KR101627880B1 - Oled의 제조 방법 - Google Patents
Oled의 제조 방법 Download PDFInfo
- Publication number
- KR101627880B1 KR101627880B1 KR1020117000510A KR20117000510A KR101627880B1 KR 101627880 B1 KR101627880 B1 KR 101627880B1 KR 1020117000510 A KR1020117000510 A KR 1020117000510A KR 20117000510 A KR20117000510 A KR 20117000510A KR 101627880 B1 KR101627880 B1 KR 101627880B1
- Authority
- KR
- South Korea
- Prior art keywords
- quinolate
- layer
- carrier gas
- inert carrier
- lithium
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000010410 layer Substances 0.000 claims abstract description 140
- 238000002347 injection Methods 0.000 claims abstract description 41
- 239000007924 injection Substances 0.000 claims abstract description 41
- 229910052751 metal Inorganic materials 0.000 claims abstract description 41
- 239000002184 metal Substances 0.000 claims abstract description 41
- 239000012159 carrier gas Substances 0.000 claims abstract description 31
- -1 lithium Schiff base Chemical class 0.000 claims abstract description 29
- IMKMFBIYHXBKRX-UHFFFAOYSA-M lithium;quinoline-2-carboxylate Chemical compound [Li+].C1=CC=CC2=NC(C(=O)[O-])=CC=C21 IMKMFBIYHXBKRX-UHFFFAOYSA-M 0.000 claims abstract description 18
- 230000005525 hole transport Effects 0.000 claims abstract description 17
- 229910052744 lithium Inorganic materials 0.000 claims abstract description 17
- 239000012044 organic layer Substances 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims description 136
- 150000001875 compounds Chemical class 0.000 claims description 49
- 238000000151 deposition Methods 0.000 claims description 42
- 239000002019 doping agent Substances 0.000 claims description 34
- 230000008021 deposition Effects 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 29
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 claims description 24
- VNZZUWADVGKWCN-UHFFFAOYSA-J quinoline-2-carboxylate zirconium(4+) Chemical compound [Zr+4].C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21 VNZZUWADVGKWCN-UHFFFAOYSA-J 0.000 claims description 23
- 125000003118 aryl group Chemical group 0.000 claims description 22
- IUFDZNVMARBLOJ-UHFFFAOYSA-K aluminum;quinoline-2-carboxylate Chemical compound [Al+3].C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21 IUFDZNVMARBLOJ-UHFFFAOYSA-K 0.000 claims description 21
- 229910052757 nitrogen Inorganic materials 0.000 claims description 16
- 125000001072 heteroaryl group Chemical group 0.000 claims description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 239000001257 hydrogen Substances 0.000 claims description 14
- 229910052739 hydrogen Inorganic materials 0.000 claims description 14
- 125000000217 alkyl group Chemical group 0.000 claims description 12
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 12
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 11
- 125000003545 alkoxy group Chemical group 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- KSUFELKEKRWQPH-UHFFFAOYSA-J hafnium(4+) quinoline-2-carboxylate Chemical compound [Hf+4].C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21 KSUFELKEKRWQPH-UHFFFAOYSA-J 0.000 claims description 10
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 claims description 9
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- 229910052736 halogen Inorganic materials 0.000 claims description 7
- 150000002367 halogens Chemical class 0.000 claims description 7
- 125000000623 heterocyclic group Chemical group 0.000 claims description 7
- 239000002904 solvent Substances 0.000 claims description 7
- 125000002950 monocyclic group Chemical group 0.000 claims description 6
