KR101642573B1 - 산업용 로봇 - Google Patents

산업용 로봇 Download PDF

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Publication number
KR101642573B1
KR101642573B1 KR1020140079469A KR20140079469A KR101642573B1 KR 101642573 B1 KR101642573 B1 KR 101642573B1 KR 1020140079469 A KR1020140079469 A KR 1020140079469A KR 20140079469 A KR20140079469 A KR 20140079469A KR 101642573 B1 KR101642573 B1 KR 101642573B1
Authority
KR
South Korea
Prior art keywords
arm
hand
screw
supporting member
driving mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020140079469A
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English (en)
Korean (ko)
Other versions
KR20150046715A (ko
Inventor
다카유키 야자와
히로시 아라카와
마사시 후지와라
요스케 다카세
Original Assignee
니혼 덴산 산쿄 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 니혼 덴산 산쿄 가부시키가이샤 filed Critical 니혼 덴산 산쿄 가부시키가이샤
Publication of KR20150046715A publication Critical patent/KR20150046715A/ko
Application granted granted Critical
Publication of KR101642573B1 publication Critical patent/KR101642573B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
KR1020140079469A 2013-10-22 2014-06-27 산업용 로봇 Active KR101642573B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013219102A JP6190692B2 (ja) 2013-10-22 2013-10-22 産業用ロボット
JPJP-P-2013-219102 2013-10-22

Publications (2)

Publication Number Publication Date
KR20150046715A KR20150046715A (ko) 2015-04-30
KR101642573B1 true KR101642573B1 (ko) 2016-07-25

Family

ID=53011723

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140079469A Active KR101642573B1 (ko) 2013-10-22 2014-06-27 산업용 로봇

Country Status (4)

Country Link
JP (1) JP6190692B2 (https=)
KR (1) KR101642573B1 (https=)
CN (1) CN104552301B (https=)
TW (1) TW201515787A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6616606B2 (ja) 2015-07-13 2019-12-04 日本電産サンキョー株式会社 産業用ロボット
JP6902422B2 (ja) 2017-07-28 2021-07-14 日本電産サンキョー株式会社 産業用ロボット
JP6869136B2 (ja) 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
JP6869137B2 (ja) 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04323115A (ja) * 1991-04-19 1992-11-12 Hitachi Electron Eng Co Ltd ワーク搬送機構
JP3484067B2 (ja) * 1998-02-20 2004-01-06 平田機工株式会社 ロボット装置
JP2000298186A (ja) * 1999-04-15 2000-10-24 Hitachi Denshi Ltd 位置決めステージ
US7066707B1 (en) * 2001-08-31 2006-06-27 Asyst Technologies, Inc. Wafer engine
JP2004106105A (ja) * 2002-09-18 2004-04-08 Seiko Instruments Inc 搬送ロボット
KR100479494B1 (ko) * 2002-09-18 2005-03-30 삼성전자주식회사 기판 반송 로봇
CN1895974A (zh) * 2005-07-15 2007-01-17 日本电产三协株式会社 基板搬出搬入方法及基板搬出搬入系统
JP4694436B2 (ja) * 2006-07-28 2011-06-08 株式会社ダイヘン 搬送ロボット
JP2008074550A (ja) * 2006-09-21 2008-04-03 Murata Mach Ltd スカラーアーム
CN101627467B (zh) * 2007-03-02 2011-04-27 株式会社大亨 搬送装置
JP4955447B2 (ja) * 2007-04-26 2012-06-20 株式会社ダイヘン 搬送装置
KR101218112B1 (ko) * 2007-12-05 2013-01-21 히라따기꼬오 가부시키가이샤 기판 반송 장치 및 기판 반송 장치의 제어 방법
JP5083339B2 (ja) * 2010-02-04 2012-11-28 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法並びに記憶媒体
KR101291811B1 (ko) * 2011-06-08 2013-07-31 주식회사 나온테크 하이브리드 진공 로봇 이송장치
JP2013184237A (ja) * 2012-03-06 2013-09-19 Sumitomo Heavy Ind Ltd 平面研削盤

Also Published As

Publication number Publication date
TWI562873B (https=) 2016-12-21
JP6190692B2 (ja) 2017-08-30
CN104552301B (zh) 2017-04-12
CN104552301A (zh) 2015-04-29
JP2015080828A (ja) 2015-04-27
KR20150046715A (ko) 2015-04-30
TW201515787A (zh) 2015-05-01

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