07-03 2002-01-22 Hikoroku Sugiura マイクロミキサー
WO2004073850A1 (en) 2003-02-14 2004-09-02 Tokyo Electron Limited Gas feeding apparatus
JP4459541B2 (ja) * 2003-03-11 2010-04-28 富士通株式会社 薄膜形成装置
US8152922B2 (en) 2003-08-29 2012-04-10 Asm America, Inc. Gas mixer and manifold assembly for ALD reactor
WO2006078666A2 (en) * 2005-01-18 2006-07-27 Asm America, Inc. Reaction system for growing a thin film
WO2008140785A1 (en) 2005-04-19 2008-11-20 Sdc Materials, Inc. Water cooling system and heat transfer system
US7513681B2 (en) * 2005-07-22 2009-04-07 Saint-Gobain Performance Plastic Corporation Static mixing device
US20090120364A1 (en) 2007-11-09 2009-05-14 Applied Materials, Inc. Gas mixing swirl insert assembly
US7871587B2 (en) * 2008-12-23 2011-01-18 Mks Instruments, Inc. Reactive chemical containment system
US8568529B2 (en) 2009-04-10 2013-10-29 Applied Materials, Inc. HVPE chamber hardware

Also Published As

Publication number Publication date
CN105190834B (zh) 2017-11-03
KR101729471B1 (ko) 2017-04-25
US20140269156A1 (en) 2014-09-18
WO2014149351A1 (en) 2014-09-25
TWI582264B (zh) 2017-05-11
US9327252B2 (en) 2016-05-03
CN105190834A (zh) 2015-12-23
TW201441416A (zh) 2014-11-01
KR20150129006A (ko) 2015-11-18
JP2016515925A (ja) 2016-06-02

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