KR101639588B1 - 평가 기판, 환경 시험 장치, 및 공시체의 평가 방법 - Google Patents

평가 기판, 환경 시험 장치, 및 공시체의 평가 방법 Download PDF

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Publication number
KR101639588B1
KR101639588B1 KR1020140049770A KR20140049770A KR101639588B1 KR 101639588 B1 KR101639588 B1 KR 101639588B1 KR 1020140049770 A KR1020140049770 A KR 1020140049770A KR 20140049770 A KR20140049770 A KR 20140049770A KR 101639588 B1 KR101639588 B1 KR 101639588B1
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KR
South Korea
Prior art keywords
substrate
specimen
heating
evaluation
heater
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KR1020140049770A
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English (en)
Korean (ko)
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KR20140138024A (ko
Inventor
히데키 다나카
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에스펙 가부시키가이샤
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Publication of KR20140138024A publication Critical patent/KR20140138024A/ko
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Publication of KR101639588B1 publication Critical patent/KR101639588B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections

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  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Environmental Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Ecology (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
KR1020140049770A 2013-05-24 2014-04-25 평가 기판, 환경 시험 장치, 및 공시체의 평가 방법 KR101639588B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2013-109866 2013-05-24
JP2013109866A JP5882944B2 (ja) 2013-05-24 2013-05-24 環境試験装置、供試体の評価方法、並びに、試験装置

Publications (2)

Publication Number Publication Date
KR20140138024A KR20140138024A (ko) 2014-12-03
KR101639588B1 true KR101639588B1 (ko) 2016-07-14

Family

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Application Number Title Priority Date Filing Date
KR1020140049770A KR101639588B1 (ko) 2013-05-24 2014-04-25 평가 기판, 환경 시험 장치, 및 공시체의 평가 방법

Country Status (4)

Country Link
JP (1) JP5882944B2 (ja)
KR (1) KR101639588B1 (ja)
CN (1) CN104181095B (ja)
TW (1) TWI598576B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7121953B2 (ja) * 2018-02-22 2022-08-19 国立大学法人大阪大学 基板評価用チップ及び基板評価装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002033364A (ja) * 2000-07-19 2002-01-31 Mitsubishi Electric Corp バーンイン装置及びバーンイン方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01316675A (ja) * 1988-03-15 1989-12-21 Furukawa Electric Co Ltd:The 電子部品テスト用積層板
MY103847A (en) * 1988-03-15 1993-09-30 Yamaichi Electric Mfg Laminated board for testing electronic components
JPH0627781B2 (ja) * 1988-08-04 1994-04-13 山一電機工業株式会社 卓上型電子部品加熱試験用ボックス
JP3232446B2 (ja) * 1996-10-14 2001-11-26 オリオン機械株式会社 温度試験装置
JP3399826B2 (ja) * 1998-02-09 2003-04-21 エスペック株式会社 環境装置の送風装置
WO2003017335A2 (en) * 2001-08-13 2003-02-27 Honeywell International Inc. Systems for wafer level burn-in of electronic devices
TWM401777U (en) * 2010-10-13 2011-04-11 Advanced Electronics Co Ltd High-power electronic device tester capable of providing constant temperature and humidity testing environment
CN102110387B (zh) * 2011-01-26 2013-04-17 浙江大学 测量微管对流传热系数的教学实验装置
JP5047384B2 (ja) 2011-07-15 2012-10-10 エスペック株式会社 環境試験装置
CN102830315B (zh) * 2012-09-05 2015-07-08 清华大学 一种模拟航天航空环境电子器件失效的装置及方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002033364A (ja) * 2000-07-19 2002-01-31 Mitsubishi Electric Corp バーンイン装置及びバーンイン方法

Also Published As

Publication number Publication date
CN104181095A (zh) 2014-12-03
JP2014228463A (ja) 2014-12-08
CN104181095B (zh) 2018-05-15
JP5882944B2 (ja) 2016-03-09
TW201447264A (zh) 2014-12-16
TWI598576B (zh) 2017-09-11
KR20140138024A (ko) 2014-12-03

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