KR101579416B1 - 직류전원장치, 직류전원장치의 제어방법 - Google Patents

직류전원장치, 직류전원장치의 제어방법 Download PDF

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KR101579416B1
KR101579416B1 KR1020157006021A KR20157006021A KR101579416B1 KR 101579416 B1 KR101579416 B1 KR 101579416B1 KR 1020157006021 A KR1020157006021 A KR 1020157006021A KR 20157006021 A KR20157006021 A KR 20157006021A KR 101579416 B1 KR101579416 B1 KR 101579416B1
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South Korea
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control
voltage
current
short
circuit
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KR20150038625A (ko
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이쯔오 유즈리하라
도시유키 아다치
신이치 고다마
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가부시끼가이샤교산세이사꾸쇼
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32027—DC powered
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32045—Circuits specially adapted for controlling the glow discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
    • H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
    • H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
    • H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33569—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
    • H02M3/33573—Full-bridge at primary side of an isolation transformer
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/007—Plural converter units in cascade
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
    • H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
    • H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
    • H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33507—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of the output voltage or current, e.g. flyback converters
    • H05H2001/4682—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/22—DC, AC or pulsed generators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/001—Arrangements for beam delivery or irradiation

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inverter Devices (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Dc-Dc Converters (AREA)
KR1020157006021A 2012-09-07 2012-09-07 직류전원장치, 직류전원장치의 제어방법 Active KR101579416B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/072854 WO2014038060A1 (ja) 2012-09-07 2012-09-07 直流電源装置、直流電源装置の制御方法

Publications (2)

Publication Number Publication Date
KR20150038625A KR20150038625A (ko) 2015-04-08
KR101579416B1 true KR101579416B1 (ko) 2015-12-21

Family

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KR1020157006021A Active KR101579416B1 (ko) 2012-09-07 2012-09-07 직류전원장치, 직류전원장치의 제어방법

Country Status (10)

Country Link
US (1) US9137885B2 (https=)
EP (1) EP2879471B1 (https=)
JP (1) JP5634626B2 (https=)
KR (1) KR101579416B1 (https=)
CN (1) CN104604337B (https=)
DE (1) DE12884110T1 (https=)
IN (1) IN2014KN03106A (https=)
PL (1) PL2879471T3 (https=)
TW (1) TWI491317B (https=)
WO (1) WO2014038060A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10818474B1 (en) 2019-05-08 2020-10-27 Newpowerplasma Co., Ltd. RF generator and its operating method

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DE12884309T1 (de) * 2012-09-05 2015-09-17 Kyosan Electric Mfg. Co., Ltd. Gleichstromversorgungsvorrichtung und steuerungsverfahren für die gleichstromversorgungsvorrichtung
JP5729732B2 (ja) 2013-09-27 2015-06-03 株式会社京三製作所 直流電源装置、直流電源装置の制御方法
DE102015117892A1 (de) * 2015-10-21 2017-04-27 Dr. Ing. H.C. F. Porsche Aktiengesellschaft Verfahren zum Auf- oder Entladen einer Fahrzeugbatterie
GB2548209B (en) * 2016-03-07 2018-03-21 Intelligent Growth Solutions Ltd Controllable power and lighting system
CN109863584B (zh) 2016-06-15 2023-05-26 沃特洛电气制造公司 用于热系统的功率转换器
DE112017004113B4 (de) * 2016-08-17 2024-10-24 Mitsubishi Electric Corporation Zündvorrichtung vom Barriere-Entladungstyp
JP6606038B2 (ja) * 2016-09-06 2019-11-13 株式会社東芝 出力電圧制御回路
JP6411701B1 (ja) * 2017-10-18 2018-10-24 日立ジョンソンコントロールズ空調株式会社 電力変換装置および冷凍空調機器
PL233868B1 (pl) * 2017-12-29 2019-12-31 Politechnika Lubelska Układ i sposób zasilania reaktora plazmowego ze ślizgającym się wyładowaniem
CN111865111B (zh) * 2020-07-22 2024-02-20 新风光电子科技股份有限公司 大功率ac/dc变换等离子体点火器驱动电路及方法
KR102796631B1 (ko) * 2021-11-16 2025-04-16 주식회사 뉴파워 프라즈마 임피던스 매칭 장치 및 이를 포함하는 플라즈마 발생 장치
EP4479993A1 (de) * 2022-02-15 2024-12-25 Cyclize GmbH Schaltungsanordnung für eine plasmaquelle zur erzeugung von plasma bei atmosphärendruck
CN116801471B (zh) * 2023-07-20 2026-04-21 中国科学院近代物理研究所 一种用于粒子加速器的束流斩波系统及其使用方法