- 125000001544 thienyl group Chemical group 0.000 claims description 6
- DGEZNRSVGBDHLK-UHFFFAOYSA-N [1,10]phenanthroline Chemical compound C1=CN=C2C3=NC=CC=C3C=CC2=C1 DGEZNRSVGBDHLK-UHFFFAOYSA-N 0.000 claims description 5
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 5
- 125000003367 polycyclic group Chemical group 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 4
- MQRCTQVBZYBPQE-UHFFFAOYSA-N 189363-47-1 Chemical compound C1=CC=CC=C1N(C=1C=C2C3(C4=CC(=CC=C4C2=CC=1)N(C=1C=CC=CC=1)C=1C=CC=CC=1)C1=CC(=CC=C1C1=CC=C(C=C13)N(C=1C=CC=CC=1)C=1C=CC=CC=1)N(C=1C=CC=CC=1)C=1C=CC=CC=1)C1=CC=CC=C1 MQRCTQVBZYBPQE-UHFFFAOYSA-N 0.000 claims description 3
- RFVBBELSDAVRHM-UHFFFAOYSA-N 9,10-dinaphthalen-2-yl-2-phenylanthracene Chemical compound C1=CC=CC=C1C1=CC=C(C(C=2C=C3C=CC=CC3=CC=2)=C2C(C=CC=C2)=C2C=3C=C4C=CC=CC4=CC=3)C2=C1 RFVBBELSDAVRHM-UHFFFAOYSA-N 0.000 claims description 3
- 125000001931 aliphatic group Chemical group 0.000 claims description 3
- 150000004703 alkoxides Chemical class 0.000 claims description 3
- 125000001769 aryl amino group Chemical group 0.000 claims description 3
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N benzo-alpha-pyrone Natural products C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 claims description 3
- 235000001671 coumarin Nutrition 0.000 claims description 3
- NADIMWSVJTWZKI-UHFFFAOYSA-M lithium;2-(phenyliminomethyl)phenolate Chemical group [Li+].[O-]C1=CC=CC=C1C=NC1=CC=CC=C1 NADIMWSVJTWZKI-UHFFFAOYSA-M 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- KBUBFHYMWGSERI-UHFFFAOYSA-N 1,2-dinaphthalen-2-ylperylene Chemical group C1=CC=CC2=CC(C3=C4C=5C=CC=C6C=CC=C(C=56)C=5C=CC=C(C4=5)C=C3C3=CC4=CC=CC=C4C=C3)=CC=C21 KBUBFHYMWGSERI-UHFFFAOYSA-N 0.000 claims description 2
- YRFKHKBUMKFMAU-UHFFFAOYSA-N 1,2-diphenylacridine Chemical group C1=CC=CC=C1C1=CC=C(N=C2C(C=CC=C2)=C2)C2=C1C1=CC=CC=C1 YRFKHKBUMKFMAU-UHFFFAOYSA-N 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 claims description 2
- 239000003446 ligand Substances 0.000 claims description 2
- KNWWWMGCICBSSM-UHFFFAOYSA-N n,n-diphenyl-4-[4-[4-(n-phenylanilino)phenyl]phenyl]aniline Chemical group C1=CC=CC=C1N(C=1C=CC(=CC=1)C=1C=CC(=CC=1)C=1C=CC(=CC=1)N(C=1C=CC=CC=1)C=1C=CC=CC=1)C1=CC=CC=C1 KNWWWMGCICBSSM-UHFFFAOYSA-N 0.000 claims description 2
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 claims description 2
- ZWFYQDWEWDSNDW-UHFFFAOYSA-J quinoline-2-carboxylate titanium(4+) Chemical compound [Ti+4].C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21 ZWFYQDWEWDSNDW-UHFFFAOYSA-J 0.000 claims description 2
- 150000003384 small molecules Chemical class 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- VBRDLBGPDHCSQC-UHFFFAOYSA-N 2,3,4-tris(9h-carbazol-1-yl)-n,n-diphenylaniline Chemical compound C1=CC=CC=C1N(C=1C(=C(C=2C=3NC4=CC=CC=C4C=3C=CC=2)C(C=2C=3NC4=CC=CC=C4C=3C=CC=2)=CC=1)C=1C=2NC3=CC=CC=C3C=2C=CC=1)C1=CC=CC=C1 VBRDLBGPDHCSQC-UHFFFAOYSA-N 0.000 claims 1
- YFTVWLKIADSAKW-UHFFFAOYSA-N 4-[2,6-dimethyl-4-(n-phenylanilino)phenyl]-3,5-dimethyl-n,n-diphenylaniline Chemical compound CC1=CC(N(C=2C=CC=CC=2)C=2C=CC=CC=2)=CC(C)=C1C(C(=C1)C)=C(C)C=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 YFTVWLKIADSAKW-UHFFFAOYSA-N 0.000 claims 1
- YXLXNENXOJSQEI-UHFFFAOYSA-L Oxine-copper Chemical compound [Cu+2].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 YXLXNENXOJSQEI-UHFFFAOYSA-L 0.000 claims 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims 1
- 125000000332 coumarinyl group Chemical class O1C(=O)C(=CC2=CC=CC=C12)* 0.000 claims 1
