IN2014KN03106A - - Google Patents

Info

Publication number
IN2014KN03106A
IN2014KN03106A IN3106KON2014A IN2014KN03106A IN 2014KN03106 A IN2014KN03106 A IN 2014KN03106A IN 3106KON2014 A IN3106KON2014 A IN 3106KON2014A IN 2014KN03106 A IN2014KN03106 A IN 2014KN03106A
Authority
IN
India
Prior art keywords
current
short
output voltage
energy
circuit
Prior art date
Application number
Inventor
Itsuo Yuzurihara
Toshiyuki Adachi
Shinichi Kodama
Original Assignee
Kyosan Electric Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyosan Electric Mfg filed Critical Kyosan Electric Mfg
Publication of IN2014KN03106A publication Critical patent/IN2014KN03106A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32027—DC powered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32045—Circuits specially adapted for controlling the glow discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
    • H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
    • H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
    • H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33569—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
    • H02M3/33573—Full-bridge at primary side of an isolation transformer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/007—Plural converter units in cascade
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
    • H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
    • H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
    • H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33507—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of the output voltage or current, e.g. flyback converters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/22—DC, AC or pulsed generators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/001—Arrangements for beam delivery or irradiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inverter Devices (AREA)
  • Plasma Technology (AREA)
  • Dc-Dc Converters (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Intermittent short-circuit control is performed in the ignition mode, thereby allowing short-circuit current to flow in the current source step-down type chopper. Energy of the short-circuit current is temporarily accumulated in the inductor provided in the current source step-down type chopper. The accumulated energy boosts the output voltage from the direct current power supply device during the period until the next short circuiting, via the current, the multiphase inverter, and the rectifier. The voltage boosting operation where accumulation of the current energy by short circuiting and boosting of the output voltage by conduction are repeated, controls an increase of the output voltage which is applied to the plasma generator.
IN3106KON2014 2012-09-07 2012-09-07 IN2014KN03106A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/072854 WO2014038060A1 (en) 2012-09-07 2012-09-07 Dc power supply device, and control method for dc power supply device

Publications (1)

Publication Number Publication Date
IN2014KN03106A true IN2014KN03106A (en) 2015-05-08

Family

ID=50236709

Family Applications (1)

Application Number Title Priority Date Filing Date
IN3106KON2014 IN2014KN03106A (en) 2012-09-07 2012-09-07

Country Status (10)

Country Link
US (1) US9137885B2 (en)
EP (1) EP2879471B1 (en)
JP (1) JP5634626B2 (en)
KR (1) KR101579416B1 (en)
CN (1) CN104604337B (en)
DE (1) DE12884110T1 (en)
IN (1) IN2014KN03106A (en)
PL (1) PL2879471T3 (en)
TW (1) TWI491317B (en)
WO (1) WO2014038060A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL2879257T3 (en) * 2012-09-05 2017-10-31 Kyosan Electric Mfg Dc power supply device, and control method for dc power supply device
JP5729732B2 (en) 2013-09-27 2015-06-03 株式会社京三製作所 DC power supply and control method of DC power supply
DE102015117892A1 (en) * 2015-10-21 2017-04-27 Dr. Ing. H.C. F. Porsche Aktiengesellschaft Method for charging or discharging a vehicle battery
GB2548209B (en) * 2016-03-07 2018-03-21 Intelligent Growth Solutions Ltd Controllable power and lighting system
JP7143226B2 (en) 2016-06-15 2022-09-28 ワットロー・エレクトリック・マニュファクチャリング・カンパニー Power converter for thermal system
DE112017004113T5 (en) * 2016-08-17 2019-05-02 Mitsubishi Electric Corporation Barrier discharge type igniter
JP6606038B2 (en) * 2016-09-06 2019-11-13 株式会社東芝 Output voltage control circuit
US10608570B2 (en) * 2017-10-18 2020-03-31 Hitachi-Johnson Controls Air Conditioning, Inc. Power converter and refrigeration air conditioner
PL233868B1 (en) * 2017-12-29 2019-12-31 Politechnika Lubelska System and method for powering a plasma reactor with gliding discharge
KR102242234B1 (en) 2019-05-08 2021-04-20 주식회사 뉴파워 프라즈마 Rf generator and its operating method
CN111865111B (en) * 2020-07-22 2024-02-20 新风光电子科技股份有限公司 High-power AC/DC conversion plasma igniter driving circuit and method
WO2023155969A1 (en) * 2022-02-15 2023-08-24 Universität Stuttgart Circuit arrangement for a plasma source for generating plasma at atmospheric pressure

