JP2016515925A5 - - Google Patents

Download PDF

Info

Publication number
JP2016515925A5
JP2016515925A5 JP2016500323A JP2016500323A JP2016515925A5 JP 2016515925 A5 JP2016515925 A5 JP 2016515925A5 JP 2016500323 A JP2016500323 A JP 2016500323A JP 2016500323 A JP2016500323 A JP 2016500323A JP 2016515925 A5 JP2016515925 A5 JP 2016515925A5
Authority
JP
Japan
Prior art keywords
block
gas
outlet
base block
coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016500323A
Other languages
English (en)
Japanese (ja)
Other versions
JP6474778B2 (ja
JP2016515925A (ja
Filing date
Publication date
Priority claimed from US13/834,625 external-priority patent/US9327252B2/en
Application filed filed Critical
Publication of JP2016515925A publication Critical patent/JP2016515925A/ja
Publication of JP2016515925A5 publication Critical patent/JP2016515925A5/ja
Application granted granted Critical
Publication of JP6474778B2 publication Critical patent/JP6474778B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2016500323A 2013-03-15 2014-02-21 ガス状化学種の混合を増進するための小型デバイス Active JP6474778B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/834,625 US9327252B2 (en) 2013-03-15 2013-03-15 Compact device for enhancing the mixing of gaseous species
US13/834,625 2013-03-15
PCT/US2014/017577 WO2014149351A1 (en) 2013-03-15 2014-02-21 Compact device for enhancing the mixing of gaseous species

Publications (3)

Publication Number Publication Date
JP2016515925A JP2016515925A (ja) 2016-06-02
JP2016515925A5 true JP2016515925A5 (https=) 2017-03-30
JP6474778B2 JP6474778B2 (ja) 2019-02-27

Family

ID=51526541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016500323A Active JP6474778B2 (ja) 2013-03-15 2014-02-21 ガス状化学種の混合を増進するための小型デバイス

Country Status (6)

Country Link
US (1) US9327252B2 (https=)
JP (1) JP6474778B2 (https=)
KR (1) KR101729471B1 (https=)
CN (1) CN105190834B (https=)
TW (1) TWI582264B (https=)
WO (1) WO2014149351A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11118262B2 (en) * 2018-10-11 2021-09-14 Asm Ip Holding B.V. Substrate processing apparatus having a gas-mixing manifold
CN111197698A (zh) * 2018-11-20 2020-05-26 长鑫存储技术有限公司 气体传输系统
US12516414B2 (en) 2019-03-19 2026-01-06 Asm Ip Holding B.V. Reactor manifolds
US11492701B2 (en) * 2019-03-19 2022-11-08 Asm Ip Holding B.V. Reactor manifolds

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1992581A (en) * 1931-08-08 1935-02-26 Fulton Sylphon Co Fluid conditioning apparatus
US1924038A (en) * 1933-03-06 1933-08-22 Ind Patents Ltd Mixing device
US3089683A (en) * 1960-06-08 1963-05-14 Horace F Thomas Mixer for viscous liquids
JPS449800Y1 (https=) * 1966-10-10 1969-04-21
DE2252201A1 (de) * 1972-10-25 1974-05-22 5090 Leverkusen Vorrichtung zum herstellen von formteilen aus schnell miteinander reagierenden chemischen komponenten
JPH01266715A (ja) * 1988-04-18 1989-10-24 Hitachi Ltd 薄膜成長装置
JPH05347259A (ja) * 1992-06-12 1993-12-27 Ishikawajima Harima Heavy Ind Co Ltd 宇宙暴露部実験用気相成長装置
JPH08264464A (ja) * 1995-03-24 1996-10-11 Shin Etsu Handotai Co Ltd 気相成長方法
JP3865813B2 (ja) * 1995-12-01 2007-01-10 有限会社エーディ 流体混合装置
US6068703A (en) 1997-07-11 2000-05-30 Applied Materials, Inc. Gas mixing apparatus and method
US6211253B1 (en) * 1998-05-20 2001-04-03 Ernesto Marelli Process for producing emulsions, particularly emulsions of liquid fuels and water, and apparatus used in the process
JP2000262876A (ja) * 1999-03-15 2000-09-26 Toshiba Corp 流体の伝熱・混合促進機構および同機構を用いた流体機器
JP2002018257A (ja) * 2000-07-03 2002-01-22 Hikoroku Sugiura マイクロミキサー
WO2004073850A1 (en) 2003-02-14 2004-09-02 Tokyo Electron Limited Gas feeding apparatus
JP4459541B2 (ja) * 2003-03-11 2010-04-28 富士通株式会社 薄膜形成装置
US8152922B2 (en) 2003-08-29 2012-04-10 Asm America, Inc. Gas mixer and manifold assembly for ALD reactor
WO2006078666A2 (en) * 2005-01-18 2006-07-27 Asm America, Inc. Reaction system for growing a thin film
WO2008140785A1 (en) 2005-04-19 2008-11-20 Sdc Materials, Inc. Water cooling system and heat transfer system
US7513681B2 (en) * 2005-07-22 2009-04-07 Saint-Gobain Performance Plastic Corporation Static mixing device
US20090120364A1 (en) 2007-11-09 2009-05-14 Applied Materials, Inc. Gas mixing swirl insert assembly
US7871587B2 (en) * 2008-12-23 2011-01-18 Mks Instruments, Inc. Reactive chemical containment system
US8568529B2 (en) 2009-04-10 2013-10-29 Applied Materials, Inc. HVPE chamber hardware

Similar Documents

Publication Publication Date Title
TWI448864B (zh) 減壓裝置
JP2016515925A5 (https=)
JP6147113B2 (ja) 流体制御装置用継手および流体制御装置
JP2018517560A5 (https=)
PT2185423E (pt) Disposição de controlo de fluído
JP4742762B2 (ja) 流体制御装置
JP2017505377A5 (https=)
US9933089B2 (en) Decompression insert for rotary valve and rotary valve provided with such an insert
JP2019512387A (ja) ノズル装置
JP6474778B2 (ja) ガス状化学種の混合を増進するための小型デバイス
US20140151588A1 (en) Adjustable gas electromagnetic valve
JP6619751B2 (ja) エジェクタ配置
JP2009543721A5 (https=)
WO2016037492A1 (zh) 气泵
US20120073686A1 (en) Control valve assembly for faucet and faucet using the same
JP2018157083A (ja) シャワープレート、処理装置、流路構造、及び分配方法
JP2017527743A (ja) エアポンプ
JP2018044663A (ja) チェンジバルブ、増減圧制御機構および水洗便器用薬液供給システム
CN110432781A (zh) 一种多蒸室烹饪器皿及带有该器皿的蒸箱
JP2014015987A5 (https=)
CN105805364A (zh) 万能阀
JP2015096742A (ja) 弁構造
JP6474025B2 (ja) バルブユニットおよび水栓装置
JP5849266B2 (ja) 切替弁
KR101566678B1 (ko) 유체 제어 통합형 밸브 블럭