- RYZPDEZIQWOVPJ-UHFFFAOYSA-N n-naphthalen-1-yl-n-[4-[4-[naphthalen-1-yl(naphthalen-2-yl)amino]phenyl]phenyl]naphthalen-2-amine Chemical group C1=CC=C2C(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C4=CC=CC=C4C=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=CC2=C1 RYZPDEZIQWOVPJ-UHFFFAOYSA-N 0.000 claims 1
- 150000004032 porphyrins Chemical class 0.000 claims 1
- 150000003512 tertiary amines Chemical class 0.000 claims 1
- 239000002262 Schiff base Substances 0.000 abstract description 4
- 230000032258 transport Effects 0.000 description 26
- 239000000758 substrate Substances 0.000 description 25
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 22
- VTWVWXZKYDDACW-UHFFFAOYSA-M copper(1+);quinolin-8-ol;quinolin-8-olate Chemical compound [Cu+].C1=CN=C2C(O)=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 VTWVWXZKYDDACW-UHFFFAOYSA-M 0.000 description 18
- 230000006870 function Effects 0.000 description 18
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 18
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 16
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- 230000008022 sublimation Effects 0.000 description 11
- 239000000203 mixture Substances 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 8
- 239000002244 precipitate Substances 0.000 description 8
- 229910052761 rare earth metal Inorganic materials 0.000 description 8
- 150000002910 rare earth metals Chemical class 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical group [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 7
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 7
- 239000007850 fluorescent dye Substances 0.000 description 7
- 150000002431 hydrogen Chemical class 0.000 description 7
- 229910052741 iridium Inorganic materials 0.000 description 7
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- 230000009467 reduction Effects 0.000 description 7
- 229910052726 zirconium Inorganic materials 0.000 description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 125000001153 fluoro group Chemical group F* 0.000 description 6
- 239000011368 organic material Substances 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
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- 150000002739 metals Chemical class 0.000 description 5
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 5
- 239000005725 8-Hydroxyquinoline Substances 0.000 description 4
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- 239000011777 magnesium Substances 0.000 description 4
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- 241000284156 Clerodendrum quadriloculare Species 0.000 description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 3
- 150000004753 Schiff bases Chemical class 0.000 description 3
- 239000007983 Tris buffer Substances 0.000 description 3
- 239000000872 buffer Substances 0.000 description 3
- 239000011575 calcium Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 125000004093 cyano group Chemical group *C#N 0.000 description 3
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- 239000000178 monomer Substances 0.000 description 3
- 150000002894 organic compounds Chemical class 0.000 description 3
- 125000002524 organometallic group Chemical group 0.000 description 3
- 229910052762 osmium Inorganic materials 0.000 description 3
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
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- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 3
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- MCJGNVYPOGVAJF-UHFFFAOYSA-N quinolin-8-ol Chemical compound C1=CN=C2C(O)=CC=CC2=C1 MCJGNVYPOGVAJF-UHFFFAOYSA-N 0.000 description 3
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- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 3
