KR101580421B1 - 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법 - Google Patents

방전램프, 광원장치, 노광장치 및 노광장치의 제조방법 Download PDF

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Publication number
KR101580421B1
KR101580421B1 KR1020147014694A KR20147014694A KR101580421B1 KR 101580421 B1 KR101580421 B1 KR 101580421B1 KR 1020147014694 A KR1020147014694 A KR 1020147014694A KR 20147014694 A KR20147014694 A KR 20147014694A KR 101580421 B1 KR101580421 B1 KR 101580421B1
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KR
South Korea
Prior art keywords
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discharge lamp
shaft portion
base
shaft
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Expired - Fee Related
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KR1020147014694A
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English (en)
Korean (ko)
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KR20140090225A (ko
Inventor
히로시 시라스
야스오 아오키
모투 고야마
다카유키 기쿠치
Original Assignee
가부시키가이샤 니콘
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V19/00—Fastening of light sources or lamp holders
    • F21V19/006—Fastening of light sources or lamp holders of point-like light sources, e.g. incandescent or halogen lamps, with screw-threaded or bayonet base
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H01J5/56—Shape of the separate part
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/822—High-pressure mercury lamps

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Health & Medical Sciences (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Fastening Of Light Sources Or Lamp Holders (AREA)
KR1020147014694A 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법 Expired - Fee Related KR101580421B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2006237252 2006-09-01
JPJP-P-2006-237252 2006-09-01
JP2007006462 2007-01-15
JPJP-P-2007-006462 2007-01-15
JP2007127451 2007-05-11
JPJP-P-2007-127451 2007-05-11
PCT/JP2007/066947 WO2008026709A1 (en) 2006-09-01 2007-08-30 Discharge lamp, light source apparatus, exposure apparatus and exposure apparatus manufacturing method

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020087031628A Division KR101624948B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법

Publications (2)

Publication Number Publication Date
KR20140090225A KR20140090225A (ko) 2014-07-16
KR101580421B1 true KR101580421B1 (ko) 2015-12-24

Family

ID=39135992

Family Applications (15)

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KR1020147014694A Expired - Fee Related KR101580421B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020167034072A Active KR101834805B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020217024814A Ceased KR20210101330A (ko) 2006-09-01 2007-08-30 방전램프
KR1020187013262A Expired - Fee Related KR101904954B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020087031628A Active KR101624948B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020207026323A Active KR102288690B1 (ko) 2006-09-01 2007-08-30 방전램프
KR1020197027510A Active KR102157236B1 (ko) 2006-09-01 2007-08-30 방전램프
KR1020167034073A Active KR101748733B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020177008820A Active KR101858552B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020187028072A Active KR102025418B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020157007484A Active KR101685858B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020177036624A Active KR101865527B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020167000200A Ceased KR20160009104A (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020177016160A Active KR101812308B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020177008819A Active KR101778704B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법

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KR1020167034072A Active KR101834805B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020217024814A Ceased KR20210101330A (ko) 2006-09-01 2007-08-30 방전램프
KR1020187013262A Expired - Fee Related KR101904954B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020087031628A Active KR101624948B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020207026323A Active KR102288690B1 (ko) 2006-09-01 2007-08-30 방전램프
KR1020197027510A Active KR102157236B1 (ko) 2006-09-01 2007-08-30 방전램프
KR1020167034073A Active KR101748733B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020177008820A Active KR101858552B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020187028072A Active KR102025418B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020157007484A Active KR101685858B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020177036624A Active KR101865527B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020167000200A Ceased KR20160009104A (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020177016160A Active KR101812308B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR1020177008819A Active KR101778704B1 (ko) 2006-09-01 2007-08-30 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법

Country Status (7)

Country Link
US (2) US8531093B2 (enExample)
EP (1) EP2096658B1 (enExample)
JP (16) JP5055632B2 (enExample)
KR (15) KR101580421B1 (enExample)
CN (2) CN102518954B (enExample)
TW (6) TWI661470B (enExample)
WO (1) WO2008026709A1 (enExample)

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CN108682602B (zh) * 2018-06-07 2024-05-03 山东广达源照明电器有限公司 用于灯管加工过程中的定位装置
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