KR101625843B1 - 액체 실록산 출발 물질의 증기상 증착 및 분무화에 의한 합성 석영 유리 제조 방법 - Google Patents

액체 실록산 출발 물질의 증기상 증착 및 분무화에 의한 합성 석영 유리 제조 방법 Download PDF

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KR101625843B1
KR101625843B1 KR1020147017200A KR20147017200A KR101625843B1 KR 101625843 B1 KR101625843 B1 KR 101625843B1 KR 1020147017200 A KR1020147017200 A KR 1020147017200A KR 20147017200 A KR20147017200 A KR 20147017200A KR 101625843 B1 KR101625843 B1 KR 101625843B1
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sio
feedstock material
feedstock
liquid
quartz glass
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KR20140098814A (ko
Inventor
하인츠 파비앙
위르겐 로퍼
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헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/011—Manufacture of glass fibres or filaments starting from a liquid phase reaction process, e.g. through a gel phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/34—Liquid, e.g. mist or aerosol
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Silicon Compounds (AREA)
KR1020147017200A 2011-11-25 2012-11-22 액체 실록산 출발 물질의 증기상 증착 및 분무화에 의한 합성 석영 유리 제조 방법 Active KR101625843B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102011119339A DE102011119339A1 (de) 2011-11-25 2011-11-25 Zerstäubungsverfahren zur Herstellung von synthetischem Quarzglas
DE102011119339.5 2011-11-25
US201161569163P 2011-12-09 2011-12-09
US61/569,163 2011-12-09
PCT/EP2012/073345 WO2013076195A1 (de) 2011-11-25 2012-11-22 Verfahren zur herstellung von synthetischem quarzglas durch abscheidung aus der dampfphase und mittels zerstäubung des flüssigen siloxaneinsatzmaterials

Publications (2)

Publication Number Publication Date
KR20140098814A KR20140098814A (ko) 2014-08-08
KR101625843B1 true KR101625843B1 (ko) 2016-06-01

Family

ID=48287834

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147017200A Active KR101625843B1 (ko) 2011-11-25 2012-11-22 액체 실록산 출발 물질의 증기상 증착 및 분무화에 의한 합성 석영 유리 제조 방법

Country Status (7)

Country Link
US (1) US8984911B2 (enExample)
EP (1) EP2782877B1 (enExample)
JP (1) JP6133319B2 (enExample)
KR (1) KR101625843B1 (enExample)
CN (1) CN103946168B (enExample)
DE (1) DE102011119339A1 (enExample)
WO (1) WO2013076195A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011121190A1 (de) * 2011-12-16 2013-06-20 Heraeus Quarzglas Gmbh & Co. Kg OMCTS-Verdampfungsverfahren
WO2014047724A1 (en) 2012-09-26 2014-04-03 Ledtech International Inc. Multilayer optical interference filter
DE102013202256B3 (de) * 2013-02-12 2014-07-17 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von Titan-dotiertem synthetischen Quarzglas und dessen Verwendung
US10464838B2 (en) * 2015-01-13 2019-11-05 Asi/Silica Machinery, Llc Enhanced particle deposition system and method
EP3424883A1 (de) * 2017-07-05 2019-01-09 Evonik Degussa GmbH Sprühverdampfung eines flüssigen rohstoffes zur herstellung von siliciumdioxid und metalloxiden
JP6793676B2 (ja) * 2018-04-02 2020-12-02 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造装置および製造方法
CN109373196A (zh) * 2018-12-05 2019-02-22 上海正帆科技股份有限公司 一种八甲基环四硅氧烷的输送及汽化系统和方法
JP7058627B2 (ja) 2019-06-11 2022-04-22 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造装置および製造方法
CN112028466B (zh) * 2020-09-01 2021-08-31 长飞光纤光缆股份有限公司 一种用于制备光纤预制棒的有机硅原料蒸发装置
JP7428632B2 (ja) 2020-12-14 2024-02-06 信越化学工業株式会社 多孔質ガラス母材の製造方法及び製造装置
CN115583791B (zh) * 2022-10-18 2023-12-01 长飞光纤光缆股份有限公司 一种适用于ovd工艺的d4快速气化装置
CN117645406B (zh) * 2023-12-22 2025-08-01 湖北菲利华石英玻璃股份有限公司 一种低膨胀系数石英玻璃锭的生产方法及生产装置

Citations (1)

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JP2001512085A (ja) * 1997-07-30 2001-08-21 コーニング インコーポレイテッド 酸素を用いる液相反応体の燃焼によるシリカ形成方法

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JP2001512085A (ja) * 1997-07-30 2001-08-21 コーニング インコーポレイテッド 酸素を用いる液相反応体の燃焼によるシリカ形成方法

Also Published As

Publication number Publication date
WO2013076195A1 (de) 2013-05-30
CN103946168B (zh) 2017-02-22
JP6133319B2 (ja) 2017-05-24
DE102011119339A1 (de) 2013-05-29
JP2015500785A (ja) 2015-01-08
CN103946168A (zh) 2014-07-23
EP2782877A1 (de) 2014-10-01
US20130133376A1 (en) 2013-05-30
EP2782877B1 (de) 2016-05-25
US8984911B2 (en) 2015-03-24
KR20140098814A (ko) 2014-08-08

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