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- 230000004580 weight loss Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- WNZNEKPFXJXMSK-UHFFFAOYSA-L zinc;quinoline-2-carboxylate Chemical compound [Zn+2].C1=CC=CC2=NC(C(=O)[O-])=CC=C21.C1=CC=CC2=NC(C(=O)[O-])=CC=C21 WNZNEKPFXJXMSK-UHFFFAOYSA-L 0.000 description 1
- DUNKXUFBGCUVQW-UHFFFAOYSA-J zirconium tetrachloride Chemical compound Cl[Zr](Cl)(Cl)Cl DUNKXUFBGCUVQW-UHFFFAOYSA-J 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/18—Light sources with substantially two-dimensional radiating surfaces characterised by the nature or concentration of the activator
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
- H10K85/621—Aromatic anhydride or imide compounds, e.g. perylene tetra-carboxylic dianhydride or perylene tetracarboxylic di-imide
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
- Nitrogen Condensed Heterocyclic Rings (AREA)
- Indole Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0810532.2 | 2008-06-10 | ||
GBGB0810532.2A GB0810532D0 (en) | 2008-06-10 | 2008-06-10 | Method of making an oled |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20110019777A KR20110019777A (ko) | 2011-02-28 |
KR101627880B1 true KR101627880B1 (ko) | 2016-06-07 |
Family
ID=39638424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020117000510A KR101627880B1 (ko) | 2008-06-10 | 2009-06-04 | Oled의 제조 방법 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP2286474A2 (ja) |
JP (1) | JP2011523184A (ja) |
KR (1) | KR101627880B1 (ja) |
GB (1) | GB0810532D0 (ja) |
WO (1) | WO2009149860A2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101639855B1 (ko) * | 2011-05-20 | 2016-07-14 | 국립대학법인 야마가타대학 | 유기 전자 디바이스 및 그 제조 방법 |
TWI558711B (zh) | 2011-11-30 | 2016-11-21 | 諾瓦發光二極體有限公司 | 有機電子裝置 |
GB201306365D0 (en) * | 2013-04-09 | 2013-05-22 | Kathirgamanathan Poopathy | Heterocyclic compounds and their use in electro-optical or opto-electronic devices |
EP2999019B1 (en) * | 2014-09-19 | 2019-06-12 | Novaled GmbH | Organic light-emitting diode including an electron transport layer stack comprising different lithium compounds and elemental metal |
CN109503610B (zh) * | 2018-12-21 | 2021-01-26 | 中节能万润股份有限公司 | 一种含有异香豆素并吡咯并香豆素结构的oled材料、制备方法及其应用 |
WO2020251696A1 (en) | 2019-06-10 | 2020-12-17 | Applied Materials, Inc. | Processing system for forming layers |
CN111423450B (zh) * | 2020-04-29 | 2021-10-26 | 上海天马有机发光显示技术有限公司 | 化合物、显示面板以及显示装置 |
CN114420878A (zh) * | 2022-01-17 | 2022-04-29 | 南京迪视泰光电科技有限公司 | 一种高热稳定性的倒置oled器件及其制备方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH1192684A (ja) * | 1997-09-24 | 1999-04-06 | Japan Atom Energy Res Inst | ガス中蒸着によるε型銅フタロシアニン結晶及びその薄膜の作製方法 |
US6337102B1 (en) * | 1997-11-17 | 2002-01-08 | The Trustees Of Princeton University | Low pressure vapor phase deposition of organic thin films |
KR101383454B1 (ko) * | 2007-09-21 | 2014-04-08 | 엘지디스플레이 주식회사 | 전계발광소자 |
-
2008
- 2008-06-10 GB GBGB0810532.2A patent/GB0810532D0/en not_active Ceased
-
2009
- 2009-06-04 JP JP2011512873A patent/JP2011523184A/ja not_active Withdrawn
- 2009-06-04 WO PCT/EP2009/003988 patent/WO2009149860A2/en active Application Filing
- 2009-06-04 KR KR1020117000510A patent/KR101627880B1/ko active IP Right Grant
- 2009-06-04 EP EP09761423A patent/EP2286474A2/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
KR20110019777A (ko) | 2011-02-28 |
WO2009149860A2 (en) | 2009-12-17 |
EP2286474A2 (en) | 2011-02-23 |
JP2011523184A (ja) | 2011-08-04 |
GB0810532D0 (en) | 2008-07-09 |
WO2009149860A3 (en) | 2010-03-04 |
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