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JP2002173772A (ja) 2000-12-05 2002-06-21 Ricoh Co Ltd スパッタリング装置
JP2005050711A (ja) 2003-07-30 2005-02-24 Eye Lighting Syst Corp 放電灯点灯装置
JP2006006053A (ja) 2004-06-18 2006-01-05 Shihen Tech Corp 直流電源装置
JP2010225308A (ja) 2009-03-19 2010-10-07 Kanazawa Univ 誘導熱プラズマ発生方法及び装置

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JPS63268470A (ja) * 1987-04-27 1988-11-07 Mitsubishi Electric Corp 電力変換器
US5418707A (en) * 1992-04-13 1995-05-23 The United States Of America As Represented By The United States Department Of Energy High voltage dc-dc converter with dynamic voltage regulation and decoupling during load-generated arcs
JPH11229138A (ja) 1998-02-09 1999-08-24 Murata Mfg Co Ltd スパッタ装置
KR100488448B1 (ko) * 2001-11-29 2005-05-11 엘지전자 주식회사 플라즈마 디스플레이 패널의 서스테인펄스 발생장치
JP2005094827A (ja) * 2003-09-12 2005-04-07 Shunsuke Hosokawa 高電圧電源パルス電源
EP1864313B1 (de) * 2005-03-24 2012-12-19 Oerlikon Trading AG, Trübbach Vakuumplasmagenerator
JP5086043B2 (ja) * 2007-11-30 2012-11-28 日立アプライアンス株式会社 電力変換装置および電力変換装置の制御方法
JP5429771B2 (ja) * 2008-05-26 2014-02-26 株式会社アルバック スパッタリング方法
TW201031276A (en) 2009-02-06 2010-08-16 Creating Nano Technologies Inc Resonant inverter and plasma driving system icluding the same
US8692466B2 (en) * 2009-02-27 2014-04-08 Mks Instruments Inc. Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator
JP2010255061A (ja) 2009-04-27 2010-11-11 Canon Anelva Corp スパッタリング装置及びスパッタリング処理方法
JP5153003B2 (ja) * 2009-08-19 2013-02-27 ウシオ電機株式会社 高圧放電ランプ点灯装置およびプロジェクタ
CN103069928B (zh) 2010-08-18 2015-03-25 株式会社爱发科 直流电源装置
US9379643B2 (en) * 2010-12-23 2016-06-28 The Regents Of The University Of Colorado, A Body Corporate Electrosurgical generator controller for regulation of electrosurgical generator output power
US20130038216A1 (en) * 2012-01-19 2013-02-14 Alvin Hao Remote controlled electronic ballast with digital display

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Publication number Priority date Publication date Assignee Title
JP2002173772A (ja) 2000-12-05 2002-06-21 Ricoh Co Ltd スパッタリング装置
JP2005050711A (ja) 2003-07-30 2005-02-24 Eye Lighting Syst Corp 放電灯点灯装置
JP2006006053A (ja) 2004-06-18 2006-01-05 Shihen Tech Corp 直流電源装置
JP2010225308A (ja) 2009-03-19 2010-10-07 Kanazawa Univ 誘導熱プラズマ発生方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10818474B1 (en) 2019-05-08 2020-10-27 Newpowerplasma Co., Ltd. RF generator and its operating method
KR20200129307A (ko) 2019-05-08 2020-11-18 주식회사 뉴파워 프라즈마 고주파 제너레이터 및 그의 동작 방법

Also Published As

Publication number Publication date
PL2879471T3 (pl) 2017-09-29
EP2879471A4 (en) 2016-07-06
US9137885B2 (en) 2015-09-15
JP5634626B2 (ja) 2014-12-03
WO2014038060A1 (ja) 2014-03-13
EP2879471B1 (en) 2017-05-10
CN104604337A (zh) 2015-05-06
TW201412199A (zh) 2014-03-16
KR20150038625A (ko) 2015-04-08
IN2014KN03106A (https=) 2015-05-08
EP2879471A1 (en) 2015-06-03
TWI491317B (zh) 2015-07-01
JPWO2014038060A1 (ja) 2016-08-08
US20150195896A1 (en) 2015-07-09
CN104604337B (zh) 2016-05-18
DE12884110T1 (de) 2015-09-24

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