TWI582264B - 用於加強氣體種類混合的壓緊裝置 - Google Patents
用於加強氣體種類混合的壓緊裝置 Download PDFInfo
- Publication number
- TWI582264B TWI582264B TW103108698A TW103108698A TWI582264B TW I582264 B TWI582264 B TW I582264B TW 103108698 A TW103108698 A TW 103108698A TW 103108698 A TW103108698 A TW 103108698A TW I582264 B TWI582264 B TW I582264B
- Authority
- TW
- Taiwan
- Prior art keywords
- section
- gas
- coupled
- mixing chamber
- outflow
- Prior art date
Links
- 230000002708 enhancing effect Effects 0.000 title description 2
- 239000007789 gas Substances 0.000 claims description 144
- 230000002093 peripheral effect Effects 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 2
- 230000006835 compression Effects 0.000 description 10
- 238000007906 compression Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/105—Mixing heads, i.e. compact mixing units or modules, using mixing valves for feeding and mixing at least two components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/10—Mixing gases with gases
- B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
- B01F23/191—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means characterised by the construction of the controlling means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/45—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads
- B01F25/452—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces
- B01F25/4521—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through orifices in elements, e.g. flat plates or cylinders, which obstruct the whole diameter of the tube
- B01F25/45211—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through orifices in elements, e.g. flat plates or cylinders, which obstruct the whole diameter of the tube the elements being cylinders or cones which obstruct the whole diameter of the tube, the flow changing from axial in radial and again in axial
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/83—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices
- B01F35/833—Flow control by valves, e.g. opening intermittently
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/58—Mixing semiconducting materials, e.g. during semiconductor or wafer manufacturing processes
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Dispersion Chemistry (AREA)
- Accessories For Mixers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/834,625 US9327252B2 (en) | 2013-03-15 | 2013-03-15 | Compact device for enhancing the mixing of gaseous species |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201441416A TW201441416A (zh) | 2014-11-01 |
| TWI582264B true TWI582264B (zh) | 2017-05-11 |
Family
ID=51526541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103108698A TWI582264B (zh) | 2013-03-15 | 2014-03-12 | 用於加強氣體種類混合的壓緊裝置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9327252B2 (https=) |
| JP (1) | JP6474778B2 (https=) |
| KR (1) | KR101729471B1 (https=) |
| CN (1) | CN105190834B (https=) |
| TW (1) | TWI582264B (https=) |
| WO (1) | WO2014149351A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11118262B2 (en) * | 2018-10-11 | 2021-09-14 | Asm Ip Holding B.V. | Substrate processing apparatus having a gas-mixing manifold |
| CN111197698A (zh) * | 2018-11-20 | 2020-05-26 | 长鑫存储技术有限公司 | 气体传输系统 |
| US12516414B2 (en) | 2019-03-19 | 2026-01-06 | Asm Ip Holding B.V. | Reactor manifolds |
| US11492701B2 (en) * | 2019-03-19 | 2022-11-08 | Asm Ip Holding B.V. | Reactor manifolds |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1992581A (en) * | 1931-08-08 | 1935-02-26 | Fulton Sylphon Co | Fluid conditioning apparatus |
| US7513681B2 (en) * | 2005-07-22 | 2009-04-07 | Saint-Gobain Performance Plastic Corporation | Static mixing device |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1924038A (en) * | 1933-03-06 | 1933-08-22 | Ind Patents Ltd | Mixing device |
| US3089683A (en) * | 1960-06-08 | 1963-05-14 | Horace F Thomas | Mixer for viscous liquids |
| JPS449800Y1 (https=) * | 1966-10-10 | 1969-04-21 | ||
| DE2252201A1 (de) * | 1972-10-25 | 1974-05-22 | 5090 Leverkusen | Vorrichtung zum herstellen von formteilen aus schnell miteinander reagierenden chemischen komponenten |
| JPH01266715A (ja) * | 1988-04-18 | 1989-10-24 | Hitachi Ltd | 薄膜成長装置 |
| JPH05347259A (ja) * | 1992-06-12 | 1993-12-27 | Ishikawajima Harima Heavy Ind Co Ltd | 宇宙暴露部実験用気相成長装置 |
| JPH08264464A (ja) * | 1995-03-24 | 1996-10-11 | Shin Etsu Handotai Co Ltd | 気相成長方法 |
| JP3865813B2 (ja) * | 1995-12-01 | 2007-01-10 | 有限会社エーディ | 流体混合装置 |
| US6068703A (en) | 1997-07-11 | 2000-05-30 | Applied Materials, Inc. | Gas mixing apparatus and method |
| US6211253B1 (en) * | 1998-05-20 | 2001-04-03 | Ernesto Marelli | Process for producing emulsions, particularly emulsions of liquid fuels and water, and apparatus used in the process |
| JP2000262876A (ja) * | 1999-03-15 | 2000-09-26 | Toshiba Corp | 流体の伝熱・混合促進機構および同機構を用いた流体機器 |
| JP2002018257A (ja) * | 2000-07-03 | 2002-01-22 | Hikoroku Sugiura | マイクロミキサー |
| WO2004073850A1 (en) | 2003-02-14 | 2004-09-02 | Tokyo Electron Limited | Gas feeding apparatus |
| JP4459541B2 (ja) * | 2003-03-11 | 2010-04-28 | 富士通株式会社 | 薄膜形成装置 |
| US8152922B2 (en) | 2003-08-29 | 2012-04-10 | Asm America, Inc. | Gas mixer and manifold assembly for ALD reactor |
| WO2006078666A2 (en) * | 2005-01-18 | 2006-07-27 | Asm America, Inc. | Reaction system for growing a thin film |
| WO2008140785A1 (en) | 2005-04-19 | 2008-11-20 | Sdc Materials, Inc. | Water cooling system and heat transfer system |
| US20090120364A1 (en) | 2007-11-09 | 2009-05-14 | Applied Materials, Inc. | Gas mixing swirl insert assembly |
| US7871587B2 (en) * | 2008-12-23 | 2011-01-18 | Mks Instruments, Inc. | Reactive chemical containment system |
| US8568529B2 (en) | 2009-04-10 | 2013-10-29 | Applied Materials, Inc. | HVPE chamber hardware |
-
2013
- 2013-03-15 US US13/834,625 patent/US9327252B2/en active Active
-
2014
- 2014-02-21 KR KR1020157029242A patent/KR101729471B1/ko active Active
- 2014-02-21 JP JP2016500323A patent/JP6474778B2/ja active Active
- 2014-02-21 WO PCT/US2014/017577 patent/WO2014149351A1/en not_active Ceased
- 2014-02-21 CN CN201480013736.0A patent/CN105190834B/zh active Active
- 2014-03-12 TW TW103108698A patent/TWI582264B/zh active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1992581A (en) * | 1931-08-08 | 1935-02-26 | Fulton Sylphon Co | Fluid conditioning apparatus |
| US7513681B2 (en) * | 2005-07-22 | 2009-04-07 | Saint-Gobain Performance Plastic Corporation | Static mixing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105190834B (zh) | 2017-11-03 |
| KR101729471B1 (ko) | 2017-04-25 |
| US20140269156A1 (en) | 2014-09-18 |
| WO2014149351A1 (en) | 2014-09-25 |
| US9327252B2 (en) | 2016-05-03 |
| CN105190834A (zh) | 2015-12-23 |
| TW201441416A (zh) | 2014-11-01 |
| JP6474778B2 (ja) | 2019-02-27 |
| KR20150129006A (ko) | 2015-11-18 |
| JP2016515925A (ja) | 2016-06-02 |
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