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JPS63268470A (en) * 1987-04-27 1988-11-07 Mitsubishi Electric Corp Power convertor
US5418707A (en) * 1992-04-13 1995-05-23 The United States Of America As Represented By The United States Department Of Energy High voltage dc-dc converter with dynamic voltage regulation and decoupling during load-generated arcs
JPH11229138A (en) 1998-02-09 1999-08-24 Murata Mfg Co Ltd Sputtering device
JP2002173772A (en) 2000-12-05 2002-06-21 Ricoh Co Ltd Sputtering apparatus
KR100488448B1 (en) * 2001-11-29 2005-05-11 엘지전자 주식회사 Generator for sustain pulse of plasma display panel
JP4406754B2 (en) * 2003-07-30 2010-02-03 株式会社アイ・ライティング・システム Discharge lamp lighting device
JP2005094827A (en) * 2003-09-12 2005-04-07 Shunsuke Hosokawa High voltage pulse power supply
JP4526879B2 (en) * 2004-06-18 2010-08-18 四変テック株式会社 DC power supply
ES2401289T3 (en) * 2005-03-24 2013-04-18 Oerlikon Trading Ag, Trübbach Vacuum Plasma Generator
JP5086043B2 (en) * 2007-11-30 2012-11-28 日立アプライアンス株式会社 Power converter and control method of power converter
JP5429771B2 (en) * 2008-05-26 2014-02-26 株式会社アルバック Sputtering method
TW201031276A (en) 2009-02-06 2010-08-16 Creating Nano Technologies Inc Resonant inverter and plasma driving system icluding the same
US8692466B2 (en) * 2009-02-27 2014-04-08 Mks Instruments Inc. Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator
JP5241578B2 (en) 2009-03-19 2013-07-17 株式会社日清製粉グループ本社 Induction thermal plasma generation method and apparatus
JP2010255061A (en) 2009-04-27 2010-11-11 Canon Anelva Corp Sputtering apparatus and sputtering treatment method
JP5153003B2 (en) * 2009-08-19 2013-02-27 ウシオ電機株式会社 High pressure discharge lamp lighting device and projector
WO2012023276A1 (en) 2010-08-18 2012-02-23 株式会社アルバック Direct current power supply device
US9379643B2 (en) * 2010-12-23 2016-06-28 The Regents Of The University Of Colorado, A Body Corporate Electrosurgical generator controller for regulation of electrosurgical generator output power
US20130038216A1 (en) * 2012-01-19 2013-02-14 Alvin Hao Remote controlled electronic ballast with digital display

Also Published As

Publication number Publication date
PL2879471T3 (en) 2017-09-29
CN104604337A (en) 2015-05-06
DE12884110T1 (en) 2015-09-24
KR20150038625A (en) 2015-04-08
JPWO2014038060A1 (en) 2016-08-08
US9137885B2 (en) 2015-09-15
KR101579416B1 (en) 2015-12-21
EP2879471A1 (en) 2015-06-03
TW201412199A (en) 2014-03-16
WO2014038060A1 (en) 2014-03-13
TWI491317B (en) 2015-07-01
JP5634626B2 (en) 2014-12-03
CN104604337B (en) 2016-05-18
EP2879471A4 (en) 2016-07-06
US20150195896A1 (en) 2015-07-09
EP2879471B1 (en) 2017-05-10

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